| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
|---|
| 07/19/2007 | US20070163992 Method and device for contacting semiconductor chips |
| 07/19/2007 | US20070163716 Gas distribution apparatuses and methods for controlling gas distribution apparatuses |
| 07/19/2007 | US20070163714 Etch chamber |
| 07/19/2007 | US20070163713 Gas supply system and processing system |
| 07/19/2007 | US20070163617 Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning |
| 07/19/2007 | US20070163501 Plasma processing apparatus |
| 07/17/2007 | US7245416 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
| 07/17/2007 | US7245358 Substrate support system |
| 07/17/2007 | US7244475 Plasma treatment apparatus and control method thereof |
| 07/17/2007 | US7244367 Metal alloy elements in micromachined devices |
| 07/17/2007 | US7244336 Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift |
| 07/17/2007 | US7244335 Substrate processing system and substrate processing method |
| 07/17/2007 | US7244311 Heat transfer system for improved semiconductor processing uniformity |
| 07/17/2007 | US7243610 Plasma device and plasma generating method |
| 07/12/2007 | WO2007078572A2 Apparatus and method for controlling plasma density profile |
| 07/12/2007 | WO2007078355A2 Microetching composition and method of using the same |
| 07/12/2007 | WO2007077612A1 Porous valve metal thin film, method for production thereof and thin film capacitor |
| 07/12/2007 | WO2007038321A3 Ultrapure colloidal silica for use in chemical mechanical polishing applications |
| 07/12/2007 | WO2006081149A3 Novel polishing slurries and abrasive-free solutions having a multifunctional activator |
| 07/12/2007 | US20070161253 Method of fabricating a trench isolation layer in a semiconductor device |
| 07/12/2007 | US20070160454 Substrate carrying device, substrate carrying method and computer-readable storage medium |
| 07/12/2007 | US20070158307 Method for selective etching |
| 07/12/2007 | US20070158306 Method of forming a metal line and method of manufacturing display substrate having the same |
| 07/12/2007 | US20070158305 Apparatus and method for plasma treating a substrate |
| 07/12/2007 | US20070158304 Etch selectivity enhancement in electron beam activated chemical etch |
| 07/12/2007 | US20070158303 Structural modification using electron beam activated chemical etch |
| 07/12/2007 | US20070158302 Systems and methods for gas assisted resist removal |
| 07/12/2007 | US20070158027 Plasma treatment device |
| 07/12/2007 | US20070158026 Processing apparatus |
| 07/12/2007 | US20070157957 Substrate transfer robot and apparatus having the substrate transfer robot for cleaning a substrate |
| 07/12/2007 | US20070157886 Substrate support assembly with thermal isolating plate |
| 07/12/2007 | US20070157845 Containing an optionally substituted bis(1H-tetrazole), e.g., 5,5'-bi(1H-tetrazole); 5,5'-azobis(mercaptotetrazole); and 5,5'-dithiobis(1-chlorotetrazole); improved heat resistance, adhesion to resin and solder wettability |
| 07/11/2007 | CN1998069A Method of plasma etch endpoint detection using a V-I probe diagnostics |
| 07/11/2007 | CN1997771A Methods for the optimization of substrate etching in a plasma processing system |
| 07/11/2007 | CN1995459A Solution for removing printing board surface adhesion palladium and removing method |
| 07/11/2007 | CN1995458A Method for promoting rustless steel surface hydrophilicity |
| 07/11/2007 | CN1994759A Process for producing patterns on surface of metal faucet |
| 07/11/2007 | CN1994486A 'I' structured three-dimensional micro solid/hollow silicon needle and silicon knife |
| 07/11/2007 | CN1326224C Interferometric endpoint detection in a substrate etching process |
| 07/11/2007 | CN1325697C Etching agent composition and method for producing reflective plate using the same etching liquid composition |
| 07/10/2007 | CA2227873C Method for removal of surface layers of metallic coatings |
| 07/05/2007 | WO2007075586A2 Flexible circuit |
| 07/05/2007 | WO2006036820A3 Methods and apparatus for monitoring a process in a plasma processing system by measuring impedance |
| 07/05/2007 | US20070155181 Method and system for etching high-k dielectric materials |
| 07/05/2007 | US20070155178 Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same |
| 07/05/2007 | US20070151950 Etching apparatus for use in manufacture of flat panel display device and manufacturing method using the same |
| 07/05/2007 | US20070151949 Semiconductor processes and apparatuses thereof |
| 07/05/2007 | US20070151948 Method of selectively stripping a metallic coating |
| 07/05/2007 | US20070151947 Method for setting plasma chamber having an adaptive plasma source, plasma etching method using the same and manufacturing method for adaptive plasma source |
| 07/05/2007 | US20070151946 Method for monitoring edge bead removal process of copper metal interconnection |
| 07/05/2007 | US20070151669 Vacuum processing apparatus |
| 07/05/2007 | US20070151515 Multi-chamber semiconductor device fabrication apparatus comprising wafer-cooling blade |
| 07/04/2007 | EP1803838A2 Method of selectively stripping a metallic coating |
| 07/04/2007 | EP1601471A4 Gas gate for isolating regions of differing gaseous pressure |
| 07/04/2007 | EP0860867B1 Surface treatment for micromachining |
| 07/04/2007 | CN1993786A Process for producing aluminum electrode foil for capacitor and aluminum foil for etching |
| 07/04/2007 | CN1992152A Etching apparatus for use in manufacture of flat panel display device and manufacturing method using the same |
| 07/04/2007 | CN1992150A Film etching method |
| 07/04/2007 | CN1324662C Method for etching side wall and method for forming semiconductor structure |
| 07/04/2007 | CN1324164C Copper or copper alloy corrodent and corrosion method |
| 07/04/2007 | CN1324114C Plasma-assisted joining |
| 07/04/2007 | CN1324105C Multiple process polishing solution for chemical mechanical planarization |
| 07/03/2007 | US7238295 Regeneration process of etching solution, etching process, and etching system |
| 07/03/2007 | US7238294 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface |
| 07/03/2007 | US7238092 Low-force electrochemical mechanical processing method and apparatus |
| 06/28/2007 | WO2006020424A3 Multi-gas distribution injector for chemical vapor deposition reactors |
| 06/28/2007 | US20070149001 Flexible circuit |
| 06/28/2007 | US20070148985 Method of manufacturing trench structure for device |
| 06/28/2007 | US20070148980 Method for fabricating semiconductor device with bulb-shaped recess gate |
| 06/28/2007 | US20070148979 Method for fabricating semiconductor device having top round recess pattern |
| 06/28/2007 | US20070148978 Slurry compositions, methods of polishing polysilicon layers using the slurry compositions and methods of manufacturing semiconductor devices using the slurry compositions |
| 06/28/2007 | US20070148974 Hardmask compositions for resist underlayer films |
| 06/28/2007 | US20070145900 RF Plasma Supply Device |
| 06/28/2007 | US20070145584 Printed wiring board, method for manufacturing same, and circuit device |
| 06/28/2007 | US20070145362 Passive electronic devices |
| 06/28/2007 | US20070145013 Method for polishing workpiece, polishing apparatus and method for manufacturing semiconductor device |
| 06/28/2007 | US20070145011 Chemical mechanical polishing system and process |
| 06/28/2007 | US20070145008 Techniques Of Anisotropic Wet Etch Micromachining For Comb Drive Transducers And Resonance Frequency Reduction |
| 06/28/2007 | US20070145007 Semiconductor structure |
| 06/28/2007 | US20070145006 Plasma etching apparatus |
| 06/28/2007 | US20070145005 Controlling system and method for operating the same |
| 06/28/2007 | US20070145004 Method for fabricating thin film pattern and method for fabricating flat panel display device using the same |
| 06/28/2007 | US20070145003 Method of etching semiconductor device |
| 06/28/2007 | US20070145002 Multi-printed etch mask process to pattern features |
| 06/28/2007 | US20070144673 Apparatus for fabricating flat panel display and method for preventing substrate damage using the same |
| 06/28/2007 | US20070144672 Plasma producing method and apparatus as well as plasma processing apparatus |
| 06/28/2007 | US20070144671 Shower plate, plasma processing apparatus, and product manufacturing method |
| 06/28/2007 | US20070144441 Methods and arrangement for implementing highly efficient plasma traps |
| 06/28/2007 | US20070144439 Cartesian cluster tool configuration for lithography type processes |
| 06/28/2007 | US20070144435 Adjusting mechanism and adjusting method thereof |
| 06/27/2007 | EP1800067A1 Method and system for wafer temperature control |
| 06/27/2007 | EP1799446A2 System for thinning a semiconductor workpiece |
| 06/27/2007 | CN1989587A Blocker plate bypass to distribute gases in a chemical vapor deposition system |
| 06/27/2007 | CN1989274A Electrolytically recoverable etching solution |
| 06/27/2007 | CN1323424C Chip protection device |
| 06/27/2007 | CN1323423C Chip protection device |
| 06/27/2007 | CN1323191C Metal surface treatment method and metal structure unit with surface formed by using said method |
| 06/26/2007 | US7235138 Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
| 06/26/2007 | US7235137 Conductor treating single-wafer type treating device and method for semi-conductor treating |
| 06/26/2007 | US7234413 Plasma processing apparatus |