Patents for C23F 1 - Etching metallic material by chemical means (16,062)
03/2008
03/13/2008US20080060759 Electron beam enhanced surface wave plasma source
03/12/2008CN101139715A Metal scavenger composition and method for producing the same
03/12/2008CN101139714A Copper etching liquid composition and production method thereof
03/12/2008CN101139713A Etching liquid and method for manufacturing patterned conductive layer using the same
03/12/2008CN101139712A Stripping method
03/12/2008CN101139711A Method for producing improved radio-frequency cable inner conductor pipe
03/12/2008CN100375247C Plasma processing method and plasma processing device
03/12/2008CN100374624C Method for preventing elution of lead and/or nickel from copper alloy piping material such as valve or pipe joint and copper alloy piping material, and fluid for use in cleaning piping material
03/12/2008CN100374622C Lithographic apparatus and method to determine beam size and divergence
03/11/2008US7341633 Apparatus for electroless deposition
03/06/2008WO2008026542A1 Etchant and etching process
03/06/2008US20080057274 Micro-channel chip and a process for producing the same
03/06/2008US20080053959 Method for low temperature bonding and bonded structure
03/06/2008US20080053958 Plasma processing apparatus
03/06/2008US20080053955 Method for enlarging a nano-structure
03/06/2008US20080053614 Surface Processing Apparatus
03/06/2008US20080053509 Combined thermal diodic and thermoenergy devices and methods for manufacturing same
03/06/2008DE102006040830A1 Verfahren zur Aufarbeitung einer Ätzmischung, die bei der Herstellung von hochreinem Silicium anfällt A process for working up an etching mixture which is obtained in the production of high purity silicon
03/05/2008EP1895577A1 Etching composition for metal material and method for manufacturing semiconductor device by using same
03/05/2008EP1894900A2 Catalyst-aided chemical processing method and apparatus
03/05/2008EP1177112A4 Remote plasma generator
03/05/2008CN201031254Y Quick mounting type lolliconveying light sheet etching conveying device
03/05/2008CN101137770A Segmented radio frequency electrode apparatus and method for uniformity control
03/05/2008CN101134930A Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
03/05/2008CN100373557C Etch amount detection method, etching method, and etching system
03/04/2008US7339758 Etching method, a substrate with a plurality of concave portions, a microlens substrate, a transmission screen and a rear projection
03/04/2008US7338614 Vapor HF etch process mask and method
03/04/2008US7338612 Door skin, a method of etching a plate for forming a wood grain pattern in the door skin, and an etched plate formed therefrom
03/04/2008US7338576 Plasma processing device
03/04/2008US7338575 Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
03/04/2008US7337745 Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor
02/2008
02/28/2008US20080050301 Silicon Carbide Single Crystal and Method of Etching the Same
02/28/2008US20080048687 Probe, method of manufacturing the probe and probe card having the probe
02/28/2008US20080047934 Silicon wafer etching method and apparatus, and impurity analysis method
02/28/2008US20080047931 In-situ oxidized textured surface for prosthetic devices
02/28/2008US20080047930 Method to form a pattern of functional material on a substrate
02/28/2008DE10194846B4 Verfahren zur Oberflächenbehandlung eines rostfreien Stahlprodukts für eine Brennstoffzelle A process for surface treatment of a stainless steel product for a fuel cell
02/27/2008CN101130871A Fluorine surface etchant for semiconductor and preparation method thereof
02/27/2008CN101130870A Laminated film
02/27/2008CN100372074C Method for monitoring plasma etching platform after prevention and maintenance process
02/27/2008CN100371809C An etchant for a wire, a method for manufacturing the wire and a method for manufacturing a thin film transistor array panel including the method
02/27/2008CN100371795C Conductive element substrate,liquid crystal display method for manufacturing liquid crystal display, and electronic information equipment
02/27/2008CN100371491C Pulsed plasma processing method and apparatus
02/26/2008US7335277 Vacuum processing apparatus
02/26/2008US7335267 Heat treating apparatus having rotatable heating unit
02/21/2008WO2008021668A2 Heating and cooling of substrate support
02/21/2008WO2006039193A3 Rf ground switch for plasma processing system
02/21/2008US20080044321 Power supply unit for generating plasma and plasma apparatus including the same
02/21/2008US20080041824 Microetching composition and method of using the same
02/21/2008US20080041821 Gas Distribution System for Improved Transient Phase Deposition
02/21/2008US20080041818 Method for pattern formation
02/21/2008US20080041816 Systems and methods for manufacturing wire grid polarizers
02/21/2008US20080041527 Antenna of plasma processing apparatus
02/20/2008CN101128622A Etching chamber with subchamber
02/20/2008CN101126161A Method for etching super-thick polysilicon
02/19/2008US7332440 Wet etching apparatus and method
02/19/2008US7332098 Phase shift mask and fabricating method thereof
02/19/2008US7332055 Substrate processing apparatus
02/19/2008US7331751 Vacuum processing method
02/19/2008US7331307 Thermally sprayed member, electrode and plasma processing apparatus using the electrode
02/19/2008US7331306 Plasma processing method and apparatus
02/14/2008US20080038930 Method of ashing an object and apparatus for performing the same
02/14/2008US20080038925 Methods and apparatus for igniting a low pressure plasma
02/14/2008US20080035610 Substrate processing apparatus and substrate processing method
02/14/2008US20080035609 System And Method for Selective Etching Of Silicon Nitride During Substrate Processing
02/14/2008US20080035607 Method and Apparatus for the Etching of Microstructures
02/14/2008US20080035605 Exhaust Assembly for Plasma Processing System and Method
02/14/2008US20080035603 Apparatus for spraying etchant and use method thereof
02/14/2008US20080035306 Heating and cooling of substrate support
02/14/2008DE102006037294A1 Etching device comprises reaction chamber in which a wafer substrate can be processed, light source, and a light detector comprising microscope optics, a camera and a filter, which is transparent for selective light of wavelength region
02/13/2008EP1252358A4 System and method for depositing inorganic/organic dielectric films
02/13/2008CN101124661A Carbon-doped-Si oxide etch using H2 additive in fluorocarbon etch chemistry
02/13/2008CN101123173A Spraying and erosion local protection method and device for semiconductor part chip table
02/13/2008CN101122027A Copper surface hydrophilic finishing agent and method
02/13/2008CN101122026A Polysilicon planarization solution for planarizing low temperature polysilicon film panel
02/13/2008CN101122025A Titanium alloying milling solution and milling technique used for the same
02/13/2008CN101122024A Processing device for processing fluid and substrate processing device having the same
02/13/2008CN101122021A Method for preparing nano titanium oxide film by medical nickel-titanium memory alloy surface in situ denickeling
02/13/2008CN101122017A Chemical treatment method for aluminum alloy surface
02/13/2008CN101121572A Die produced glass model core and regeneration method thereof
02/13/2008CN101121108A Vacuum processing apparatus
02/13/2008CN100369215C Adsorption stripping process for removing exposed zone polymer
02/13/2008CN100368598C Copper or copper alloy surface tiny-etching treatment fluid for smoothing
02/13/2008CN100367907C Microelectrode making method and apparatus
02/12/2008US7329361 Method and apparatus for fabricating or altering microstructures using local chemical alterations
02/07/2008WO2008016747A2 Method and system for controlling the uniformity of a ballistic electron beam by rf modulation
02/07/2008WO2007096095A3 Etching solution and method for structuring a ubm layer system
02/07/2008US20080032236 Method and apparatus for solid-state microbattery photolithographic manufacture, singulation and passivation
02/07/2008US20080032109 Method for Coating Blanks for the Production of Printed Circuit Boards (Pcb)
02/07/2008US20080029487 comprising at least one of hydrogen fluoride, nitric acid, ammonium fluoride and ammonium chloride; makes fine treatment on multilayer film, including tungsten film and a silicon oxide film, possible by controlling the etching rate
02/07/2008US20080029486 Light collimating and diffusing film and system for making the film
02/07/2008US20080029484 In-situ process diagnostics of in-film aluminum during plasma deposition
02/07/2008US20080029483 Method of treating a mask layer prior to performing an etching process
02/07/2008US20080029219 Apparatus for spraying etchant solution onto preformed printed circuit board
02/06/2008EP1883718A2 Method and composition for improving adhesion of organic polymer coatings with copper surface
02/06/2008CN101117714A Dry etcher including etching device and cleaning device
02/06/2008CN101116858A Surface treating method of the aluminum alloy decorative sheet
02/06/2008CN100367469C Method of plasma etching
02/05/2008US7326359 Lacquer of metal dissolving etchant locally reacts with metallic layer and dissolved metal remains within multilayer structure, dissolution of the metal allows creation of window in metallic layer without washing, partial demetallization is suitable to be carried out on gravure or flexo printing presses
02/05/2008US7326358 Plasma processing method and apparatus, and storage medium
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