| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 02/26/2009 | US20090053901 High dose implantation strip (hdis) in h2 base chemistry |
| 02/26/2009 | US20090053900 Processing Apparatus and Processing Method |
| 02/26/2009 | US20090053835 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 02/26/2009 | US20090053655 Methods for forming patterned structures |
| 02/26/2009 | US20090053471 Micro and nano structures in an elastomeric material |
| 02/26/2009 | US20090053395 Method and System for Imaging a Cross Section of a Specimen |
| 02/26/2009 | US20090051530 Article tagging |
| 02/26/2009 | US20090050603 Mask trimming with arl etch |
| 02/26/2009 | US20090050270 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
| 02/26/2009 | DE10043148B4 Verfahren zur Erhöhung der Korrosionsbeständigkeit eines Werkstücks aus Titan oder einer Titanlegierung und Verwendung des Verfahrens A method for increasing the corrosion resistance of a workpiece made of titanium or a titanium alloy and use of the method |
| 02/25/2009 | EP2027306A2 Plasma reactor with a dynamically adjustable plasma source power applicator |
| 02/25/2009 | CN101372746A Copper resource cyclic regeneration method in manufacture process |
| 02/25/2009 | CN101372745A Method for adjusting etching bias |
| 02/24/2009 | US7495239 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
| 02/24/2009 | US7494597 Method and apparatus for etching disk-like member |
| 02/24/2009 | US7494596 Measurement of etching |
| 02/24/2009 | US7494594 Method of manufacturing an electrostatic actuator |
| 02/24/2009 | US7494575 Method for manufacturing a split probe |
| 02/24/2009 | US7494562 Vapor phase growth apparatus |
| 02/24/2009 | US7494561 Plasma processing apparatus and method, and electrode plate for plasma processing apparatus |
| 02/24/2009 | US7494549 Substrate treatment apparatus and substrate treatment method |
| 02/19/2009 | WO2009023135A1 Apparatus for wafer level arc detection at an rf bias impedance match to the pedestal electrode |
| 02/19/2009 | WO2009023073A1 Microetching composition and method of using the same |
| 02/19/2009 | US20090047731 Cellular electrophysiological measurement device and method for manufacturing the same |
| 02/19/2009 | US20090047479 Mems sensor and production method of mems sensor |
| 02/19/2009 | US20090046883 Surface micromachined differential microphone |
| 02/19/2009 | US20090045165 Semiconductor device manufacturing method and storage medium |
| 02/19/2009 | US20090044909 Plasma processing apparatus |
| 02/18/2009 | EP2024281A1 Potassium monopersulfate solutions |
| 02/18/2009 | CN101370965A Apparatus for the removal of a set of byproducts from a substrate edge and methods therefor |
| 02/18/2009 | CN101369613A Method for preparing polysilicon solar battery suede in magnetic field |
| 02/18/2009 | CN101368889A Method for displaying high-strength vessel slab original austenite crystal grain |
| 02/18/2009 | CN101368271A Green triazole carbon steel restrainer and use thereof |
| 02/18/2009 | CN100463119C Anisotropic wet etching of silicon |
| 02/18/2009 | CN100462475C Apparatus and method for plasma processing |
| 02/17/2009 | US7491344 Method for etching an object using a plasma and an object etched by a plasma |
| 02/17/2009 | US7491292 Apparatus for catching byproducts in semiconductor device fabrication equipment |
| 02/17/2009 | US7491291 Apparatus for trapping residual products in semiconductor device fabrication equipment |
| 02/12/2009 | WO2007127294A9 Exhaust system |
| 02/12/2009 | US20090042091 Supported catalyst layers for direct oxidation fuel cells |
| 02/12/2009 | US20090041986 Method of making hierarchical articles |
| 02/12/2009 | US20090041640 Plasma processing apparatus |
| 02/12/2009 | US20090041624 Fluidic structure and method for production of a fluid structure |
| 02/12/2009 | US20090040704 Printed circuit board, method of fabricating the same, and electronic apparatus employing the same |
| 02/12/2009 | US20090039057 Method of increasing etchability of metals having chemical etching resistant microstructure |
| 02/12/2009 | US20090039055 Method For Making An Aligned Carbon Nanotube |
| 02/12/2009 | US20090038641 Substrate Cleaning Apparatus, Substrate Cleaning Method, Substrate Processing System, and Storage Medium |
| 02/11/2009 | EP2022447A1 Nanosurface |
| 02/11/2009 | EP2021298A1 Polishing piezoelectric material |
| 02/11/2009 | CN100461494C Mask for vapour-deposition and producing method thereof |
| 02/11/2009 | CN100461364C Multiple zone carrier head with flexible membrane |
| 02/10/2009 | US7488429 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium |
| 02/05/2009 | WO2007131057A3 Vacuum processing chamber suitable for etching high aspect ratio features and components of same |
| 02/05/2009 | US20090035859 Method and devices for preventing restenosis in cardiovascular stents |
| 02/05/2009 | US20090035525 Apparatus, system, and method for dna shadow nanolithography |
| 02/05/2009 | US20090032499 Low Friction Coatings for Use in Dental and Medical Devices |
| 02/05/2009 | US20090032498 Spin Processing Method And Apparatus |
| 02/05/2009 | US20090032492 Apparatus and method for wet-chemical processing of flat, thin substrates in a continuous method |
| 02/04/2009 | CN101361170A Method for production of nano-porous substrate |
| 02/04/2009 | CN101358348A Surface treating method of electronic apparatus shell |
| 02/04/2009 | CN101358285A Stripping method of metal copper foil on waste epoxy circuit board |
| 02/04/2009 | CN101358284A Stripping method of metal copper foil on waste phenolic circuit board |
| 02/04/2009 | CN100459068C Etchant, replenishment solution and method for producing copper wiring using the same |
| 02/04/2009 | CN100458565C Acoustooptic frequency modulation single exposure imaging interference photo-etching method and system thereof |
| 02/04/2009 | CN100457211C I-shaped structured three-dimensional micro solid/hollow silicon needle and silicon knife |
| 02/03/2009 | US7485238 Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
| 02/03/2009 | US7485204 ECR plasma source and ECR plasma device |
| 02/03/2009 | US7485189 Thin film deposition device using an FTIR gas analyzer for mixed gas supply |
| 01/29/2009 | US20090029528 Method and apparatus for cleaning a substrate surface |
| 01/29/2009 | US20090029487 Semiconductor production method and semiconductor production device |
| 01/29/2009 | US20090029471 Microelectromechanical devices useful for manipulating cells or embryos, kits thereof, methods of making same, and methods of use thereof |
| 01/29/2009 | US20090026170 Plasma processing apparatus and method of plasma distribution correction |
| 01/29/2009 | US20090025876 Methods and apparatus for in situ substrate temperature monitoring by electromagnetic radiation emission |
| 01/29/2009 | DE102004023286B4 Behälter zum Aufnehmen und Speichern von Flüssigkeiten sowie viskosen Stoffen, insbesondere von Trink- und Abwasser oder Kraftstoff, ein Verfahren zu dessen Herstellung und dessen Verwendung Container for receiving and storing liquids and viscous materials, in particular of drinking water and waste water, or fuel, a process for its preparation and its use |
| 01/28/2009 | CN201186951Y Tin-stripping solution adding apparatus for outer layer etching |
| 01/28/2009 | CN101356304A Optical metrological scale and laser-based manufacturing method therefor |
| 01/28/2009 | CN101356303A Method of forming a recessed structure employing a reverse tone process |
| 01/28/2009 | CN101353795A Method for extracting copper from printed circuit board acidic spent etching solution and preparing poly ferric chloride |
| 01/28/2009 | CN101353794A Austenitic stainless steel metallographic etchant, preparing method and use thereof |
| 01/28/2009 | CN101352981A Heat bimetallic strip steel surface printing technique |
| 01/28/2009 | CN100456434C Semiconductor etching apparatus |
| 01/28/2009 | CN100455700C Chemical process of nickel-titanium alloy material |
| 01/27/2009 | US7482279 Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask |
| 01/27/2009 | US7481944 Etch amount detection method, etching method, and etching system |
| 01/27/2009 | US7481904 Plasma device |
| 01/27/2009 | US7480974 Methods of making gas distribution members for plasma processing apparatuses |
| 01/22/2009 | WO2009011398A1 Composite of metal with resin and process for producing the same |
| 01/22/2009 | WO2008143659A3 Plasma generator apparatus |
| 01/22/2009 | US20090023265 Etching solution for removal of oxide film, method for preparing the same, and method of fabricating semiconductor device |
| 01/22/2009 | US20090020503 Substrate etching apparatus and substrate etching method |
| 01/22/2009 | US20090020501 Method of forming passage in substrate for mems module |
| 01/22/2009 | US20090020499 Method to Fabricate a Redirecting Mirror in Optical Waveguide Devices |
| 01/22/2009 | US20090020226 Etching Apparatus |
| 01/21/2009 | EP2016161A1 Acidic cleaner for metal surfaces |
| 01/21/2009 | CN101351573A Stephanoporate valve metallic thin-film and manufacturing method thereof as well as thin-film capacitor |
| 01/21/2009 | CN101350291A Apparatus for processing substrate |
| 01/21/2009 | CN101350290A Substrate processing apparatus |
| 01/21/2009 | CN101348902A Diffuser plate with slit valve compensation |
| 01/21/2009 | CN100453701C Wet method pattern technology of chrome-nickel alloy thin film |
| 01/21/2009 | CN100453694C Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof |