| Patents for G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation (3,671) |
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| 04/11/2006 | US7026976 Radar apparatus having function of estimating target's width |
| 04/11/2006 | US7026615 Semiconductor inspection system |
| 04/11/2006 | US7026009 Evaluating textured coating on structure by: directing a beam of electrons onto surface grains of textured coating causing electrons to be backscattered, detecting backscattered electrons and generating a signal image, evaluating signal |
| 04/05/2006 | EP1397835B1 Method of controlling the crystal orientation of a composite structure |
| 04/05/2006 | CN1249401C Method and apparatus for wall film monitoring |
| 04/04/2006 | US7022986 Apparatus and method for wafer pattern inspection |
| 03/30/2006 | WO2006033868A2 Method and apparatus for converting a digital radiograph to an absolute thickness map |
| 03/30/2006 | WO2006032730A1 Method for microwave measurement, measuring device and oscillator |
| 03/29/2006 | CN1247153C Method and apparatus for setting thickness of paired asymmetric scanned laminae |
| 03/28/2006 | US7020241 Method and device for detecting a given material in an object using electromagnetic rays |
| 03/28/2006 | US7020239 Method and device for the determination of the thickness of the insulation of a flat ribbon cable in the region of the conductor paths |
| 03/28/2006 | US7019293 Position detecting system and method |
| 03/23/2006 | DE102004057743A1 Vorrichtung und Verfahren zum Bestimmen des Flächengewichtes einer geförderten Materialprobe Apparatus and method for determining the basis weight of conveyed material sample |
| 03/16/2006 | US20060058979 Method and system for calibrating integrated metrology systems and stand-alone metrology systems that acquire wafer state data |
| 03/16/2006 | US20060053855 Manufacturing method and manufacturing apparatus of pipe, thickness deviation information derivation apparatus, and computer program |
| 03/15/2006 | EP1635374A1 Electron beam device, electron beam inspection method, electron beam inspection device, pattern inspection method and exposure condition determination method |
| 03/15/2006 | EP1634036A1 Measuring apparatus |
| 03/15/2006 | CN1746617A Thin-membrane thickness and density measurement without sampler |
| 03/14/2006 | US7013235 Method, apparatus and program for determining growth of trees |
| 03/09/2006 | US20060052977 Combined feature dimensional parameter analysis |
| 03/07/2006 | US7010447 Method for inspecting defect and system therefor |
| 02/28/2006 | US7006597 Examination method and apparatus |
| 02/28/2006 | US7005219 Defect repair method employing non-defective pattern overlay and photoexposure |
| 02/23/2006 | US20060041399 Assembly moves using float-remaining figures |
| 02/23/2006 | US20060039530 Exempt source for an x-ray fluorescence device |
| 02/23/2006 | DE102004039763A1 Hard mask layer`s thickness determining method for manufacturing high integrated circuits, involves recording intensity of photoelectrons produced by x-ray energy, and finding layer thickness from intensity and/or energy of photoelectrons |
| 02/21/2006 | US7003074 Stress measurement method using X-ray diffraction |
| 02/21/2006 | US7003072 Method for localizing a target in an object |
| 02/21/2006 | US7002361 Film thickness measuring apparatus and a method for measuring a thickness of a film |
| 02/16/2006 | US20060036409 Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication |
| 02/15/2006 | CN1734501A Method and apparatus for removing uneven brightness in an image |
| 02/08/2006 | EP1090269A4 Determining the shape and orientation of a borehole |
| 02/07/2006 | CA2254538C Collision deformation sensor for use in the crush zone of a vehicle |
| 02/02/2006 | DE102004032473A1 Auswerteverfahren und Auswertevorrichtung für ein System zur Sitzbelegungserkennung Evaluation and evaluation of a system for seat occupancy detection |
| 02/01/2006 | EP1093574B1 Automatic defect classification with invariant core classes |
| 01/31/2006 | US6993431 Assembly moves using float-remaining figures |
| 01/31/2006 | US6992287 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 01/31/2006 | CA2393885C Device for measurement of metal sheet thickness and clad layer thickness and use of the device |
| 01/24/2006 | US6989675 Method and apparatus for precision measurement of film thickness |
| 01/24/2006 | CA2381398C X-ray fluorescence analysis of multilayered samples |
| 01/19/2006 | WO2006005690A1 Determining the size of a radial gap |
| 01/19/2006 | US20060013361 Method for measurement of the three-dimensional density distribution in bones |
| 01/18/2006 | EP1617210A1 Method and apparatus for X-Ray reflectance measurement |
| 01/18/2006 | EP1617174A1 Radial clearance determination |
| 01/17/2006 | US6988050 Setting device for a vehicle having a mechanically adjustable part, and method for operating the setting device |
| 01/17/2006 | US6988008 Smart camera |
| 01/17/2006 | US6987873 Automatic defect classification with invariant core classes |
| 01/11/2006 | CN1236482C Device for checking semiconductor device |
| 01/10/2006 | US6983516 Spinning preparation machine |
| 01/10/2006 | CA2132454C Nuclear gauge |
| 01/05/2006 | US20060002510 Inspection method and system for and method of producing component mounting substrate |
| 01/05/2006 | US20060000972 Method and system for detecting a property of a pavement by measuring gamma-radiaton |
| 01/04/2006 | EP1611969A1 Method and apparatus for producing pipe, wall thickness variation-obtaining device, and computer program |
| 01/04/2006 | CN1717582A Optical inspection system and radiation source for use therein |
| 12/29/2005 | US20050288890 Assembly moves using float-remaining figures |
| 12/29/2005 | US20050288889 Method and system for assessing consumed tolerances for individual features of a pattern and accommodating errors due to such individual features |
| 12/28/2005 | EP1609155A2 Exempt source for an x-ray fluorescence device |
| 12/22/2005 | DE102004026357A1 Coordinate measuring and object scanning system uses X-ray source and X-ray sensors for primary scan and tactile and/or optical secondary mechanism movable in X, Y and Z directions for secondary scan |
| 12/20/2005 | US6978220 Combined feature dimensional parameter analysis |
| 12/20/2005 | US6977986 Method and apparatus for aligning a crystalline substrate |
| 12/15/2005 | US20050278138 Micropattern measuring method, micropattern measuring apparatus, and computer-readable recording medium on which a micropattern measuring program is recorded |
| 12/13/2005 | US6975125 Semiconductor device tester |
| 12/07/2005 | CN1230662C Film thickness measuring equipment and method |
| 12/06/2005 | US6972405 Nanoscale standard sample and its manufacturing method |
| 12/01/2005 | WO2005112752A1 Penetrating radiation measurements |
| 11/29/2005 | US6970532 Method and apparatus for measuring thin film, and thin film deposition system |
| 11/29/2005 | US6969998 Measurement of angle rotation using microstrip resonators (2.4ghz,2 degree) |
| 11/29/2005 | US6969853 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus |
| 11/24/2005 | WO2005111539A1 Method for the nondestructive determination of the inner dimensions and/or the outer dimensions of a shoe and/or of a last |
| 11/24/2005 | WO2005008768A3 A system and method for determining a cross sectional feature of a structural element using a reference structural element |
| 11/23/2005 | CN1228809C Charged beam apparatus, pattern testing method and pattern display method |
| 11/17/2005 | US20050256669 Measurement system and method and computer program for processing measurement data |
| 11/17/2005 | US20050254614 Method and apparatus for measuring wall thickness of a vessel |
| 11/17/2005 | DE10019789B4 Vorrichtung und Verfahren zum Messen der Dicke von Folienmaterial während des Vorschubs Apparatus and method for measuring the thickness of sheet material during the advancement |
| 11/10/2005 | US20050249331 Solid state X-ray detector with improved spatial resolution |
| 11/10/2005 | US20050247876 Sample dimension measuring method and scanning electron microscope |
| 11/10/2005 | US20050247860 Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system |
| 11/09/2005 | CN1226781C Miniature pattern inspection apparatus and method, CD-SEM managing apparatus and method |
| 11/09/2005 | CN1226591C Method to measure features with asymmetrical profile |
| 11/08/2005 | US6963819 Micropattern measuring method, micropattern measuring apparatus, and computer-readable recording medium on which a micropattern measuring program is recorded |
| 11/08/2005 | US6963067 Scanning electron microscope and sample observing method using it |
| 11/03/2005 | DE102004021922B3 Dielectric layer thickness determination method in which a structured dielectric layer is irradiated with an inclined electron beam and a resultant compensation current measured, from which the thickness is calculated |
| 10/27/2005 | US20050237069 Semiconductor device test method and semiconductor device tester |
| 10/27/2005 | DE19830794B4 Schichtdickenmeßsystem und -verfahren Schichtdickenmeßsystem and procedures |
| 10/20/2005 | US20050230618 Defect inspection apparatus, program, and manufacturing method of semiconductor device |
| 10/19/2005 | CN1223827C Multiple point thickness meter |
| 10/11/2005 | US6953933 Method for measuring size of multilayer structured container |
| 10/11/2005 | CA2300166C Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |
| 10/06/2005 | US20050220267 Method and apparatus for film thickness measurement |
| 10/06/2005 | DE102004034326A1 Method for determining cavities position and size in semiconductor modules especially semiconductor memories, involves firing beam of positrons at surface of module |
| 09/29/2005 | US20050211897 Pattern measuring method |
| 09/28/2005 | EP1579170A2 Nondestructive characterization of thin films using measured basis spectra and/or based on acquired spectrum |
| 09/22/2005 | WO2005088245A1 Method and apparatus for measuring wall thickness of a vessel |
| 09/22/2005 | US20050207673 Method for measuring line and space pattern using scanning electron microscope |
| 09/22/2005 | US20050205780 Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same |
| 09/21/2005 | CN1672236A Evaluation of chamber components having textured coatings |
| 09/21/2005 | CN1220050C Automated control of metal thickness during film deposition |
| 09/20/2005 | US6947520 Beam centering and angle calibration for X-ray reflectometry |
| 09/20/2005 | US6946857 Semiconductor device tester |
| 09/15/2005 | US20050200841 Detection of defects in patterned substrates |