Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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10/10/1995 | US5456765 Epitaxial wafer of gallium arsenide phosphide |
10/10/1995 | US5456207 Synthesis of triisopropylindium diisopropyltelluride adduct and use for semiconductor materials |
10/04/1995 | EP0675524A1 Semiconductor wafer process chamber with susceptor back coating |
10/04/1995 | CN1109518A SOI integrate circuit chip material containing diamond film and its making technology |
10/03/1995 | US5455081 Introducing a starting material gas comprising hydrocarbon into Hall accelerator ion source, forming an ion beam; good adhesion to iron containing substrates |
10/03/1995 | US5455072 Initiation and bonding of diamond and other thin films |
10/03/1995 | US5455069 Method of improving layer uniformity in a CVD reactor |
10/03/1995 | CA1337170C Method for forming crystalline deposited film |
09/28/1995 | DE19510919A1 Verfahren zur Herstellung eines AlGaAs-Kristalls und seine Verwendung als Halbleiterlaser und als HBT-Transitor A process for the preparation of a AlGaAs crystal and its use as a semiconductor laser and HBT as Transitor |
09/27/1995 | EP0674028A2 Diamond crystal and method of manufacturing the same |
09/26/1995 | US5453106 Oriented particles in hard surfaces |
09/21/1995 | DE3690606C2 Diamond synthesis by chemical, vapour phase growth |
09/20/1995 | EP0672298A1 Substrates for the growth of 3c-silicon carbide |
09/19/1995 | US5450813 Method for manufacturing nitrogen-doped group II-VI compound semiconductor thin films |
09/13/1995 | EP0671761A1 Apparatus for forming low-temperature oxide films and method of forming low-temperature oxide films |
09/13/1995 | EP0671484A1 Gas flow system for CVD reactor |
09/13/1995 | EP0671481A1 Apparatus and method for chemical vapor deposition of diamond |
09/12/1995 | US5449561 Intermetallics |
09/12/1995 | US5449531 Method of fabricating oriented diamond films on nondiamond substrates and related structures |
09/12/1995 | CA1336949C Method for forming crystal and crystal article obtained by said method |
09/05/1995 | US5447908 Protective coating of carbides or nitrides |
09/05/1995 | US5447117 Crystal article, method for producing the same and semiconductor device utilizing the same |
08/31/1995 | WO1995023427A2 Apparatus for thermal treatment of thin film wafer |
08/30/1995 | EP0669412A1 Aluminim nitride thin film substrate and process for producing same |
08/30/1995 | EP0669287A1 Method and apparatus for supplying gaseous raw material |
08/29/1995 | US5445851 Using oxygen and acetylene gases in combustion flame method, controlling molar ratio and nucleation density on substrate |
08/29/1995 | US5445521 Heat treating method and device |
08/29/1995 | US5445106 Method for making high thermal conducting diamond |
08/24/1995 | WO1995020253A3 Using lasers to fabricate coatings on substrates |
08/23/1995 | EP0668376A1 Process for producing long whiskers of silicon carbide |
08/23/1995 | EP0668372A1 Semi-transparent diamond film |
08/23/1995 | EP0668371A1 Semi-transparent diamond film |
08/23/1995 | EP0531354B1 Process for the measurement of the thickness and refractive index of a thin film on a substrate, and a device for carrying out the process |
08/22/1995 | US5444217 Rapid thermal processing apparatus for processing semiconductor wafers |
08/22/1995 | US5443686 Plasma CVD apparatus and processes |
08/22/1995 | US5443648 Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate |
08/22/1995 | US5443647 Method and apparatus for depositing a refractory thin film by chemical vapor deposition |
08/22/1995 | US5443033 Semiconductor crystal growth method |
08/22/1995 | US5443032 Method for the manufacture of large single crystals |
08/18/1995 | CA2142693A1 Process for producing long fibrous silicon carbide trichites or whiskers |
08/16/1995 | EP0667638A2 Method of etching a compound semiconductor |
08/16/1995 | EP0667405A1 Method of manufacturing aluminum borate whiskers having a reformed surface based upon gamma alumina |
08/15/1995 | US5442199 Heat resistance; vapor deposition of crystalline diamond film on substrate |
08/15/1995 | US5441703 Having conicoidal interior contour which homogeneously widens flow of reactant gases |
08/15/1995 | US5441577 Thin film solar cell and production method therefor |
08/15/1995 | US5441571 Cylindrical apparatus for growth of epitaxial layers |
08/15/1995 | US5441012 Thin film deposition method for wafer |
08/15/1995 | CA1336704C Method of producing sintered hard metal with diamond film |
08/08/1995 | US5439876 Method of making artificial layered high Tc superconductors |
08/08/1995 | US5439753 Vapor deposition of diamond like carbon film on a substrate |
08/08/1995 | US5439492 Wear resistance |
08/08/1995 | US5438952 Method of growing a semiconductor layer and a fabrication method of a semiconductor device using such a semiconductor layer |
08/08/1995 | CA1336568C Organic thin film controlled molecular epitaxy |
08/03/1995 | DE19502865A1 Sealed reactor used to produce silicon@ of semiconductor quality |
08/02/1995 | EP0391906B1 Chemical vapor deposition system |
08/01/1995 | US5438019 Vapor deposition, adsorption, decomposition |
08/01/1995 | US5437728 Apparatus and method for chemical vapor deposition of diamond |
08/01/1995 | US5437710 Filtering gas; controlling gas flow; sensing changes in concentration |
07/28/1995 | CA2114345A1 Solid phase epitaxy reactor, the most cost effective gaas epitaxial growth technology (the) |
07/27/1995 | WO1995020253A2 Using lasers to fabricate coatings on substrates |
07/27/1995 | CA2181440A1 Using lasers to fabricate coatings on substrates |
07/25/1995 | US5435682 Chemical vapor desposition system |
07/25/1995 | US5435264 Process for forming epitaxial BaF2 on GaAs |
07/20/1995 | WO1995019317A1 Aluminium nitride based platelets, process for their preparation and use thereof |
07/18/1995 | US5434126 Thin-film high Tc superconductor comprising a ferroelectric buffer layer |
07/18/1995 | US5434100 Substrate for epitaxy and epitaxy using the substrate |
07/18/1995 | US5434090 Processing chamber for processing semiconductor substrates |
07/18/1995 | US5433784 Vertical treating apparatus having a restricting means for avoiding misalignment |
07/18/1995 | US5433170 Bis/magnesium cyclopentadienyl derivatives |
07/18/1995 | US5433169 Method of depositing a gallium nitride-based III-V group compound semiconductor crystal layer |
07/12/1995 | EP0662532A1 Process for crystal growth of III-V group compound semiconductor |
07/12/1995 | EP0662215A1 Extraction of spatially varying dielectric function from ellipsometric data |
07/11/1995 | US5432120 Method for producing a laterally limited single-crystal region with selective epitaxy and the employment thereof for manufacturing a bipolar transistor as well as a MOS transistor |
07/11/1995 | US5432003 Continuous thin diamond film and method for making same |
07/11/1995 | US5431965 Coreless refractory fibers |
07/11/1995 | US5431738 Apparatus for growing group II-VI mixed compound semiconductor |
07/06/1995 | WO1995018460A1 Thin film formation method |
07/05/1995 | EP0661385A1 Method for forming oxide film |
07/05/1995 | EP0660886A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate |
07/04/1995 | US5429498 Thermal processing system |
06/29/1995 | WO1995017537A1 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films |
06/28/1995 | EP0659911A1 Method to form a polycrystalline film on a substrate |
06/27/1995 | US5427659 Process for the manufacture of devices |
06/27/1995 | US5427054 Vapor deposition by decomposing hydrocarbon, oxygen and hydrogen source and/or boron source for doping |
06/27/1995 | US5427053 Diamond film and method of producing same |
06/22/1995 | WO1995016800A1 Apparatus for heating or cooling wafers |
06/20/1995 | US5426068 Method of manufacturing compound semiconductor wafer |
06/20/1995 | US5425808 Ion implanting pattern of nucleation surface sites on portion of non-nucleation surface, supplying gas phase material to form film, growing mixed crystal compound film only on nucleation surface |
06/20/1995 | US5425803 Device for removing dissolved gas from a liquid |
06/20/1995 | CA1335955C High tc superconductor - gallate crystal structures |
06/14/1995 | EP0656870A1 Methods and apparati for producing fullerenes |
06/13/1995 | US5424561 Magnetic sensor element using highly-oriented diamond film and magnetic detector |
06/13/1995 | US5424243 Method of making a compound semiconductor crystal-on-substrate structure |
06/13/1995 | US5424096 HF-CVD method for forming diamond |
06/13/1995 | US5423914 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film |
06/13/1995 | US5423286 Method for forming crystal and crystal article |
06/13/1995 | US5423284 Method for growing crystals of N-type II-VI compound semiconductors |
06/07/1995 | EP0656431A2 Metal-organic chemical vapor-phase deposition process |
06/06/1995 | US5422081 Trap device for vapor phase reaction apparatus |
06/06/1995 | US5421895 Apparatus for vaporizing liquid raw material and apparatus for forming thin film |