| Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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| 09/28/1988 | EP0283546A1 Method for producing micromechanical components of any form from plane parallel polymer plates or via holes therein |
| 09/27/1988 | US4774461 System for inspecting exposure pattern data of semiconductor integrated circuit device |
| 09/27/1988 | US4774164 Chrome mask etch |
| 09/21/1988 | EP0179146B1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces |
| 09/20/1988 | US4771551 Method of and apparatus for applying angle data marks to originals for image data scanning |
| 09/20/1988 | CA1242111A1 Device for in-register film mounting for the production of printing plates for small offset presses |
| 09/15/1988 | DE3707130A1 Method of fabricating silicon X-ray masks |
| 09/13/1988 | US4771017 Patterning a photosensitive layer with incline profile, metal coating |
| 09/13/1988 | US4770947 Multiple density mask and fabrication thereof |
| 09/13/1988 | US4770533 Apparatus for detecting position of an object such as a semiconductor wafer |
| 08/31/1988 | EP0280131A2 Method of correcting defect in circuit pattern |
| 08/31/1988 | EP0280085A1 Coating composition and process for the production of glassy layers |
| 08/25/1988 | DE3705360A1 Method of repairing defects on masks |
| 08/24/1988 | EP0279670A2 A reflection type mask |
| 08/23/1988 | US4765744 Method for testing a photomask |
| 08/17/1988 | EP0278076A2 Lithographic mask for obtaining patterns |
| 08/17/1988 | EP0277982A1 Marking of articles with photochromic compounds. |
| 08/17/1988 | CN88100613A Method of cutting organic membrane |
| 08/16/1988 | US4764969 Apparatus for inspecting the surface of a material |
| 08/16/1988 | US4764441 Layers of ultraviolet non-transmissive and reflecting films |
| 08/16/1988 | US4764432 Photo-mask with regions having a differing optical transmissivities |
| 08/10/1988 | EP0277828A2 Thin film artwork compounds |
| 08/10/1988 | EP0277820A2 Method of cutting a membrane |
| 08/09/1988 | US4762396 Masking method |
| 08/03/1988 | EP0276938A2 Semiconductor device fabrication including a non-destructive method for examining lithographically defined features |
| 08/02/1988 | US4761560 Measurement of proximity effects in electron beam lithography |
| 07/26/1988 | US4759990 Composite optical element including anti-reflective coating |
| 07/26/1988 | CA1239610A1 Chain conveyor permitting the accumulation of trucks on a section of the conveyor |
| 07/20/1988 | EP0274757A2 Bilayer lithographic process |
| 07/19/1988 | US4758863 Process for imaging a wafer |
| 07/19/1988 | US4758731 Method and arrangement for aligning, examining and/or measuring two-dimensional objects |
| 07/19/1988 | US4758094 Process and apparatus for in-situ qualification of master patterns used in patterning systems |
| 07/06/1988 | EP0273703A2 An adaptive lithography method and system |
| 07/06/1988 | EP0273392A2 Multi-layer structure and method of fabrication thereof |
| 07/06/1988 | EP0273351A2 Apparatus for repairing a pattern film |
| 06/30/1988 | WO1988004797A1 Method of patterning resist for printed wiring board |
| 06/30/1988 | DE3713767C1 Device and method for determining an image section for producing an enlargement after cropping (enlarged cropping) |
| 06/28/1988 | US4754404 Method of incising the contour in an image film |
| 06/28/1988 | US4754325 Method and apparatus for producing a color-separation film by recording at least one trimmed color-separation image and a masking region simultaneously |
| 06/21/1988 | US4752668 System for laser removal of excess material from a semiconductor wafer |
| 06/15/1988 | EP0271002A2 Transmittance modulation photomask, process for producing the same and process for producing diffraction grating |
| 06/14/1988 | US4751169 Method for repairing lithographic transmission masks |
| 06/14/1988 | US4751167 Reduction of adhesion of multilayer device upon exposure to light |
| 06/09/1988 | DE3640441A1 Mask for photolithographically producing a structure |
| 06/08/1988 | EP0270011A2 Drum scanning type image scanning apparatus and a method of inputting thereto |
| 06/08/1988 | EP0269692A1 Monolithic channeling mask |
| 06/02/1988 | WO1988004070A1 Dust cover with excellent light transmittance for photomask reticle |
| 05/31/1988 | US4748478 Projection exposure apparatus |
| 05/31/1988 | US4748327 Method of inspecting masks and apparatus thereof |
| 05/31/1988 | US4748050 Process for preparing thin film having high light transmittance |
| 05/31/1988 | US4748045 Method and apparatus for photodeposition of films on surfaces |
| 05/26/1988 | DE3739431A1 Tragbares bildzustand-messgeraet Portable forming condition meter |
| 05/24/1988 | US4747146 System for detecting difference between image on primary sheet and image on secondary sheet |
| 05/24/1988 | US4746594 Transparencies for printing plates |
| 05/24/1988 | US4746587 Electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask |
| 05/05/1988 | DE3705993C1 Method of compensating for absorber-induced distortions on X-ray masks |
| 05/04/1988 | EP0266275A2 An X-ray exposure mask for transferring patterns onto a semiconductor wafer |
| 05/04/1988 | EP0265957A2 Apparatus for automatically providing positioning holes on film material |
| 05/04/1988 | EP0265658A2 High energy laser mask and method of making same |
| 05/03/1988 | US4741603 Electrochromic nonglaring mirror |
| 05/03/1988 | CA1236172A1 Laser imaging system and method for imposing pages for printing |
| 04/26/1988 | US4740125 Method and apparatus for adjusting the binding back margins, especially for sew-stitched, wire-stitched and block stitched magazines |
| 04/19/1988 | US4738907 Process for manufacturing a photomask |
| 04/19/1988 | US4738886 Resin printing plate and preparation thereof |
| 04/12/1988 | US4737920 Method and apparatus for correcting rotational errors during inspection of reticles and masks |
| 04/12/1988 | US4737436 Mixing pigment with water soluble photoresist, coating on substrate, and exposure to actinic radiation |
| 04/12/1988 | US4737425 Patterned resist and process |
| 04/12/1988 | US4737387 With composite frame for free-standing, protective membrane |
| 04/07/1988 | WO1987007400A3 Monolithic channeling mask |
| 04/05/1988 | US4735890 Photomasks for photolithographic fine patterning |
| 04/05/1988 | US4735877 Masking support film contains fluorescent material |
| 03/30/1988 | EP0261195A1 An etch technique for metal mask definition |
| 03/29/1988 | US4734923 Lithographic system mask inspection device |
| 03/24/1988 | WO1987006028A3 X-ray reflective mask and system for image formation with use of the same |
| 03/24/1988 | DE3631383A1 Method of generating fine structures in a substrate and device for carrying out the method |
| 03/23/1988 | EP0260718A2 An X-ray-transparent membrane and its production method |
| 03/23/1988 | EP0260349A1 Dye diffusion transfer imaging process for production of retained images |
| 03/22/1988 | US4733309 Apparatus for enabling an operator to mount an unexposed film on and demount an exposed film from the drum of a color scanner via a light-blind window |
| 03/15/1988 | US4731155 Process for forming a lithographic mask |
| 03/08/1988 | US4729935 Process for the production of photographic images utilizing a negative working diazo contact film |
| 03/02/1988 | EP0257685A1 Method for altering patterns provided at a surface of a carrier and apparatus for carrying it out |
| 03/02/1988 | EP0257528A1 Photo cathodes for electron image projection |
| 03/01/1988 | US4729037 Method for recording printing forms |
| 02/25/1988 | WO1988001288A1 Marking of articles with photochromic compounds |
| 02/24/1988 | CN87103147A Recording method of printing plate |
| 02/23/1988 | US4727234 Laser-based system for the total repair of photomasks |
| 02/16/1988 | US4725966 Image modification |
| 02/16/1988 | US4725722 Automatic focusing method and apparatus utilizing contrasts of projected pattern |
| 02/16/1988 | US4725526 Process for reducing halations using lubricant in the course of irradiating and developing reproduction layers used for preparing printing plates |
| 02/16/1988 | CA1232972A1 Equal density distribution process |
| 02/02/1988 | US4722878 Photomask material |
| 01/28/1988 | EP0214236A4 Method of forming a pressure sensitive image transfer sheet and the product thereof. |
| 01/20/1988 | EP0253066A2 Process for obtaining multilevel micropatterns by X-ray lithography |
| 01/19/1988 | US4720442 Photomask blank and photomask |
| 01/13/1988 | EP0252673A2 Removable pellicle and method |
| 01/13/1988 | EP0252574A2 Method and apparatus for reducing particulates on photomasks |
| 01/12/1988 | US4719161 Peroxopolytungsten compound as absorber for x-rays |
| 01/05/1988 | US4717625 Photomask material |
| 12/30/1987 | WO1987006027A3 An etch technique for metal mask definition |
| 12/29/1987 | US4716299 Apparatus for conveying and inspecting a substrate |