Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
10/2006
10/18/2006EP1712661A1 Single crystalline diamond and producing method thereof
10/18/2006EP1711649A2 Directionally controlled growth of nanowhiskers
10/18/2006CN1849410A Alkyl push flow for vertical flow rotating disk reactors
10/18/2006CN1280961C Nitride semiconductor substrate and method for manufacturing same, and nitride semiconductor device using said substrate
10/17/2006US7123662 OFDM detection apparatus and method for networking devices
10/17/2006US7122847 Nitride semiconductor thin film and method for growing the same
10/12/2006WO2006078666A3 Reaction system for growing a thin film
10/12/2006US20060228901 Growth method for nitride semiconductor epitaxial layers
10/12/2006US20060225645 Three inch silicon carbide wafer with low warp, bow, and TTV
10/12/2006US20060225644 Vertical group III-nitride light emitting device and method for manufacturing the same
10/12/2006US20060225643 AlGaN substrate and production method thereof
10/12/2006US20060225642 Method of forming semiconductor crystal
10/12/2006US20060225641 Method for the production of monocrystalline structures and component
10/11/2006EP1404891B1 Cvd system comprising a thermally differentiated substrate support
10/11/2006CN1844491A Nitriding process for lithium aluminate wafer
10/11/2006CN1279577C Method for carrying out thermally processing for substrate
10/11/2006CN1279221C Method of depositing big grain polycrystalline silicon thin film on ceramic substrate
10/11/2006CN1279211C Process and device for deposition of at least partially crystalline silicium layer on substrate
10/10/2006US7119400 Isotopically pure silicon-on-insulator wafers and method of making same
10/10/2006US7118934 Porous substrate for epitaxial growth, method for manufacturing same, and method for manufacturing III-nitride semiconductor substrate
10/10/2006US7118929 Process for producing an epitaxial layer of gallium nitride
10/10/2006US7118782 Method for manufacturing diamond coatings
10/10/2006US7118779 Reactor surface passivation through chemical deactivation
10/10/2006US7118625 Liquid phase growth method for silicon crystal, manufacturing method for solar cell and liquid phase growth apparatus for silicon crystal
10/05/2006US20060222481 Method of supporting a substrate in a gas cushion susceptor system
10/05/2006US20060219160 Method and system for forming a variable thickness seed layer
10/05/2006DE19581484B4 Vorrichtung zur Bildung von Dünnschichten An apparatus for forming thin films
10/04/2006EP1708254A1 Process for producing monocrystal thin film and monocrystal thin film device
10/04/2006EP1707654A1 Method for manufacturing diamond single crystal substrate, and diamond single crystal substrate
10/04/2006EP1706903A1 Isotopically pure silicon-on-insulator wafers and method of making same
10/04/2006EP1479267B1 System and method for lamp split zone control
10/04/2006CN1842895A Substrate processing apparatus and method for manufacturing semiconductor device
10/04/2006CN1840748A 金刚石衬底及其制造方法 Diamond substrate and manufacturing method thereof
10/04/2006CN1840747A Method for growing single-crystal zinc oxide film by using zinc oxide buffer layer
10/03/2006US7116754 Diffractometer
10/03/2006US7116727 Frequency offset estimation apparatus for intersymbol interference channels
10/03/2006US7115521 Epitaxial semiconductor deposition methods and structures
10/03/2006US7115494 Method and system for controlling the presence of fluorine in refractory metal layers
10/03/2006US7115486 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
10/03/2006US7115241 Ultrahard diamonds and method of making thereof
10/03/2006US7115167 Method of growing a semiconductor multi-layer structure
10/03/2006US7115166 Systems and methods for forming strontium- and/or barium-containing layers
09/2006
09/28/2006US20060216945 Methods of depositing materials over semiconductor substrates
09/28/2006US20060216914 Method of growing non-polar a-plane gallium nitride
09/28/2006US20060216514 Diamond film-forming silicon and its manufacturing method
09/28/2006US20060213429 Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate
09/28/2006US20060213428 Diamond substrate and manufacturing method thereof
09/28/2006DE102005013831A1 Siliciumscheibe und Verfahren zur thermischen Behandlung einer Siliciumscheibe Silicon wafer and method for heat treating a silicon wafer
09/27/2006CN1839217A Methods of depositing materials over substrates, and methods of forming layers over substrates
09/26/2006US7112826 Single crystal GaN substrate semiconductor device
09/26/2006US7112615 Porous material formation by chemical vapor deposition onto colloidal crystal templates
09/26/2006US7112544 In a reactor, substrates are simultaneously exposed to a first reactive material to form a first mass across the exposed surfaces of the substrates, the first reactive material is removed, and the substrates are exposed to a second reactive material to convert the first mass to a second mass
09/26/2006US7112538 In situ growth of oxide and silicon layers
09/26/2006US7112243 Method for producing Group III nitride compound semiconductor
09/26/2006US7112242 Manufacturing method for producing silicon carbide crystal using source gases
09/21/2006US20060207505 Method and apparatus for forming multi-layered thin film by using photolysis chemical vapor deposition
09/20/2006EP1703550A1 Vapor growth device and production method for epitaxial wafer
09/20/2006EP1703549A1 Vapor growth device and porduction method for epitaxial wafer
09/20/2006EP1703002A2 Multilayer substrate, method for producing a multilayer substrate, and device
09/20/2006EP1702357A1 Substrate with determinate thermal expansion coefficient
09/20/2006EP1702355A1 Methods for deposition of semiconductor material
09/20/2006CN2818496Y Fast heater
09/20/2006CN1835255A Production method for light emitting element
09/20/2006CN1835254A Production method for light emitting element
09/20/2006CN1834006A Growth appts. of carson nanotube array and growth method of multi-wall carbon nanotube array
09/19/2006US7108753 Staggered ribs on process chamber to reduce thermal effects
09/19/2006US7108748 Low temperature load and bake
09/19/2006US7108747 Method for growing oxide thin films containing barium and strontium
09/19/2006US7108746 Silicon fixture with roughened surface supporting wafers in chemical vapor deposition
09/19/2006US7108745 Formation method for semiconductor layer
09/14/2006WO2006081104A3 Semiconductor wafer boat for a vertical furnace
09/14/2006WO2006025593A3 Growth of nitride semiconductor crystals
09/14/2006US20060205197 Compound semiconductor devices and methods of manufacturing the same
09/14/2006US20060205185 Method of epitaxial deoposition of an n-doped silicon layer
09/14/2006US20060201427 CVD coating device
09/14/2006US20060201415 Patterned ferroelectric thin films for microwave devices
09/14/2006US20060201414 Low temperature load and bake
09/14/2006US20060201413 Method for producing silicon epitaxial wafer and silicon epitaxial wafer
09/13/2006EP1699951A2 Method of producing self-supporting substrates comprising iii-nitrides by means of heteroepitaxy on a sacrificial layer
09/13/2006CN1833310A 半导体层 Semiconductor layer
09/13/2006CN1833294A Method of producing biaxially textured buffer layers and related articles, devices and systems
09/13/2006CN1832110A 外延生长方法 Epitaxial growth
09/13/2006CN1831212A Method for by composition cladding germanium nanometer wire
09/13/2006CN1830813A Preparation method of nanometer tungsten trioxide crystallite
09/13/2006CN1275335C Single Crystal gallium nitride base board and its growth method and manufacture method
09/13/2006CN1275293C Group iii nitride compound semiconductor device and producing method therefor
09/12/2006US7105865 AlxInyGa1−x−yN mixture crystal substrate
09/12/2006US7105208 Methods and processes utilizing microwave excitation
09/12/2006US7105055 In situ growth of oxide and silicon layers
09/12/2006US7105054 Method and apparatus of growing a thin film onto a substrate
09/12/2006US7105053 Energy efficient method for growing polycrystalline silicon
09/12/2006US7105051 High quality colloidal nanocrystals and methods of preparing the same in non-coordinating solvents
09/08/2006WO2006031257A3 METHOD FOR GROWING Si-Ge SEMICONDUCTOR MATERIALS AND DEVICES ON SUBSTRATES
09/07/2006US20060197035 Organic film vapor deposition method and a scintillator panel
09/07/2006US20060196413 Forming method for polymeric laminated wafers comprising different film materials
09/07/2006US20060196412 Method and casting mold for producing an optical semiconductor module
09/07/2006US20060196411 Vapor phase epitaxy apparatus and irregular gas mixture avoidance method for use therewith
09/06/2006EP1697965A1 NON-POLAR (A1, B, In, Ga)N QUANTUM WELLS
09/06/2006CN1273655C Simulated diamond gemstones formed of aluminum nitride and aluminium nitride silicon carbide alloys
09/06/2006CN1273654C Growth process for monocrystal of gallium nitride, substrates of gallium nitride monocrystal and manufacture thereof
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