Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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06/06/1995 | US5421893 Susceptor drive and wafer displacement mechanism |
06/06/1995 | US5421365 Flow control apparatus |
06/06/1995 | US5421288 Process for growing silicon epitaxial layer |
05/31/1995 | EP0655514A1 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film |
05/30/1995 | US5420443 Microelectronic structure having an array of diamond structures on a nondiamond substrate and associated fabrication methods |
05/30/1995 | US5420103 A-axis superconductor on a yttrium oxide film |
05/30/1995 | US5419276 Single-crystal diamond of very high thermal conductivity |
05/24/1995 | EP0416128B1 Wafer of compound semiconductor |
05/24/1995 | EP0394462B1 Method of forming a semiconductor thin film and apparatus therefor |
05/23/1995 | US5418430 Plasma generator with field-enhancing electrodes |
05/23/1995 | US5417953 Apparatus and method for synthesizing diamond in supercritical water |
05/23/1995 | US5417770 Photovoltaic device and a forming method thereof |
05/23/1995 | US5417180 Method for forming SOI structure |
05/18/1995 | WO1995013282A1 F-series metal and metal amides for use in mocvd |
05/17/1995 | EP0653500A1 CVD reactor for improved film thickness uniformity deposition |
05/16/1995 | US5415585 Decompression apparatus |
05/16/1995 | US5415127 Method of forming a single crystal film of sodium-beta "-alumina |
05/16/1995 | US5415126 Silicon-cyclobutane |
05/10/1995 | EP0652308A2 Method of and apparatus for forming single-crystalline thin film |
05/04/1995 | WO1995012013A1 Diamond film growth from fullerene precursors |
05/03/1995 | EP0650465A1 Conversion of fullerenes to diamond |
05/02/1995 | US5411590 Gas injectors for reaction chambers in CVD systems |
04/26/1995 | EP0649480A1 Semimetal-semiconductor heterostructures and multilayers |
04/25/1995 | US5409540 Chemical vapor phase growth method and chemical vapor phase growth apparatus |
04/25/1995 | US5409275 Magnetic retaining device for electronic apparatus |
04/20/1995 | WO1995010638A1 Process for the preparation of silicon carbide films using single organosilicon compounds |
04/20/1995 | WO1995010410A1 Pseudomorphic substrates |
04/19/1995 | EP0648215A1 Process for the preparation of trialkyl compounds of group 3a metals. |
04/18/1995 | US5407531 Method of fabricating a compound semiconductor device |
04/12/1995 | EP0647730A2 GaN single crystal |
04/12/1995 | EP0647728A1 Process and apparatus for forming tungsten silicide |
04/11/1995 | US5405654 Self-cleaning chemical vapor deposition apparatus and method |
04/11/1995 | US5405446 Apparatus for heat processing a substrate |
04/11/1995 | US5405445 Vacuum extraction system for chemical vapor deposition reactor vessel and trapping device incorporated therein |
04/11/1995 | US5405444 Process chamber purge module for semiconductor processing equipment |
04/11/1995 | US5404837 Method for preparing a graphite intercalation compound having a metal or metal compounds inserted between adjacent graphite layers |
04/11/1995 | US5404836 Method and apparatus for continuous controlled production of single crystal whiskers |
04/11/1995 | US5404835 Method of making large area single crystalline diamond films |
04/05/1995 | CN1028117C Process for depositing film mainly comprising carbon |
04/04/1995 | US5403399 Method and apparatus for vapor deposition of diamond |
04/04/1995 | US5402749 Ultra-high vacuum/chemical vapor deposition of epitaxial silicon-on-sapphire |
04/04/1995 | US5402748 Method of growing a compound semiconductor film |
03/30/1995 | WO1995008657A1 Method for obtaining diamond and diamond-like films |
03/29/1995 | EP0472666A4 Cvd grown transition metal carbide and nitride whiskers |
03/28/1995 | US5400738 Vapor deposition from hydrocarbon gas, dopant |
03/23/1995 | DE4433523A1 Shape-simulation method, which allows simulation of a prepared shape during steps for producing a semiconductor device in a short time period |
03/23/1995 | DE4331701A1 Process for producing polycrystalline diamond layers |
03/22/1995 | EP0644279A1 Alpha-alumina |
03/22/1995 | EP0644278A1 Alpha-alumina |
03/22/1995 | EP0644277A1 Process for producing alpha-alumina |
03/21/1995 | US5399521 Method of semiconductor layer growth by MBE |
03/21/1995 | US5399430 Boron fibers having improved tensile strength |
03/21/1995 | US5399206 Arsenic passivation for epitaxial deposition of ternary chalcogenide semiconductor films onto silicon substrates |
03/21/1995 | US5399199 Apparatus for gas source molecular beam epitaxy |
03/15/1995 | EP0643143A2 Composite ultrafine particles of nitrides, method for production and sintered article thereof |
03/14/1995 | US5397596 Filling and exhaustion of gas, isolation, backfilling with reactive gas for deposition |
03/14/1995 | US5397558 Contacting hydrogen, oxygen or mixtures with microwaves, deionization or activation, adding carbon to form diamond deposit |
03/14/1995 | US5397428 Nucleation enhancement for chemical vapor deposition of diamond |
03/08/1995 | EP0642154A1 Process for producing group III-V compound semiconductor and group III-V compound semiconductor |
03/07/1995 | US5395481 Method for forming silicon on a glass substrate |
03/07/1995 | US5395452 Apparatus made of silica for semiconductor device fabrication |
03/07/1995 | US5394826 Method of (111) group II-VI epitaxial layer grown on (111) silicon substrate |
03/01/1995 | EP0640610A2 Liquid indium source |
02/28/1995 | US5392730 Method for depositing compound semiconductor crystal |
02/22/1995 | EP0639661A2 Method of forming crystalline silicon carbide coatings at low temperatures |
02/21/1995 | US5391409 Low temperature method for synthesizing diamond with high quality by vapor phase deposition |
02/21/1995 | US5391229 Apparatus for chemical vapor deposition of diamond including graphite substrate holders |
02/21/1995 | US5390626 Low pressure chemical vapor deposition method using a hot-wall |
02/14/1995 | US5389396 InGaAsP/GaAs diode laser |
02/08/1995 | EP0637639A1 A process for the synthesis of diamond |
02/07/1995 | US5387443 Selective high quality growth on any desired region of a base material at lower temperatures; diluting saturated hydrocarbon gas with hydrogen; controlling radiation |
02/07/1995 | US5387310 Method for producing single crystal diamond film |
02/07/1995 | US5387309 Process for the measurement of the thickness and refractive index of a thin film on a substrate, and an apparatus for carrying out the process |
02/01/1995 | EP0637088A1 Anisotropic superconductor device, method of producing the device and fluxon using same |
02/01/1995 | EP0637059A2 Direct MOMBE and MOVPE growth of II-VI materials on silicon |
02/01/1995 | EP0636714A1 Composite metal oxide material |
02/01/1995 | EP0636706A2 Apparatus for chemical vapor deposition of diamond including graphite substrate holders |
02/01/1995 | EP0636705A2 A vertical type vapor phase growth apparatus |
01/26/1995 | WO1995002897A1 Chemical vapor deposition process for fabricating layered superlattice materials |
01/26/1995 | WO1995002896A1 Method for manufacturing semiconductor |
01/26/1995 | WO1995002710A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate |
01/25/1995 | EP0635075A1 Method of coating substrates |
01/24/1995 | US5384151 InGaAsP/GaAs diode laser |
01/24/1995 | US5383421 Method for forming beta-silicon carbide whiskers, singly or in a matrix, using an organotitanium coordination compound catalyst |
01/19/1995 | DE4322150C1 Process for producing epitactically grown, structured, metal-oxidic superconducting layers |
01/18/1995 | EP0633997A1 A rapid thermal processing apparatus for processing semiconductor wafers |
01/17/1995 | US5382911 Reaction chamber interelectrode gap monitoring by capacitance measurement |
01/17/1995 | US5382542 Method of growth of II-VI materials on silicon using As passivation |
01/17/1995 | US5381755 Method of synthesizing high quality, doped diamond and diamonds and devices obtained therefrom |
01/17/1995 | US5381605 Method and apparatus for delivering gas |
01/10/1995 | US5380516 Process for synthesizing diamond in a vapor phase |
01/10/1995 | US5379720 Process for growing semiconductor crystal |
01/10/1995 | US5379718 Method for forming a titanium thin film |
01/05/1995 | DE4421539A1 Verfahren zur Herstellung eines Halbleiters aus einer Verbindung der Gruppe II-VI A process for producing a semiconductor device from a compound of group II-VI |
01/04/1995 | EP0632145A2 Method of forming crystalline silicon carbide coatings |
01/04/1995 | EP0632144A2 Method of purging and pumping vacuum chamber to ultra-high vacuum |
01/03/1995 | US5378651 Comprehensive process for low temperature epitaxial growth |
01/03/1995 | US5378283 Treating device |
01/03/1995 | US5377616 Method for vaporizing and supplying organometal compounds |
12/28/1994 | EP0630994A1 Process for vapor-phase diamond synthesis |