| Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302) |
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| 07/30/1996 | US5540059 Method and apparatus for supplying gaseous raw material |
| 07/24/1996 | EP0723039A2 Compound semiconductor substrate and process of producing same |
| 07/23/1996 | US5539154 Fluorinated silicon nitride films |
| 07/23/1996 | US5538230 Silicon carbide carrier for wafer processing |
| 07/18/1996 | WO1996021757A1 Rotatable susceptor with integrated ferromagnetic element |
| 07/18/1996 | CA2206828A1 Rotatable susceptor with integrated ferromagnetic element |
| 07/16/1996 | US5536330 Method of purging and pumping vacuum chamber to ultra-high vacuum |
| 07/16/1996 | US5536320 Processing apparatus |
| 07/10/1996 | EP0720665A1 Method for obtaining diamond and diamond-like films |
| 07/09/1996 | US5534079 Doped silicides or germanides for semiconductors |
| 07/09/1996 | US5534074 Vertical boat for holding semiconductor wafers |
| 07/04/1996 | WO1996020298A1 Method of producing boron-doped monocrystalline silicon carbide |
| 07/03/1996 | EP0720212A2 Method of manufacturing semiconductor devices |
| 07/02/1996 | US5531184 Method for producing synthetic diamond thin film, the thin film and device using it |
| 06/26/1996 | EP0718642A1 Diffractive optics |
| 06/19/1996 | EP0717126A2 Apparatus for low pressure chemical vapor deposition |
| 06/18/1996 | US5527559 Method of depositing a diamond film on a graphite substrate |
| 06/18/1996 | US5527396 Deposited film forming apparatus |
| 06/18/1996 | US5526768 Method for providing a silicon and diamond substrate having a carbon to silicon transition layer and apparatus thereof |
| 06/13/1996 | WO1996017973A1 Reactor for the vapor phase deposition (cvd) of thin layers |
| 06/13/1996 | WO1996017969A2 Method and equipment for growing thin films |
| 06/11/1996 | US5525815 Diamond film structure with high thermal conductivity |
| 06/11/1996 | US5525537 Process of producing diamond composite structure for electronic components |
| 06/11/1996 | US5525157 Gas injectors for reaction chambers in CVD systems |
| 06/11/1996 | US5525156 Apparatus for epitaxially growing a chemical compound crystal |
| 06/06/1996 | WO1996017107A1 Method and apparatus for growing thin films |
| 06/06/1996 | WO1996017106A1 Apparatus for growing thin films |
| 06/05/1996 | EP0715342A2 Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same |
| 06/05/1996 | EP0715335A1 System for processing a workpiece in a plasma |
| 06/05/1996 | EP0715006A1 Substrates and methods for gas phase deposition |
| 06/05/1996 | EP0714998A2 CVD processing chamber |
| 06/05/1996 | CN1123848A Apparatus for growing thin-film crystal by vapor deposition of metallorganic compound |
| 06/05/1996 | CN1123847A Hot wire process for growing diamond |
| 06/04/1996 | US5523160 Highly-oriented diamond film |
| 06/04/1996 | US5523121 Smooth surface CVD diamond films and method for producing same |
| 06/04/1996 | US5522215 Substrate cooling apparatus |
| 05/30/1996 | DE19543723A1 Verfahren zur Herstellung einkristalliner Diamantfilme A process for producing single-crystal diamond films |
| 05/30/1996 | DE19543722A1 Verfahren zur Herstellung von Substraten zur Bildung einkristalliner Diamantfilme durch chemisches Aufdampfen Process for the preparation of substrates for forming a single-crystal diamond films by chemical vapor deposition |
| 05/28/1996 | US5520742 Thermal processing apparatus with heat shielding member |
| 05/23/1996 | WO1996010659A3 An epitaxial reactor, susceptor and gas-flow system |
| 05/22/1996 | CN1122849A Vapor growth apparatus and vapor growth method capable of growing a compound semicondcutor layer having an evenness and an interfacial sharpness in units of atomic layers with good productivity |
| 05/21/1996 | US5518766 Diamond |
| 05/21/1996 | US5518549 Susceptor and baffle therefor |
| 05/15/1996 | EP0711854A1 Epitaxial wafer and method for the preparation thereof |
| 05/15/1996 | EP0711853A1 Method for growing gallium nitride compound semiconductor crystal, and gallium nitride compound semiconductor device |
| 05/14/1996 | US5516722 Method for increasing doping uniformity in a flow flange reactor |
| 05/14/1996 | US5516554 Cyclic hot-filament CVD of diamond |
| 05/14/1996 | US5516283 Apparatus for processing a plurality of circular wafers |
| 05/07/1996 | US5514350 Apparatus for making nanostructured ceramic powders and whiskers |
| 05/05/1996 | CA2135125A1 Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film |
| 05/01/1996 | EP0709879A1 Method for manufacturing semiconductor |
| 05/01/1996 | EP0709489A1 Method and apparatus for vapor phase growth |
| 05/01/1996 | EP0709488A1 Method and apparatus for thin film growth |
| 05/01/1996 | EP0708983A1 Chemical vapor deposition process for fabricating layered superlattice materials |
| 04/30/1996 | US5512541 Homoepitaxial and heteroepitaxial growth |
| 04/30/1996 | US5512375 Pseudomorphic substrates |
| 04/25/1996 | WO1996012055A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 04/25/1996 | CA2201905A1 Apparatus for growing metal oxides using organometallic vapor phase epitaxy |
| 04/24/1996 | EP0708488A1 Epitaxial growth of semiconductor |
| 04/17/1996 | EP0707097A1 MBE apparatus and MBE method |
| 04/17/1996 | EP0706425A1 Selective plasma deposition |
| 04/16/1996 | US5508255 Barium, yttrium, copper oxide films; microwave and radiofrequency applications |
| 04/16/1996 | US5507987 Method of making a free-standing diamond film with reduced bowing |
| 04/16/1996 | US5507639 Heat treatment apparatus and method thereof |
| 04/11/1996 | WO1996010659A2 An epitaxial reactor, susceptor and gas-flow system |
| 04/10/1996 | EP0705917A1 Method for making high thermal conducting diamond |
| 04/10/1996 | EP0705916A1 Diamond film structure with high thermal conductivity |
| 04/10/1996 | EP0705915A1 Electron emissive film |
| 04/09/1996 | US5506389 Thermal processing furnace and fabrication method thereof |
| 04/09/1996 | US5505159 Growing intermetallic from reacting a group 3 halide with a group 5 hydride; exciting stretching vibration of hydride in beam, aligning orientation of molecules |
| 04/09/1996 | US5505158 Apparatus and method for achieving growth-etch deposition of diamond using a chopped oxygen-acetylene flame |
| 04/04/1996 | DE19536253A1 Epitaxial crystal growth for semiconductor lasers and SHF applications |
| 04/03/1996 | EP0704887A2 A method and device for controlling tensile and compressive stresses and mechanical problems in thin films on substrates |
| 04/03/1996 | EP0704554A1 Wafer supporting boat |
| 04/03/1996 | EP0662215A4 Extraction of spatially varying dielectric function from ellipsometric data. |
| 04/03/1996 | EP0511294B1 Heating apparatus for semiconductor wafers or substrates |
| 04/02/1996 | US5504346 Insitu detection of tube sagging in semiconductor diffusion furnace using a laser beam that is blocked when tube sags |
| 03/27/1996 | EP0702775A1 Apparatus for thermal treatment of thin film wafer |
| 03/26/1996 | US5502227 Liquid indium source |
| 03/26/1996 | US5501173 Method for epitaxially growing α-silicon carbide on a-axis α-silicon carbide substrates |
| 03/21/1996 | DE4432813A1 Chemical-vapour-deposition of monocrystal silicon-carbide film |
| 03/19/1996 | US5499601 Method for vapor phase synthesis of diamond |
| 03/14/1996 | WO1996007661A1 Formation of a metalorganic compound for growing epitaxial semiconductor layers |
| 03/14/1996 | WO1996007660A1 Metalorganic compounds |
| 03/13/1996 | EP0701008A2 Epitaxy for growing compound semiconductors and an InP substrate for epitaxial growth |
| 03/12/1996 | US5498909 Semiconductor device and method of manufacturing such semiconductor device |
| 03/12/1996 | US5498568 Method of producing a compound semiconductor crystal layer with a steep heterointerface |
| 03/07/1996 | WO1996007202A1 Methods and systems for monitoring and controlling layer formation using p-polarized reflectance spectroscopy |
| 03/07/1996 | WO1996006732A1 Oriented crystal assemblies |
| 03/07/1996 | DE19532761A1 Verfahren zum Herstellen einer Halbleiterschicht, Verfahren zum Herstellen eines Halbleiterlasers und Halbleiterlaser A method for fabricating a semiconductor layer, A method of manufacturing a semiconductor laser and semiconductor laser |
| 03/06/1996 | EP0699777A1 Method and apparatus of forming thin films |
| 03/06/1996 | EP0699776A1 Wafer and method of producing a wafer |
| 03/05/1996 | US5496410 Plasma processing apparatus and method of processing substrates by using same apparatus |
| 03/05/1996 | US5496408 Mass flow controllers, vapor deposition onto semiconductor substrates |
| 03/05/1996 | US5495824 Method for forming semiconductor thin film |
| 03/05/1996 | US5495822 Method of selectively growing Si epitaxial film |
| 02/29/1996 | DE4447177A1 Blue-emitting gallium nitride epitaxial layer growth |
| 02/28/1996 | EP0698674A2 Chemical vapor deposition apparatus and method for exclusion of deposition and contamination from the backside and periphery of the wafers |
| 02/28/1996 | EP0698296A1 Preparation of nucleated silicon surfaces |
| 02/27/1996 | US5494524 Vertical heat treatment device for semiconductor |