Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
02/2015
02/11/2015CN104350427A 定位系统、光刻设备和器件制造方法 Positioning system, lithographic apparatus and device manufacturing method
02/11/2015CN104350426A 光刻设备 Lithography equipment
02/11/2015CN104350425A 液浸构件及曝光装置 And the liquid immersion exposure apparatus member
02/11/2015CN104350424A 量测方法和设备、衬底、光刻系统以及器件制造方法 Measuring method and apparatus, a substrate, a lithography system and device manufacturing method
02/11/2015CN104350423A 衬底保持装置、光刻设备以及器件制造方法 Substrate holding apparatus, lithographic apparatus and device manufacturing method
02/11/2015CN104350422A 着色感光性树脂组合物 The colored photosensitive resin composition
02/11/2015CN104350421A 感光性组合物及具有其固化层的印刷电路板 The photosensitive composition and a printed circuit board having a cured layer
02/11/2015CN104350420A 用于处理单分子的设备的制造方法 The method of manufacturing the processing device for single molecule
02/11/2015CN104350108A 黑色着色剂混合物 Black colorant mixture
02/11/2015CN104347443A 一种晶圆套刻的水平方向突变的测试方法 Test method for wafer overlay horizontal mutations
02/11/2015CN104347362A 小尺寸图形的制作方法 Small graphic production methods
02/11/2015CN104345583A 一种用于去除光阻残留物的清洗液 A method for removing photoresist residues of the cleaning fluid
02/11/2015CN104345582A 一种用于去除光阻残留物的清洗液 A method for removing photoresist residues of the cleaning fluid
02/11/2015CN104345581A 一种等离子体去除光刻胶的方法 A method for removing photoresist method plasma
02/11/2015CN104345580A 显影方法和显影装置 Developing method and a developing apparatus
02/11/2015CN104345579A 无掩模曝光设备及其信号回馈控制方法 Maskless exposure apparatus and method for feedback control signal
02/11/2015CN104345578A 光刻机的快门叶片 Shutter blade lithography
02/11/2015CN104345577A 对准装置 Alignment means
02/11/2015CN104345576A 形成图案的方法 The method of forming a pattern of
02/11/2015CN104345575A 用于光刻设备的真空声噪隔离系统 Vacuum acoustic noise isolation system for a lithographic apparatus
02/11/2015CN104345574A 一种基于位置传感器的光刻机掩模预对准系统 Based on pre-position sensor lithography mask alignment system
02/11/2015CN104345573A 一种曝光装置的内部框架结构 Internal frame structure of an exposure apparatus
02/11/2015CN104345572A 掩模版固定装置及方法 Reticle fixing device and method
02/11/2015CN104345571A 对准标记的成像和测量装置、光刻装置 Imaging and measuring device alignment marks, lithographic apparatus
02/11/2015CN104345570A 极紫外光刻机光源系统及极紫外曝光方法 EUV lithography machine EUV exposure light source system and method
02/11/2015CN104345569A 极紫外光刻机光源系统及极紫外曝光方法 EUV lithography machine EUV exposure light source system and method
02/11/2015CN104345568A 减小光刻胶图形线宽粗糙度的方法 Reduce the line width roughness of the resist pattern
02/11/2015CN104345567A 感光性聚硅氧烷组合物及其应用 Photosensitive silicone composition and its application
02/11/2015CN104345566A 着色组合物、着色固化膜和显示元件 Colored composition, the colored cured film and display elements
02/11/2015CN104345565A 感光树脂组合物和使用其的彩色滤光片 A photosensitive resin composition and the use of a color filter thereof
02/11/2015CN104345564A 印刷电路板制造用光固化性组合物、其固化物以及印刷电路板 Printed circuit board manufacturing light curable composition, cured product thereof and a printed circuit board
02/11/2015CN104345563A 光敏树脂组合物和使用其的光阻挡层 The photosensitive resin composition and the use thereof in the light blocking layer
02/11/2015CN104345562A 用于增材制造的低粘度液体辐射可固化的牙对准器模具树脂组合物 Low viscosity liquid material used by manufacturing a radiation curable dental aligner mold resin composition
02/11/2015CN104345561A 导电性树脂组合物及其固化物 Conductive resin composition and a cured product
02/11/2015CN104345560A 着色感光树脂组合物、滤色片和具有该滤色片的液晶显示装置 The colored photosensitive resin composition, a color filter and a liquid crystal display device having the color filter
02/11/2015CN104345559A 着色感光性树脂组合物及具有其的彩色滤光片和液晶显示器 The colored photosensitive resin composition and having the same color filters and liquid crystal displays
02/11/2015CN104345558A 彩色滤光片用蓝色感光性树脂组合物及其应用 A blue color filter The photosensitive resin composition and application thereof
02/11/2015CN104345557A 负型感光性树脂组合物及图案、晶粒、装置的制法 Method negative photosensitive resin compositions and patterns, grain, means
02/11/2015CN104345556A 感光性树脂组合物、彩色滤光片及液晶显示装置 The photosensitive resin composition, a color filter and liquid crystal display device
02/11/2015CN104345555A 焊料凸点形成用树脂组合物、焊料凸点形成方法和具备焊料凸点的构件 Solder bump forming member includes a solder bump forming method and the resin composition, the solder bump
02/11/2015CN104345554A 感光性树脂组合物、彩色滤光片及其液晶显示元件 The photosensitive resin composition, a color filter and liquid crystal display element
02/11/2015CN104345553A 前面遮光层形成用感光性树脂组合物和显示装置 Front light shielding layer forming the photosensitive resin composition and a display device
02/11/2015CN104345552A 着色感光树脂组合物、滤色片和具有该滤色片的液晶显示装置 The colored photosensitive resin composition, a color filter and a liquid crystal display device having the color filter
02/11/2015CN104345551A 着色感光性树脂组合物及具有其的彩色滤光片和液晶显示器 The colored photosensitive resin composition and having the same color filters and liquid crystal displays
02/11/2015CN104345550A 着色感光树脂组合物、滤色片和具有该滤色片的液晶显示装置 The colored photosensitive resin composition, a color filter and a liquid crystal display device having the color filter
02/11/2015CN104345549A 基板制造方法及基板制造装置 Substrate manufacturing method and substrate manufacturing apparatus
02/11/2015CN104345545A 掩膜版及其制造方法 Mask and its manufacturing method
02/11/2015CN104345544A 掩膜板 Mask
02/11/2015CN104345359A 微透镜阵列及其制作方法、图像获取装置、显示装置 Microlens array and its production method, image acquisition devices, display devices
02/11/2015CN104343885A 高精密磁悬浮主动减震设备 High-precision magnetic levitation active damping device
02/11/2015CN104341583A 芳族聚缩醛及其制品 Polyacetal and aromatic products
02/11/2015CN104341551A 平板印刷用聚合物的制造方法、抗蚀剂组合物的制造方法及形成有图案的基板的制造方法 Patterned substrate manufacturing method using the manufacturing method of lithographic polymer, method for producing a resist composition and formation
02/11/2015CN104341468A 一种基于鞣酸的化学增幅型紫外正性光致抗蚀剂材料及其合成方法 A resist material based tannin and synthetic method of chemically-amplified positive ultraviolet photoluminescence
02/11/2015CN104341448A 多丙烯酸酯基化合物与感光性树脂组成物 Multi-acrylate-based compound and a photosensitive resin composition
02/11/2015CN104341406A 光敏树脂组合物和使用其制备的滤色片 The photosensitive resin composition and its preparation using a color filter
02/11/2015CN104339900A 一种丝网印刷工艺 One kind of a screen printing process
02/11/2015CN104339821A 激光雕刻用柔性印刷版原版的制造方法、激光雕刻用柔性印刷版原版、柔性印刷版的制版方法及柔性印刷版 Laser engraving method for producing a flexographic printing plate precursor, laser engraving flexographic printing plate precursor, flexible printing plate method and flexographic printing plate
02/11/2015CN103424995B 导模共振滤光片光刻胶层的优化方法 Guided-mode resonant filter photoresist layer optimization methods
02/11/2015CN103365099B 一种调焦调平信号处理方法 A focusing signal processing method leveling
02/11/2015CN103309177B 一种光刻机工件台系统 A lithographic machine worktable systems
02/11/2015CN103197519B 一种偏置平板的调整装置 Biasing plate adjusting device
02/11/2015CN103197517B 一种工件台平衡质量质心测试校准方法 A work station centroid mass balance test calibration method
02/11/2015CN103135371B 基于分束偏折结构的小光斑离轴对准系统 Based on the structure of the beam deflection small spot off-axis alignment system
02/11/2015CN103135355B 光硬化性聚硅氧烷组成物、保护膜及具有保护膜的元件 Light-curing silicone composition, protective film has elements of the protective film
02/11/2015CN103091993B 用于光刻机透镜热效应测量的测试标记及其测量方法 Test and measurement methods mark lithography lens for measuring the thermal effects
02/11/2015CN103091992B 一种工件位置校正装置及其校正方法 A work position correction device and calibration method
02/11/2015CN103069340B 光反应性树脂组合物 Photoreactive resin composition
02/11/2015CN103062306B 双层气浮正交解耦与二维柔性铰链角度解耦的电涡流阻尼隔振器 Flotation and two-dimensional orthogonal double decoupling Decoupling flexible hinge angle eddy current damping isolator
02/11/2015CN103062287B 共面气浮正交解耦与二维柔性铰链角度解耦的电磁阻尼隔振器 DAF coplanar with the two-dimensional orthogonal decoupling Decoupling flexible hinge angle electromagnetic damping isolator
02/11/2015CN103062284B 双层气浮正交解耦与柔性膜角度解耦的零刚度隔振器 Double flotation orthogonal angle decoupling Decoupling flexible film isolator stiffness zero
02/11/2015CN103033859B 一种蝇眼透镜 One kind of fly-eye lens
02/11/2015CN102994015B 用于无水胶印制版的底涂液,其制备方法及其应用 Waterless plate for primer liquid, their preparation and their use
02/11/2015CN102890429B 光刻系统中倾斜扫描显示下提高数据传输速度的方法 Tilt scan lithography system display to improve data transmission speed of a
02/11/2015CN102866593B 一种监控光刻设备光路稳定性的装置 An apparatus for optical lithography apparatus stability monitoring
02/11/2015CN102830594B 曝光失焦的sem检查装置及其方法 Exposure sem inspection apparatus and method out of focus
02/11/2015CN102799082B 一种烤箱和可调式烘烤系统 One kind of oven and bake adjustable system
02/11/2015CN102789135B 一种调焦调平测量装置 One kind of focus leveling measurement device
02/11/2015CN102770808B 含磺酰胺的光刻胶组合物及其使用方法 Containing photoresist compositions and methods of use of sulfonamide
02/11/2015CN102749816B 一种调焦调平测量装置 One kind of focus leveling measurement device
02/11/2015CN102736221B 一种投影光刻物镜 A projection lithography lens
02/11/2015CN102566314B 一种光刻机化学品接口系统及其应用 A lithographic machine interface system and its application of chemicals
02/11/2015CN102540750B 一种光刻设备环境控制系统 A lithographic apparatus Environmental Control System
02/11/2015CN102540738B 一种光束间不平行角度的补偿方法 Between a non-parallel beam angle compensation method
02/11/2015CN102483569B 光化射线敏感或辐射敏感树脂组合物及使用该组合物形成图案的方法 Actinic radiation-sensitive or radiation-sensitive resin compositions and methods of use of the composition for forming a pattern
02/11/2015CN102163002B 光刻设备和器件制造方法 Lithographic apparatus and device manufacturing method
02/11/2015CN102148121B X射线电子束产生器及其阴极 X-ray generator and the cathode of an electron beam
02/11/2015CN102129173B 一种光刻机投影物镜波像差现场测量方法 A lithographic projector lens aberration field measurement method
02/10/2015US8954899 Contour alignment system
02/10/2015US8953250 Optical arrangement of autofocus elements for use with immersion lithography
02/10/2015US8953175 Mark position detector, imprint apparatus, and article manufacturing method
02/10/2015US8953173 Apparatus for microlithographic projection exposure and apparatus for inspecting a surface of a substrate
02/10/2015US8953163 Exposure apparatus, exposure method, and method of manufacturing semiconductor device
02/10/2015US8953148 Exposure apparatus and making method thereof
02/10/2015US8953147 Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
02/10/2015US8953146 Exposure apparatus for improving alignment accuracy of a pattern generated by light modulating elements
02/10/2015US8953145 Detection of contaminating substances in an EUV lithography apparatus
02/10/2015US8953144 Lithographic apparatus and device manufacturing method
02/10/2015US8953143 Liquid immersion member
02/10/2015US8953142 Lithographic apparatus, drying device, metrology apparatus and device manufacturing method
02/10/2015US8953141 Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid
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