| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 10/14/1998 | EP0871228A2 Semiconductor substrate, semiconductor device and method of manufacturing the same |
| 10/14/1998 | EP0871212A1 Heat treatment apparatus |
| 10/14/1998 | EP0870852A1 Method and apparatus for preventing condensation in an exhaust passage |
| 10/14/1998 | CN2294270Y Upside down type crystal growth reactor using metallic organic compound vapour-deposition tech. |
| 10/14/1998 | CN2294269Y 气垫式衬底旋转装置 Air Cushion substrate rotating device |
| 10/13/1998 | US5820948 Positioning targets; heating |
| 10/13/1998 | US5820686 A support for substrate |
| 10/13/1998 | US5820685 Wafer support device |
| 10/13/1998 | US5820367 Boat for heat treatment |
| 10/13/1998 | US5820366 Dual vertical thermal processing furnace |
| 10/13/1998 | US5819684 Chemical vapor deposition apparatus |
| 10/13/1998 | CA2144092C Extraction of spatially varying dielectric function from ellipsometric data |
| 10/08/1998 | WO1998044175A1 Epitaxial growth furnace |
| 10/07/1998 | CN1195036A Cooling system and method for epitaxial barrel reactor |
| 10/06/1998 | US5817179 GaAs anneal boat design and method for use |
| 10/06/1998 | US5817175 Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organometallic precursor compounds |
| 10/01/1998 | WO1998042897A1 Susceptor designs for silicon carbide thin films |
| 10/01/1998 | WO1998042896A1 Process of diamond growth from c¿70? |
| 10/01/1998 | CA2284771A1 Susceptor designs for silicon carbide thin films |
| 10/01/1998 | CA2283268A1 Process of diamond growth from c70 |
| 09/30/1998 | EP0867538A1 Heating apparatus |
| 09/30/1998 | EP0867537A1 Method for the production of low-cost isotopically engineered diamond anvils |
| 09/30/1998 | EP0867536A1 Low-cost isotopically engineered diamond amvils |
| 09/30/1998 | CN1194624A Polycrystalline silicon rod and process for preparing the same |
| 09/29/1998 | US5815520 light emitting semiconductor device and its manufacturing method |
| 09/29/1998 | US5814534 Method of doping with beryllium and method of fabricating semiconductor optical element doped with beryllium |
| 09/29/1998 | US5814290 Silicon nitride nanowhiskers and method of making same |
| 09/29/1998 | US5814150 Method of and apparatus for forming single-crystalline thin film, beam irradiator, beam irradiating method and beam reflecting device |
| 09/29/1998 | US5814149 Vapor deposition on platinum substrate |
| 09/29/1998 | US5813851 Heat treatment method |
| 09/24/1998 | WO1998041806A1 Method for cooling a furnace, and furnace provided with a cooling device |
| 09/23/1998 | EP0865518A1 A device for heat treatment of objects and a method for producing a susceptor |
| 09/22/1998 | US5811349 Method for growing a semiconductor layer |
| 09/22/1998 | US5810930 Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith |
| 09/22/1998 | US5810925 GaN single crystal |
| 09/17/1998 | WO1998040543A1 Process for preparing polysilicon using exothermic reaction |
| 09/17/1998 | CA2283562A1 Process for preparing polysilicon using exothermic reaction |
| 09/16/1998 | EP0865083A2 Electrode for semiconductor device and method of manufacturing it |
| 09/15/1998 | US5809211 Ramping susceptor-wafer temperature using a single temperature input |
| 09/15/1998 | US5807792 Rotation; alternating supplying segments |
| 09/15/1998 | US5807432 Process for producing diamond covered member |
| 09/15/1998 | CA2101285C Method of forming single-crystalline thin film |
| 09/10/1998 | DE19801439A1 Silicon epitaxial layer growth apparatus |
| 09/09/1998 | EP0863228A1 Vertical type CVD apparatus |
| 09/09/1998 | CN1192490A Method and system for monocrystalline epitaxial deposition |
| 09/08/1998 | US5804042 Reduces or eliminates secondary plasma around backplane |
| 09/08/1998 | US5803967 Repeatedly cycling between first and second growth parameters; etching at intermediate stages to remove defects |
| 09/02/1998 | EP0778837B1 Preparation of metalorganic compounds |
| 09/02/1998 | CN1192265A Passive gas substrate thermal conditioning apparatus and method |
| 09/01/1998 | US5800622 Vapor-phase growth apparatus and compound semiconductor device fabricated thereby |
| 08/27/1998 | WO1998037258A1 A rapid thermal processing barrel reactor for processing substrates |
| 08/26/1998 | EP0800592B1 Method of producing boron-doped monocrystalline silicon carbide |
| 08/25/1998 | US5798293 Wafer bonding technique: two amorphous layers are placed face to face and bonded by heating; piece is annealed at such a high temperature that the material of the amorphous layer is allowed to flow for relaxing a 3c-sic-layer; epitaxial growth |
| 08/25/1998 | CA2128590C Direct mombe and movpe growth of ii-vi materials on silicon |
| 08/25/1998 | CA2010482C Process for the fabrication of devices; utilizing electrochemically generated gases |
| 08/19/1998 | EP0859155A2 Fluid control apparatus |
| 08/19/1998 | EP0783599A4 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 08/18/1998 | US5795396 Apparatus for forming crystalline film |
| 08/18/1998 | US5795385 Method of forming single-crystalline thin film by beam irradiator |
| 08/18/1998 | US5795384 Nitriding, carbiding, and/or carbonization of carbon powder using cobalt or nickel catalyst and alkali metal chloride volatization reagent |
| 08/13/1998 | WO1998035531A1 Model based temperature controller for semiconductor thermal processors |
| 08/11/1998 | US5792701 Used for mixing gases in the deposition/oxidations processes in furnaces to achieve uniform film growth and thickness |
| 08/11/1998 | US5792556 Diamond crystal |
| 08/11/1998 | US5792273 Secondary edge reflector for horizontal reactor |
| 08/11/1998 | US5792270 Apparatus for forming a pattern of nucleation sites |
| 08/11/1998 | US5792257 Method for protecting the susceptor during epitaxial growth by CVD and a device for epitaxial growth by CVD |
| 08/04/1998 | US5790751 Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature |
| 08/04/1998 | US5790750 Profiled substrate heating utilizing a support temperature and a substrate temperature |
| 08/04/1998 | US5789309 Method and system for monocrystalline epitaxial deposition |
| 08/04/1998 | US5788777 Susceptor for an epitaxial growth factor |
| 08/04/1998 | CA2055400C Method of forming crystal |
| 07/30/1998 | WO1998032902A1 Method of manufacturing crystalline particles on a support or a substrate |
| 07/30/1998 | DE19702311A1 Growth substrate with diamond or diamond-like carbon growth nuclei |
| 07/28/1998 | US5785764 Susceptor for a gas phase growth apparatus |
| 07/28/1998 | US5785755 Growing layers of different compositions; tributylphosphine in standby step |
| 07/28/1998 | CA2055675C Method for forming crystal article |
| 07/22/1998 | EP0854210A1 Vapor deposition apparatus and method for forming thin film |
| 07/21/1998 | US5783335 Fluidized bed deposition of diamond |
| 07/21/1998 | US5782979 Substrate holder for MOCVD |
| 07/21/1998 | US5782975 Method for providing a silicon and diamond substrate having a carbon to silicon transition layer and apparatus thereof |
| 07/15/1998 | EP0853138A1 Vapor-phase film growth apparatus and gas ejection head |
| 07/15/1998 | EP0853137A1 High pressure MOCVD reactor system |
| 07/15/1998 | EP0853134A1 Method for obtaining a coating with a uniform distribution of reactants |
| 07/15/1998 | EP0852575A1 Silicon nitride nanowhiskers and method of making same |
| 07/15/1998 | EP0737258A4 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
| 07/14/1998 | US5781693 Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween |
| 07/14/1998 | US5779804 Gas feeding device for controlled vaporization of an organanometallic compound used in deposition film formation |
| 07/14/1998 | US5778968 For stabilizing the temperature of semiconductor wafers |
| 07/09/1998 | WO1998029178A1 Inlet structures for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system |
| 07/08/1998 | EP0852393A2 Thermal reaction chamber for semiconductor wafer processing operations |
| 07/07/1998 | US5776552 Gas mixture of hydrogen, inert with carbon compound and oxygen |
| 07/07/1998 | US5776391 Silicon carbide carrier for wafer processing and method for making same |
| 07/07/1998 | US5776253 Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device |
| 07/07/1998 | US5776246 Wide signel crystal; for semiconductors, surface acoustic lave devices |
| 07/07/1998 | US5775416 Temperature controlled chuck for vacuum processing |
| 07/07/1998 | CA2054050C Method and apparatus for making grit and abrasive media |
| 07/01/1998 | EP0851467A2 Method and system for monocrystalline epitaxial deposition |
| 07/01/1998 | EP0851040A1 Surface treatment apparatus using gas jet |
| 07/01/1998 | CN1186128A Dual vertical thermal processing furance |
| 06/30/1998 | US5772760 Method for the preparation of nanocrystalline diamond thin films |