Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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05/24/1989 | EP0260258B1 Stretched, composite polyester films useable particularly for graphic arts |
05/23/1989 | US4833051 Protective pellicles, spacings |
05/17/1989 | EP0316111A2 Mask repair |
05/17/1989 | EP0315774A2 System for the production of dot-etched lithographic films |
05/16/1989 | US4831274 Surface inspecting device for detecting the position of foreign matter on a substrate |
05/10/1989 | EP0315450A2 Pellicle |
05/09/1989 | US4828949 Cathode ray tubes, ammonium dichromate, pigments, polyvinyl alcohol, glycol, leveling, development |
05/09/1989 | US4828640 Method of producing films using a peeling jig |
05/05/1989 | WO1989004052A1 Exposing substrates to ion beams |
05/03/1989 | EP0314418A2 Dust-proof film |
05/03/1989 | EP0313886A2 Production of a direct negative from resistive ribbon |
05/02/1989 | US4827138 Filled grid mask |
05/02/1989 | US4825555 Apparatus for automatic forming on a film material of both a mask film pattern and a positioning hole |
04/27/1989 | DE3733874A1 Druckformherstellung mittels auswaschbarem bildtraeger Platemaking using washable bildtraeger |
04/20/1989 | WO1989003545A1 Production of formes using washable image carriers |
04/20/1989 | WO1989003544A1 Monolithic channeling mask having amorphous/single crystal construction |
04/19/1989 | EP0312341A2 High resolution imagery systems |
04/18/1989 | US4823289 Positioning originals on an original scanning drum of an image reproducing system |
04/18/1989 | US4822718 Light absorbing coating |
04/11/1989 | US4820898 Ion beam apparatus for finishing patterns |
04/11/1989 | US4820546 Method for production of X-ray-transparent membrane |
04/06/1989 | WO1989003051A1 Method and apparatus for registering color separation film |
04/05/1989 | EP0310412A2 Improvements in photo-masks |
04/05/1989 | EP0310183A2 Fabrication process of a SiC mask support for X-ray lithography |
04/05/1989 | EP0310124A2 Process for producing an X-ray mask |
04/04/1989 | US4818661 Method for fabricating thin film metallic meshes for use as Fabry-Perot interferometer elements, filters and other devices |
03/30/1989 | DE3730642A1 Hole mask for use in ion- or electron-optical processes, and method for fabricating such a hole mask |
03/28/1989 | US4816903 Film checking apparatus |
03/28/1989 | US4816382 Method of producing plate making masks and film for forming masks |
03/22/1989 | EP0307966A2 System for making covering masks for use in photoengraving |
03/22/1989 | EP0307948A2 Silhouette cutting apparatus |
03/22/1989 | EP0307726A2 Semiconductor manufacturing process which compensates for the distortion between a pattern on a semiconductor body and the mask from which the pattern is derived |
03/22/1989 | CN1031900A Method of manufacturing a mask for radiation lithography |
03/22/1989 | CN1031899A Method for obtaining ultrathin protected phototools |
03/21/1989 | US4814799 Method and apparatus for creating a photomask for projecting an image |
03/21/1989 | US4814615 Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure |
03/21/1989 | US4814246 Light-sensitive photoconductive recording material with light sensitive covering layer for use in manufacturing printing form or printed circuit |
03/21/1989 | US4814244 Irradiating with ion beam |
03/21/1989 | US4813764 Device for editing a reproduction |
03/14/1989 | US4812279 Process for preparation of cellulose ester films |
03/08/1989 | EP0306091A2 Process for the production of a mask for radiation lithography |
03/01/1989 | EP0304969A2 Process for forming a pattern film |
02/28/1989 | US4809341 Test method and apparatus for a reticle or mask pattern used in semiconductor device fabrication |
02/28/1989 | US4808510 Photographic element and patternable mordant composition |
02/28/1989 | US4808435 Screen printing method for producing lines of uniform width and height |
02/23/1989 | WO1989001650A1 Durable patterning member |
02/23/1989 | DE3727030A1 Method for indirectly determining the pattern line (pattern feature) widths and deviations in the pattern line widths of lithography masks |
02/22/1989 | EP0304383A2 A photographic element and patternable mordant composition |
02/22/1989 | EP0304211A2 Dust-proof film |
02/21/1989 | US4807020 Image reproducing system having multiple processing levels |
02/21/1989 | US4806921 From data representing geometric objects |
02/21/1989 | US4806457 Forming check pattern with resist stripes in intervals |
02/15/1989 | EP0303572A1 Use of a thermal transfer printer in the production of a photomask |
02/14/1989 | US4805123 Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems |
02/14/1989 | US4804600 Lithographic mask structure and process for preparing the same |
02/08/1989 | EP0189435B1 Mask-to-wafer alignment utilizing zone plates |
02/07/1989 | US4803145 Coloring film of uniform thickness |
01/25/1989 | EP0300661A2 Reflection-preventive pellicle film and process for preparation thereof |
01/25/1989 | EP0300475A2 Method for obtaining ultrathin protected phototools |
01/18/1989 | EP0299951A2 Process and apparatus for mask inspection |
01/11/1989 | EP0298495A2 Method and apparatus for correcting defects of x-ray mask |
01/10/1989 | US4797334 Patterning optical and X-ray masks for integrated circuit fabrication |
01/10/1989 | US4797177 Method of cutting an organic membrane |
01/10/1989 | US4796973 Pellicle structure for transmission of mid ultraviolet light |
01/04/1989 | EP0297506A2 Removal of particles from solid-state surfaces by laser bombardement |
01/04/1989 | CN1030147A Method of plate making and printing for synthesizing colored stereapicture |
01/03/1989 | US4796061 Device for detachably attaching a film onto a drum in a drum type picture scanning recording apparatus |
12/29/1988 | DE3808573A1 Photomask glass of low expansion having improved adhesion properties |
12/27/1988 | US4794462 Method and system for patching an original at a desired angular orientation on a scanner input drum or an original patching sheet and extracting original trimming data |
12/20/1988 | US4792693 Step-and-repeat exposure method |
12/20/1988 | US4792461 Method of forming a photomask material |
12/13/1988 | US4790895 Laminater |
12/07/1988 | EP0293643A2 Lithographic process having improved image quality |
12/06/1988 | US4789611 Method for amending a photomask |
11/30/1988 | EP0293239A2 Method of producing films and jig for producing the same |
11/29/1988 | US4788117 Semiconductor device fabrication including a non-destructive method for examining lithographically defined features |
11/23/1988 | EP0292090A2 Rinser dryer system |
11/17/1988 | WO1988009049A1 Mask repair using an optimized focused ion beam system |
11/17/1988 | DE3715865A1 X-ray mask made from silicon combined with silicon nitride layers, and process for the production thereof |
11/15/1988 | US4785347 Method for emphasizing sharpness of a picture image by forming and processing sharp and unsharp signals from a picture image signal |
11/08/1988 | US4783390 Multicolor diazo image-forming material |
11/08/1988 | US4783385 Dry dot etching; exposure behind halftone positive and negative of color separation set and diffusion sheets |
11/08/1988 | US4783371 Photomask material |
11/08/1988 | CA1244521A1 Apparatus for photomask repair |
11/02/1988 | EP0289249A2 Device fabrication by X-ray lithography utilizing stable boron nitride mask |
11/02/1988 | EP0289174A2 Antireflection coatings for use in photolithography |
11/02/1988 | EP0220233A4 Target keys for wafer probe alignment. |
10/25/1988 | US4780382 Process for making a transmission mask |
10/18/1988 | US4778745 Defect detection method of semiconductor wafer patterns |
10/18/1988 | US4778693 Photolithographic mask repair system |
10/18/1988 | CA1243427A1 Laser pattern generation apparatus |
10/12/1988 | EP0286018A2 Exposure mask for materials coated with a photosensitive layer |
10/12/1988 | EP0285850A2 Improved screen printing method for producing lines of uniform width and height |
10/11/1988 | US4777372 Right angle driving |
10/11/1988 | US4777371 Glass ceramic with high quartz structure |
10/04/1988 | US4775886 Apparatus for performing a plurality of editing processes according to a predetermined order of priority while recording a composite image |
10/04/1988 | US4775797 Method of stabilizing a mask |
10/04/1988 | US4775205 Light-beam scanning apparatus having two beam waists |
10/04/1988 | CA1242815A1 Defect detection method of semiconductor wafer patterns |
09/28/1988 | EP0284003A1 Reticle frame assembly |