| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 02/19/2015 | US20150049321 Facet mirror |
| 02/19/2015 | US20150049320 Projection exposure method, system and objective |
| 02/19/2015 | US20150049319 Microlithography projection optical system, tool and method of production |
| 02/19/2015 | US20150049318 Optical element, optical system, capturing apparatus, optical equipment, and original recording and manufacturing method therefor |
| 02/19/2015 | US20150049317 Lithography apparatus, alignment method, and method of manufacturing article |
| 02/19/2015 | US20150049316 Exposure apparatus and method thereof |
| 02/19/2015 | US20150049315 Exposure apparatus and method of manufacturing device |
| 02/19/2015 | US20150049314 Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device |
| 02/19/2015 | US20150048051 Resist pattern-forming method, substrate-processing method, and photoresist composition |
| 02/18/2015 | EP2837969A1 Exposure apparatus, exposure method, and method for producing device |
| 02/18/2015 | EP2836876A1 Liquid immersion member and exposure apparatus |
| 02/18/2015 | EP2836875A1 Liquid immersion member and exposure apparatus |
| 02/17/2015 | US8958078 Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space |
| 02/17/2015 | US8958059 Method of determining mask pattern and exposure condition, storage medium, and computer |
| 02/17/2015 | US8958054 Lithographic apparatus and device manufacturing method |
| 02/17/2015 | US8958053 Lithographic apparatus and alignment method |
| 02/17/2015 | US8958051 Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
| 02/17/2015 | US8957225 Photochemical methods and photoactive compounds for modifying surfaces |
| 02/17/2015 | US8957224 Photoinitiators for UV-LED curable compositions and inks |
| 02/17/2015 | US8957151 Liquid-repellent film and production method therefor, and fine structure using the liquid-repellent film and production method therefor |
| 02/17/2015 | US8957006 Cleaning solution comprising an ether acetate for preventing pattern collapse |
| 02/17/2015 | US8956981 Methods of eliminating pattern collapse on photoresist patterns |
| 02/17/2015 | US8956886 Embedded test structure for trimming process control |
| 02/17/2015 | US8956810 Primer and pattern forming method for layer including block copolymer |
| 02/17/2015 | US8956808 Asymmetric templates for forming non-periodic patterns using directed self-assembly materials |
| 02/17/2015 | US8956807 Method for forming resist pattern, and composition for forming resist underlayer film |
| 02/17/2015 | US8956806 Photoresist and patterning process |
| 02/17/2015 | US8956805 Polymers, methods of use thereof, and methods of decomposition thereof |
| 02/17/2015 | US8956804 Self-assemblable polymer and methods for use in lithography |
| 02/17/2015 | US8956803 Sulfonium salt, resist composition, and patterning process |
| 02/17/2015 | US8956802 Pattern forming method, chemical amplification resist composition and resist film |
| 02/17/2015 | US8956801 Resist composition and method of forming resist pattern |
| 02/17/2015 | US8956800 Resist composition and method of forming resist pattern |
| 02/17/2015 | US8956799 Photoacid generator and photoresist comprising same |
| 02/17/2015 | US8956791 Exposure tolerance estimation method and method for manufacturing semiconductor device |
| 02/17/2015 | US8956790 Positive photosensitive resin composition, and organic insulator film for display device and display device fabricated using the same |
| 02/17/2015 | US8956787 Reflective mask blank for EUV lithography and process for producing the same |
| 02/17/2015 | US8956713 Methods of forming a stamp and a stamp |
| 02/17/2015 | US8956695 Developing method |
| 02/17/2015 | US8956694 Developing apparatus, developing method and storage medium |
| 02/17/2015 | US8956143 Lithography system and lithography method |
| 02/12/2015 | WO2015020445A1 Photoresist resin composition for dry film photoresist |
| 02/12/2015 | WO2015020329A1 Adhesive composition and composite polarizing plate using same |
| 02/12/2015 | WO2015020064A1 Lens member manufacturing method, lens member, curved surface shape pattern manufacturing method, and resin film for forming curved surface shape pattern |
| 02/12/2015 | WO2015019961A1 Resist underlayer film forming composition containing polymer which contains nitrogen-containing ring compound |
| 02/12/2015 | WO2015019936A1 Colored photosensitive resin composition, cured film, color filter, method for producing color filter, solid state imaging element, and image display device |
| 02/12/2015 | WO2015019934A1 Colored photosensitive resin composition, cured film, color filter, method for producing color filter, solid-state imaging element, and image display device |
| 02/12/2015 | WO2015019819A1 Photosensitive coloring resin composition, cured film, color filter, method for producing color filter, solid-state imaging element, and image display device |
| 02/12/2015 | WO2015019802A1 Photosensitive resin composition, relief pattern film thereof, method for producing relief pattern film, electronic component or optical product including relief pattern film, and adhesive including photosensitive resin composition |
| 02/12/2015 | WO2015019659A1 Method for producing halogenated organic pigment, halogenated organic pigment produced by said production method, and colored composition containing said halogenated organic pigment |
| 02/12/2015 | WO2015019242A2 Illumination device |
| 02/12/2015 | WO2015018760A1 Method for producing structures on a circulating surface |
| 02/12/2015 | WO2015018672A1 Method of producing a resist structure with undercut sidewall |
| 02/12/2015 | WO2015018625A1 Metrology method and apparatus, lithographic system and device manufacturing method |
| 02/12/2015 | WO2015018590A1 Method of designing lithography features by self-assembly of block copolymer |
| 02/12/2015 | WO2015018560A2 Mirror, more particularly for a microlithographic projection exposure apparatus |
| 02/12/2015 | WO2015018424A1 Microlithographic projection exposure apparatus and method of correcting an aberration in such an apparatus |
| 02/12/2015 | WO2015018186A1 Method for forming spacer and liquid crystal panel |
| 02/12/2015 | WO2015018154A1 Modified nano-silica and preparation method therefor, pigment dispersion, and photosensitive resin composition |
| 02/12/2015 | WO2015018101A1 Method and device for stripping photoresist layer |
| 02/12/2015 | US20150044839 Photoresist stripping and cleaning composition, method of its preparation and its use |
| 02/12/2015 | US20150044790 Negative photosensitive resin composition and application thereof |
| 02/12/2015 | US20150044686 Systems and Methods for Containing Biological Samples |
| 02/12/2015 | US20150044617 Method for forming resist pattern |
| 02/12/2015 | US20150044616 Method of forming patterns |
| 02/12/2015 | US20150044615 Drawing data generating method, processing apparatus, storage medium, drawing apparatus, and method of manufacturing article |
| 02/12/2015 | US20150044614 Drawing apparatus, and method of manufacturing article |
| 02/12/2015 | US20150044613 Chemically amplified photosensitive resin composition and method for producing resist pattern using the same |
| 02/12/2015 | US20150044612 Lithographic printing plate precursors and processes for preparing lithographic printing plates |
| 02/12/2015 | US20150044611 Photo-curable and thermo-curable resin compostion, and dry film solder resist |
| 02/12/2015 | US20150044610 Photosensitive conductive paste |
| 02/12/2015 | US20150044609 Compositions and processes for immersion lithography |
| 02/12/2015 | US20150044608 Method of manufacturing polymer for lithography, method of manufacturing resist composition, and method of manufacturing substrate having pattern |
| 02/12/2015 | US20150044600 Double-exposure mask structure and photolithography method thereof |
| 02/12/2015 | US20150044110 Microfluidic device with hydrophobic surface modification layer and manufacturing method thereof |
| 02/12/2015 | US20150043060 Optical Elements Comprising Magnetostrictive Material |
| 02/12/2015 | US20150043059 Single reflective optical element for interference lithography |
| 02/12/2015 | US20150042999 Illumination Source for use in Inspection Methods and/or Lithography; Inspection and Lithographic Apparatus and Inspection Method |
| 02/12/2015 | US20150042984 Methods and apparatus for determining focus |
| 02/12/2015 | US20150042976 Patterning Device Support |
| 02/12/2015 | US20150042975 Projection exposure tool for microlithography and method for microlithographic imaging |
| 02/12/2015 | US20150042974 Illumination optical unit and optical system for euv projection lithography |
| 02/12/2015 | US20150042973 Photonic activation of reactants for sub-micron feature formation using depleted beams |
| 02/12/2015 | US20150042972 Amplification method for photoresist exposure in semiconductor chip manufacturing |
| 02/12/2015 | US20150042971 Method and system for nanolithography |
| 02/12/2015 | US20150042970 Mirror assembly with heat transfer mechanism |
| 02/12/2015 | US20150042935 Light control film, display device, and method for manufacturing light control film |
| 02/12/2015 | US20150042934 Light diffusing member, method for manufacturing same and display device |
| 02/12/2015 | US20150042931 Blue photosensitive resin composition for color filter and uses thereof |
| 02/12/2015 | US20150041303 Novel ito crossover integrated capacitive touch screen and manufacturing method thereof |
| 02/12/2015 | US20150040826 Method for manufacturing metal mask |
| 02/12/2015 | DE102014010870A1 Phasenkontrollierte Überlagerungsmesssysteme auf Modellbasis und Verfahren Phase Controlled overlay measurement systems and model-based method |
| 02/12/2015 | DE102013215541A1 Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage Levels, particularly for microlithography projection exposure apparatus |
| 02/11/2015 | EP2835688A1 Nano-patterned system and magnetic-field applying device thereof |
| 02/11/2015 | EP2835687A1 Method of producing a resist structure with undercut sidewall |
| 02/11/2015 | EP2834709A1 Particulate contamination measurement method and apparatus |
| 02/11/2015 | CN204155063U 一种显影机的显影清洗装置 A developing device for developing machine washing |
| 02/11/2015 | CN204155062U 一种具有曝光功能的涂胶显影机 Having exposure function glue Developers |
| 02/11/2015 | CN204155061U 应用于紫外固化纳米压印的软膜压印装置 Applied to the UV curing nanoimprint soft membrane marking device |
| 02/11/2015 | CN104350428A 图案形成方法以及各自使用所述图案形成方法的用于制备电子器件的方法和电子器件 Pattern forming method and pattern forming method using the respective method for making an electronic device and an electronic device |