| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 02/02/2006 | US20060024478 Composite, ordered material having sharp surface features |
| 02/02/2006 | US20060023371 High sensitivity spin valve designs with ion beam treatment |
| 02/02/2006 | US20060023353 Method and apparatus for providing a write head having well-defined, precise write head pole tips |
| 02/02/2006 | US20060021971 Method for plasma treatment of a carbon layer |
| 02/02/2006 | US20060021968 Time continuous ion-ion plasma |
| 02/02/2006 | US20060021967 fabricating an imprint stamp using controlled thin film deposition, lithographic patterning, and etching to form an imprint stamp that includes an application specific imprint pattern. |
| 02/02/2006 | US20060021966 Production process and production system of magnetic recording medium |
| 02/02/2006 | US20060021962 Method of fabricating a sharp protrusion |
| 02/02/2006 | US20060021961 Micromechanical component and method for manufacturing such a component |
| 02/02/2006 | US20060021705 Substrate mounting apparatus and control method of substrate temperature |
| 02/02/2006 | US20060021704 Method and apparatus for etching Si |
| 02/02/2006 | US20060021703 Dual gas faceplate for a showerhead in a semiconductor wafer processing system |
| 02/02/2006 | US20060021702 Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor |
| 02/02/2006 | US20060021701 Dual-chamber plasma processing apparatus |
| 02/02/2006 | US20060021700 Plasma processing apparatus and method |
| 02/02/2006 | DE10326767B4 Verfahren zur Regenerierung von eisenhaltigen Ätzlösungen zur Verwendung beim Ätzen oder Beizen von Kupfer oder Kupferlegierungen sowie eine Vorrichtung zur Durchführung desselben Of the same method for regenerating etching solutions containing iron for the use in etching or pickling copper or copper alloys, as well as an apparatus for performing |
| 02/01/2006 | EP1622192A1 Substrate transfer device of thin-film forming apparatus |
| 02/01/2006 | EP1620257A2 A method of adding mass to mems structures |
| 02/01/2006 | CN1239747C Surface treatment agent for copper and copper alloy |
| 02/01/2006 | CN1239746C Technology of selective lead removed for running water pipe fitting made of copper alloy and lead removal liquid |
| 02/01/2006 | CN1239320C Composite comprising aluminium alloy and resin and method for manufacturing the same |
| 01/31/2006 | US6992016 Chemical processing method, and method of manufacturing semiconductor device |
| 01/31/2006 | US6991740 Method for reducing removal forces for CMP pads |
| 01/26/2006 | US20060019178 Method of repairing phase shift mask |
| 01/26/2006 | US20060016783 Process for titanium nitride removal |
| 01/26/2006 | US20060016782 Methods and compositions for dicing through lithographic micro-machining |
| 01/26/2006 | US20060016781 Dry etching method |
| 01/26/2006 | US20060016561 Semiconductor etching apparatus |
| 01/26/2006 | US20060016560 Plasma processing apparatus |
| 01/26/2006 | US20060016559 Plasma processing apparatus |
| 01/26/2006 | US20060016558 Endpoint detecting device in semiconductor manufacturing system |
| 01/26/2006 | US20060016459 High rate etching using high pressure F2 plasma with argon dilution |
| 01/26/2006 | DE10232220B4 Vorrichtung und Verfahren zur direkten Rückgewinnung der Chemikalien, die sich beim Betrieb von Anlagen der Galvano- Oberflächentechnik in Absauganlagen ablagern Apparatus and method for direct recovery of the chemicals that are deposited in the operation of facilities electroplating surface technology in extraction systems |
| 01/25/2006 | EP1619268A2 Process for titanium nitride removal |
| 01/25/2006 | EP1442344B1 Method and device for treating objects by means of a liquid |
| 01/25/2006 | CN1726302A Method of cleaning a coated process chamber component |
| 01/25/2006 | CN1725442A Process for titanium nitride removal |
| 01/25/2006 | CN1725306A Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium |
| 01/25/2006 | CN1724706A Method for enhancing fluorine utilization |
| 01/25/2006 | CN1238755C Method of forming metal wire of LCD device |
| 01/25/2006 | CN1238560C Solution used for platinum chemical mechanical polishing |
| 01/24/2006 | US6989683 of wafers; circuit with a variable capacitor that sets the initial phase angle of the measurement circuit to about zero and alters the phase angle; improved detection under noisy conditions |
| 01/24/2006 | US6988342 Door skin, a method of etching a plate for forming a wood grain pattern in the door skin, and an etched plate formed therefrom |
| 01/19/2006 | WO2006007355A1 Method for providing uniform removal of organic material |
| 01/19/2006 | US20060011585 Method for controlling ph during planarization and cleaning of microelectronic substrates |
| 01/19/2006 | US20060011583 Materials and gas chemistries for processing systems |
| 01/19/2006 | US20060011582 Fast isotropic etching system and process for large, non-circular substrates |
| 01/19/2006 | US20060011580 Plasma processing method and post-processing method |
| 01/19/2006 | US20060011576 Method and apparatus for stone engraving |
| 01/19/2006 | US20060011299 Ultra high speed uniform plasma processing system |
| 01/19/2006 | US20060011298 Showerhead with branched gas receiving channel and apparatus including the same for use in manufacturing semiconductor substrates |
| 01/19/2006 | US20060011297 Semiconductor manufacturing apparatus |
| 01/19/2006 | US20060011296 Substrate processing apparatus, substrate processing method, and computer program |
| 01/19/2006 | DE102004030924A1 Elektrolytisch regenerierbare Ätzlösung Electrolytically reclaimable etching solution |
| 01/18/2006 | EP1616189A2 Implementation of microfluidic components, including molecular fractionation devices, in a microfluidic system |
| 01/18/2006 | EP1229970A4 A golf club head with a face composed of a forged material |
| 01/18/2006 | CN1722361A Substrate processing device and method, and pattern forming method |
| 01/18/2006 | CN1721574A Aqueous solution composition for treating metal surface |
| 01/18/2006 | CN1721493A Multiple process polishing solution for chemical mechanical planarization |
| 01/18/2006 | CN1237207C Silver alloy etching solution |
| 01/18/2006 | CN1236845C Bis (perfluoroalkanesulfonyl)imides and their salts as surfactants/additives for applications having extreme environments and methods thereof |
| 01/17/2006 | US6986609 optical module, in which grooves of different depths are included so as to prevent a convex corner phenomenon without compensation patterns, and a substrate is passed through the grooves or etched to a predetermined depth to form a stoppper hole |
| 01/17/2006 | US6986202 Method of fabricating a micro-electromechanical fluid ejection device |
| 01/12/2006 | US20060009039 Etching method, etching apparatus, and method for manufacturing semiconductor device |
| 01/12/2006 | US20060009004 Method of forming trench isolation within a semiconductor substrate |
| 01/12/2006 | US20060005930 Substrate supporting structure for semiconductor processing, and plasma processing device |
| 01/12/2006 | US20060005929 Plasma processing device and plasma generating method |
| 01/12/2006 | US20060005928 Apparatus and methods for improving the stability of RF power delivery to a plasma load |
| 01/12/2006 | US20060005927 Plasma processing apparatus, control method thereof and program for performing same |
| 01/12/2006 | US20060005926 Gas distributor and apparatus using the same |
| 01/12/2006 | US20060005856 Reduction of reactive gas attack on substrate heater |
| 01/12/2006 | US20060005771 Apparatus and method of shaping profiles of large-area PECVD electrodes |
| 01/11/2006 | EP1614766A1 Method for forming porous thin film |
| 01/11/2006 | EP1613792A2 Methods and apparatus for atomic layer deposition |
| 01/11/2006 | CN1720352A Aqueous composition for the chemical removal of metallic surfacing present on turbine blades, and its use |
| 01/11/2006 | CN1718869A Surface treated aluminum material and mfg.method thereof |
| 01/11/2006 | CN1718858A High petential magnesium alloy sacrificial anode material and its manufacturing method |
| 01/10/2006 | US6984588 Compositions for oxide CMP |
| 01/10/2006 | US6983718 Electron beam physical vapor deposition apparatus |
| 01/05/2006 | WO2006002153A1 Probes for use in scanning probe microscopes and methods of fabricating such probes |
| 01/05/2006 | WO2006000364A1 Electrolytically recoverable etching solution |
| 01/05/2006 | US20060003593 Method and apparatus for stripping photo-resist |
| 01/05/2006 | US20060003592 System and method for processing a substrate using supercritical carbon dioxide processing |
| 01/05/2006 | US20060000807 Energy enhanced surface planarization |
| 01/05/2006 | US20060000806 Substrate carrier for surface planarization |
| 01/05/2006 | US20060000805 Method and apparatus for stable plasma processing |
| 01/05/2006 | US20060000803 Plasma processing method and apparatus |
| 01/05/2006 | US20060000800 Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units |
| 01/05/2006 | US20060000553 Minimizing particle contamination of semiconductor wafers during pressure evacuation by selective orientation and shielding |
| 01/05/2006 | US20060000552 Plasma processing apparatus and cleaning method thereof |
| 01/05/2006 | US20060000551 Methods and apparatus for optimal temperature control in a plasma processing system |
| 01/04/2006 | EP1611992A1 Method of forming a molding surface for a composite shingle mold |
| 01/04/2006 | CN1717789A Plasma processing apparatus and method, and electrode plate for plasma processing apparatus |
| 01/04/2006 | CN1716009A Etching composition for laminated film including reflective electrode and method for forming laminated wiring structure |
| 12/29/2005 | WO2005124827A2 Improved method and apparatus for the etching of microstructures |
| 12/29/2005 | US20050287815 Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes |
| 12/29/2005 | US20050287389 Method for preventing elution of lead and/or nickel from copper alloy piping material such as valve or pipe joint and copper alloy piping material, and fluid for use in cleaning piping material |
| 12/29/2005 | US20050284844 Cleaning composition for semiconductor components and process for manufacturing semiconductor device |
| 12/29/2005 | US20050284842 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium |
| 12/29/2005 | US20050284577 Glass support system, method of supporting glass, and etching equipment using the same |