| Patents for G03C 5 - Photographic processes or agents therefor; Regeneration of such processing agents (11,726) |
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| 06/21/2007 | US20070141517 Improving resist resolution by using a dipolar group coupled to an anion of a photo-acid generator of the resist to force anisotropic acid diffusion process during post-exposure bake; limiting lateral acid diffusion to increase vertical; chemically amplified resists; semiconductors; miniaturization |
| 06/21/2007 | US20070141486 Device manufacturing method and computer program product |
| 06/21/2007 | US20070141483 Near-field exposure photoresist and fine pattern forming method using the same |
| 06/21/2007 | US20070141481 photoresists with varying transmissive areas; halftones |
| 06/21/2007 | US20070141480 including a first pattern portion having a first minimum dimension and a second pattern portion having a second minimum dimension includes a first exposure step of performing exposure using a Levenson-type mask and a second exposure step of performing exposure using a half tone-type mask |
| 06/21/2007 | US20070141479 mask pattern includes a main pattern to be transferred through exposure and an auxiliary pattern that diffracts exposing light and is not transferred through the exposure; can improve contrast in forming a pattern in an arbitrary shape |
| 06/21/2007 | US20070139855 Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus |
| 06/20/2007 | CN1985335A Method for bilayer resist plasma etch |
| 06/19/2007 | US7232651 Optical recording materials |
| 06/19/2007 | US7232631 Silicon oxide on silicon substrate; controlling thickness; doping with boron, phorphosus |
| 06/19/2007 | US7232256 Intraoral radiographic dental x-ray packets having non-lead radiation shielding |
| 06/14/2007 | WO2007067706A2 Pressurized aerosol formulation for use in radiation sensitive coatings |
| 06/14/2007 | US20070134602 High-pressure processing apparatus |
| 06/14/2007 | US20070134601 Supplying a rinsing liquid onto a substrate with a light-exposed pattern formed thereon and treated by a developing procedure; rinsing liquid contains a polyethylene glycol family surfactant or an acetylene glycol family surfactant in a critical micelle concentration or less |
| 06/14/2007 | US20070134599 Growing or depositing a carbon nanotube (NT) array on a substrate;functionalizing it by partial thermal degradation of a polymer to form a NT structure; characterizing functionalization of the structure; and processing the functionalized NT structure according to the characterized functionalization |
| 06/14/2007 | US20070134595 Pressurized aerosol formulation for use in radiation sensitive coatings |
| 06/14/2007 | US20070134567 Mask and method of manufacturing display device using the same |
| 06/14/2007 | US20070134564 Method of manufacturing semiconductor device, mask and semiconductor device |
| 06/14/2007 | US20070134563 Photomask and method of manufacturing semiconductor device |
| 06/14/2007 | US20070134562 Fabrication method for photomask, fabrication method for device and monitoring method for photomask |
| 06/14/2007 | US20070132811 Ink jet head manufacturing method and ink jet head manufactured by the manufacturing method |
| 06/14/2007 | US20070132157 Processing method |
| 06/14/2007 | DE102005059743A1 Translucent paper`s discrimination and/or copying protection producing method, involves applying paper with colorless lacquer in defined region as identification, where intensification of background is viewable by refraction of light |
| 06/12/2007 | US7229748 Method for forming a micro pattern, micro pattern, method for fabricating a mold for forming the micro pattern through transcription, and mold for forming the micro pattern through transcription |
| 06/12/2007 | US7229747 Surface treatment of interpenetrating polymer networkcarbon tubes; photolithography; heat curing; negative patterns |
| 06/12/2007 | US7229743 Electron beam lithography method, patterned master carrier for magnetic transfer, lithography method for patterned master carrier for magnetic transfer, and method for producing performatted magnetic recording media |
| 06/12/2007 | US7229742 Methods for improving angled line feature accuracy and throughput using electron beam lithography and electron beam lithography system |
| 06/12/2007 | US7229738 Silver halide emulsion layer on a support, contains a fluorine compound with >/=2 fluoroalkyl groups, and anionic and nonionic hydrophilic groups |
| 06/12/2007 | US7229724 Optical transmission pattern; etching edges; on radiation transparent substrate |
| 06/12/2007 | US7229723 Method for forming an opening in a light-absorbing layer on a mask |
| 06/12/2007 | US7229722 Alternating phase shift mask design for high performance circuitry |
| 06/12/2007 | US7228623 Process for fabricating a multi layer circuit assembly |
| 06/07/2007 | WO2006026280A8 Method for reducing acrylamide formation in thermally processed foods |
| 06/07/2007 | US20070128557 Phototool coating |
| 06/07/2007 | US20070128555 polymerizable ester compound containing a fluorinated alkyl group, a lactone ring, and an acid-eliminatable unit within a common molecule can be polymerized into a polymer which meets water repellency as needed for the immersion lithography |
| 06/07/2007 | US20070128553 Method for forming feature definitions |
| 06/07/2007 | US20070128549 Forming patterns on a first substrate using an E-beam lithography, transferring the patterns formed on the first substrate to a second substrate using a nanoimprint lithography to complete an mold |
| 06/07/2007 | US20070128529 Exposure method and apparatus, coating apparatus for applying resist to plural substrates, and device manufacturing method |
| 06/07/2007 | US20070128527 A wafer for a circuit having a transparent substrate with a pattern light-reducing layer having sidewalls with openings to expose non-patterned regions and having an angle of < 90 degrees improve intensity balance of an image-formed by light-transmitted through the mask |
| 06/07/2007 | US20070128524 Method of arranging mask patterns |
| 06/07/2007 | US20070127625 Flat image detector |
| 06/06/2007 | EP1793272A1 Silver halide color photographic photosensitive material and method of image forming |
| 06/06/2007 | EP1791653A2 Optical films and methods of making the same |
| 06/05/2007 | US7226866 Etching method for making a reticle |
| 06/05/2007 | US7226723 Providing a substrate having a resist thereon;exposing the resist to at least one generally rectangular-shaped shot from an electron beam, rotating at least one of the substrate and a path of the generally rectangular-shaped shot; andexposing the resist with rectangular-shaped shot from electron beam |
| 06/05/2007 | US7226721 Having a high dry etching rate compared with photoresist, and causing no intermixing with the photoresist, manufacture of semiconductor device |
| 06/05/2007 | US7226707 Methods of printing structures |
| 06/05/2007 | US7226706 using a blocker to prevent electron beams from hitting the outer region for an area more than 90 percent of the outer region when patterning a predetermined feature on the substrate; comprising: a non-conductive substrate; and a layer of conductive material on substrate |
| 06/05/2007 | US7226705 Method of manufacturing a mask blank and a mask, the mask blank and the mask, and useless film removing method and apparatus |
| 05/31/2007 | US20070124708 Contrast based resolution enhancement for photolithographic processing |
| 05/31/2007 | US20070124108 Structure, system and method for dimensionally unstable layer dimension measurement |
| 05/31/2007 | US20070122755 Heat developable photosensitive material including a combination of specified reducing agents |
| 05/31/2007 | US20070122754 Radiating vacuum-ultraviolet light through a photomask to a pattern forming substrate, varying a surface property by the vacuum-ultraviolet light, and forming a property varied pattern with the property varied on a surface of the pattern forming substrate to form a pattern formed body; removing |
| 05/31/2007 | US20070122750 Salt suitable for an acid generator and a chemically amplified resist composition containing the same |
| 05/31/2007 | US20070122749 Method of nanopatterning, a resist film for use therein, and an article including the resist film |
| 05/31/2007 | US20070122737 Coating and developing system and coating and developing method |
| 05/31/2007 | US20070122733 Positive photosensitive resin composition, method for forming pattern, and electronic part |
| 05/31/2007 | US20070122723 Process |
| 05/31/2007 | US20070122718 distribution of the light transmittance is determined so that the resist layer having been exposed in accordance with a first resist shape would be used to form a second resist shape with an aspect ratio higher than the aspect ratio of the first resist shape; gray scale mask; microlens |
| 05/31/2007 | US20070121789 Holder device for dental x-ray digital sensor |
| 05/30/2007 | EP1790429A1 Imaging methods |
| 05/30/2007 | EP1287549A4 An apparatus and a method for forming a pattern using a crystal structure of material |
| 05/30/2007 | CN1973247A Developer for a photopolymer protective layer |
| 05/29/2007 | US7223613 Ferroelectric polymer memory with a thick interface layer |
| 05/29/2007 | US7223528 photographic films comprising supports having photosensitive silver halides, nonphotosensitive organic silver salt, reducing agents and nonphotosensitive layers containing a water soluble magenta dye; quality images having good contrast, discoloration inhibition and surface gloss |
| 05/29/2007 | US7223505 Thin film formed on a substrate, irradiating with an energy beam to elevate the temperature of a region to a predetermined temperature, and patterning |
| 05/24/2007 | US20070117410 Method for manufacturing semiconductor device using immersion lithography process |
| 05/24/2007 | US20070117051 Trimming a MEMS Device to Fine Tune Natural Frequency |
| 05/24/2007 | US20070117050 Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizes |
| 05/24/2007 | US20070117049 Form crosslinks of repeating -(CO-O-CH(-CH3)-O)-; reaction of multifunctional vinyl ether and a polymer with free acid groups, e.g. poly(methacryloyloxy ethyl phthalate); eliminate the bottom anti-reflective coating etch step by using a wet-developable bottom anti-reflective coating; high resolution |
| 05/24/2007 | US20070117038 Method for forming mark and liquid ejection apparatus |
| 05/24/2007 | US20070117032 Method for determining an exposure dose and exposure apparatus |
| 05/24/2007 | US20070117029 Exposure pattern or mask and inspection method and manufacture method for the same |
| 05/24/2007 | US20070114477 Enhanced sensitivity of a whispering gallery mode microsphere sensor by a high-refractive index surface layer |
| 05/23/2007 | EP1786277A2 Method for reducing acrylamide formation in thermally processed foods |
| 05/22/2007 | US7222327 Photo mask, method of manufacturing photo mask, and method of generating mask data |
| 05/22/2007 | US7221427 Method of making semiconductor chips for liquid crystal display device |
| 05/22/2007 | US7220981 Radiographic-image recording medium containing shock-resistant member |
| 05/22/2007 | US7220536 Exhibits minimum contamination of the interior of an imager, low level of odor as well as high abrasion resistance during performing a thermal development, image keeping stability after development |
| 05/22/2007 | US7220535 Use of separate bands of UV light for the curing and imaging steps ensures that the techniques provide for a marking that is non-interfering with data read out |
| 05/22/2007 | US7220479 Multilayer body with a layer having at least one laser-sensitive material |
| 05/18/2007 | WO2006098877A3 Method and apparatus for analyzing an imaging material |
| 05/18/2007 | WO2005092025A3 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis |
| 05/18/2007 | CA2627433A1 Visual film identification |
| 05/17/2007 | US20070111536 Substrate treatment apparatus and substrate treatment method |
| 05/17/2007 | US20070111465 Mask, mask blank, and methods of producing these |
| 05/17/2007 | US20070111144 Display device and manufacturing method of the same |
| 05/17/2007 | US20070111116 Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same |
| 05/17/2007 | US20070111114 Silicon thin film in which an opening for selectively irradiating charged particles to a semiconductor substrate is provided and whose irradiation surface on which the charged particles are irradiated is implanted with an impurity, and selectively irradiating charged particles to semiconductor substrate |
| 05/17/2007 | US20070111113 Photo mask for mitigating stitching effect and exposing method using the same |
| 05/17/2007 | US20070111110 In-situ plasma treatment of advanced resists in fine pattern definition |
| 05/16/2007 | EP1784079A2 Method for reducing acrylamide formation in thermally processed foods |
| 05/16/2007 | EP1730477A4 Embedded attenuated phase shift mask with tunable transmission |
| 05/16/2007 | CN1965269A Aqueous edge bead remover |
| 05/15/2007 | US7217504 high-density colour or monochrome images; especially on a transparent support; receiver having at least one radiation absorbing component having pre-determined spectral absorbance properties susceptible to alteration to form an altered radiation absorbing component |
| 05/15/2007 | US7217502 Nanopastes for use as patterning compositions |
| 05/10/2007 | WO2007030704A3 System and method for mask verification using an individual mask error model |
| 05/10/2007 | US20070105276 Mask, mask blank, and methods of producing these |
| 05/10/2007 | US20070105059 Image forming method using photothermographic material |
| 05/10/2007 | US20070105058 Dual Layer Workpiece Masking and Manufacturing Process |