| Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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| 12/29/1987 | US4715929 Pattern forming method |
| 12/29/1987 | US4715392 Automatic photomask or reticle washing and cleaning system |
| 12/23/1987 | EP0249769A2 Patterned image and process for forming a patterned image |
| 12/22/1987 | US4714957 Apparatus and method for making a stamp |
| 12/16/1987 | EP0249476A2 Process for preparation of cellulose ester films |
| 12/10/1987 | DE3618972A1 Drive device for photomechanical modification systems, in particular outlining instruments |
| 12/08/1987 | US4711834 Transfer layer with particles dispersed in heterogeneous resin, actinic radiation, crosslinking |
| 12/08/1987 | US4711438 To be processed by a particle beam |
| 12/03/1987 | WO1987007400A2 Monolithic channeling mask |
| 12/02/1987 | EP0247331A2 Removal of excess material from a semiconductor wafer |
| 12/01/1987 | US4710440 Test mask for determining alignment of an automatic IC mask testing apparatus |
| 11/25/1987 | EP0246845A2 Mask inspection device |
| 11/24/1987 | US4708919 Flatness |
| 11/11/1987 | EP0244816A2 Mask pattern defect detection apparatus |
| 11/11/1987 | EP0244496A1 Lithographic mask for ions, electrons or X-rays, and process for its production |
| 11/11/1987 | CN86103087A Photo mechanical imaging |
| 11/10/1987 | US4705739 Graphic arts imaging constructions using vapor-deposited colorant and metalloid layers with overlying photosensitive resist layer |
| 11/10/1987 | US4705738 Silver halide photographic material for tanning development and process of producing a relief image |
| 11/10/1987 | US4705390 Originals patching device |
| 11/10/1987 | US4704927 Cutting reproduction images out of a sheet of exposed film |
| 11/05/1987 | DE3615044A1 Process for the production of printing plates by the diffusion transfer process |
| 11/04/1987 | EP0244246A2 A method of making a dimensionally stable X-ray mask |
| 11/04/1987 | EP0244241A2 Photographic masks for tonal correction |
| 11/04/1987 | EP0243523A1 Method of recording printing forms |
| 11/03/1987 | US4704526 Apparatus of regulating shape of focused ion beams |
| 11/03/1987 | US4704347 Method of manufacturing a semiconductor device, in which a photolacquer mask is formed by means of a two-layer lacquer system. |
| 11/03/1987 | US4704342 Pyrolysis of polymer coating on glass plate |
| 10/29/1987 | DE3613667A1 Method and device for the simplified production of slide montages for printing plates for offset printing |
| 10/28/1987 | EP0243228A1 System for the creation of images, especially for mock-ups for the printing of publicity documents such as packages, labels or the like |
| 10/28/1987 | EP0242744A2 Method of manufacturing an integrated circuit semiconductor device comprising a lithography step |
| 10/27/1987 | US4703434 Apparatus for measuring overlay error |
| 10/27/1987 | US4702592 Exposure system for manufacture of semiconductor devices |
| 10/20/1987 | US4701859 Inspecting method and apparatus for a photomask pattern |
| 10/20/1987 | US4701391 Mask with magnesium diaphragm for X-ray lithography |
| 10/14/1987 | EP0241190A2 Method and apparatus for photodeposition of films on surfaces |
| 10/13/1987 | US4699869 Process for the preparation of a distortion resistant polyester support for use as a phototool |
| 10/13/1987 | US4699859 Containing phenol which prevents curing of certain segments |
| 10/08/1987 | WO1987006028A2 X-ray reflective mask and system for image formation with use of the same |
| 10/08/1987 | WO1987006027A2 An etch technique for metal mask definition |
| 10/06/1987 | US4698285 Method for producing deep-etch, X-ray lithography masks |
| 10/06/1987 | US4698236 Augmented carbonaceous substrate alteration |
| 09/29/1987 | US4696878 Additive process for manufacturing a mask for use in X-ray photolithography and the resulting mask |
| 09/29/1987 | US4696877 Photo-mask blank comprising a shading layer having a variable etch rate |
| 09/29/1987 | CA1227355A1 Inspection system for pellicalized reticles |
| 09/22/1987 | US4694527 Mask washing apparatus for production of integrated circuit |
| 09/16/1987 | EP0237220A2 Method and apparatus for forming a film |
| 09/15/1987 | US4693768 Art production method utilizing cast coated paper for preparation of camera-ready art |
| 09/09/1987 | EP0235428A2 Mounting preparation for optical membrane |
| 09/08/1987 | US4692796 Method for manufacturing electric masks using a color scanner and an apparatus for use therein |
| 09/08/1987 | EP0155942A4 Method of producing contamination-free pellicles. |
| 09/02/1987 | EP0234547A2 Method of manufacturing photomask and photo-mask manufactured thereby |
| 09/02/1987 | EP0234166A1 Masking process and mask therefor |
| 09/02/1987 | EP0233990A2 Pattern scanner |
| 09/01/1987 | CA1226348A1 Inspection system utilizing dark-field illumination |
| 08/24/1987 | EP0154629A4 Dustfree packaging container and method. |
| 08/19/1987 | EP0233056A2 Light absorbing coating |
| 08/12/1987 | EP0231916A2 X-ray exposure masks |
| 08/11/1987 | US4686162 For electromagnetic radiation |
| 08/04/1987 | US4684979 System for allocating images onto photosensitive materials utilizing flags |
| 07/29/1987 | EP0229842A1 Laminator |
| 07/28/1987 | CA1224662A1 Correction of lithographic masks |
| 07/22/1987 | EP0229523A2 Distortion resistant polyester support for use as a phototool |
| 07/21/1987 | US4682286 System for supervising photomechanical process |
| 07/21/1987 | US4681784 Peelable layer, nitrile rubber, cellulose nitrate, non-sticky |
| 07/21/1987 | CA1224351A1 Integral photosensitive optical device and method |
| 07/15/1987 | EP0228545A2 A device for detachably attaching a film onto a drum in a drum type picture scanning recording apparatus |
| 07/14/1987 | US4680244 Light-sensitive recording material for the production of a printing form or printed circuit with photoconductive layer and light-sensitive overlayer |
| 07/14/1987 | US4680243 Method for producing a mask for use in X-ray photolithography and resulting structure |
| 07/08/1987 | EP0227851A1 Process for obtaining photoresist patterns |
| 07/07/1987 | US4678714 Metal silicide film of continuously gradated composition on glass substrate |
| 06/30/1987 | US4677042 Mask structure for lithography, method for preparation thereof and lithographic method |
| 06/30/1987 | US4676637 Exposure apparatus with foreign particle detector |
| 06/30/1987 | US4676614 Apparatus for regulating the optical characteristics of a projection optical system |
| 06/23/1987 | US4675702 Photoplotter using a light valve device and process for exposing graphics |
| 06/23/1987 | US4674824 System for enhancement of optical features |
| 06/10/1987 | EP0225257A2 System for inspecting exposure pattern data of semiconductor integrated circuit device |
| 06/10/1987 | EP0224985A2 Composite optical membrane including anti-reflective coating |
| 06/09/1987 | US4672462 Method and system for recording plural images on a photosensitive film with layout work |
| 06/09/1987 | US4671850 Enhanced mechanical strength |
| 06/03/1987 | EP0224458A2 Method and apparatus for adjusting the binding back margins, especially for sew-stitched, wire-stitched and block stitched magazines |
| 06/03/1987 | EP0223994A2 Method of forming a sub-micrometer trench structure on a semiconductor substrate |
| 06/02/1987 | US4670371 Stepwise pattern exposure of photosensitive layers |
| 06/02/1987 | US4670365 Photomask and method of fabrication thereof |
| 06/02/1987 | US4669885 Apparatus for inspecting negatives |
| 05/27/1987 | EP0223770A2 Means for avoiding plastic deformation of a maskfoil |
| 05/27/1987 | EP0222787A1 Method and device for aligning, controlling and/or measuring bidimensional objects. |
| 05/27/1987 | DE3541559A1 Hard mask for photolithographic processes |
| 05/26/1987 | US4668601 Protective coating for phototools |
| 05/26/1987 | US4668528 Laser initiated |
| 05/26/1987 | US4668336 Process for making a mask used in x-ray photolithography |
| 05/20/1987 | EP0222739A2 Process for the production of a transmission mask |
| 05/20/1987 | EP0222738A2 Process for the production of a transmission mask |
| 05/20/1987 | EP0222737A2 Stabilization of mask membranes, and supporting frame |
| 05/19/1987 | US4666818 Elimination of separate artwork masters |
| 05/13/1987 | EP0221773A2 Opacifying phtographically produced images |
| 05/13/1987 | EP0221457A2 Method of defect detection in step-and-repeat projection systems |
| 05/13/1987 | EP0221184A1 Mask repairing apparatus |
| 05/12/1987 | CA1221730A1 Storage battery construction |
| 05/07/1987 | DE3539183A1 Photolithographic mask |
| 05/06/1987 | EP0220994A1 Contact printing apparatus for the production of circular reproductions from normal photographic originals |