| Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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| 05/06/1987 | EP0220471A1 Process for examining defects in masks |
| 05/06/1987 | EP0220233A1 Target keys for wafer probe alignment. |
| 05/05/1987 | US4662747 Method and apparatus for production and use of nanometer scale light beams |
| 04/30/1987 | DE3537829A1 Method for producing artwork, particularly for fabricating printed circuits |
| 04/28/1987 | US4661426 Process for manufacturing metal silicide photomask |
| 04/22/1987 | EP0218613A1 Device for the alignment, testing and/or measurement of two-dimensional objects. |
| 04/21/1987 | US4659650 Temperature resistance |
| 04/21/1987 | US4659429 High resolution optical microscopy and lithography |
| 04/16/1987 | DE3624566A1 Mask for X-ray lithography |
| 04/14/1987 | US4658301 Phototelegraphic apparatus for transmitting images of film and data |
| 04/14/1987 | US4657805 Dust cover superior in transparency for photomask reticle use and process for producing the same |
| 04/14/1987 | US4657648 Method of manufacturing a mask blank including a modified chromium compound |
| 04/14/1987 | US4657379 Photomask and exposure apparatus using the same |
| 04/09/1987 | DE3535630A1 Method for photographic montage by copying-in and device for carrying out the method |
| 04/07/1987 | US4656504 Allocation of recording area onto photosensitive film |
| 04/01/1987 | EP0216750A1 Ion beam apparatus and process for realizing modifications, especially corrections, on substrates, using an ion beam apparatus |
| 04/01/1987 | EP0216619A1 Recording medium |
| 04/01/1987 | EP0216305A2 Film checking apparatus |
| 04/01/1987 | EP0215939A1 Mounting table |
| 03/31/1987 | US4654526 System for prevention of contact between analyzing head and transparent drum of color scanner |
| 03/31/1987 | US4653882 Device for exposing discrete portions of a photosensitive surface by means of a light beam |
| 03/26/1987 | WO1987001865A1 Ion beam apparatus and method of modifying substrates |
| 03/25/1987 | EP0215532A2 An electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask |
| 03/25/1987 | EP0215358A2 Method and device employing input and output staging chamber devices for reduced pressure lamination |
| 03/24/1987 | US4652762 Electron lithography mask manufacture |
| 03/24/1987 | US4652118 Device for mounting film in-register for producing printing plates for small offset printing presses |
| 03/18/1987 | EP0214514A2 Mask removal tool |
| 03/18/1987 | EP0214236A1 Method of forming a pressure sensitive image transfer sheet and the product thereof. |
| 03/11/1987 | EP0213693A2 Photomask material |
| 03/10/1987 | US4648937 Semiconductors |
| 03/05/1987 | DE3530029A1 Method for producing printing copies for multi-colour printing and colour variation sheet for carrying out the method |
| 03/04/1987 | EP0212713A2 Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure |
| 03/04/1987 | EP0212054A2 Process for the production of X-ray masks |
| 03/03/1987 | US4647517 Very large scale integration semiconductor components |
| 03/03/1987 | CA1218763A1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces |
| 03/02/1987 | EP0198908A4 Focused substrate alteration. |
| 02/26/1987 | DE3529871A1 Method for making printing masks |
| 02/24/1987 | US4645731 Distortion resistant polyester support for use as a phototool |
| 02/24/1987 | US4645336 Method and apparatus for determining the trimmed images of originals for reproduction on printing technology |
| 02/17/1987 | US4643796 Moly mask removal tool |
| 02/12/1987 | DE3528814A1 Hard mask for printed-circuit board exposure, method for producing said mask, and appliance for implementing the method |
| 02/10/1987 | US4642699 Method of scanning and recording images |
| 02/10/1987 | CA1217669A Metal film imaging structure |
| 02/03/1987 | US4641353 Inspection method and apparatus for a mask pattern used in semiconductor device fabrication |
| 02/03/1987 | US4640900 Low expansion glass |
| 02/03/1987 | US4640878 Method of forming a pressure sensitive image transfer sheet and the product thereof |
| 01/28/1987 | EP0209950A2 Process for making a mask used in x-ray photolithography |
| 01/22/1987 | DE3525067A1 Method for preparing a patterned absorber for an X-ray lithography mask |
| 01/20/1987 | US4637714 Inspection system for pellicalized reticles |
| 01/20/1987 | US4637713 Pellicle mounting apparatus |
| 01/13/1987 | US4636870 Method and system for recording transformed images |
| 01/13/1987 | US4636438 Masking films |
| 01/13/1987 | US4636403 Method of repairing a defective photomask |
| 01/13/1987 | US4636073 Semiconductors, hemispherical pads to simulate light scattering |
| 01/08/1987 | DE3620970A1 Mask holding device |
| 01/07/1987 | EP0207528A2 Process of producing a photomask |
| 01/06/1987 | US4634643 X-ray mask and method of manufacturing the same |
| 01/06/1987 | US4634270 Protective cover |
| 01/02/1987 | DE3522817A1 Process for the production of protective coatings which prevent vegetative or animal colonisation and rodent or insect damage |
| 12/30/1986 | US4633504 Automatic photomask inspection system having image enhancement means |
| 12/30/1986 | US4633090 Method and apparatus for particle irradiation of a target |
| 12/30/1986 | US4632871 Anodic bonding method and apparatus for X-ray masks |
| 12/30/1986 | US4632541 Method of using photographic montage to make portrait photos in particular |
| 12/30/1986 | EP0206681A2 Optical method for forming a hologram |
| 12/30/1986 | EP0206633A2 Method of inspecting masks and apparatus thereof |
| 12/30/1986 | EP0205571A1 Establishing and/or evaluating alignment by means of alignment marks. |
| 12/18/1986 | WO1986007301A1 Laminator |
| 12/16/1986 | US4630094 Use of metallic glasses for fabrication of structures with submicron dimensions |
| 12/16/1986 | CA1215481A1 Electron lithography mask manufacture |
| 12/10/1986 | EP0204169A1 Support material for electron beam devices |
| 12/09/1986 | US4628350 Scanning apparatus for generating signals representing color components |
| 12/03/1986 | EP0203563A2 Photomask blank and photomask |
| 12/03/1986 | EP0203215A1 Process for the correction of transmission masks |
| 12/02/1986 | US4627005 Equal density distribution process |
| 12/02/1986 | US4626493 Laser-imageable assembly with heterogeneous resin layer and process for production thereof |
| 12/02/1986 | US4626097 Process for preparing printing plates |
| 11/26/1986 | EP0203014A2 Photomechanical contact device for the correction of the image deformation in a metal box extrusion process |
| 11/26/1986 | EP0202540A1 Electron beam mask |
| 11/25/1986 | CA1214349A1 Method and apparatus for setting and monitoring an exposure spot for printing |
| 11/20/1986 | WO1986006852A1 Method and device for aligning, controlling and/or measuring bidimensional objects |
| 11/18/1986 | US4623676 Photocurable |
| 11/18/1986 | US4623607 Coating defects, selective masking and irradiation |
| 11/18/1986 | US4623257 Alignment marks for fine-line device fabrication |
| 11/18/1986 | US4623256 Apparatus for inspecting mask used for manufacturing integrated circuits |
| 11/11/1986 | US4622591 Apparatus and method for precisely orienting originals on an image scanner drum |
| 11/11/1986 | US4622262 Recording materials of improved lubricity for use in electroerosion printing |
| 10/29/1986 | EP0198908A1 Focused substrate alteration |
| 10/29/1986 | EP0198907A1 Focused substrate alteration |
| 10/28/1986 | US4620288 Data handling system for a pattern generator |
| 10/23/1986 | WO1986006176A1 Target keys for wafer probe alignment |
| 10/23/1986 | WO1986006024A1 Stretched, composite polyester films useable particularly for graphic arts |
| 10/22/1986 | EP0198571A2 Method and system for patching original and extracting original-trimming data in scanner |
| 10/22/1986 | EP0198280A2 Dry development process for metal lift-off profile |
| 10/21/1986 | US4618550 Resin printing plate and preparation thereof |
| 10/09/1986 | WO1986005895A1 Device for the alignment, testing and/or measurement of two-dimensional objects |
| 10/09/1986 | WO1986005744A1 Mounting table |
| 09/30/1986 | US4614433 Mask-to-wafer alignment utilizing zone plates |
| 09/30/1986 | US4614427 Automatic contaminants detection apparatus |
| 09/30/1986 | CA1212182A1 Photomask |
| 09/25/1986 | WO1986005600A1 Method of forming a pressure sensitive image transfer sheet and the product thereof |