Patents for C30B 23 - Single-crystal growth by condensing evaporated or sublimed materials (5,192)
04/2002
04/09/2002US6368406 Nanocrystalline intermetallic powders made by laser evaporation
04/09/2002US6367267 Integrated phase separator for ultra high vacuum system
04/04/2002US20020038892 Boride-based substrate for growing semiconducting layers thereon and a semiconductor devise using the same
04/04/2002US20020038627 Apparatus for growing low defect density silicon carbide
04/02/2002US6365478 Solid state electronic device fabrication using crystalline defect control
03/2002
03/28/2002WO2002024984A1 Tool and method for in situ vapor phase deposition source material reloading and maintenance
03/28/2002WO2002024983A2 Integrated phase separator for ultra high vacuum system
03/28/2002WO2001094658A3 Process for production of fullerene coatings
03/28/2002US20020037249 Method of producing oxide whiskers, oxide whiskers, and photoelectric conversion apparatus
03/28/2002US20020036281 Spin electronic material and fabrication method thereof
03/27/2002EP1191579A2 Solid state electronic device fabrication using crystalline defect control
03/27/2002EP1191120A2 In situ purification of compound phosphorus source for solid source molecular beam epitaxy
03/27/2002EP1099014B1 Method and device for producing at least one silicon carbide monocrystal
03/26/2002US6361598 Method for preparing high temperature superconductor
03/21/2002WO2002023603A1 Method for the epitaxy of (indium, aluminum, gallium) nitride on foreign substrates
03/21/2002WO2002022918A1 Nanocrystalline intermetallic powders made by laser evaporation
03/21/2002US20020034861 Method of growing p-type ZnO based oxide semiconductor layer and method of manufacturing semiconductor light emitting device
03/20/2002EP0950132A4 CaTiO 3? INTERFACIAL TEMPLATE STRUCTURE ON SUPERCONDUCTOR
03/19/2002US6358822 Method of epitaxially growing III-V compound semiconductor containing nitrogen and at least another group V element utilizing MBE
03/19/2002US6358378 Method for fabricating ZnO thin film for ultraviolet detection and emission source operated at room temperature, and apparatus therefor
03/14/2002WO2002021575A2 Method of producing silicon carbide and various forms thereof
03/14/2002WO2002020880A1 Production of low defect epitaxial films
03/14/2002WO2002020879A1 Production method for composite oxide thin film and device therefor and composite oxide film produced thereby
03/14/2002WO2001043165A3 Oxide films containing p-type dopant and process for preparing same
03/14/2002US20020031680 Zinc oxide films containing p-type dopant and process for preparing same
03/14/2002US20020031615 Process for production of ultrathin protective overcoats
03/07/2002WO2002019352A1 Magnetic semiconductor material and method for preparation thereof
03/07/2002WO2002018678A1 Method for preparing single crystal oxide thin film
03/07/2002WO2002018668A1 Titanium dioxide cobalt magnetic film and its manufacturing method
03/07/2002US20020028531 Vapor, vacuum deposition in presence of metallic surfactant
03/07/2002US20020026899 Apparatus and method for coating substrates with vacuum depositable materials
03/07/2002DE10041285A1 Verfahren zur Epitaxie von (Indium, Aluminium, Gallium)-nitrid-Schichten auf Fremdsubstraten A process for the epitaxial growth of (indium, aluminum, gallium) nitride layers on foreign substrates
03/06/2002EP1183717A1 Method for the growth of a thin silicon oxide layer on a silicon substrate surface and double reactor machine
03/05/2002US6352884 Method for growing crystals having impurities and crystals prepared thereby
02/2002
02/28/2002US20020025621 Radical cell device and method for manufacturing groups II-VI compound semiconductor device
02/28/2002US20020025594 Method for growing ZnO based oxide semiconductor layer and method for manufacturing semiconductor light emitting device using the same
02/28/2002US20020023581 Method for growing low defect density silicon carbide
02/27/2002EP1182282A1 Method of crystal growth, method of forming fine semiconductor structure, semiconductor device, and system
02/27/2002EP1181401A2 Semi-insulating silicon carbide without vanadium domination
02/21/2002DE10037566A1 Substratheizung zum gleichzeitig beidseitigen Beheizen eines Wafers Substrate heater to heat a wafer simultaneously on both sides
02/20/2002EP0948671B1 Method for preparation of metal intercalated fullerene-like metal chalcogenides
02/14/2002WO2002012598A1 Epitaxial wafer apparatus
02/07/2002WO2001065590A3 Esrf source for ion plating epitaxial deposition
02/07/2002US20020015866 Method of growing a semiconductor layer
02/07/2002US20020015852 Multilayer thin film and its fabrication process as well as electron device
02/07/2002US20020015793 Method of manufacturing metallic film consisting of giant single crystal grains
02/07/2002US20020014199 Method for growing an alpha-SiC bulk single crystal
02/06/2002EP1178520A2 Substrate heating system for heating simultaneously both sides of a wafer
02/06/2002EP1178129A1 Polycrystalline thin film and method for preparation thereof, and superconducting oxide and method for preparation thereof
02/05/2002US6344085 Device and method for producing at least one SiC single crystal
02/05/2002US6344084 Combinatorial molecular layer epitaxy device
02/01/2002WO2001011116A1 Epitaxial growing method for growing aluminum nitride and growing chamber therefor
02/01/2002CA2383400A1 Epitaxial growing method for growing aluminum nitride and growing chamber therefor
01/2002
01/31/2002WO2002009159A2 Thin-film metallic oxide structure and process for fabricating same
01/31/2002WO2002008121A2 A method for shaping a nanotube and a nanotube shaped thereby
01/31/2002WO2002008120A2 Telescoped multiwall nanotube and manufacture thereof
01/31/2002WO2001055472A3 Method and apparatus for in-situ deposition of epitaxial thin film of high-temperature superconductors and other complex oxides under high-pressure
01/31/2002WO2000008691A9 Zinc oxide films containing p-type dopant and process for preparing same
01/31/2002US20020011201 Controlled source for material processing
01/30/2002EP1176231A2 A boride-based substrate for growing semiconducting layers thereon and a semiconductor device using the same
01/30/2002EP1176230A1 Method of preparing crystalline alkaline earth metal oxides on an Si substrate
01/29/2002US6342313 Oxide films and process for preparing same
01/29/2002US6342265 Apparatus and method for in-situ thickness and stoichiometry measurement of thin films
01/23/2002EP0720418B1 Manufacturing method for ternary compound films
01/22/2002US6340393 Method for synthesizing n-type diamond having low resistance
01/17/2002WO2002005296A1 Ultraviolet-transparent conductive film and process for producing the same
01/17/2002WO2001026164A3 Control of oxide layer reaction rates
01/17/2002US20020006733 Ferroelectric film on silicon substrate
01/17/2002US20020005566 Process for growing epitaxial gallium nitride and composite wafers
01/10/2002WO2001008169A3 Superconductor coated conductors with reduced a.c. loss
01/08/2002US6337991 Temperature sensor comprising single crystal substrate, buffer layer comprising cerium dioxide, yttrium barium copper oxide layer, epitaxial thin film of oxide having perovskite structure which undergoes ferromagnetic phase transition
01/08/2002US6336971 Method and apparatus for producing silicon carbide single crystal
01/03/2002WO2002001608A2 METHOD FOR ACHIEVING IMPROVED EPITAXY QUALITY (SURFACE TEXTURE AND DEFECT DENSITY) ON FREE-STANDING (ALUMINUM, INDIUM, GALLIUM) NITRIDE ((Al,In,Ga)N) SUBSTRATES FOR OPTO-ELECTRONIC AND ELECTRONIC DEVICES
01/03/2002US20020001977 Forming a nanowire under thermal conditions and under non-catalytic conditions; catalysts for selective dehydrogenation of ethanol to acetaldehyde such as copper on silica
01/03/2002US20020001680 Process for production of ultrathin protective overcoats
01/03/2002US20020000189 Method of pulling up silicon single crystal and method of manufacturing epitaxial wafer
01/02/2002CN1329683A Simulated diamond gemstones formed of aluminum nitride and aluminium nitride silicon carbide alloys
12/2001
12/27/2001US20010054384 Vaporiser for generating feed gas for an arc chamber
12/27/2001US20010054375 Method of suppressing convection in a fluid in a cylindrical vessel
12/26/2001CN1076850C Ferroelectric thin film and their preparation method
12/25/2001US6333111 Method of producing layered aluminum fine particles and use thereof
12/19/2001EP1164620A2 Plasma display panel suitable for high-quality display and production method
12/19/2001EP1164211A1 Method for growing single crystal of silicon carbide
12/19/2001EP1164210A2 A method of growing a semiconductor layer
12/13/2001WO2001095380A1 Preparation method of a coating of gallium nitride
12/13/2001WO2001094658A2 Process for production of fullerene coatings
12/12/2001EP1161986A2 Apparatus for combinatorial molecular beam epitaxy
12/12/2001EP0947466B1 Process for producing carbon nanotubes, process for producing carbon nanotube film, and structure provided with carbon nanotube film
12/11/2001US6329088 Silicon carbide epitaxial layers grown on substrates offcut towards <1{overscore (1)}00>
12/11/2001CA2019077C Coated cutting insert
12/06/2001WO2001092608A2 Method and apparatus for preparation of binary and higher order compounds and devices fabricated using same
12/06/2001WO2001091922A2 Process for production of ultrathin protective overcoats
12/06/2001WO2001026165A3 Method and apparatus for forming buffer layers
12/06/2001US20010049201 Separating the GaN layer from the sapphire substrate by radiating a laser onto the back side of the sapphire substrate.
12/06/2001US20010049029 Process control
12/06/2001US20010047751 Method of producing device quality (a1) ingap alloys on lattice-mismatched substrates
12/05/2001EP0650465B1 Conversion of fullerenes to diamond
11/2001
11/29/2001WO2001008232A3 Surface conditioning process for making multi-layer articles
11/29/2001WO2001008170A3 Enhanced purity oxide buffer layer formation
11/29/2001DE10024857A1 Production of a partially single crystalline silicon carbide layer in a silicon wafer comprises preparing a silicon wafer, implanting carbon ions into the wafer by ion implantation, and subjecting the wafer to a thermal radiation source
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