Patents for G03C 5 - Photographic processes or agents therefor; Regeneration of such processing agents (11,726)
09/2007
09/18/2007US7270917 Forming a first hard mask layer over a substrate;forming an acid layer over the first hard mask layer;depositing a photoresist layer over the acid layer; patterning the photoresist layer to form a pattern; transferring the pattern to the first hard mask layer below the acid layer
09/13/2007US20070212899 Photosensitive resin composition and method for manufacturing semiconductor apparatus using the same
09/13/2007US20070212652 Method and system for enhanced lithographic alignment
09/13/2007US20070212651 Method for forming recess on slider surface
09/13/2007US20070212624 Method for determining an edge profile of a volume of a photoresist after a development process
09/13/2007US20070212620 Mask data generation method and mask
09/13/2007US20070212617 For exposure of semiconductor wafer with dipole illumination light; photoresists
09/13/2007DE102006011140A1 Prozesskontrollstreifen und Verfahren zur Aufzeichnung Process control strip and method for recording
09/12/2007CN100337158C Thermal developing appts. and thermal developing method and program
09/11/2007US7269819 Method and apparatus for generating exposure data
09/11/2007US7267935 Thermally developable materials stabilized with crown ethers
09/11/2007US7267934 Development of an exposed photothermographic material using a developing device at a distance of 0-50 cm between an exposing section and a developing section at 100-140 degrees C. at a conveying rate of 20-200 mm/sec to obtain a maximum density of 4.0-5.0 of the developed photothermographic material
09/11/2007US7267933 Image forming method using photothermographic material
09/11/2007US7267932 Method for high resolution patterning using soft X-ray, process for preparing nano device using the same method
09/11/2007US7267929 Producing barrier ribs for a pixel pattern from a mixture of an alkali-soluble photosensitive resin having acidic groups and at least three ethylenic double bonds per molecule; an ink repellent copolymer having fluoroalkyl groups; and a photopolymerization initiator
09/11/2007US7267927 Method for fabricating semiconductor device and equipment for fabricating the same
09/11/2007US7267912 Exposure mask and pattern exposure method
09/11/2007US7267859 Thick porous anodic alumina films and nanowire arrays grown on a solid substrate
09/06/2007US20070207536 Fluorescence biosensor
09/06/2007US20070207415 Process for producing wiring circuit board
09/06/2007US20070207414 Ink jet recording head and manufacturing method of the same
09/06/2007US20070207394 Photomask is provided with the test pattern and an image of the pattern is obtained; edges of the image are determined and, therefrom, a set of edge position data are obtained; ddge position data are fitted to a straight line to determine edge position residuals; amplitude spectrum is calculated
09/06/2007US20070207393 Photomask formation method, photomask, and semiconductor device fabrication method
09/06/2007US20070207392 Manufacturing method of photo mask and manufacturing method of semiconductor device
09/06/2007US20070207391 Multiple resist layer phase shift mask (PSM) blank and PSM formation method
09/05/2007EP1521843B1 Method for chemiluminescent detection
09/04/2007US7266802 Drawing apparatus and drawing method
09/04/2007US7264920 Image forming layer containing photosensitive silver halide emulsions, nonphotosensitive organic silver compound, reducing agent and binder; medical imaging for diagnosis; high speed resolution
09/04/2007US7264919 Mono-sheet heat-developable photosensitive material and method of forming image
09/04/2007US7264909 Exposure parameters for all of the selected exposure patterns to be corrected include position, focal point, astigmatism, rotation, and magnification
09/04/2007US7264908 Photo mask blank and photo mask
09/04/2007US7264906 OPC based illumination optimization with mask error constraints
09/04/2007US7264415 Methods of forming alternating phase shift masks having improved phase-shift tolerance
09/04/2007US7264345 Liquid composition for ink jet, ink set for ink jet, and recording method and recording apparatus using the same
08/2007
08/30/2007US20070202448 Selenium-sensitized silver chloride content of 90 mole % or above; N-(o-oxyphenyl)-alpha-(cyclo)alkanoyl-alpha-1-cyclicimidoacetamide yellow dye-forming coupler; magenta and cyan dye-forming couplers; light-insensitive hydrophilic colloid layer
08/30/2007US20070202447 Transport system in which a feed roller in contact with a bundle of stacked film sheets feeds the uppermost film sheet through rotation of the feed roller to expose and develop the sheet; back coating layer contains a matting resin and has center-line mean roughness of 50-120 nm
08/30/2007US20070202444 Resist pattern forming method and apparatus
08/30/2007US20070202418 Multi layer, attenuated phase shifting mask
08/30/2007US20070201135 Optical element and method of manufacturing optical element
08/28/2007US7262422 Use of supercritical fluid to dry wafer and clean lens in immersion lithography
08/28/2007US7262001 Support with organic silver salt, silver halide, binder, and a reducing agent; roughness; high image density; storage stability, heat resistance
08/28/2007US7262000 Photothermographic material and image forming method for the photothermographic material
08/28/2007US7261999 Photothermographic materials containing post-processing stabilizers
08/28/2007US7261997 Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
08/28/2007US7261985 Large feature-shift coma sensitivity is simulated for a range of illumination conditions, resulting source sensitivity data is modeled and a practical array of source shapes, each of which is optimized to eliminate the effects of transverse distortion due to third-order coma, is identified
08/28/2007US7261984 Exposure pattern or mask and inspection method and manufacture method for the same
08/28/2007US7261983 Reference wafer and process for manufacturing same
08/28/2007US7261982 Utilizing photolithographic master and slave mask set; simple, low cost technique for correcting errors; adjusts to varying wafer positions
08/28/2007US7261981 Generating simplified layout patterns from the predetermined main shapes of the mask, such layout patterns are generated by eliminating detail of the main shapes which leads to unmanufacturable associated shapes while preserving geometrically relevant shape information, associated shapes are generated
08/23/2007WO2007030528A3 Photomask and method for forming a non-orthogonal feature on the same
08/23/2007WO2005022600A3 Method and systems for processing overlay data
08/23/2007US20070198964 Multi-dimensional analysis for predicting RET model accuracy
08/23/2007US20070196776 Stable High Ph Developer
08/23/2007US20070196775 Removing solution for photosensitive composition
08/23/2007US20070196769 Methods of forming patterns in semiconductor devices using photo resist patterns
08/23/2007US20070196747 Grid-based resist simulation
08/23/2007US20070196746 Methods and apparatuses for applying wafer-alignment marks
08/23/2007US20070196745 comprising a slit-shaped main transmission region and three pairs of slit-shaped auxiliary transmission regions; improving resolution, high light intensity contrast, narrow the exposed width of the resist film with a small uniform width
08/23/2007US20070196744 Method for producing a mask for the lithographic projection of a pattern onto a substrate
08/23/2007US20070196742 Mask-Patterns Including Intentional Breaks
08/23/2007US20070196741 Phase Calibration for Attenuating Phase-Shift Masks
08/23/2007US20070195937 Mount for image receiver
08/23/2007DE10340611B4 Lithografiemaske zur Abbildung von konvexen Strukturen Lithography mask for imaging of convex structures
08/22/2007EP1532484A4 Lithographic printing with polarized light
08/22/2007EP1509404B1 Multilayer body with a layer having at least one laser-sensitive material
08/22/2007CN101023393A Photosensitive material for silver halide color photograph
08/21/2007US7258968 Thermally developable materials with buried conductive backside coatings
08/21/2007US7258967 Photothermographic materials containing print stabilizers
08/21/2007US7258966 Multilayer; radiation transparent substrate, overcoating with photoresists; masking; exposure; development
08/16/2007US20070190465 Positively radiation-sensitive resin composition
08/16/2007US20070190463 Method to align mask patterns
08/16/2007US20070190461 Polycarbosilane substituted with a benzyl or diazo group and/or a polysilazane having a substituent capable of absorbing exposure light; high exposure light (particularly ultraviolet light) absorptivity, which efficiently blocks the exposure light that reaches porous insulating films
08/16/2007US20070190438 Method and apparatus for controlling light intensity and for exposing a semiconductor substrate
08/16/2007US20070190437 Substrate processing apparatus
08/16/2007US20070190436 Resist composition
08/16/2007US20070190434 Pattern forming method and phase shift mask manufacturing method
08/16/2007US20070190432 uses the die area outside of traditionally focused reticle to fabricate components, instead of avoiding this area of reduced precision, uses this area to layout structures with features that are coarser than what can be achieved within high-resolution region of the reticle
08/16/2007US20070190431 Photomask structure
08/16/2007US20070189756 Grey card for controlling exposure and white balance of a digital camera
08/15/2007EP1818719A1 Silver halide photographic material and image-forming method using the same
08/14/2007US7256870 Method and apparatus for controlling iso-dense bias in lithography
08/14/2007US7256667 Waveguide device and method for making same
08/14/2007US7255982 Black-and-white, organic solvent based, containing especially phenylboronic acid or derivatives that provide the materials with reduced initial image Dmin and improved hot-dark Dmin print stability without unacceptable loss in sensitometric properties.
08/14/2007US7255979 Lenticular printing
08/14/2007US7255974 Pattern formation method
08/14/2007US7255892 Chemically bonding a self-assembled molecular film to a surface of a substrate, self-assembled molecular film including defect site and active device molecules, forming a Langmuir-Blodgett (LB) film of a molecule on at least one of a water/solvent interface and an air/water interface, connecting
08/09/2007US20070184393 Image Forming Method, Liquid Developer Developing Apparatus, and Image Forming Apparatus
08/09/2007US20070184392 Coating and developing method, coating and developing system and storage medium
08/09/2007US20070184389 Method of forming a printhead
08/09/2007US20070184369 Lithography Verification Using Guard Bands
08/09/2007US20070184368 Projection optical system and projection-type image display apparatus
08/09/2007US20070184361 Photomask, pattern formation method using the same and mask data creation method
08/09/2007US20070184360 Photomask features with interior nonprinting window using alternating phase shifting
08/09/2007US20070184359 Photomask, pattern formation method using photomask and mask data creation method
08/09/2007US20070184355 Cross-shaped sub-resolution assist feature
08/08/2007EP1814955A1 Resin cured film for flexible printed wiring board and production process thereof
08/08/2007CN101015042A Methods of removing photoresist on substrates
08/07/2007US7254324 Systems and methods for film processing quality control
08/07/2007US7252925 1-Alkoxy- or cycloalkoxy(poly)oxyethylenebenzimidazoles, e.g., 1-(2-methoxyethyl)-1H-benzimidazole, used to form amplified resists with excellent resolution, form precisely configured patterns with minimized roughness of sidewalls and useful in microfabrication using electron beams or deep-UV light.
08/07/2007US7252913 Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer
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