| Patents for G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation (3,671) |
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| 07/04/2002 | WO2002052224A1 Particle-optical inspection device especially for semiconductor wafers |
| 07/04/2002 | US20020084412 Electron microscope equipped with electron biprism |
| 07/04/2002 | DE10147633A1 Bestrahlungssystem und Bestrahlungsziel Bewegungs-Überwachungsverfahren sowie Bestrahlungszielpositions-Erkennungsverfahren Irradiation system and the irradiation target movement monitoring procedures and irradiation target position detection method |
| 06/27/2002 | US20020082781 Crystal structure analysis method |
| 06/27/2002 | US20020081016 Method of detecting measurement error in measurement system |
| 06/27/2002 | US20020079462 Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method |
| 06/27/2002 | US20020079447 Particle-optical inspection device especially for semiconductor wafers |
| 06/25/2002 | US6411907 Accurate tissue injury assessment |
| 06/25/2002 | CA2121311C Method of inspecting abnormality occurring inside pipe and apparatus for practicing the method |
| 06/20/2002 | US20020077545 Irradiation system ans its irradiation target movement monitoring method, and irradiation target position recognizing method |
| 06/20/2002 | US20020075545 Optcal high speed communications for a computed tomography x-ray machine |
| 06/20/2002 | DE10133676A1 Röntgenfluoreszenz-Dickenprüfer X-ray fluorescence thickness tester |
| 06/13/2002 | WO2002046692A1 A method ad system for measuring in patterned structures |
| 06/13/2002 | US20020072133 Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image |
| 06/13/2002 | US20020070738 Semiconductor device inspecting apparatus |
| 06/11/2002 | US6404382 Level transmitter |
| 06/05/2002 | EP1210572A1 Measurement of angle of rotation using microstrip resonators (2.4 ghz, 2 degree) |
| 06/04/2002 | US6399944 Measurement of film thickness by inelastic electron scattering |
| 05/29/2002 | EP1208353A1 X-ray fluorescence sensor for measurement of metal sheet thickness |
| 05/28/2002 | US6396613 Optical high speed communications for a computed tomography x-ray machine |
| 05/22/2002 | EP1206679A1 X-ray fluorescence analysis of multilayered samples |
| 05/08/2002 | EP1203200A1 X-ray reflectometry measurements on patterned wafers |
| 05/08/2002 | DE10141423A1 Verfahren und Gerät zur Prüfung auf Musterfehler Method and apparatus for testing for pattern defects |
| 05/08/2002 | DE10141422A1 Verfahren zur Prüfung auf Maskenfehler und Gerät zur Elektronenstrahlbelichtung Method to check for errors and mask device for electron beam exposure |
| 05/07/2002 | US6384408 Calibration of a scanning electron microscope |
| 05/02/2002 | US20020050160 Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |
| 04/25/2002 | US20020048857 System for manufacturing semiconductor device utilizing photolithography technique, method of manufacturing semiconductor device, and semiconductor device manufactured thereby |
| 04/25/2002 | US20020047098 Substrate defect inspection method and substrate defect inspection system |
| 04/24/2002 | EP0803059B1 Method and device for measuring the content of bone mineral in the skeleton |
| 04/23/2002 | US6377654 Method for measuring the wall thickness of a tubular object |
| 04/18/2002 | US20020044631 Method for determining a coordinate transformation for use in navigating an object |
| 04/18/2002 | US20020044628 X-ray compton scatter density measurement at a point within an object |
| 04/18/2002 | US20020044276 Millimeter wave scanning imaging system |
| 04/18/2002 | DE10027221A1 Verfahren zur Korrektur physikalisch bedingter Fehler bei der Messung mikroskopischer Objekte A method of correcting physically conditioned errors in the measurement of microscopic objects |
| 04/17/2002 | CN1082862C Welding method and device for coated sheet steel in particular tinplate |
| 04/10/2002 | EP1000314B1 Distance determination with an open cavity resonator |
| 04/10/2002 | EP0858664A4 X-ray thickness gauge |
| 04/10/2002 | CN1344367A Improved thin layer nuclear density gauge |
| 04/09/2002 | US6370223 Automatic detection of bone fragments in poultry using multi-energy x-rays |
| 04/09/2002 | US6370221 Method of setting a position of an object of measurement in layer thickness measurement by X-ray fluorescence |
| 04/09/2002 | US6369891 Method of determining accuracy error in line width metrology device |
| 04/03/2002 | EP1192416A1 Measurement of film thickness by inelastic electron scattering |
| 04/03/2002 | EP0873574B1 Method to determine depth profiles in an area of thin coating |
| 04/02/2002 | US6366083 Method for measuring the thickness of oxide layer underlying crud layer containing ferromagnetic material on nuclear fuel rods |
| 04/02/2002 | US6364526 Fluoro-assist feature for a diagnostic imaging device |
| 03/26/2002 | US6363167 Method for measuring size of fine pattern |
| 03/21/2002 | WO2002022019A1 Frameless radiosurgery treatment system and method |
| 03/21/2002 | US20020035435 Method for inspecting defect and system therefor |
| 03/21/2002 | US20020033457 Pattern lock system |
| 03/21/2002 | DE10044169A1 Verfahren zur zerstörungsfreien Wandstärkenprüfung A method of nondestructive testing wall thickness |
| 03/19/2002 | US6359955 Twin asymmetric scan slice thickness setting method and apparatus and radiation tomography method and apparatus |
| 03/14/2002 | WO2002019908A1 Apparatus and method for compensating for respiratory and patient motion during treatment |
| 03/14/2002 | US20020031164 Method and apparatus for photothermal analysis of a layer of material, especially for thickness measurement thereof |
| 03/13/2002 | EP1186855A2 Method for nondestructive wall thickness inspection |
| 02/28/2002 | US20020026628 Pattern defect checking method and device |
| 02/28/2002 | US20020025020 X-ray fluorescence thickness tester |
| 02/28/2002 | US20020024019 Mask defect checking method and device for electron beam exposure |
| 02/28/2002 | DE10039217A1 Vorrichtung und Verfahren zur berührungslosen Erfassung eines Drehwinkels bzw. einer Torsionsverdrehung Apparatus and method for non-contact detection of a rotation angle or of torsional twisting |
| 02/27/2002 | EP0789888B1 X-ray computer tomography (ct) system and method for detecting thin objects |
| 02/21/2002 | WO2002014818A1 Measurement of angle of rotation using microstrip resonators (2.4 ghz, 2 degree) |
| 02/21/2002 | WO2002014785A1 Method and system for detecting hidden edges |
| 02/21/2002 | WO2001092818A8 Method for correcting physical errors in measuring microscopic objects |
| 02/21/2002 | CA2414402A1 Method and system for detecting hidden edges |
| 02/19/2002 | US6349128 Method and device using x-rays to measure thickness and composition of thin films |
| 02/14/2002 | WO2002013232A2 Measurement of critical dimensions using x-rays |
| 02/13/2002 | CN1335486A Transient strain waveform storage |
| 02/12/2002 | US6347131 Non-contact volume measurement |
| 02/07/2002 | US20020015518 Semiconductor wafer pattern shape evaluation method and device |
| 02/07/2002 | DE10034747A1 Establishing thickness of coating on support material comprises using measured absorption of excited fluorescent beam which has passed through coating |
| 02/06/2002 | EP1177418A1 Level transmitter |
| 02/06/2002 | EP1177410A1 Device for determining the thickness or the number of sheets of a sheet-like object |
| 02/06/2002 | EP1176919A1 Apparatus and method for compensating for respiratory and patient motion during treatment |
| 01/31/2002 | US20020012418 X-ray fluorescence thickness measurement device |
| 01/30/2002 | EP1175592A1 Position detector with auxiliary means for detecting the direction of the gravity vector |
| 01/30/2002 | CN1333466A Semiconductor device test method and apparatus |
| 01/29/2002 | US6342265 Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |
| 01/29/2002 | CA2065075C Method and apparatus for the cross-sectional measurement of electric insulated conductors |
| 01/24/2002 | US20020008659 Level transmitter |
| 01/24/2002 | DE10134240A1 Evaluation of semiconductor wafer structure form uses CAD and SEM line segment data |
| 01/10/2002 | US20020003854 Fluoro-assist feature for a diagnostic imaging device |
| 01/10/2002 | US20020003426 Classification of the surface structure of heat exchanger tubes by means of doppler radar spectroscopy |
| 01/02/2002 | EP1166095A2 Improved thin layer nuclear density gauge |
| 01/01/2002 | CA2236109C Arrangement for measuring thickness of a medium |
| 12/27/2001 | US20010055363 Thin layer nuclear density gauge |
| 12/25/2001 | US6333733 Position-sensing unit and multidimensional pointer comprising one or more such units |
| 12/20/2001 | US20010053197 Method and apparatus for measuring a bump on a substrate |
| 12/19/2001 | EP1164357A2 Sensing apparatus and method of producing same |
| 12/19/2001 | EP1164351A2 Method and apparatus for measuring a bump on a substrate |
| 12/18/2001 | US6331709 Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection method |
| 12/13/2001 | WO2001095365A1 Film thickness measurement using electron-beam induced x-ray microanalysis |
| 12/13/2001 | WO2001095364A1 Electron beam generator and method of electron beam irradiation |
| 12/13/2001 | WO2001035051A3 X-ray tomography bga (ball grid array) inspections |
| 12/06/2001 | WO2001092818A1 Method for correcting physical errors in measuring microscopic objects |
| 12/06/2001 | DE10025574A1 Klassifikation der Oberflächenbeschaffenheit von Wärmetauscherrohren mittels der Radar-Doppler-Spektroskopie Classification of surface characteristics of heat exchanger tubes by means of the radar Doppler spectroscopy |
| 12/05/2001 | EP0917642B1 Improved thickness monitoring |
| 12/04/2001 | US6326618 Method of analyzing semiconductor surface with patterned feature using line width metrology |
| 11/28/2001 | EP1158268A2 Classification of the surface-condition of heatexchangertubes by means of radar-doppler-spectroscopy |
| 11/22/2001 | US20010043668 Method and apparatus for measuring thin film, and thin film deposition system |
| 11/08/2001 | WO2001084129A2 Method and device using x-rays to measure thickness and composition of thin films |
| 11/08/2001 | US20010038681 Method and system for low-dose three-dimensional imaging of a scene |