| Patents for G01B 15 - Measuring arrangements characterised by the use of wave or particle radiation (3,671) |
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| 03/13/2003 | US20030047682 Detecting apparatus and device manufacturing method |
| 03/12/2003 | EP1291900A2 Apparatus for detecting a fine geometry on a surface of a sample and method of manufacturing a semiconductor device |
| 03/11/2003 | US6531881 Measurement arrangement |
| 03/05/2003 | CN1401070A Electron beam length measuring instrument and length measuring method |
| 02/26/2003 | CN1399715A Distortion detector |
| 02/26/2003 | CN1102240C Method and device for measuring content of bone mineral in skeleton |
| 02/20/2003 | US20030034453 Coaxial probe and scanning micro-wave microscope including the same |
| 02/18/2003 | US6522719 Method and apparatus for measuring a bump on a substrate |
| 02/18/2003 | US6522718 X-ray fluorescence thickness tester |
| 02/18/2003 | US6522153 Classification of the surface structure of heat exchanger tubes by means of doppler radar spectroscopy |
| 02/13/2003 | US20030031294 X-ray coating thickness gauge |
| 02/13/2003 | US20030029998 Electron beam length measuring instrument and length measuring method |
| 02/11/2003 | US6518884 Electric resonance element, detection apparatus and moving vehicle control system |
| 02/06/2003 | US20030025630 Level Transmitter |
| 02/04/2003 | US6515296 Pattern dimension measuring system and pattern dimension measuring method |
| 02/04/2003 | US6514122 System for manufacturing semiconductor device utilizing photolithography technique |
| 01/30/2003 | US20030021463 Method and apparatus for circuit pattern inspection |
| 01/30/2003 | US20030020450 Measurement of angle rotation using microstrip resonators (2.4ghz,2 degree) |
| 01/29/2003 | EP1279923A2 Method and apparatus for circuit pattern inspection |
| 01/29/2003 | EP1279032A2 Method and device using x-rays to measure thickness and composition of thin films |
| 01/28/2003 | US6512814 X-ray reflectometer |
| 01/28/2003 | US6512810 Method of analyzing a specimen comprising a compound material by x-ray fluorescence analysis |
| 01/23/2003 | WO2003007019A1 Radiation three-dimensional position detector |
| 01/23/2003 | US20030015659 Defect inspection method |
| 01/21/2003 | US6509750 Apparatus for detecting defects in patterned substrates |
| 01/16/2003 | US20030013954 Tissue sensor |
| 01/16/2003 | US20030010914 Method for determining depression/protrusion of sample and charged particle beam apparatus therefor |
| 01/15/2003 | EP1276134A2 A method for determining depression/protrusion of sample and charged particle beam apparatus therefor |
| 01/15/2003 | EP0705420B1 Online tomographic gauging of sheet metal |
| 01/14/2003 | US6507634 System and method for X-ray reflectometry measurement of low density films |
| 01/02/2003 | EP1177418B1 Level transmitter |
| 12/31/2002 | US6501981 Apparatus and method for compensating for respiratory and patient motions during treatment |
| 12/19/2002 | US20020192598 Defining multiple position-measurement marks on the reticle; using a reticle-inspection device detecting respective positional coordinates of marks on the reticle; mounting reticle in the microlithography apparatus and detecting |
| 12/19/2002 | US20020192359 System for automatic control of the wall bombardment to control wall deposition |
| 12/19/2002 | US20020191742 Image pickup device |
| 12/12/2002 | US20020185598 Array foreshortening measurement using a critical dimension scanning electron microscope |
| 12/05/2002 | WO2002097366A1 Observation device using light and x-ray, exposure system and exposure method |
| 12/05/2002 | US20020181776 Pattern measuring method and measuring system using display microscope image |
| 12/03/2002 | US6489612 Method of measuring film thickness |
| 11/28/2002 | DE10119352C1 Vehicle tyre profile characteristics determination method uses near-field radar sensor detecting microwaves reflected by tyre surface |
| 11/27/2002 | CN1381717A Ray testing equipment and ray testing method |
| 11/27/2002 | CN1095094C Automated non-visual method of locating periodically arranged sub-micron objects |
| 11/26/2002 | US6487431 Radiographic apparatus and method for monitoring the path of a thrust needle |
| 11/26/2002 | US6486472 Inspecting system using electron beam and inspecting method using same |
| 11/20/2002 | EP1259067A2 Image pickup device |
| 11/14/2002 | US20020168047 Radiation inspection apparatus and radiation inspection method |
| 11/14/2002 | US20020167311 Method of a continuous determination of an instantaneous position of an impeller blade tip in a rotor turbine machine |
| 11/14/2002 | US20020166964 Detection of defects in patterned substrates |
| 11/12/2002 | US6480802 Method for determining the flatness of a material strip |
| 11/06/2002 | CN1378067A Multiple point thickness meter |
| 10/31/2002 | WO2002086421A1 System and method for the measurement of the layer thicknesses of a multi-layer pipe |
| 10/31/2002 | US20020158199 Semiconductor inspection system |
| 10/31/2002 | DE10119669A1 Testing or detecting system for test objects with threads detects Doppler shift as radar sensor transmission and reception antenna is moved along thread |
| 10/29/2002 | US6471399 X-ray examination device and method for producing undistorted X-ray images |
| 10/24/2002 | US20020154734 Method and apparatus for inspecting a structure using X-rays |
| 10/17/2002 | US20020150209 Pulsed X-ray reflectometer |
| 10/17/2002 | US20020150208 X-ray reflectometer |
| 10/09/2002 | EP1248072A2 Thickness-measuring device |
| 10/09/2002 | EP1247073A1 Tissue sensor |
| 10/08/2002 | US6462346 Mask inspecting apparatus and mask inspecting method which can inspect mask by using electron beam exposure system without independently mounting another mask inspecting apparatus |
| 10/03/2002 | WO2002077570A1 Method to measure features with asymmetrical profile |
| 10/03/2002 | US20020141534 Thickness-measuring device |
| 10/02/2002 | EP0880679B1 Method and apparatus for sensing proximity or position of an object using near-field or magnetic effects |
| 10/01/2002 | US6459772 Radiographic reference marker |
| 09/26/2002 | US20020135781 Scatterometry techniques to ascertain asymmetry profile of features and generate feedback or feedforward process control data associated therewith |
| 09/26/2002 | US20020134936 Wafer inspection system and wafer inspection process using charged particle beam |
| 09/26/2002 | DE10114131A1 Detecting outer contour of living tree, locating internal structural damage involves stereographic x-ray image analysis with reference markers on rods, showing image pairs on screen |
| 09/17/2002 | US6452175 Column for charged particle beam device |
| 09/16/2002 | CA2829325A1 Interrogation of an object for dimensional and topographical information |
| 09/11/2002 | EP1238405A1 Method and system for the examination of specimen using a charged particle bam |
| 09/04/2002 | EP1236017A2 X-ray tomography bga ( ball grid array ) inspections |
| 09/03/2002 | US6445191 Distance measuring device and method for determining a distance |
| 08/29/2002 | US20020117619 Inspecting system using electron beam and inspecting method using same |
| 08/28/2002 | EP1234216A1 Method and apparatus for aligning a crystalline substrate |
| 08/28/2002 | EP1234158A1 Distortion detector |
| 08/27/2002 | US6442232 Thin layer nuclear density gauge |
| 08/27/2002 | US6441905 Sheet thickness and swell measurement method and apparatus therefor |
| 08/22/2002 | WO2002065109A2 Automated control of metal thickness during film deposition |
| 08/20/2002 | US6438209 Apparatus for guiding X-rays |
| 08/20/2002 | US6437306 Reducing motion artifacts by joining partial images in multiple scans |
| 08/15/2002 | US20020109705 System and method for preparing an image corrected for the presence of a gravity induced distortion |
| 08/13/2002 | US6434217 System and method for analyzing layers using x-ray transmission |
| 08/08/2002 | WO2001035051A9 X-ray tomography bga (ball grid array) inspections |
| 08/07/2002 | CN1362610A Apparatus and method for measuring film thickness of unsintered ceramic wafer |
| 08/06/2002 | US6430257 Method and apparatus for determining the position of an elongated object relative the surface of an obstructing body by means of electromagnetic radiation |
| 08/06/2002 | US6429944 Process and device for determining the thickness transverse profile and thickness longitudinal profile of a running strip of material |
| 08/06/2002 | US6429427 Method and apparatus for surface imaging |
| 08/06/2002 | US6429425 Method for forming a calibation standard to adjust a micro-bar of an electron microscope |
| 07/31/2002 | EP1007917A4 Accurate tissue injury assessment using hybrid neural network analysis |
| 07/31/2002 | CN1361860A Level transmitter |
| 07/30/2002 | US6426989 Computed tomography method |
| 07/25/2002 | US20020097913 Pattern evaluation method, pattern evaluation system and computer readable recorded medium |
| 07/18/2002 | WO2001084129A3 Method and device using x-rays to measure thickness and composition of thin films |
| 07/18/2002 | US20020095267 Method for the non-destructive inspection of wall strength |
| 07/18/2002 | US20020093350 Semiconductor device test method and semiconductor device tester |
| 07/16/2002 | US6421418 Method and system for detecting hidden edges |
| 07/16/2002 | US6420702 Non-charging critical dimension SEM metrology standard |
| 07/11/2002 | US20020090744 Method and system for measuring in patterned structures |
| 07/09/2002 | US6418243 Apparatus and method for providing high fidelity reconstruction of an observed sample |
| 07/09/2002 | US6417502 Millimeter wave scanning imaging system having central reflectors |