| Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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| 10/15/1991 | US5057462 Compensation of lithographic and etch proximity effects |
| 10/15/1991 | US5057388 Method for the preparation of mask for X-ray lithography |
| 10/09/1991 | EP0450552A2 Image processing system |
| 10/08/1991 | US5055568 Process for preparation of cellulose nitrate films |
| 10/08/1991 | US5055383 Process for making masks with structures in the submicron range |
| 10/01/1991 | US5053318 Coating substrate with photoresist, electroless plating of catalyst, exposure to radiation, development |
| 09/26/1991 | DE4009390A1 Optical enlarger registering scanning data - has lamp house and magnifying lens as single rigid unit movable w.r.t. original e.g. half tone, analogue image holder |
| 09/25/1991 | CN1054839A Fabrication of complementary patterns for exposing semicanductor chips with self-supporting masks |
| 09/24/1991 | US5052033 Reflection type mask |
| 09/24/1991 | US5051585 Apparatus and method of pattern detection based on a scanning transmission electron microscope |
| 09/24/1991 | US5051326 X-Ray lithography mask and devices made therewith |
| 09/24/1991 | US5051295 Pattern on a bearing surface with a radiation curable surface of a cyclic phosphazene that can be crosslinked |
| 09/18/1991 | EP0447132A1 Reflection-type photomask and reflection-type photolithography method |
| 09/17/1991 | US5049925 Method and apparatus for focusing a wafer stepper |
| 09/17/1991 | US5049461 Scanning tunneling microscope |
| 09/11/1991 | EP0445870A1 Method of repairing a defect in a lithographic mask |
| 09/11/1991 | CN1013837B Method of cutting organic membrane |
| 09/10/1991 | US5048066 X-ray exposure process for preventing electrostatic attraction or contact of X-ray masks |
| 09/10/1991 | US5047843 Image reading method |
| 09/05/1991 | WO1991013384A1 Three dimensional plating or etching process and masks therefor |
| 09/04/1991 | CN1054330A Pattern printing board of shadow mask and manufacturing method for same |
| 09/03/1991 | US5045419 Pattern exposure/transfer method and pattern exposure/transfer mask apparatus |
| 09/03/1991 | US5045417 Mask for manufacturing semiconductor device and method of manufacture thereof |
| 08/29/1991 | DE4037973A1 Colour photocopier material - uses transparent paper sets with extended black steps to give different shading(s) |
| 08/28/1991 | EP0443097A1 Three dimensional plating or etching process and masks therefor |
| 08/27/1991 | US5043586 Planarized, reusable calibration grids |
| 08/27/1991 | US5043198 Including a binder, solids, fillers, and polysiloxane |
| 08/27/1991 | US5042945 Lithographic mask structure and device for positioning the same |
| 08/27/1991 | US5042655 Pellicle packaging and handling system |
| 08/24/1991 | CA2036818A1 Three dimensional plating or etching process and masks therefor |
| 08/21/1991 | CN2083303U Multifunctional photopolymer plate-making machine |
| 08/20/1991 | US5040882 Unit magnification optical system with improved reflective reticle |
| 08/14/1991 | EP0441578A2 Positional deviation detecting method |
| 08/14/1991 | EP0441359A2 Method of and apparatus for extracting image contour data |
| 08/14/1991 | DE4003634A1 Method of producing diffraction grating - involves directing light through transparent matrix with parallel opaque strips |
| 08/13/1991 | US5039203 Optical window member and method for production thereof |
| 08/07/1991 | EP0440467A2 Reticle for photolithographic patterning |
| 08/06/1991 | US5038383 Method of and apparatus for producing cutout mask data |
| 08/06/1991 | US5038166 Optical image recording apparatus |
| 08/01/1991 | WO1991011754A1 Improved method and means for producing photomasks |
| 08/01/1991 | CA2074714A1 Method and means for producing photomasks |
| 07/31/1991 | EP0438602A1 Dust-preventing film |
| 07/30/1991 | US5036209 Fabrication method for semiconductor devices and transparent mask for charged particle beam |
| 07/30/1991 | US5035787 Method for repairing semiconductor masks and reticles |
| 07/23/1991 | US5034972 Method of producing thin sheets and use of such sheets for the production of X-ray masks |
| 07/23/1991 | US5034971 Mask for X-ray lithography |
| 07/17/1991 | EP0437376A2 Phase shifting masks and methods of manufacture |
| 07/17/1991 | EP0436930A2 Alignment marks for two objects to be aligned in superposition |
| 07/16/1991 | CA1286424C Bilayer lithographic process |
| 07/09/1991 | US5030549 Organometallic complex or chloride of nickel, copper or cobalt; semiconductor substrate; heat treatment; reducing agent; resists |
| 07/04/1991 | DE4000053A1 Optical enlarger for scanner data - projects marking lines at fixed distance from original stage plane onto projection board |
| 07/03/1991 | EP0435746A2 Method for the preparation of a silicon carbide-silicon nitride composite membrane for X-ray lithography |
| 07/03/1991 | EP0435167A2 Cut mask preparation method and apparatus |
| 07/03/1991 | EP0435128A1 Silicon carbide membrane for X-ray lithography and method for the preparation thereof |
| 07/02/1991 | US5028702 Dust-proof film |
| 07/02/1991 | US5028475 Lighographic film material |
| 07/02/1991 | CA1285664C Lithographic process using mask with small opaque or transparent elements |
| 06/26/1991 | EP0434142A1 Method of manufacturing a device and group of masks for this method |
| 06/26/1991 | EP0433820A2 Multiple mask system |
| 06/26/1991 | EP0433467A1 Fabrication of complementary patterns for exposing semiconductor chips with self-supporting masks |
| 06/25/1991 | US5027225 Apparatus for fabricating pre-press masking film |
| 06/25/1991 | US5026775 Polyvinyl butyral pellicle compositions |
| 06/25/1991 | US5026143 Active type liquid crystal matrix display having signal electrodes with expanded sections at group exposure boundaries |
| 06/19/1991 | EP0432900A2 Method of producing a semiconductor memory device using a phase shifting mask |
| 06/11/1991 | US5023166 Method for forming plate characters in a half-tone gravure platemaking process |
| 06/11/1991 | US5023156 Mask for X-ray lityhography and method of manufacturing the same |
| 06/11/1991 | US5022419 Rinser dryer system |
| 06/05/1991 | EP0349633A4 Polysilicon thin film process and product |
| 05/28/1991 | US5020083 X-ray masks, their fabrication and use |
| 05/28/1991 | US5019486 Method for forming plate characters in a half-tone gravure platemaking process |
| 05/22/1991 | EP0427930A2 Monolithic silicon membrane device and fabrication process therefor |
| 05/14/1991 | US5014413 Method and apparatus for facilitating loading of a panel processing machine and positioning of artwork on a work surface thereon |
| 05/08/1991 | EP0229842B1 Laminator |
| 05/07/1991 | US5014223 Method of filling inner region of a graphic with traces of imaging spot |
| 05/07/1991 | US5013681 Method of producing a thin silicon-on-insulator layer |
| 05/02/1991 | EP0425137A1 Apparatus and method for the production of grooves or ribs in or on a surface |
| 05/02/1991 | EP0425136A1 Mask and method for the production of at least one groove, rib or different intensity strip in or on a surface |
| 05/02/1991 | EP0424963A2 Exposure mask |
| 05/02/1991 | EP0424375A1 Monolithic channeling mask having amorphous/single crystal construction |
| 04/30/1991 | US5012500 X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask |
| 04/30/1991 | US5011569 Etching of copper or copper oxide coatings with ammonium chloride and hydrogen peroxide mixture to produce masking patterns in printed circuit boards |
| 04/25/1991 | DE3934196A1 Optical filter device - has point density and distribution simulated by algorithm |
| 04/23/1991 | US5009944 Lightsafe masking film |
| 04/22/1991 | CA2028039A1 Mask and method for the production of at least one groove, rib or different intensity strip in or on a surface |
| 04/22/1991 | CA2028037A1 Mask and method for the production of grooves or ribs in or on a surface |
| 04/17/1991 | EP0422395A2 Apparatus for and method of characterizing photolithography systems |
| 04/16/1991 | US5008156 Photochemically stable mid and deep ultraviolet pellicles |
| 04/04/1991 | DE4005454C1 Embossing printer for side of container - produces shaped film by using optical scanning process |
| 04/03/1991 | EP0420489A2 Compensation of lithographic and etch proximity effects |
| 04/03/1991 | EP0420318A1 Multilayer material for the preparation of full flat background masks for graphic industry and for the production of printed circuits |
| 04/03/1991 | EP0420122A1 Pellicle packaging and handling system |
| 04/02/1991 | US5005075 X-ray mask and method of manufacturing an X-ray mask |
| 04/02/1991 | US5004927 Process for forming a fine pattern having a high aspect ratio |
| 03/30/1991 | WO1991005366A1 Method of producing a thin silicon-on-insulator layer |
| 03/28/1991 | DE4028647A1 Perforated mask prodn. from thin membrane esp. of silicon - by exposing photoresist in electron or X=ray beam only at periphery of hole and etching through |
| 03/28/1991 | CA2026248A1 Pellicle packaging and handling system |
| 03/27/1991 | EP0418733A2 Radiation-curable composition and method of producing a solder mask |
| 03/26/1991 | CA1281870C Polyester composite stretch film useable namely in the field of graphic arts |
| 03/20/1991 | EP0418053A1 Method for preliminarly printing blank for tapered draw-formed body |
| 03/20/1991 | EP0418052A2 Process for making preliminarily printed formed body |