Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
06/1995
06/06/1995US5421893 Susceptor drive and wafer displacement mechanism
06/06/1995US5421365 Flow control apparatus
06/06/1995US5421288 Process for growing silicon epitaxial layer
05/1995
05/31/1995EP0655514A1 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film
05/30/1995US5420443 Microelectronic structure having an array of diamond structures on a nondiamond substrate and associated fabrication methods
05/30/1995US5420103 A-axis superconductor on a yttrium oxide film
05/30/1995US5419276 Single-crystal diamond of very high thermal conductivity
05/24/1995EP0416128B1 Wafer of compound semiconductor
05/24/1995EP0394462B1 Method of forming a semiconductor thin film and apparatus therefor
05/23/1995US5418430 Plasma generator with field-enhancing electrodes
05/23/1995US5417953 Apparatus and method for synthesizing diamond in supercritical water
05/23/1995US5417770 Photovoltaic device and a forming method thereof
05/23/1995US5417180 Method for forming SOI structure
05/18/1995WO1995013282A1 F-series metal and metal amides for use in mocvd
05/17/1995EP0653500A1 CVD reactor for improved film thickness uniformity deposition
05/16/1995US5415585 Decompression apparatus
05/16/1995US5415127 Method of forming a single crystal film of sodium-beta "-alumina
05/16/1995US5415126 Silicon-cyclobutane
05/10/1995EP0652308A2 Method of and apparatus for forming single-crystalline thin film
05/04/1995WO1995012013A1 Diamond film growth from fullerene precursors
05/03/1995EP0650465A1 Conversion of fullerenes to diamond
05/02/1995US5411590 Gas injectors for reaction chambers in CVD systems
04/1995
04/26/1995EP0649480A1 Semimetal-semiconductor heterostructures and multilayers
04/25/1995US5409540 Chemical vapor phase growth method and chemical vapor phase growth apparatus
04/25/1995US5409275 Magnetic retaining device for electronic apparatus
04/20/1995WO1995010638A1 Process for the preparation of silicon carbide films using single organosilicon compounds
04/20/1995WO1995010410A1 Pseudomorphic substrates
04/19/1995EP0648215A1 Process for the preparation of trialkyl compounds of group 3a metals.
04/18/1995US5407531 Method of fabricating a compound semiconductor device
04/12/1995EP0647730A2 GaN single crystal
04/12/1995EP0647728A1 Process and apparatus for forming tungsten silicide
04/11/1995US5405654 Self-cleaning chemical vapor deposition apparatus and method
04/11/1995US5405446 Apparatus for heat processing a substrate
04/11/1995US5405445 Vacuum extraction system for chemical vapor deposition reactor vessel and trapping device incorporated therein
04/11/1995US5405444 Process chamber purge module for semiconductor processing equipment
04/11/1995US5404837 Method for preparing a graphite intercalation compound having a metal or metal compounds inserted between adjacent graphite layers
04/11/1995US5404836 Method and apparatus for continuous controlled production of single crystal whiskers
04/11/1995US5404835 Method of making large area single crystalline diamond films
04/05/1995CN1028117C Process for depositing film mainly comprising carbon
04/04/1995US5403399 Method and apparatus for vapor deposition of diamond
04/04/1995US5402749 Ultra-high vacuum/chemical vapor deposition of epitaxial silicon-on-sapphire
04/04/1995US5402748 Method of growing a compound semiconductor film
03/1995
03/30/1995WO1995008657A1 Method for obtaining diamond and diamond-like films
03/29/1995EP0472666A4 Cvd grown transition metal carbide and nitride whiskers
03/28/1995US5400738 Vapor deposition from hydrocarbon gas, dopant
03/23/1995DE4433523A1 Shape-simulation method, which allows simulation of a prepared shape during steps for producing a semiconductor device in a short time period
03/23/1995DE4331701A1 Process for producing polycrystalline diamond layers
03/22/1995EP0644279A1 Alpha-alumina
03/22/1995EP0644278A1 Alpha-alumina
03/22/1995EP0644277A1 Process for producing alpha-alumina
03/21/1995US5399521 Method of semiconductor layer growth by MBE
03/21/1995US5399430 Boron fibers having improved tensile strength
03/21/1995US5399206 Arsenic passivation for epitaxial deposition of ternary chalcogenide semiconductor films onto silicon substrates
03/21/1995US5399199 Apparatus for gas source molecular beam epitaxy
03/15/1995EP0643143A2 Composite ultrafine particles of nitrides, method for production and sintered article thereof
03/14/1995US5397596 Filling and exhaustion of gas, isolation, backfilling with reactive gas for deposition
03/14/1995US5397558 Contacting hydrogen, oxygen or mixtures with microwaves, deionization or activation, adding carbon to form diamond deposit
03/14/1995US5397428 Nucleation enhancement for chemical vapor deposition of diamond
03/08/1995EP0642154A1 Process for producing group III-V compound semiconductor and group III-V compound semiconductor
03/07/1995US5395481 Method for forming silicon on a glass substrate
03/07/1995US5395452 Apparatus made of silica for semiconductor device fabrication
03/07/1995US5394826 Method of (111) group II-VI epitaxial layer grown on (111) silicon substrate
03/01/1995EP0640610A2 Liquid indium source
02/1995
02/28/1995US5392730 Method for depositing compound semiconductor crystal
02/22/1995EP0639661A2 Method of forming crystalline silicon carbide coatings at low temperatures
02/21/1995US5391409 Low temperature method for synthesizing diamond with high quality by vapor phase deposition
02/21/1995US5391229 Apparatus for chemical vapor deposition of diamond including graphite substrate holders
02/21/1995US5390626 Low pressure chemical vapor deposition method using a hot-wall
02/14/1995US5389396 InGaAsP/GaAs diode laser
02/08/1995EP0637639A1 A process for the synthesis of diamond
02/07/1995US5387443 Selective high quality growth on any desired region of a base material at lower temperatures; diluting saturated hydrocarbon gas with hydrogen; controlling radiation
02/07/1995US5387310 Method for producing single crystal diamond film
02/07/1995US5387309 Process for the measurement of the thickness and refractive index of a thin film on a substrate, and an apparatus for carrying out the process
02/01/1995EP0637088A1 Anisotropic superconductor device, method of producing the device and fluxon using same
02/01/1995EP0637059A2 Direct MOMBE and MOVPE growth of II-VI materials on silicon
02/01/1995EP0636714A1 Composite metal oxide material
02/01/1995EP0636706A2 Apparatus for chemical vapor deposition of diamond including graphite substrate holders
02/01/1995EP0636705A2 A vertical type vapor phase growth apparatus
01/1995
01/26/1995WO1995002897A1 Chemical vapor deposition process for fabricating layered superlattice materials
01/26/1995WO1995002896A1 Method for manufacturing semiconductor
01/26/1995WO1995002710A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate
01/25/1995EP0635075A1 Method of coating substrates
01/24/1995US5384151 InGaAsP/GaAs diode laser
01/24/1995US5383421 Method for forming beta-silicon carbide whiskers, singly or in a matrix, using an organotitanium coordination compound catalyst
01/19/1995DE4322150C1 Process for producing epitactically grown, structured, metal-oxidic superconducting layers
01/18/1995EP0633997A1 A rapid thermal processing apparatus for processing semiconductor wafers
01/17/1995US5382911 Reaction chamber interelectrode gap monitoring by capacitance measurement
01/17/1995US5382542 Method of growth of II-VI materials on silicon using As passivation
01/17/1995US5381755 Method of synthesizing high quality, doped diamond and diamonds and devices obtained therefrom
01/17/1995US5381605 Method and apparatus for delivering gas
01/10/1995US5380516 Process for synthesizing diamond in a vapor phase
01/10/1995US5379720 Process for growing semiconductor crystal
01/10/1995US5379718 Method for forming a titanium thin film
01/05/1995DE4421539A1 Verfahren zur Herstellung eines Halbleiters aus einer Verbindung der Gruppe II-VI A process for producing a semiconductor device from a compound of group II-VI
01/04/1995EP0632145A2 Method of forming crystalline silicon carbide coatings
01/04/1995EP0632144A2 Method of purging and pumping vacuum chamber to ultra-high vacuum
01/03/1995US5378651 Comprehensive process for low temperature epitaxial growth
01/03/1995US5378283 Treating device
01/03/1995US5377616 Method for vaporizing and supplying organometal compounds
12/1994
12/28/1994EP0630994A1 Process for vapor-phase diamond synthesis