| Patents for G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation (3,671) |
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| 09/14/2005 | EP1236017B1 X-ray tomography bga ( ball grid array ) inspections |
| 09/14/2005 | CN2725855Y Material layer thickness measurer for roll mill |
| 09/14/2005 | CN1668915A Method and apparatus for measuring critical size |
| 09/08/2005 | US20050197801 Combined feature dimensional parameter analysis |
| 09/07/2005 | EP1247073A4 Tissue sensor |
| 09/01/2005 | US20050191027 Distance measuring device and method for determining a distance |
| 09/01/2005 | US20050190880 Stress measurement method using X-ray diffraction |
| 09/01/2005 | US20050189489 Method for matching two measurement methods for measuring structure widths on a substrate |
| 08/31/2005 | EP1567853A1 Optical inspection system and radiation source for use therein |
| 08/31/2005 | EP0991916B1 Straddle inspection system |
| 08/25/2005 | WO2005078775A1 Measurement method, transfer characteristic measurement method, exposure device adjustment method, and device manufacturing method |
| 08/25/2005 | US20050185195 Positional measurement system and lens for positional measurement |
| 08/25/2005 | US20050184234 Standard reference for metrology and calibration method of electron-beam metrology system using the same |
| 08/25/2005 | DE102004006258A1 Method for approximation of two measuring processes of tapering structure widths on substrate for obtaining mutually comparable values |
| 08/25/2005 | DE102004004597A1 Method for measuring a structure formed on semiconductor wafer e.g. for manufacture of integrated circuits, involves use of raster electron microscope with electron beam source and detector |
| 08/24/2005 | CN1657869A Positional measurement system and lens for positional measurement |
| 08/11/2005 | US20050173633 Method of measuring dimensions of pattern |
| 08/11/2005 | DE102004043760A1 Measurement of geometric characteristics of a hollow space, e.g. an air-filled high frequency resonator, by coupling a waveguide for high frequency electromagnetic waves to the conducting surface of the hollow space |
| 08/04/2005 | DE102004001682A1 X ray tomography unit collimator plate deviation determination procedure compares detector signals for two focal points for which signals should be identical |
| 08/03/2005 | EP1559993A2 Method and apparatus for film thickness measurement |
| 07/28/2005 | US20050161601 Electron beam system and electron beam measuring and observing method |
| 07/27/2005 | EP0986745A4 Single beam photoneutron probe and x-ray imaging system for contraband detection and identification |
| 07/27/2005 | CN1646743A Spinning preparation machine with microwave sensors |
| 07/21/2005 | WO2005066998A1 Interference instrument |
| 07/21/2005 | US20050156606 Thickness measuring systems and methods using a cavity resonator |
| 07/14/2005 | US20050151078 Method for determining depression/protrusion of sample and charged particle beam apparatus therefor |
| 07/05/2005 | US6914444 Semiconductor device test method and semiconductor device tester |
| 07/05/2005 | US6914441 Detection of defects in patterned substrates |
| 07/05/2005 | US6913861 Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device |
| 06/30/2005 | US20050141761 Method and apparatus for measuring dimensions of a pattern on a semiconductor device |
| 06/29/2005 | CN1633594A Methods and devices for quantitative analysis of X-ray images |
| 06/29/2005 | CN1208599C Optical imaging method and device for invisible image |
| 06/29/2005 | CN1208598C Pretreatment method for measuring thickness of organic membrane and polymeric membrane |
| 06/23/2005 | US20050133718 Method and apparatus for observing a specimen |
| 06/23/2005 | US20050133717 Method for manufacturing a split probe |
| 06/22/2005 | EP1360476B1 Automated control of metal thickness during film deposition |
| 06/21/2005 | US6909772 Method and apparatus for thin film thickness mapping |
| 06/16/2005 | US20050128489 Parametric optimization of optical metrology model |
| 06/15/2005 | EP1542035A1 Doppler radar for detecting tire anomalies |
| 06/15/2005 | EP1541960A2 Parametric optimization of optical metrology model |
| 06/15/2005 | EP1540276A2 Method and apparatus for thin film thickness mapping |
| 06/15/2005 | CN1627098A Doppler radar for detecting tire anomalies |
| 06/14/2005 | CA2155682C A method for simultaneously measuring the positions of more than one surface in metallurgic processes |
| 06/09/2005 | WO2005052509A1 System and method for counting the number of layers of a multilayer object by means of electromagnetic waves |
| 06/09/2005 | WO2004089056A3 Exempt source for an x-ray fluorescence device |
| 06/09/2005 | US20050120787 Doppler radar for detecting tire abnormalities |
| 06/09/2005 | CA2546930A1 Micro-optic security and image presentation system |
| 06/02/2005 | US20050116726 Film thickness measuring apparatus and a method for measuring a thickness of a film |
| 06/02/2005 | US20050116182 Method of measuring pattern dimension and method of controlling semiconductor device process |
| 05/31/2005 | US6900645 Semiconductor device test method and semiconductor device tester |
| 05/26/2005 | WO2004114016A3 Imprint lithography with improved monitoring and control and apparatus therefor |
| 05/26/2005 | US20050109938 Circuit pattern inspection method and its apparatus |
| 05/25/2005 | CN1203379C Method and apparatus for aligning crystalline substrate |
| 05/18/2005 | CN1202416C X-ray guiding device |
| 05/17/2005 | US6895071 XRR detector readout processing |
| 05/17/2005 | US6894277 Scanning electron microscope |
| 05/17/2005 | US6894261 Position measuring system for use in lithographic apparatus |
| 05/12/2005 | US20050100205 Method for measuring three dimensional shape of a fine pattern |
| 05/12/2005 | US20050098724 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 05/11/2005 | CN1614416A Method for measuring speed rate of thin-membrane deposition |
| 05/11/2005 | CN1201134C Distortion detector |
| 05/10/2005 | US6891158 Nondestructive characterization of thin films based on acquired spectrum |
| 05/05/2005 | US20050094859 Automatic region of interest locator for AP spinal images and for hip images in bone densitometry |
| 05/03/2005 | US6888137 Instrument and method for observing selected stored images acquired from a scanning charged-particle beam |
| 04/28/2005 | US20050090999 Method of determining the irregularities of a hole |
| 04/28/2005 | US20050087699 Method of evaluating optical element |
| 04/27/2005 | EP1210572B1 Measurement of angle of rotation using microstrip resonators (2.4 ghz, 2 degree) |
| 04/26/2005 | US6885727 Apparatus and method for measuring thickness and composition of multi-layered sample |
| 04/26/2005 | US6885198 Method and device for testing a mat made of biomass particles |
| 04/21/2005 | WO2004061388A3 Nondestructive characterization of thin films using measured basis spectra and/or based on acquired spectrum |
| 04/20/2005 | EP1523671A2 Method and apparatus for measuring critical dimensions with a particle beam |
| 04/20/2005 | CN1607373A Measurement of hot container wall thickness |
| 04/14/2005 | US20050078788 Method for localizing a target in an object |
| 04/14/2005 | US20050078287 Lithographic apparatus and device manufacturing method |
| 04/14/2005 | US20050076725 Method and apparatus of vibration isolation, in particular for electron beam metrology tools |
| 04/07/2005 | US20050074088 X-ray inspection apparatus and X-ray inspection method |
| 04/07/2005 | DE10212310B4 Verfahren und Vorrichtung zur Bestimmung einer Reifenprofiltiefe Method and apparatus for determining a tire tread depth |
| 04/05/2005 | US6875992 Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method |
| 04/05/2005 | US6874369 Stress measurement method using X-ray diffraction |
| 03/30/2005 | EP1519400A2 Method and apparatus of vibration isolation, in particular for electron beam metrology tools |
| 03/29/2005 | US6872943 Method for determining depression/protrusion of sample and charged particle beam apparatus therefor |
| 03/24/2005 | US20050061973 Shape measuring device and shape measuring method |
| 03/24/2005 | DE19919007B4 Einrichtung zum Messen von Lagerdaten Means for measuring data warehouse |
| 03/23/2005 | EP1192416B1 Measurement of film thickness by inelastic electron scattering |
| 03/23/2005 | EP1097352B1 Thickness measurement of fluorescing coatings |
| 03/22/2005 | US6870948 Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image |
| 03/22/2005 | US6870603 Lithographic apparatus and method to determine beam characteristics |
| 03/17/2005 | DE19846885B4 Verfahren zum radiographischen Vermessen eines körperlichen Gegenstands A method for radiographic measurement of tangible property |
| 03/16/2005 | CN1595124A X-ray inspection apparatus and x-ray inspection method |
| 03/16/2005 | CN1193209C Method for setting measured object position in measuring thin layer thickness by X-ray fluorescent light |
| 03/10/2005 | US20050051732 Radiation detecting device for use with a furnace |
| 03/10/2005 | US20050051722 Inspection system, inspection method, and process management method |
| 03/10/2005 | US20050051721 Sample dimension-measuring method and charged particle beam apparatus |
| 03/09/2005 | EP1513023A1 Method of evaluating optical element |
| 03/09/2005 | CN1591196A Lithographic apparatus and device manufacturing method |
| 02/24/2005 | US20050043917 Image reconstruction method |
| 02/22/2005 | US6859060 Inspection method of semiconductor device and inspection system |
| 02/10/2005 | CA2534439A1 Geosteering detectors for boring-type continuous miners |
| 02/09/2005 | EP1504244A1 Method for determining a position parameter for a boundary layer of a medium contained in a container |
| 02/08/2005 | US6853741 Automatic region of interest locator for AP spinal images and for hip images in bone densitometry |