Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
04/1998
04/28/1998US5745284 Solid-state laser source of tunable narrow-bandwidth ultraviolet radiation
04/28/1998US5745222 Apparatus for making a stamp from an original picture
04/28/1998US5745221 Exposure equipment
04/28/1998US5745150 Laser drawing apparatus having drawing beams in a common place aligned with a lens meridian
04/28/1998US5744947 Movement actuator/sensor systems
04/28/1998US5744924 Guideless stage with isolated reaction frame
04/28/1998US5744858 Semiconductor packaging technique yielding increased inner lead count for a given die-receiving area
04/28/1998US5744856 Electronic system
04/28/1998US5744814 Method and apparatus for scanning exposure having thickness measurements of a film surface
04/28/1998US5744810 Method and system for exposing pattern on object by charged particle beam
04/28/1998US5744557 Transition metal-containing organometallic catalyst
04/28/1998US5744537 Film-forming polymeric binder and fluorocarbon compound
04/28/1998US5744512 For photopolymerization of systems containing unsaturated compounds
04/28/1998US5744511 Visible ray polymerization initiator and visible ray polymerizable composition
04/28/1998US5744305 Arrays of materials attached to a substrate
04/28/1998US5744293 Semiconductor device having antireflective layer containing organic resin with dispersed carbon particles
04/28/1998US5744286 Applying polyamic acid coating with photosensitive system that becomes more soluble in aqueous base developer when exposed to actinic radiation
04/28/1998US5744284 Method for fabricating resilient z-axis contacts for electrically interconnecting integrated circuits on a plurality of stacked carriers
04/28/1998US5744283 Method of photolithographically metallizing at least the inside of holes arranged in accordance with a pattern in a plate of an electrically insulating material
04/28/1998US5744282 Photosensitive resin compositions and photosensitive element using the same
04/28/1998US5744281 P-hydroxystyrene polymer
04/28/1998US5744248 Containing unsaturated binder, mixture of polyester prepared from fatty acids and compound containing (meth)acryloyl groups, photoinitiator
04/28/1998US5744101 Reactor system for synthesizing polymer sequences on substrate; solid phase synthesis
04/28/1998US5743965 Disk coating system
04/28/1998US5743188 Method of imaging a zirconia ceramic surface to produce a lithographic printing plate
04/25/1998CA2194723A1 Amido substituted acetal polymer binders and their use in photosensitive compositions
04/23/1998WO1998002913A3 Method of forming a gate electrode for an igfet
04/23/1998DE19712281A1 Projection illuminator using phase-shift mask for integrated circuit manufacture
04/22/1998EP0837371A2 Line width insensitive wafer target detection
04/22/1998EP0837370A1 Exposure apparatus for flexographic printing plates
04/22/1998EP0837369A1 Pattern formation method and surface treatment agent
04/22/1998EP0837368A1 Positive resist composition
04/22/1998EP0837367A2 Positive resist composition comprising a dipyridyl compound
04/22/1998EP0837366A1 Photocurable resin composition
04/22/1998EP0836628A1 Process for preparing polyhydroxystyrene with a novolak type structure
04/22/1998EP0836540A1 Process for manufacturing mould inserts
04/22/1998EP0677069B1 Metal ion reduction in the raw materials
04/22/1998CN1179557A Photosensitive aqueous developable thick film composition employing vinylpyrrolidone polymer
04/21/1998US5742864 Exposure apparatus for use in the manufacture of color CRTs
04/21/1998US5742634 Picosecond laser
04/21/1998US5742436 For transmitting radiation from an object plane to an image plane
04/21/1998US5742397 Control device of the position and slope of a target
04/21/1998US5742386 Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same
04/21/1998US5742377 Cantilever for scanning probe microscope including piezoelectric element and method of using the same
04/21/1998US5742376 Projection exposure apparatus and projection exposure method
04/21/1998US5742362 Process for forming a photosensitive material and an exposure apparatus used for the process
04/21/1998US5742067 Exposure method and apparatus therefor
04/21/1998US5742062 Arrangement for masked beam lithography by means of electrically charged particles
04/21/1998US5741879 Energy-polymerizable compositions comprising a cyanate ester monomer or oligomer and a polyol
04/21/1998US5741732 Method for detecting implantation mask misalignment
04/21/1998US5741630 Acid-catalyzed thermal decomposition of secondary acid generator and formation of second acid; copper compound and reactive material used to decompose superacid precursor
04/21/1998US5741629 Resist materials and related processes
04/21/1998US5741628 Method of forming micropatterns by having a resist film absorb water
04/21/1998US5741626 Method for forming a dielectric tantalum nitride layer as an anti-reflective coating (ARC)
04/21/1998US5741625 Process for forming fine patterns in a semiconductor device utilizing multiple photosensitive film patterns and organic metal-coupled material
04/21/1998US5741624 Connecting semiconductor layers
04/21/1998US5741622 Comprising copolymer having unsaturated compound and free carboxyl group, polyfunctional unsaturated compond diluent, solvent, photoinitiator, vinyltriazine compound, inorganic filler
04/21/1998US5741621 Process for using photoimageable films prepared for aqueous photoimageable liquid emulsions
04/21/1998US5741620 Reactive polymeric dyes
04/21/1998US5741619 Negative image-recording material comprising an acrylic resin, a diazo compound and carbon black
04/21/1998US5741614 Atomic force microscope measurement process for dense photoresist patterns
04/21/1998US5741368 Dibasic ester stripping composition
04/21/1998US5740732 Apparatus for simultaneously manufacturing multiple annular shaped screen frames
04/21/1998US5740580 Stepper vacuum chuck wiper
04/21/1998CA2094438C Pressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environment
04/21/1998CA2089822C Photosensitive laminate having dual intermediate layers
04/16/1998WO1998015952A1 Optical apparatus
04/16/1998WO1998015410A1 Inverted stamping process
04/16/1998DE19743540A1 Improved aluminium-supported printing plates
04/16/1998CA2216705A1 Line width insensitive wafer target detection
04/15/1998EP0836120A1 Alkaline developing composition and method of use to process lithographic printing plates
04/15/1998EP0836119A1 Chemically amplified resist composition
04/15/1998EP0835917A1 Ultraviolet-curing adhesive composition and article
04/15/1998EP0835848A2 Fluorine-containing silica glass, its method of manufacture and a projection exposure apparatus comprising the glass
04/15/1998CN1038069C Method for producing integrate three dimension rigid article and apparatus for precisely producing said article
04/14/1998US5740489 Apparatus and method for making a lithographic printing plate according to silver salt diffusion transfer processing
04/14/1998US5740488 Resist developing apparatus with selectable spray and drip nozzles
04/14/1998US5740068 Fidelity enhancement of lithographic and reactive-ion-etched images by optical proximity correction
04/14/1998US5740065 Method for manufacturing semiconductor device
04/14/1998US5740052 Method and apparatus for manufacture of semiconductor devices
04/14/1998US5739964 Projection lens assembly
04/14/1998US5739913 Alignment system for a lithography system
04/14/1998US5739899 Projection exposure apparatus correcting tilt of telecentricity
04/14/1998US5739898 Exposure method and apparatus
04/14/1998US5739636 Cadmium discharge lamp of the short arc type and method of producing UV light therewith
04/14/1998US5739589 Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same
04/14/1998US5739265 Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom
04/14/1998US5739254 Chloromethylation with acetylhalide in presence of dimethoxymethane and a halogen containing lewis acid catalyst in methanol
04/14/1998US5739214 Radiation-curable coating of unsaturated prepolymer, epoxy and ketone resin
04/14/1998US5739175 Photoreactor composition containing an arylketoalkene wavelength-specific sensitizer
04/14/1998US5739174 Epoxysilicone photocurable composition comprising a sulfolene or isatin photosensitizer
04/14/1998US5738977 Forming copper layer on substrate surface, forming layer of nickel-boron, cataphoretically coating with photosensitive lacquer, exposing, developing, removing uncovered layers, stripping lacquer, sealing with nickel-phosphorus layer
04/14/1998US5738976 Photo-curable organopolysiloxane composition and a method for producing a (meth) acryloyloxyl group-containing organopolysiloxane used therein
04/14/1998US5738975 Mixture containing (meth)acrylate terpolymer having group which reacts with an acid to convert polarity of polymer, photo acid generating compound, solvent
04/14/1998US5738974 Photopolymerizable composition and photosensitive lithographic printing plate
04/14/1998US5738972 Blend of binder, dissolution inhibitor, photosensitivr compound, base, phenolic resin and solvent
04/14/1998US5738971 Photosensitive composition for transfer sheets
04/14/1998US5738970 Negative working, peel developable, single sheet color proofing system with polyvinyl acetal photoadhering layer
04/14/1998US5738969 Water insoluble compound having mercapto or thione group, and sulfonated styrene-containing polymer
04/14/1998US5738968 Positive photoresist composition