| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 02/01/2000 | US6020253 Decomposition; phosphiding |
| 02/01/2000 | US6019840 Process for forming deep level impurity undoped phosphorous containing semi-insulating epitaxial layers |
| 02/01/2000 | US6019839 Method and apparatus for forming an epitaxial titanium silicide film by low pressure chemical vapor deposition |
| 01/27/2000 | WO2000004205A1 High throughput organometallic vapor phase epitaxy (omvpe) apparatus |
| 01/27/2000 | CA2334349A1 High throughput organometallic vapor phase epitaxy (omvpe) apparatus |
| 01/25/2000 | US6018065 Method of fabricating iridium-based materials and structures on substrates, iridium source reagents therefor |
| 01/25/2000 | US6017774 Method for producing group III-V compound semiconductor and fabricating light emitting device using such semiconductor |
| 01/25/2000 | US6017395 Gas pressure regulation in vapor deposition |
| 01/20/2000 | WO2000003056A1 System and method for reducing particles in epitaxial reactors |
| 01/20/2000 | WO2000002674A1 Cleaning process for rapid thermal processing system |
| 01/19/2000 | EP0972096A1 Process for preparing polysilicon using exothermic reaction |
| 01/18/2000 | US6016383 Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature |
| 01/18/2000 | US6015917 Precursors for liquid delivery chemical vapor deposition |
| 01/18/2000 | US6015590 Surface with thin films on substrate of multilayer element with vapor deposition |
| 01/18/2000 | US6015459 Method for doping semiconductor materials |
| 01/13/2000 | WO2000001867A1 Method for synthesizing n-type diamond having low resistance |
| 01/12/2000 | EP0970337A1 Method for cooling a furnace, and furnace provided with a cooling device |
| 01/12/2000 | EP0970267A1 Susceptor designs for silicon carbide thin films |
| 01/11/2000 | US6013319 Method and apparatus for increasing deposition quality of a chemical vapor deposition system |
| 01/11/2000 | US6013318 Igniting reagent mixture to flame; flowing through plasma torch; coating with thin film metal or metal oxide |
| 01/11/2000 | US6013238 Heating potassium titante fibers coated with aluminum compound in presence of fusing agent selected form chlorides and sulfates of alkali metals to undergo reaction for growth of crystals and cooling |
| 01/11/2000 | US6013155 Gas injection system for plasma processing |
| 01/11/2000 | US6013134 Advance integrated chemical vapor deposition (AICVD) for semiconductor devices |
| 01/11/2000 | US6013130 Process and device for the production of epitaxial layers |
| 01/11/2000 | US6013129 Production of heavily-doped silicon |
| 01/06/2000 | WO2000001005A1 Method for forming monocrystalline silicon layer, method for manufacturing semiconductor device, and semiconductor device |
| 01/06/2000 | WO2000000677A1 Method for doping semiconductor materials |
| 01/06/2000 | WO2000000664A1 Susceptor for barrel reactor |
| 01/06/2000 | WO2000000663A1 Method and device for displacing wafers in a deposition reactor |
| 01/05/2000 | CN1240304A GaN monocrystal substrate and making method thereof |
| 01/04/2000 | US6009831 Apparatus for low pressure chemical vapor deposition |
| 12/28/1999 | US6007635 Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing |
| 12/28/1999 | US6007633 Single-substrate-processing apparatus in semiconductor processing system |
| 12/23/1999 | WO1999066565A1 Method and apparatus for producing group-iii nitrides |
| 12/23/1999 | WO1999066351A1 Method of organic film deposition |
| 12/23/1999 | WO1999066286A1 Ellipsometric method and control device for making a thin-layered component |
| 12/23/1999 | WO1999065821A1 Free-standing and aligned carbon nanotubes and synthesis thereof |
| 12/23/1999 | CA2335449A1 Free-standing and aligned carbon nanotubes and synthesis thereof |
| 12/22/1999 | EP0966047A2 GaN single crystal substrate and method of producing same |
| 12/22/1999 | CN1239543A Spherical shaped semiconductor integrated circuit |
| 12/21/1999 | US6004396 Spherical shaped semiconductor integrated circuit |
| 12/21/1999 | US6004392 Ferroelectric capacitor and manufacturing the same using bismuth layered oxides |
| 12/15/1999 | EP0964083A2 Method and apparatus for growing a compound semiconductor layer |
| 12/15/1999 | EP0963458A1 Process for low temperature cvd using bi-carboxylates |
| 12/15/1999 | CN1238813A Gemstones formed of silicon carbide with diamond coating |
| 12/14/1999 | US6002109 System and method for thermal processing of a semiconductor substrate |
| 12/14/1999 | US6001183 Wafer carriers for epitaxial growth processes |
| 12/14/1999 | US6001175 Crystal producing method and apparatus therefor |
| 12/14/1999 | US6001174 Method for growing a diamond crystal on a rheotaxy template |
| 12/14/1999 | US6001172 Apparatus and method for the in-situ generation of dopants |
| 12/14/1999 | CA2044543C Multi-layer superhard film structure |
| 12/09/1999 | DE19925430A1 Growing light-emitting thin film electroluminescent component using cerium-doped strontium sulfide |
| 12/08/1999 | EP0962558A1 A method for producing a single-crystalline film |
| 12/07/1999 | US5998050 Rare earth (or yttium) barium copper oxide |
| 12/07/1999 | US5997639 Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organometallic precursor compounds |
| 12/07/1999 | US5997638 Localized lattice-mismatch-accomodation dislocation network epitaxy |
| 12/07/1999 | US5997589 Adjustment pumping plate design for the chamber of semiconductor equipment |
| 11/30/1999 | US5994676 Method for calibrating the temperature of an epitaxy reactor |
| 11/30/1999 | US5994158 Controlling gas flow |
| 11/30/1999 | US5993919 Method of synthesizing diamond |
| 11/30/1999 | US5993557 Apparatus for growing single-crystalline semiconductor film |
| 11/30/1999 | US5993555 Apparatus and process for growing silicon epitaxial layer |
| 11/30/1999 | US5993542 Having an excellent quality with a good crystallographic property and no surface roughness or cracks. |
| 11/30/1999 | US5993538 Method of forming single-crystalline thin film using beam irradiating method |
| 11/24/1999 | EP0959151A2 Thin film forming apparatus |
| 11/24/1999 | EP0959148A2 Method for producing diamond films using a vapour-phase synthesis system |
| 11/24/1999 | EP0958401A1 Apparatus and method for high density plasma chemical vapor deposition |
| 11/24/1999 | CN1236481A Forming a crystalline semiconductor film on a glass substrate |
| 11/23/1999 | US5989511 Smooth diamond films as low friction, long wear surfaces |
| 11/23/1999 | US5989338 Method for depositing cell nitride with improved step coverage using MOCVD in a wafer deposition system |
| 11/23/1999 | US5989305 Feeder of a solid organometallic compound |
| 11/23/1999 | CA2177345C Method for the growth of industrial crystals |
| 11/18/1999 | WO1999059196A1 Temperature control system for a thermal reactor |
| 11/18/1999 | WO1999059195A1 Crystal growth method for group-iii nitride and related compound semiconductors |
| 11/17/1999 | EP0957185A2 Apparatus for fabrication of thin film |
| 11/17/1999 | EP0956376A1 A susceptor for a device for epitaxially growing objects and such a device |
| 11/17/1999 | CN1235367A Film forming apparatus and method of forming crystalline silicon film |
| 11/16/1999 | US5985026 Seed crystal for producing monocrystals and method for producing SiC monocrystals or monocrystalline SiC layers |
| 11/11/1999 | WO1999057345A1 Functional element for electric, electronic or optical device and method for manufacturing the same |
| 11/11/1999 | WO1999057343A1 Injector for reactor |
| 11/10/1999 | EP0954948A1 Model based temperature controller for semiconductor thermal processors |
| 11/10/1999 | EP0954366A1 Inlet structures for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system |
| 11/09/1999 | US5982034 Multilayer; strontium, calcium, ruthenium oxide |
| 11/09/1999 | US5981400 Compliant universal substrate for epitaxial growth |
| 11/09/1999 | US5980978 Reacting a grignard reagent with a metal halide in an amine solvent |
| 11/09/1999 | CA2173267C Fluid control system and valve to be used therein |
| 11/03/1999 | EP0953659A2 Apparatus for thin film growth |
| 11/03/1999 | EP0644277B1 Process for producing alpha-alumina |
| 11/02/1999 | US5976957 Evaporating a metal as a catalyst on silicon substrate; heating; oxidation; removal |
| 11/02/1999 | US5976481 Polycrystal silicon rod and production process therefor |
| 10/27/1999 | EP0951631A1 Spherical shaped semiconductor integrated circuit |
| 10/27/1999 | EP0828867A4 Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities |
| 10/26/1999 | US5972109 Growth of bulk single crystals of aluminum nitride |
| 10/20/1999 | EP0951077A2 Method for growing nitride compound semiconductor |
| 10/20/1999 | EP0950132A1 CaTiO 3? INTERFACIAL TEMPLATE STRUCTURE ON SUPERCONDUCTOR |
| 10/19/1999 | US5970314 Process for vapor phase epitaxy of compound semiconductor |
| 10/19/1999 | US5970214 Heating device for semiconductor wafers |
| 10/19/1999 | US5968877 Article comprising substrate sequentially coated with epitaxial buffer layer(s) and high critical temperature (tc) yttrium-barium-copper oxide (ybco) layer |
| 10/19/1999 | US5968277 Susceptor apparatus for epitaxial deposition and method for reducing slip formation on semiconductor substrates |
| 10/14/1999 | WO1999051797A1 A method and a device for epitaxial growth of objects by chemical vapour deposition |