Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
10/1995
10/10/1995US5456765 Epitaxial wafer of gallium arsenide phosphide
10/10/1995US5456207 Synthesis of triisopropylindium diisopropyltelluride adduct and use for semiconductor materials
10/04/1995EP0675524A1 Semiconductor wafer process chamber with susceptor back coating
10/04/1995CN1109518A SOI integrate circuit chip material containing diamond film and its making technology
10/03/1995US5455081 Introducing a starting material gas comprising hydrocarbon into Hall accelerator ion source, forming an ion beam; good adhesion to iron containing substrates
10/03/1995US5455072 Initiation and bonding of diamond and other thin films
10/03/1995US5455069 Method of improving layer uniformity in a CVD reactor
10/03/1995CA1337170C Method for forming crystalline deposited film
09/1995
09/28/1995DE19510919A1 Verfahren zur Herstellung eines AlGaAs-Kristalls und seine Verwendung als Halbleiterlaser und als HBT-Transitor A process for the preparation of a AlGaAs crystal and its use as a semiconductor laser and HBT as Transitor
09/27/1995EP0674028A2 Diamond crystal and method of manufacturing the same
09/26/1995US5453106 Oriented particles in hard surfaces
09/21/1995DE3690606C2 Diamond synthesis by chemical, vapour phase growth
09/20/1995EP0672298A1 Substrates for the growth of 3c-silicon carbide
09/19/1995US5450813 Method for manufacturing nitrogen-doped group II-VI compound semiconductor thin films
09/13/1995EP0671761A1 Apparatus for forming low-temperature oxide films and method of forming low-temperature oxide films
09/13/1995EP0671484A1 Gas flow system for CVD reactor
09/13/1995EP0671481A1 Apparatus and method for chemical vapor deposition of diamond
09/12/1995US5449561 Intermetallics
09/12/1995US5449531 Method of fabricating oriented diamond films on nondiamond substrates and related structures
09/12/1995CA1336949C Method for forming crystal and crystal article obtained by said method
09/05/1995US5447908 Protective coating of carbides or nitrides
09/05/1995US5447117 Crystal article, method for producing the same and semiconductor device utilizing the same
08/1995
08/31/1995WO1995023427A2 Apparatus for thermal treatment of thin film wafer
08/30/1995EP0669412A1 Aluminim nitride thin film substrate and process for producing same
08/30/1995EP0669287A1 Method and apparatus for supplying gaseous raw material
08/29/1995US5445851 Using oxygen and acetylene gases in combustion flame method, controlling molar ratio and nucleation density on substrate
08/29/1995US5445521 Heat treating method and device
08/29/1995US5445106 Method for making high thermal conducting diamond
08/24/1995WO1995020253A3 Using lasers to fabricate coatings on substrates
08/23/1995EP0668376A1 Process for producing long whiskers of silicon carbide
08/23/1995EP0668372A1 Semi-transparent diamond film
08/23/1995EP0668371A1 Semi-transparent diamond film
08/23/1995EP0531354B1 Process for the measurement of the thickness and refractive index of a thin film on a substrate, and a device for carrying out the process
08/22/1995US5444217 Rapid thermal processing apparatus for processing semiconductor wafers
08/22/1995US5443686 Plasma CVD apparatus and processes
08/22/1995US5443648 Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate
08/22/1995US5443647 Method and apparatus for depositing a refractory thin film by chemical vapor deposition
08/22/1995US5443033 Semiconductor crystal growth method
08/22/1995US5443032 Method for the manufacture of large single crystals
08/18/1995CA2142693A1 Process for producing long fibrous silicon carbide trichites or whiskers
08/16/1995EP0667638A2 Method of etching a compound semiconductor
08/16/1995EP0667405A1 Method of manufacturing aluminum borate whiskers having a reformed surface based upon gamma alumina
08/15/1995US5442199 Heat resistance; vapor deposition of crystalline diamond film on substrate
08/15/1995US5441703 Having conicoidal interior contour which homogeneously widens flow of reactant gases
08/15/1995US5441577 Thin film solar cell and production method therefor
08/15/1995US5441571 Cylindrical apparatus for growth of epitaxial layers
08/15/1995US5441012 Thin film deposition method for wafer
08/15/1995CA1336704C Method of producing sintered hard metal with diamond film
08/08/1995US5439876 Method of making artificial layered high Tc superconductors
08/08/1995US5439753 Vapor deposition of diamond like carbon film on a substrate
08/08/1995US5439492 Wear resistance
08/08/1995US5438952 Method of growing a semiconductor layer and a fabrication method of a semiconductor device using such a semiconductor layer
08/08/1995CA1336568C Organic thin film controlled molecular epitaxy
08/03/1995DE19502865A1 Sealed reactor used to produce silicon@ of semiconductor quality
08/02/1995EP0391906B1 Chemical vapor deposition system
08/01/1995US5438019 Vapor deposition, adsorption, decomposition
08/01/1995US5437728 Apparatus and method for chemical vapor deposition of diamond
08/01/1995US5437710 Filtering gas; controlling gas flow; sensing changes in concentration
07/1995
07/28/1995CA2114345A1 Solid phase epitaxy reactor, the most cost effective gaas epitaxial growth technology (the)
07/27/1995WO1995020253A2 Using lasers to fabricate coatings on substrates
07/27/1995CA2181440A1 Using lasers to fabricate coatings on substrates
07/25/1995US5435682 Chemical vapor desposition system
07/25/1995US5435264 Process for forming epitaxial BaF2 on GaAs
07/20/1995WO1995019317A1 Aluminium nitride based platelets, process for their preparation and use thereof
07/18/1995US5434126 Thin-film high Tc superconductor comprising a ferroelectric buffer layer
07/18/1995US5434100 Substrate for epitaxy and epitaxy using the substrate
07/18/1995US5434090 Processing chamber for processing semiconductor substrates
07/18/1995US5433784 Vertical treating apparatus having a restricting means for avoiding misalignment
07/18/1995US5433170 Bis/magnesium cyclopentadienyl derivatives
07/18/1995US5433169 Method of depositing a gallium nitride-based III-V group compound semiconductor crystal layer
07/12/1995EP0662532A1 Process for crystal growth of III-V group compound semiconductor
07/12/1995EP0662215A1 Extraction of spatially varying dielectric function from ellipsometric data
07/11/1995US5432120 Method for producing a laterally limited single-crystal region with selective epitaxy and the employment thereof for manufacturing a bipolar transistor as well as a MOS transistor
07/11/1995US5432003 Continuous thin diamond film and method for making same
07/11/1995US5431965 Coreless refractory fibers
07/11/1995US5431738 Apparatus for growing group II-VI mixed compound semiconductor
07/06/1995WO1995018460A1 Thin film formation method
07/05/1995EP0661385A1 Method for forming oxide film
07/05/1995EP0660886A1 Growing a nitrogen doped epitaxial ii-vi compound layer on a single crystal substrate
07/04/1995US5429498 Thermal processing system
06/1995
06/29/1995WO1995017537A1 Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films
06/28/1995EP0659911A1 Method to form a polycrystalline film on a substrate
06/27/1995US5427659 Process for the manufacture of devices
06/27/1995US5427054 Vapor deposition by decomposing hydrocarbon, oxygen and hydrogen source and/or boron source for doping
06/27/1995US5427053 Diamond film and method of producing same
06/22/1995WO1995016800A1 Apparatus for heating or cooling wafers
06/20/1995US5426068 Method of manufacturing compound semiconductor wafer
06/20/1995US5425808 Ion implanting pattern of nucleation surface sites on portion of non-nucleation surface, supplying gas phase material to form film, growing mixed crystal compound film only on nucleation surface
06/20/1995US5425803 Device for removing dissolved gas from a liquid
06/20/1995CA1335955C High tc superconductor - gallate crystal structures
06/14/1995EP0656870A1 Methods and apparati for producing fullerenes
06/13/1995US5424561 Magnetic sensor element using highly-oriented diamond film and magnetic detector
06/13/1995US5424243 Method of making a compound semiconductor crystal-on-substrate structure
06/13/1995US5424096 HF-CVD method for forming diamond
06/13/1995US5423914 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film
06/13/1995US5423286 Method for forming crystal and crystal article
06/13/1995US5423284 Method for growing crystals of N-type II-VI compound semiconductors
06/07/1995EP0656431A2 Metal-organic chemical vapor-phase deposition process
06/06/1995US5422081 Trap device for vapor phase reaction apparatus
06/06/1995US5421895 Apparatus for vaporizing liquid raw material and apparatus for forming thin film