| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 05/06/1997 | US5627142 Method of producing composite metal oxide material |
| 05/06/1997 | US5626908 Method for producing silicon nitride based member coated with film of diamond |
| 05/06/1997 | US5626456 Transfer device |
| 05/02/1997 | EP0648215B1 Process for the preparation of trialkyl compounds of group 3a metals |
| 04/29/1997 | US5624720 Process for forming a deposited film by reacting between a gaseous starting material and an oxidizing agent |
| 04/29/1997 | US5624719 Process for synthesizing diamond in a vapor phase |
| 04/24/1997 | WO1997008356A3 Modified metalorganic chemical vapor deposition of group III-V thin layers |
| 04/23/1997 | EP0769210A1 Epitaxial thallium high temperature superconducting films formed via a nucleation layer |
| 04/23/1997 | EP0769079A1 Apparatus for uniformly heating a substrate |
| 04/23/1997 | EP0526646B1 Semiconductor device having an isolation region enriched in oxygen and a fabrication process thereof |
| 04/22/1997 | US5622559 Method of preparing compound semiconductor |
| 04/17/1997 | WO1997013892A1 Improved method for the preparation of nanocrystalline diamond thin films |
| 04/17/1997 | WO1997013891A1 METHOD OF MANUFACTURING EPITAXIAL LAYERS OF GaN OR Ga(A1,In)N ON SINGLE CRYSTAL GaN AND MIXED Ga(A1,In)N SUBSTRATES |
| 04/16/1997 | CN1147806A Novel silicon carbide dummy wafer |
| 04/15/1997 | US5620754 Method of treating and coating substrates |
| 04/15/1997 | US5620557 Sapphireless group III nitride semiconductor and method for making same |
| 04/15/1997 | US5620512 Diamond film growth from fullerene precursors |
| 04/15/1997 | US5620511 Adding silicon microparticles and carbon fibers of specific length and diameter as reinforcing agents to an aluminum alkoxide solution, filtering, dehydrating, forming, drying and heating |
| 04/10/1997 | WO1997013011A1 A device for heat treatment of objects and a method for producing a susceptor |
| 04/08/1997 | US5618625 CVD diamond coated cutting tools and method of manufacture |
| 04/08/1997 | US5618350 Processing apparatus |
| 04/02/1997 | EP0733130A4 Apparatus for heating or cooling wafers |
| 04/02/1997 | CN1146503A Tail gas recovery method and device in production of silicon carbide fibre |
| 04/01/1997 | US5616264 Method and apparatus for controlling temperature in rapid heat treatment system |
| 04/01/1997 | US5616181 MBE apparatus and gas branch piping apparatus |
| 04/01/1997 | US5616179 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
| 04/01/1997 | US5616178 Method for growth of II-VI compound semiconductors |
| 04/01/1997 | US5616024 Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles |
| 03/26/1997 | EP0764726A1 Method for tuning barrel reactor purge system |
| 03/25/1997 | US5614258 Process of diamond growth from C70 |
| 03/25/1997 | US5614162 Gas phase reaction using aluminum and iron catalyst, carbon fabric substrate |
| 03/25/1997 | US5614019 Masking, etching, vapor deposition |
| 03/22/1997 | CA2185981A1 Process for preparing trichlorosilane |
| 03/20/1997 | DE19522923A1 Mfr. of crystalline, amorphous and epitaxial semiconductor layers on substrate |
| 03/18/1997 | US5611685 Substrate heat treatment apparatus |
| 03/11/1997 | US5610094 Photoelectric conversion device |
| 03/06/1997 | WO1997008361A1 Surface treatment apparatus using gas jet |
| 03/06/1997 | WO1997008356A2 Modified metalorganic chemical vapor deposition of group iii-v thin layers |
| 03/06/1997 | WO1997003236A3 System and method for thermal processing of a semiconductor substrate |
| 03/04/1997 | US5607723 Method for making continuous thin diamond film |
| 03/04/1997 | US5607511 Method and apparatus for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers |
| 03/04/1997 | CA2076334C Ambient-free processing system |
| 02/27/1997 | WO1997007265A1 SEED CRYSTAL FOR GROWING MONOCRYSTALS, USE OF THE SEED CRYSTAL AND PROCESS FOR PRODUCING SiC MONOCRYSTALS OR MONOCRYSTALLINE SiC LAYERS |
| 02/25/1997 | US5606180 III-V compound semiconductor with high crystal quality and luminous efficiency |
| 02/25/1997 | US5605574 Semiconductor wafer support apparatus and method |
| 02/20/1997 | WO1996029441A3 High growth rate homoepitaxial diamond film deposition at high temperatures by microwave plasma-assisted chemical vapor deposition |
| 02/20/1997 | DE19534922C1 Prodn. of tri:chloro:silane |
| 02/19/1997 | EP0758310A1 Novel silicon carbide dummy wafer |
| 02/18/1997 | US5603764 Process for crystal growth of III-V group compound semiconductor |
| 02/12/1997 | CN1034012C Preparation method for alpha-alumine |
| 02/12/1997 | CN1034011C Alpha-alumine |
| 02/12/1997 | CN1034010C Alpha-alumin |
| 02/11/1997 | US5601651 Flow control valve for use in fabrication of semiconductor devices |
| 02/06/1997 | WO1997003935A1 Silicon nitride nanowhiskers and method of making same |
| 02/05/1997 | EP0757117A1 Method and apparatus for deposition of material on a semiconductor wafer |
| 02/05/1997 | EP0756580A1 Method and apparatus for producing nanostructured ceramic powders and whiskers |
| 02/04/1997 | US5599732 Covering reactor interior surfaces with stable protective barrier(for impurities) coating before vapor deposition or molecular beam epitaxy |
| 02/04/1997 | US5599397 Semiconductor wafer process chamber with suspector back coating |
| 01/30/1997 | WO1997003236A2 System and method for thermal processing of a semiconductor substrate |
| 01/29/1997 | EP0756118A2 Fluid control system and valve to be used therein |
| 01/29/1997 | CN1141602A Using laser for fabricating coatings substrate |
| 01/28/1997 | US5597411 Method of forming a single crystal material |
| 01/23/1997 | WO1997002368A1 Process for the preparation of magnesium oxide films using organomagnesium compounds |
| 01/23/1997 | DE19606226A1 Vapour phase esp. MOCVD growth appts. |
| 01/22/1997 | EP0754932A2 Optical film thickness measurement method, film formation method, and semiconductor laser fabrication method |
| 01/22/1997 | EP0754784A1 Manufacture of transition metal carbide, nitride and carbonitride whiskers containing two or more transition metals |
| 01/22/1997 | EP0754783A1 Manufacture of transition metal carbide, nitride and carbonitride whiskers |
| 01/22/1997 | EP0754782A1 Manufacture of titanium carbide, nitride and carbonitride whiskers |
| 01/22/1997 | EP0754777A2 Process for producing thin film, and optical instrument including the same |
| 01/22/1997 | CN1140832A Optical film thickness measurement method, film formation method, and semiconductor laser fabrication method |
| 01/21/1997 | US5595604 Wafer supporting boat |
| 01/16/1997 | WO1997001658A1 A device and a method for epitaxially growing objects by cvd |
| 01/16/1997 | WO1996037639A3 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
| 01/14/1997 | US5593741 Method and apparatus for forming silicon oxide film by chemical vapor deposition |
| 01/14/1997 | US5593497 Method for forming a deposited film |
| 01/14/1997 | US5593465 Mounting for carrier bodies in an apparatus for the deposition of semiconductor material |
| 01/08/1997 | EP0752018A1 Surface treatment techniques |
| 01/08/1997 | EP0751911A1 Aluminium nitride based platelets, process for their preparation and use thereof |
| 01/07/1997 | US5592581 Heat treatment apparatus |
| 01/07/1997 | US5591260 Method for crystal growth |
| 01/03/1997 | WO1997000340A1 Titanate whisker and process for the production thereof |
| 01/03/1997 | WO1997000336A1 Oriented niobate ferroelectric thin films for electrical and optical devices and method of making such films |
| 01/02/1997 | EP0751237A1 Segmented substrate for arc-jet diamond deposition |
| 01/01/1997 | CN1139460A Epitaxial reactor, susceptor and gas-flow system |
| 12/31/1996 | US5589693 Substrates and methods for gas phase deposition of semiconductors and other materials |
| 12/31/1996 | US5589421 Method of manufacturing annealed films |
| 12/31/1996 | US5589110 Container for liquid metal organic compound |
| 12/31/1996 | US5588994 Method of producing sheets of crystalline material and devices made therefrom |
| 12/31/1996 | US5588827 Passive gas substrate thermal conditioning apparatus and method |
| 12/27/1996 | WO1996041906A1 Bulk single crystal gallium nitride and method of making same |
| 12/27/1996 | EP0749940A1 Process for the preparation of aluminium nitride whiskers |
| 12/24/1996 | US5587210 Growing and releasing diamonds |
| 12/24/1996 | US5587124 Method of making synthetic diamond film with reduced bowing |
| 12/24/1996 | US5587095 Process and apparatus for contamination-free processing of semiconductor parts |
| 12/24/1996 | US5587019 Apparatus for use in epitaxial crystal growth |
| 12/24/1996 | US5587014 Method for manufacturing group III-V compound semiconductor crystals |
| 12/24/1996 | US5586880 Heat treatment apparatus and heat treatment boat |
| 12/20/1996 | CA2179345A1 Process for producing aluminum nitride trichites |
| 12/19/1996 | WO1996041109A1 Passive gas substrate thermal conditioning apparatus and method |
| 12/19/1996 | WO1996041043A1 Carbide nanomaterials |