Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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11/17/2005 | US20050255705 Prevention of electrostatic wafer sticking in plasma deposition/etch tools |
11/17/2005 | US20050252884 Method and system for predicting process performance using material processing tool and sensor data |
11/17/2005 | US20050252609 Apparatus and method for demetallizing a metallized film |
11/17/2005 | US20050251990 Plasma uniformity control by gas diffuser hole design |
11/17/2005 | DE102004020768A1 Plasmareaktor mit hoher Produktivität Plasma reactor with high productivity |
11/16/2005 | EP1595976A1 Film-forming apparatus component and method for cleaning same |
11/16/2005 | EP1595974A2 Plasma uniformity control by gas diffuser hole design |
11/16/2005 | CN1697153A Multiple zone carrier head with flexible membrane |
11/16/2005 | CN1696349A Etching liquid for removing oxyde film, and its prepn. method and method of mfg. semiconductor device |
11/16/2005 | CN1696348A Etching solution for silver alloy |
11/16/2005 | CN1696347A Controllable type etching equipment of microbe |
11/16/2005 | CN1696346A Wet etching equipment |
11/15/2005 | US6964724 Etching and cleaning methods and etching and cleaning apparatuses used therefor |
11/15/2005 | CA2292381C Method of removing hot corrosion products from a diffusion aluminide coating |
11/10/2005 | WO2005106081A1 Method and system for selectively coating or etching surfaces |
11/10/2005 | WO2005061378A3 Equipment and process for creating a custom sloped etch in a substrate |
11/10/2005 | US20050247675 Treatment of dies prior to nickel silicide formation |
11/10/2005 | US20050247672 Plasma etching method |
11/10/2005 | US20050247667 Apparatus and method for treating substrate |
11/09/2005 | CN1694228A Electric liquid chamber and method of processing substrate in the chamber |
11/09/2005 | CN1226456C Hydrogen peroxide soaking process for separating waste zinc containing nickel alloy sheet |
11/09/2005 | CN1226455C Method for reeliminating residual polymer by carbon fluoride reaction gas etching technology |
11/09/2005 | CN1226454C Method and device of monitoring ion concentration in etching cavity body in sputtering etching process |
11/09/2005 | CN1226453C Technology for generating vein on Al alloy surface by direct chemical etching |
11/08/2005 | US6962823 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
11/08/2005 | US6961981 electrically connecting electrodes formed on a resonator piece; short circuit prevention; layering the resonator piece with two electrodes, a dielectric, noble metal and metal under layers; etching a resistive mask; surface coating |
11/03/2005 | WO2005103333A2 Wafer heater assembly |
11/03/2005 | WO2005103332A2 Improved micro-fluid ejection assemblies |
11/03/2005 | WO2005021156A3 Capillary imprinting technique |
11/03/2005 | WO2005000363B1 Atmospheric pressure non-thermal plasma device to clean and sterilize the surface of probes, cannulas, pin tools, pipettes and spray heads |
11/03/2005 | US20050244756 Etch rate control |
11/03/2005 | US20050244274 Method for removing aluminide coating from metal substrate and turbine engine part so treated |
11/03/2005 | US20050242062 Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method |
11/03/2005 | US20050242060 Plasma processing method |
11/03/2005 | US20050241955 Substrate processing apparatus and substrate processing method |
11/03/2005 | US20050241770 Substrate cleaning apparatus and method |
11/03/2005 | US20050241769 Plasma processing apparatus and plasma processing method |
11/03/2005 | US20050241768 High frequency plasma generator and high frequency plasma generating method |
11/03/2005 | US20050241767 Multi-piece baffle plate assembly for a plasma processing system |
11/03/2005 | US20050241766 Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing |
11/03/2005 | US20050241765 Apparatus including showerhead electrode and heater for plasma processing |
11/03/2005 | US20050241764 Baffle to reduce azimuthal etch asymmetry |
11/03/2005 | US20050241762 Alternating asymmetrical plasma generation in a process chamber |
11/03/2005 | US20050241760 Wet etching system |
11/03/2005 | US20050241679 Applying a chromous or aluminum ferrous material; using alkaline solution and oxidizer; spraying |
11/03/2005 | DE102004018817A1 Removing material substrate surface for manufacturing semiconductor integrated circuits and devices by introducing pressurized processing solution in vessel to expose surface to processing solution |
11/02/2005 | EP1592050A1 Method for manufacturing semi-transparent semi-reflective electrode substrate, reflective element substrate, method for manufacturing same, etching composition used for the method for manufacturing the reflective electrode substrate |
11/02/2005 | EP1591545A1 Eco-friendly stripping of chromium-plated plastic materials and extension to Cr-plated passivatable metallic substrates |
11/02/2005 | EP1590188A2 A door skin, a method of etching a plate for forming a wood grain pattern in the door skin, and an etched plate formed therefrom |
11/02/2005 | CN1692475A Plasma etching chamber and plasma etching system using same |
11/01/2005 | US6960536 Method for producing integrated microsystems |
11/01/2005 | US6960521 Method and apparatus for polishing metal and dielectric substrates |
11/01/2005 | US6960413 Multi-step process for etching photomasks |
11/01/2005 | US6960314 Molding of fastening hooks and other devices |
11/01/2005 | US6960305 Methods for forming and releasing microelectromechanical structures |
10/27/2005 | WO2005101100A2 Method and apparatus for in-situ film stack processing |
10/27/2005 | WO2005100638A1 Etching method and etching liquid |
10/27/2005 | WO2005100637A1 Liquid treatment device and liquid treatment method |
10/27/2005 | WO2005100636A2 Techniques for packaging and encapsulating components of diagnostic plasma measurement devices |
10/27/2005 | US20050238811 Composition and method for preparing chemically-resistant roughened copper surfaces for bonding to substrates |
10/27/2005 | US20050236359 Copper/copper alloy surface bonding promotor and its usage |
10/27/2005 | US20050236275 Method of using an etchant solution for removing a thin metallic layer |
10/27/2005 | US20050236111 Processing apparatus |
10/27/2005 | US20050236109 Plasma etching apparatus and plasma etching method |
10/27/2005 | DE102005012356A1 Wet-etch composition for manufacturing e.g. electrode of a capacitor for semiconductor device comprises peracetic acid and fluorinated acid |
10/26/2005 | CN2736371Y Device for removing aluminum layer on the back of nano alumina template |
10/26/2005 | CN1689150A Method for eliminating voiding in plated solder |
10/26/2005 | CN1688749A Method for removing a layer area of a component |
10/26/2005 | CN1688748A Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof |
10/25/2005 | US6958312 No corrosion of copper |
10/20/2005 | WO2005098091A2 A method of plasma etch endpoint detection using a v-i probe diagnostics |
10/20/2005 | WO2005074661A3 Rf sensor clamp assembly |
10/20/2005 | US20050233588 Semiconductor constructions |
10/20/2005 | US20050233477 Substrate processing apparatus, substrate processing method, and program for implementing the method |
10/20/2005 | US20050231851 Manufacturing method of magnetic head slider, magnetic head slider and magnetic device |
10/20/2005 | US20050231557 Micro-fluid ejection assemblies |
10/20/2005 | US20050230356 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
10/20/2005 | US20050230351 Plasma processing method and apparatus |
10/20/2005 | US20050230350 In-situ dry clean chamber for front end of line fabrication |
10/20/2005 | US20050230261 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates |
10/20/2005 | US20050230049 Method and apparatus for plasma processing |
10/20/2005 | US20050230048 Liner for use in processing chamber |
10/20/2005 | US20050230045 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device |
10/19/2005 | EP1587131A2 Plasma reactor with high productivity |
10/19/2005 | EP1586007A2 Electron beam processing for mask repair |
10/19/2005 | CN1684224A Methods and array for creating a mathematical model of a plasma processing system |
10/19/2005 | CN1683589A Surface contact improver for copper and copper alloy and its usage |
10/19/2005 | CN1224298C Electric plasma processing device |
10/13/2005 | WO2005095673A1 Stripping solution and use thereof |
10/13/2005 | WO2005095108A2 Method for the production of surface and depth variable embossing tools |
10/13/2005 | WO2005094404A2 Semiconductor manufacturing gas flow divider system and method |
10/13/2005 | US20050224462 Method of etching a glass substrate |
10/13/2005 | US20050224459 Etching solution, etched article and method for etched article |
10/13/2005 | US20050224457 Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those |
10/13/2005 | US20050224456 Anisotropic dry etching of cu-containing layers |
10/13/2005 | US20050224454 Method for manufacturing a fast heat rise resistor |
10/13/2005 | US20050224182 Plasma processing apparatus |
10/13/2005 | US20050224181 Method and apparatus for in-situ film stack processing |
10/12/2005 | EP1583669A2 Improved surface for use on implantable device |
10/12/2005 | EP0766820B1 The production of electrodes for electrochemical sensing |