Patents
Sitemap › G01 - Measuring; Testing › G01B - Measuring length, thickness or similar linear dimensions; Measuring angles; Measuring areas; Measuring irregularities of surfaces or contours › G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation
Patents for G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation (3,671)
11/2003
11/18/2003CA2355560C X-ray compton scatter density measurement at a point within an object
11/12/2003EP1360476A2 Automated control of metal thickness during film deposition
11/12/2003CN1455248A Method of nondestructive and rapid detecting grain size of metal polycrystal
11/06/2003WO2003091726A1 Method and system for detecting a property of a pavement by measuring gamma-radiation
11/04/2003US6642528 Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method
11/04/2003US6642519 Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device
10/2003
10/30/2003US20030204344 System and method for outputting measurement data on an object to a graphic file thereof
10/29/2003EP1357382A1 Method and system for determining a property of a pavement by measuring natural gamma radiation
10/28/2003US6639968 X-ray reflectometer
10/23/2003US20030197873 Shape measurement method and apparatus
10/21/2003US6636824 Method of and apparatus for inspecting semiconductor device
10/16/2003WO2003085179A2 Spinning preparation machine with microwave sensors
10/15/2003EP1352211A1 A method and system for measuring in patterned structures
10/09/2003WO2003083160A2 Evaluation of chamber components having textured coatings chamber components
10/07/2003US6631177 Device for measurement of metal sheet thickness and clad layer thickness and method of use thereof
10/07/2003US6630364 System for automatic control of the wall bombardment to control wall deposition
10/07/2003CA2223606C Diagnostic tomographic laser imaging apparatus
10/02/2003US20030185965 Evaluating textured coating on structure by: directing a beam of electrons onto surface grains of textured coating causing electrons to be backscattered, detecting backscattered electrons and generating a signal image, evaluating signal
10/01/2003EP1348933A1 Tyre tread depth with microwave reflection by polarisation or frequency
09/2003
09/24/2003EP0697108B1 A method for simultaneously measuring the positions of more than one surface in metallurgic processes
09/18/2003US20030173516 Semiconductor inspection system
09/17/2003EP1344018A1 Particle-optical inspection device especially for semiconductor wafers
09/11/2003US20030169846 Multi-technique thin film analysis tool
09/09/2003US6618689 Method for the non-destructive inspection of wall strength
09/09/2003US6618464 Thickness-measuring device
09/09/2003US6617574 Apparatus for in-situ thickness and stoichiometry measurement of thin films
09/04/2003WO2003071934A2 Methods and devices for quantitative analysis of x-ray images
09/04/2003CA2473621A1 Methods and devices for quantitative analysis of x-ray images
09/02/2003US6614924 Adaptive mask technique for defect inspection
09/02/2003US6614244 Semiconductor device inspecting apparatus
08/2003
08/27/2003EP1234158B1 Distortion detector
08/26/2003US6611576 Automated control of metal thickness during film deposition
08/21/2003WO2003069269A2 Distance measuring device and method for determining a distance
08/19/2003CA2203539C Triaxial normal and shear force sensor
08/12/2003US6606053 Level transmitter
07/2003
07/31/2003WO2003062805A2 X-ray diffraction method
07/30/2003EP1330628A1 Method for correcting physical errors in measuring microscopic objects
07/30/2003CN1433533A Method and apparatus for aligning crystalline substrate
07/30/2003CN1432791A Film thickness measuring equipment and method
07/29/2003US6600806 System for radiographic determination of pipe wall thickness
07/24/2003US20030137288 Method and device for testing a mat made of biomass particles
07/23/2003EP1328195A1 Frameless radiosurgery treatment system and method
07/17/2003US20030132765 Film thickness measuring apparatus and a method for measuring a thickness of a film
07/17/2003US20030132381 Method and apparatus for measuring thickness of thin film
07/10/2003US20030127593 Apparatus and method for wafer pattern inspection
07/03/2003WO2003054577A1 Method for localizing a target in an object
07/03/2003US20030125622 Apparatus and method for compensating for respiratory and patient motion during treatment
07/02/2003EP1206679B1 X-ray fluorescence analysis of multilayered samples
07/02/2003CN1113235C X-ray computerized tomography (CT) system for detecting thin objects
07/01/2003CA2122067C Method and device for calibating a set of transverse profile thickness values in flat products
06/2003
06/25/2003EP1208353B1 X-ray fluorescence sensor for measurement of metal sheet thickness
06/24/2003US6584420 Defect examination apparatus
06/19/2003WO2003050566A2 Radiation detecting device for use with a furnace
06/19/2003US20030112201 Mirror surface accuracy measuring device and mirror surface control system of reflector antenna
06/17/2003US6581023 Accurate contact critical dimension measurement using variable threshold method
06/17/2003US6580853 Optical high speed communications for a computed tomography x-ray machine
06/11/2003EP1318377A1 Method and device for testing a mat made of biomass particles
06/11/2003EP1175592B1 Position detector with auxiliary means for detecting the direction of the gravity vector
06/03/2003US6574303 Radiation inspection apparatus and radiation inspection method
05/2003
05/30/2003WO2003044453A1 Measurement of the thickness of metals using a spectrum of electromagnetic frequencies and magnetic saturation
05/28/2003EP1314957A2 Method and apparatus for measuring turbine blade tip clearance
05/28/2003CN2553377Y High precision X-ray adhesive material director
05/22/2003US20030094956 Method and apparatus for measuring turbine blade tip clearance
05/20/2003US6567497 Method and apparatus for inspecting a structure using X-rays
05/20/2003US6566654 Detecting secondary electrons emitted as a result of irradiation of the circuit pattern with the electron beam, forming images of the irradiated first and second regions, extracting a difference between the formed images
05/15/2003US20030090651 Three-dimensional micropattern profile measuring system and method
05/14/2003EP1309833A1 Method and system for detecting hidden edges
05/14/2003CN2550721Y Portable automatic thickness meter
05/13/2003US6563906 X-ray compton scattering density measurement at a point within an object
05/13/2003US6563116 Method of measuring sizes of trapezoidal structure
05/07/2003CN1107855C 扫描装置 Scanning device
05/06/2003US6559662 Semiconductor device tester and semiconductor device test method
05/06/2003US6559458 Measuring instrument and method for measuring features on a substrate
05/02/2003EP1305815A1 Film thickness measurement using electron-beam induced x-ray microanalysis
05/01/2003WO2003036309A1 Method and apparatus for electron density measurement
05/01/2003WO2003036224A1 Method and apparatus for wall film monitoring
04/2003
04/29/2003US6556703 Scanning electron microscope system and method of manufacturing an integrated circuit
04/29/2003US6556652 Measurement of critical dimensions using X-rays
04/24/2003WO2003033760A1 Method of forming multilayer thin film and device therefor
04/24/2003WO2002065109A3 Automated control of metal thickness during film deposition
04/24/2003US20030075691 Charged particle beam apparatus, pattern measuring method and pattern writing method
04/23/2003EP1005639B1 Apparatus and method for in-situ thickness and stoichiometry measurement of thin films
04/17/2003US20030072413 X-ray reflectometer
04/17/2003US20030071646 Inspection method of semiconductor device and inspection system
04/17/2003US20030071214 Method and scanning electron microscope for measuring width of material on sample
04/17/2003US20030071213 Fine pattern inspection apparatus, managing apparatus of CD-SEM device, fine pattern inspection method, managing method of CD-SEM device and program
04/16/2003EP1302972A2 Method and scanning electron microscope for measuring width of material on sample
04/16/2003CN1411047A Miniature pattern inspection apparatus and method CD-SEM managing apparatus and method
04/16/2003CN1411025A Charged beam apparatus, pattern testing method and pattern display method
04/09/2003CN1409816A Inspection method utilizing vertical slice image
04/03/2003US20030063792 Apparatus for inspecting a specimen
04/03/2003US20030063704 Methods and devices for quantitative analysis of x-ray images
04/03/2003US20030062487 Pattern inspection method and system therefor
04/02/2003EP1176919A4 Apparatus and method for compensating for respiratory and patient motion during treatment
04/02/2003CN1407335A X-ray coating thickness device
04/02/2003CN1407334A Manufacture for test apparatus and parts
03/2003
03/20/2003US20030052270 Electron beam length-measurement apparatus and measurement method
03/18/2003US6535575 Pulsed X-ray reflectometer
03/18/2003US6533455 Method for determining a coordinate transformation for use in navigating an object
03/13/2003WO2003021186A1 Method for measuring dimensions of sample and scanning electron microscope
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