| Patents for G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation (3,671) |
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| 08/17/2004 | CA2247582C Imaging system functioning on submillimeter waves |
| 08/12/2004 | US20040155208 Method of selecting pattern to be measured, pattern inspection method, manufacturing method of semiconductor device, program, and pattern inspection apparatus |
| 08/05/2004 | DE10242962B4 Einrichtung und Verfahren zur örtlichen Schichtdickenmessung an einer Probe Apparatus and method for local layer thickness measurement on a sample |
| 08/03/2004 | US6770868 Critical dimension scanning electron microscope |
| 07/29/2004 | DE19951793B4 Verbesserte Dickenkalibrierung und Schattierungskorrektur für eine automatische Röntgeninspektion Improved thickness calibration and shading correction for an automatic X-ray Inspection |
| 07/27/2004 | US6768324 Semiconductor device tester which measures information related to a structure of a sample in a depth direction |
| 07/22/2004 | WO2004061388A2 Nondestructive characterization of thin films using measured basis spectra and/or based on acquired spectrum |
| 07/22/2004 | WO2004008255A8 Method and apparatus for measuring critical dimensions with a particle beam |
| 07/21/2004 | EP1438732A1 Methods and apparatus for defect localization |
| 07/08/2004 | US20040131246 Micropattern measuring method, micropattern measuring apparatus, and computer-readable recording medium on which a micropattern measuring program is recorded |
| 07/08/2004 | US20040131148 Apparatus for measurement of the thickness of thin layers |
| 07/08/2004 | DE10259696A1 Vorrichtung zum Messen der Dicke dünner Schichten Apparatus for measuring the thickness of thin layers |
| 07/07/2004 | CN1156689C Improved thin layer nuclear density gauge |
| 07/06/2004 | US6759656 Electron microscope equipped with electron biprism |
| 07/01/2004 | US20040125913 Nondestructive characterization of thin films based on acquired spectrum |
| 07/01/2004 | DE19919990B4 Verfahren und Vorrichtung zur Messung der Dicke einer Metallschicht Method and apparatus for measuring the thickness of a metal layer |
| 06/30/2004 | CN1508513A Apparatus for measuring thickness of thin layer |
| 06/29/2004 | US6757354 Multi-view x-ray imaging of logs |
| 06/29/2004 | US6756590 Shape measurement method and apparatus |
| 06/22/2004 | US6754305 Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry |
| 06/17/2004 | US20040114122 Lithographic apparatus and method to determine beam characteristics |
| 06/16/2004 | EP1176919B1 Apparatus and method for compensating for respiratory and patient motion during treatment |
| 06/16/2004 | CN1153951C Method and apparatus for determining the position of elongated object relative the surface of obstructing body by means of electromagnetic radiation |
| 06/10/2004 | WO2004048950A1 Optical inspection system and radiation source for use therein |
| 06/10/2004 | WO2004008255A3 Method and apparatus for measuring critical dimensions with a particle beam |
| 06/10/2004 | US20040109531 Beam centering and angle calibration for X-ray reflectometry |
| 06/03/2004 | US20040105578 Pattern inspection apparatus |
| 06/03/2004 | DE29825046U1 System and method for measuring layer thickness on substrates utilize the motion of the substrates relative to a measuring head during their transport along a given track |
| 06/02/2004 | CN1500911A Lithographic apparatus and method to determine beam size and divergence |
| 06/01/2004 | US6744848 Method and system for low-dose three-dimensional imaging of a scene |
| 05/26/2004 | CN1500200A Method to measure features with asymmetrical profile |
| 05/20/2004 | US20040098220 Method, system and computer product for performing geometric dimension and tolerance stack-up analysis |
| 05/20/2004 | US20040094714 Method of determining lattice constant, method of evaluating material by using the same and electronic microscope suitable for using the same |
| 05/19/2004 | EP1330628B1 Method for correcting physical errors in measuring microscopic objects |
| 05/19/2004 | CN1149956C Dianostic tomographic laser imaging apparatus |
| 05/18/2004 | US6738717 Crystal structure analysis method |
| 05/06/2004 | WO2004037085A1 Apparatus for determining size and shape of a foot |
| 05/06/2004 | EP1416513A2 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 05/06/2004 | EP1149269B1 Latex coat thickness measuring and control apparatus |
| 05/04/2004 | US6731720 Image pickup device |
| 05/04/2004 | US6730920 Abbe arm calibration system for use in lithographic apparatus |
| 04/22/2004 | US20040075051 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 04/20/2004 | US6724005 Substrate defect inspection method and substrate defect inspection system |
| 04/15/2004 | WO2004031687A1 Device and method for locally measuring the layer thickness of a sample and/or for locally modifying the thickness thereof with an electron beam |
| 04/15/2004 | WO2003069269A3 Distance measuring device and method for determining a distance |
| 04/14/2004 | CN1489689A Automated control of metal thickness during film deposition |
| 04/08/2004 | US20040065825 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus |
| 04/07/2004 | CN1487285A X-ray diffraction stress determinating method |
| 04/06/2004 | US6717418 Method and apparatus for measuring turbine blade tip clearance |
| 04/06/2004 | US6717145 Mapping electron microscopes exhibiting improved imaging of specimen having chargeable bodies |
| 04/06/2004 | US6715345 Coaxial probe with cantilever and scanning micro-wave microscope including the same |
| 04/01/2004 | WO2003085179A3 Spinning preparation machine with microwave sensors |
| 04/01/2004 | DE10242962A1 Einrichtung und Verfahren zur örtlichen Schichtdickenmessung an einer Probe und/oder zur örtlichen Veränderung ihrer Dicke mit einem Elektronenstrahl Apparatus and method for local layer thickness measurement on a sample and / or the local variation of the thickness with an electron beam |
| 03/25/2004 | US20040057551 Multi-view x-ray imaging of logs |
| 03/25/2004 | US20040057364 Method and apparatus for measuring a minute pitch |
| 03/18/2004 | US20040051040 Method for measuring dimensions of sample and scanning electron microscope |
| 03/17/2004 | EP1398774A2 Method and apparatus for measuring a minute pitch |
| 03/17/2004 | EP1071535B1 A method and apparatus for determining the position of an elongated object relative the surface of an obstructing body by means of electromagnetic radiation |
| 03/11/2004 | US20040047447 Method and apparatus for thin film thickness mapping |
| 03/10/2004 | CN2606333Y Harmonic angulometer |
| 03/04/2004 | WO2004018959A2 Method and apparatus for thin film thickness mapping |
| 03/03/2004 | EP1394533A2 Stress measurement method using x-ray diffraction analysis |
| 03/02/2004 | US6700122 Wafer inspection system and wafer inspection process using charged particle beam |
| 02/26/2004 | WO2003071934A3 Methods and devices for quantitative analysis of x-ray images |
| 02/19/2004 | DE10212310A1 Verfahren zur Bestimmung einer Reifenprofiltiefe A method for determining a tire tread depth |
| 02/18/2004 | EP1389441A1 Diagnostic tomographic laser imaging apparatus |
| 02/17/2004 | US6693278 Particle-optical inspection device especially for semiconductor wafers |
| 02/12/2004 | US20040030430 Waferless metrology recipe generator and generating method |
| 02/12/2004 | US20040028186 X-ray reflectometer |
| 02/11/2004 | CN1474162A Optical imaging method and device for invisible image |
| 02/05/2004 | WO2003083160A3 Evaluation of chamber components having textured coatings chamber components |
| 02/05/2004 | US20040022429 Scanning microscope and inspection method employing the scanning microscope |
| 01/28/2004 | CN1470849A Pretreatment method for measuring thickness of organic membrane and polymeric membrane |
| 01/27/2004 | US6683308 Method and apparatus for measuring thickness of thin film |
| 01/27/2004 | US6683306 Array foreshortening measurement using a critical dimension scanning electron microscope |
| 01/22/2004 | WO2004008255A2 Method and apparatus for measuring critical dimensions with a particle beam |
| 01/22/2004 | US20040011959 Scanning electron microscope |
| 01/22/2004 | US20040011957 Method and device for measuring quantity of wear |
| 01/22/2004 | DE10331419A1 Verfahren und Vorrichtung zur Bestimmung der Ist-Position einer Struktur eines Untersuchungsobjektes Method and device for determining the actual position of a structure of an examination object |
| 01/21/2004 | EP1381826A1 System and method for the measurement of the layer thicknesses of a multi-layer pipe |
| 01/21/2004 | CN1469102A X-ray detection method for thickness of cable insulation layer |
| 01/14/2004 | EP1380263A1 Process and device for measuring the actual position of the structure of an object to be examined |
| 01/02/2004 | EP1373828A1 Method to measure features with asymmetrical profile |
| 01/01/2004 | US20040001570 Distance measurement apparatus of gamma ray source using multilayered ray detector |
| 01/01/2004 | US20040001568 System and method for detecting alteration of objects |
| 01/01/2004 | US20040000638 Undercut measurement using sem |
| 12/30/2003 | US6670612 Undercut measurement using SEM |
| 12/16/2003 | US6663791 Detection method of coating film thickness and ion implantation equipment using this method |
| 12/11/2003 | WO2002013232A3 Measurement of critical dimensions using x-rays |
| 12/10/2003 | EP0837649B1 Diagnostic tomographic laser imaging apparatus |
| 12/10/2003 | CN1460833A Harmonic goniometer instrument |
| 12/09/2003 | US6661384 Mirror surface accuracy measuring device and mirror surface control system of reflector antenna |
| 12/09/2003 | US6661015 Pattern lock system |
| 12/03/2003 | CN1129775C 跨式检查系统 Straddle inspection system |
| 11/27/2003 | WO2003062805A3 X-ray diffraction method |
| 11/27/2003 | US20030219658 Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device |
| 11/25/2003 | US6653634 Method of measuring length with scanning type electron microscope |
| 11/20/2003 | WO2003095954A1 Method for determining a position parameter for a boundary layer of a medium contained in a container |
| 11/18/2003 | US6650424 Method and system for measuring in patterned structures |
| 11/18/2003 | US6650422 Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewith |