| Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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| 01/17/1990 | EP0350876A2 Process for the production of dielectric layers in planar circuits on ceramic substrates |
| 01/17/1990 | EP0218613B1 Device for the alignment, testing and/or measurement of two-dimensional objects |
| 01/17/1990 | EP0154629B1 Dustfree packaging container and method |
| 01/10/1990 | EP0349964A2 Cutting device for masking film |
| 01/10/1990 | EP0349633A1 Polysilicon thin film process |
| 01/03/1990 | EP0348992A2 Apparatus and method of pattern detection based on a scanning transmission electron microscope |
| 01/03/1990 | EP0348962A2 Fine pattern forming method |
| 01/03/1990 | EP0348908A2 Apparatus and method for forming an intermediate original sheet for printing a book |
| 01/02/1990 | US4891830 X-ray reflective mask and system for image formation with use of the same |
| 01/02/1990 | US4891547 Particle or radiation beam mask and process for making same |
| 01/02/1990 | US4891296 Glass support having roughened surface |
| 12/28/1989 | WO1989012848A1 Method of making a mask for discriminating a fragment of image |
| 12/27/1989 | CN1038357A Mfg. method of original for exposed photographic printing |
| 12/26/1989 | US4890309 Lithography mask with a π-phase shifting attenuator |
| 12/26/1989 | US4889998 Apparatus with four light detectors for checking surface of mask with pellicle |
| 12/20/1989 | EP0346828A2 X-ray absorber for use in X-ray lithography and method for fabrication thereof by sputtering |
| 12/12/1989 | US4887283 X-ray mask and exposure method employing the same |
| 12/12/1989 | US4886958 Autofocus system for scanning laser inspector or writer |
| 12/06/1989 | EP0344883A1 Lightsafe masking film |
| 12/05/1989 | US4885467 Shading elimination method |
| 11/30/1989 | WO1989011682A1 Process for changing the image scale in x-ray lithography |
| 11/30/1989 | DE3817382A1 Method for changing the image scale in X-ray lithography |
| 11/29/1989 | EP0343609A2 Method of manufacturing main plates for exposure printing |
| 11/28/1989 | US4884224 Method for generating image contour data and apparatus therefor |
| 11/23/1989 | EP0342881A1 Linewidth loss measurement |
| 11/23/1989 | DE3831404C1 Process for the deposition of tin on substrate surfaces |
| 11/21/1989 | US4882622 Silhouette cutting apparatus |
| 11/14/1989 | US4881257 Deformation free X-ray exposure mask for X-ray lithography |
| 11/08/1989 | EP0340329A1 Protective dust cover for photomask of reticle |
| 11/07/1989 | US4879267 Creating artwork with chromogen-containing materials; developing color to enhance halftone or full color photographic reproduction |
| 11/07/1989 | US4878973 Protecting photomask |
| 11/02/1989 | WO1989010584A1 A method for making a reticle mask |
| 11/02/1989 | EP0339953A2 Lithographic mask structure and device for positioning the same |
| 11/02/1989 | EP0339757A1 Lightsafe masking film |
| 11/02/1989 | EP0339020A1 Method of patterning resist for printed wiring board. |
| 10/25/1989 | EP0338889A2 Process for forming dicing lines on wafer |
| 10/25/1989 | EP0338749A2 Structure of X-ray mask |
| 10/24/1989 | US4876165 Coating substrate with soluble heat resistant dye in curable resin vehicle |
| 10/24/1989 | US4876164 Forming silicide; applying photoresist; patterning; dry etching |
| 10/24/1989 | US4875780 Method and apparatus for inspecting reticles |
| 10/19/1989 | DE3814229C1 Device for the enlarged viewing of an original |
| 10/18/1989 | EP0337812A2 Method and apparatus for creating a photomask for projecting an image |
| 10/18/1989 | EP0155942B1 Method of producing contamination-free pellicles |
| 10/17/1989 | US4874632 Directing vapor stream of polymerizable or carbonizable organic compound onto surface; irradiating with ion beam |
| 10/17/1989 | US4874460 Using ion beam |
| 10/10/1989 | US4873163 Photomask material |
| 10/10/1989 | US4873162 X-ray mask and a manufacture method therefor |
| 10/04/1989 | EP0335163A2 Apparatus for detecting foreign matter on the surface of a substrate |
| 10/04/1989 | EP0334936A1 Method and apparatus for registering color separation film |
| 10/03/1989 | US4871418 Etching of polyoxymethylene glycol substrate which has patterned photoresist coating |
| 09/27/1989 | EP0334680A2 Mask repair system |
| 09/26/1989 | US4870504 Image scanning apparatus including means for selecting one of a plurality of scanning drums to be scanned |
| 09/26/1989 | US4869998 Several different composite representations on same mask |
| 09/26/1989 | CA1261193A1 Process for the production of an x-ray mask with a metal carrier foil |
| 09/26/1989 | CA1260753A1 High energy beam sensitive glasses |
| 09/21/1989 | WO1989008489A1 Membrane structure and method for the manufacture thereof |
| 09/19/1989 | US4868884 Image extraction mask |
| 09/19/1989 | US4868093 Device fabrication by X-ray lithography utilizing stable boron nitride mask |
| 09/19/1989 | US4868020 Rub and show graphics |
| 09/19/1989 | US4868005 Method and apparatus for photodeposition of films on surfaces |
| 09/19/1989 | CA1259724A1 Pellicle compositions and pellicles thereof for projection printing |
| 09/13/1989 | EP0332130A2 X-ray exposure masks |
| 09/12/1989 | US4865952 Forming photoresist on semiconductor, irradiation and development |
| 09/07/1989 | DE3806762A1 Process for locally increasing the optical transparency of silicon membranes |
| 09/06/1989 | EP0331022A2 Radiation induced pattern deposition |
| 08/30/1989 | EP0330536A2 Method and apparatus for inspecting reticles |
| 08/30/1989 | EP0330330A2 Filled grid mask |
| 08/29/1989 | US4861402 Spin coating, desolventizing, cementing thin film to frame; for protection from dust during microlithography |
| 08/23/1989 | EP0329437A2 Lightsafe masking film |
| 08/23/1989 | EP0328787A1 Process for the production of photographic masks |
| 08/23/1989 | EP0328648A1 Durable patterning member |
| 08/16/1989 | EP0327763A2 Colored salts of polymeric sulfonate polyanions and dye cations, and light-absorbing coatings made therewith |
| 08/09/1989 | EP0327019A2 Apparatus for fabricating pre-press masking film |
| 08/08/1989 | US4855197 Mask for ion, electron or X-ray lithography and method of making it |
| 08/01/1989 | US4853317 Printing masking ink on photoresist; identification |
| 07/27/1989 | DE3900526A1 Ultra-thin diaphragm having a supporting edge |
| 07/25/1989 | US4851881 Optical printing system |
| 07/25/1989 | US4851097 Apparatus for repairing a pattern film |
| 07/18/1989 | US4849914 Method and apparatus for registering color separation film |
| 07/18/1989 | US4849793 Image reading apparatus |
| 07/18/1989 | US4849642 Method for repairing a pattern film |
| 07/18/1989 | US4849313 Method for making a reticle mask |
| 07/12/1989 | EP0323880A2 Masking films |
| 07/05/1989 | EP0323264A2 X-ray exposure process using an electrically conductive x-ray mask |
| 07/05/1989 | EP0323263A2 X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask |
| 07/05/1989 | EP0322903A2 Optical image recording apparatus |
| 06/29/1989 | WO1989006045A1 Polysilicon thin film process and product |
| 06/29/1989 | DE3842481A1 Process for the production of an X-ray mask |
| 06/27/1989 | US4842969 Transmittance modulation photomask, process for producing the same, and process for producing diffraction gratings using the same |
| 06/27/1989 | US4842901 From silicic acid ester in presence of acid catalyst |
| 06/27/1989 | CA1256594A1 Rasterizer for pattern generator |
| 06/21/1989 | EP0321147A2 Photoelectron mask and photo cathode image projection method using the same |
| 06/21/1989 | EP0320577A2 Direct negative and offset master production |
| 06/20/1989 | US4840836 Stretched, composite polyester films usable particularly for graphic arts |
| 06/14/1989 | EP0320292A2 A process for forming a pattern |
| 06/06/1989 | US4837129 Process for producing conductor patterns on three dimensional articles |
| 06/06/1989 | US4837123 Aluminum nitride oxide thin films |
| 06/06/1989 | US4836105 Direct negative and offset master production using thermal liftoff |
| 05/30/1989 | US4835704 Adaptive lithography system to provide high density interconnect |
| 05/24/1989 | EP0316814A2 Method of and apparatus for preventing scanning line deviation in a process scanner of a separated drum type |