| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 02/27/1996 | US5494521 Apparatus and method for vapor growth |
| 02/27/1996 | US5493987 Chemical vapor deposition reactor and method |
| 02/22/1996 | WO1996005019A1 Wafer carrier and method for making same |
| 02/21/1996 | EP0617741B1 Nucleation enhancement for chemical vapor deposition of diamond |
| 02/20/1996 | US5492752 Comprising a thin film epitaxial monocrystalline cubic rock salt; stability |
| 02/15/1996 | DE19528740A1 Doping Gp.=III-V cpd. semiconductor crystal with beryllium@ |
| 02/14/1996 | EP0696653A1 Method of chemical vapor deposition and reactor therefor |
| 02/14/1996 | EP0696472A1 Method and apparatus for supply of liquid raw material gas |
| 02/13/1996 | US5491002 Multilayer CVD diamond films |
| 02/07/1996 | EP0695922A1 Heating apparatus for semiconductor wafers or substrates |
| 02/07/1996 | EP0695816A1 Method of making synthetic diamond film with reduced bowing |
| 02/07/1996 | EP0573424B1 Method for making coreless refractory fibres and whiskers |
| 01/30/1996 | US5487945 Diamond films on nondiamond substrates |
| 01/30/1996 | US5487358 Apparatus for growing silicon epitaxial layer |
| 01/25/1996 | WO1996001913A1 Monocrystalline diamond film production by chemical vapor deposition |
| 01/24/1996 | EP0693580A1 Oxide thin film having quartz crystal structure and process for producing the same |
| 01/24/1996 | EP0693573A1 Synthesizing diamond film |
| 01/23/1996 | US5487127 Rapid thermal heating apparatus and method utilizing plurality of light pipes |
| 01/23/1996 | US5485804 Enhanced chemical vapor deposition of diamond and related materials |
| 01/18/1996 | WO1996001502A1 Epitaxial thallium high temperature superconducting films formed via a nucleation layer |
| 01/18/1996 | DE4424929A1 Holder used in deposition appts. for semiconductor material |
| 01/18/1996 | CA2194400A1 Epitaxial thallium high temperature superconducting films formed via a nucleation layer |
| 01/17/1996 | EP0692556A1 K cell type vapor source and shutter |
| 01/16/1996 | US5483919 Atomic layer epitaxy method and apparatus |
| 01/16/1996 | US5483918 Method for producing single-crystal silicon by chemical vapor deposition and method for fractional determination of ultratrace elements present in chlorosilanes as starting materials and single-crystal silicon produced |
| 01/13/1996 | CA2153754A1 K cell type vapor source having an improved shutter |
| 01/11/1996 | WO1996000804A1 Apparatus for uniformly heating a substrate |
| 01/09/1996 | US5483084 Diamond covered member and process for producing the same |
| 01/09/1996 | US5482558 Heat treatment boat support |
| 01/09/1996 | US5482002 Microprobe, preparation thereof and electronic device by use of said microprobe |
| 01/06/1996 | CA2153184A1 Method of making synthetic diamond film with reduced bowing |
| 01/03/1996 | EP0689618A1 Method and apparatus for the combustion chemical vapor deposition of films and coatings |
| 01/02/1996 | US5480833 Semiconductor device having an isolation region enriched in oxygen and a fabrication process thereof |
| 01/02/1996 | US5480489 Reactor for uniform heating of a substrate |
| 01/02/1996 | US5479875 Microwave plasma vapor deposition, nucleation |
| 01/02/1996 | US5479874 CVD diamond production using preheating |
| 01/02/1996 | US5479873 Method of manufacturing aluminum borate whiskers having a reformed surface based upon gamma alumina |
| 01/02/1996 | CA1337855C Processes for the preparation of polycrystalline diamond films |
| 12/28/1995 | WO1995023427A3 Apparatus for thermal treatment of thin film wafer |
| 12/27/1995 | EP0689233A2 Wafer and method of producing same |
| 12/27/1995 | EP0688888A2 Apparatus and method for substrate processing |
| 12/27/1995 | EP0688887A1 Wafer processing reactor |
| 12/26/1995 | US5478513 CVD diamond growth on hydride-forming metal substrates |
| 12/26/1995 | US5478400 Apparatus for fabricating semiconductor devices |
| 12/21/1995 | WO1995034698A1 Photo-assigned nitrogen doping of ii-vi semiconductor compounds during epitaxial growth using an amine |
| 12/20/1995 | EP0687753A1 A synthesis process of diamond, synthesis apparatus and synthetic diamond |
| 12/20/1995 | EP0687749A1 Apparatus for chemical vapour deposition |
| 12/20/1995 | EP0687747A1 Apparatus and method for chemical vapor deposition of diamond |
| 12/19/1995 | US5476548 Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring |
| 12/19/1995 | US5476547 Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation |
| 12/19/1995 | US5476359 Robotically loaded epitaxial deposition apparatus |
| 12/19/1995 | CA2025612C Gas separation by semi-permeable membranes |
| 12/14/1995 | DE19520961A1 Verfahren zum Bilden eines ferroelektrischen Filmes A method for forming a ferroelectric film |
| 12/13/1995 | EP0686708A1 Film forming method and film forming apparatus |
| 12/12/1995 | US5474021 Epitaxial growth of diamond from vapor phase |
| 12/05/1995 | US5473090 Contacting metal with an alkyl halide in presence of an alkali metal; alkali metal halide |
| 12/05/1995 | US5472934 Anisotropic superconducting device and fluxon device |
| 12/05/1995 | US5472505 Apparatus for monitoring films during MOCVD |
| 12/05/1995 | US5471947 Preparation of diamond films on silicon substrates |
| 12/05/1995 | US5471946 Method for producing a wafer with a monocrystalline silicon carbide layer |
| 12/05/1995 | US5471944 Method for forming crystal article |
| 11/30/1995 | DE4092184C2 Appts. for vapour-phase diamond synthesis |
| 11/29/1995 | EP0532758B1 Cvd semiconductor manufacturing equipment |
| 11/28/1995 | US5471033 Process and apparatus for contamination-free processing of semiconductor parts |
| 11/28/1995 | US5469806 Chlorination of semiconductor surfaces, dechlorination by forming hydrogen chloride with hydrogen and epitaxial crystallization |
| 11/23/1995 | WO1995031592A1 Enhanced chemical vapor deposition of diamond and related materials |
| 11/23/1995 | WO1995031584A1 Surface treatment techniques |
| 11/23/1995 | WO1995031582A1 Chemical vapor deposition reactor and method |
| 11/22/1995 | EP0683508A1 Selective crystal growth method of compound semiconductor |
| 11/22/1995 | EP0683249A1 Method and apparatus for the growth of compound semiconductor layer |
| 11/21/1995 | US5468684 Semiconductors |
| 11/21/1995 | US5468299 Device comprising a flat susceptor rotating parallel to a reference surface about a shaft perpendicular to this surface |
| 11/14/1995 | US5467220 Method and apparatus for improving semiconductor wafer surface temperature uniformity |
| 11/14/1995 | US5465680 Vapor deposition, trimethylsilane |
| 11/08/1995 | EP0681314A2 Composite structure for electronic devices and method of making the same |
| 11/07/1995 | US5464583 Shaping silicon carbide and aluminum nitride; catalytically reacting with nitrogen to form sialon and silicon nitride |
| 11/07/1995 | US5463978 Flowing gaseous silicon and carbon compounds through growth chamber; varying ratio to regulate amount of element vapor deposited |
| 11/07/1995 | US5463977 Method of and apparatus for epitaxially growing chemical compound crystal |
| 11/07/1995 | US5463975 Process for producing crystal |
| 11/02/1995 | WO1995029124A1 Method and apparatus for producing nanostructured ceramic powders and whiskers |
| 11/02/1995 | EP0679732A1 Synthetic diamond film with reduced bowing and method of making same |
| 10/31/1995 | US5462899 Heating substrate, mixing and reacting organosilicon compound gas, oxygen gas containing ozone and second oxygen containing gas |
| 10/31/1995 | US5462883 Method of fabricating defect-free silicon on an insulating substrate |
| 10/31/1995 | US5462812 Fluorinated silicon nitride films |
| 10/31/1995 | US5462776 Energizing fullerene molecule by passage over a hot filament causing fragmentation and ionization by electron attachment or emission, depositing on diamond substrate causing thicknes of diamond or diamond-like film on substrate surface |
| 10/31/1995 | US5462012 Substrates and methods for gas phase deposition of semiconductors and other materials |
| 10/29/1995 | CA2144924A1 Synthetic diamond film with reduced bowing and method of making same |
| 10/25/1995 | EP0407601B1 Production method of zinc oxide whisker |
| 10/24/1995 | US5460794 Method of manufacturing a powdery AlN |
| 10/24/1995 | US5460654 Apparatus for generating raw material gas used in apparatus for growing thin film |
| 10/19/1995 | WO1995028002A1 Method and device for processing semiconductor wafer |
| 10/19/1995 | WO1995027815A1 Method for growing gallium nitride compound semiconductor crystal, and gallium nitride compound semiconductor device |
| 10/19/1995 | WO1995027570A1 Selective plasma deposition |
| 10/17/1995 | US5458918 Gas injectors for reaction chambers in CVD systems |
| 10/17/1995 | US5458733 Method for etching a diamond film |
| 10/17/1995 | US5458689 Apparatus and method for growing semiconductor crystal |
| 10/17/1995 | US5458086 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 10/11/1995 | EP0676793A2 Substrate holder and reaction apparatus |
| 10/11/1995 | EP0676485A1 Diamond wafer and method of producing a diamond wafer |
| 10/11/1995 | EP0676484A2 Transparent diamond films and method for making |