| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 05/03/2005 | US6887796 Method of wet etching a silicon and nitrogen containing material |
| 05/03/2005 | US6886442 Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same |
| 04/28/2005 | WO2005038877A2 MOLECULAR AIRBORNE CONTAMINANTS (MACs) REMOVAL AND WAFER SURFACE SUSTAINING SYSTEM AND METHOD |
| 04/28/2005 | WO2005038094A2 Apparatus for electroless deposition |
| 04/28/2005 | WO2005037446A2 Applying imprinting material to substrates employing electromagnetic fields |
| 04/28/2005 | US20050088491 Substrate and method of forming substrate for fluid ejection device |
| 04/28/2005 | US20050087516 Method for using ion implantation to treat the sidewalls of a feature in a low-k dielectric film |
| 04/28/2005 | US20050087514 Method for high-resolution processing of thin layers using electron beams |
| 04/28/2005 | US20050087301 Apparatus for processing substrate and method of doing the same |
| 04/27/2005 | EP1525602A2 Method for adjusting voltage on a powered faraday shield |
| 04/27/2005 | CN1610073A Method for etching side wall and method for forming semiconductor structure |
| 04/26/2005 | US6884542 Method for treating titanium to electroplating |
| 04/26/2005 | US6884363 Forming ingot, hot/cold rolling, annealing to form sheet, then etching to form carbide inclusion, washing; protruding/ preventing fall off of conductive inclusions to reduce contact resistance on surface |
| 04/26/2005 | US6884319 Susceptor of apparatus for manufacturing semiconductor device |
| 04/21/2005 | WO2005036596A2 Method and apparatus of etch process control in fabrications of microstructures |
| 04/21/2005 | WO2005035090A2 An etching method in fabrications of microstructures |
| 04/21/2005 | US20050084615 monitoring the characteristics of processing fluids using detectors and external controllers |
| 04/21/2005 | US20050082259 cleaning and drying the metal or alloy surfaces, then etching to remove defects on the surface, rinsing with water and coating with corrosion inhibitors; surface treatment |
| 04/21/2005 | US20050082256 Plasma etching method |
| 04/21/2005 | US20050082253 Applying imprinting material to substrates employing electromagnetic fields |
| 04/21/2005 | US20050082005 Plasma processing method and apparatus |
| 04/21/2005 | US20050082000 Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 04/21/2005 | US20050081883 Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device |
| 04/21/2005 | US20050081785 Apparatus for electroless deposition |
| 04/20/2005 | EP1523586A2 In-line demetallization process for flexible metallized substrates |
| 04/20/2005 | CN1607463A Acoustooptic frequency modulation single exposure imaging interference photo-etching method and system thereof |
| 04/20/2005 | CN1607462A Ordinary light source closefitting type nano photo-etching optical device |
| 04/20/2005 | CN1607268A Method for isotropic etching of copper |
| 04/20/2005 | CN1198488C Electro-deposition copper foil through surface processing and its producing method and use |
| 04/19/2005 | US6881679 Etching solution for etching Cu and Cu/Ti metal layer of liquid crystal display device and method of fabricating the same |
| 04/19/2005 | US6880233 Method of making an air bag |
| 04/14/2005 | WO2005034596A2 Improved method for micro-roughening treatment of copper and mixed-metal circuitry |
| 04/14/2005 | WO2005034226A1 Metal polishing composition |
| 04/14/2005 | WO2005033797A2 Single phase fluid imprint lithography method |
| 04/14/2005 | WO2004086143A3 Multi-step process for etching photomasks |
| 04/14/2005 | US20050079714 Method of etching silicon anisotropically |
| 04/14/2005 | US20050079329 Metal/ceramic bonding substrate and method for producing same |
| 04/14/2005 | US20050077267 removing chrome from the surface of a calcium fluoride (CaF2) object by etching the chrome a first amount in a first chrome etchant, and etching the chrome a second amount beyond the first amount in second selective chrome etchant, such that the CaF2 object maintains a micro-roughness. |
| 04/14/2005 | CA2536836A1 Improved method for micro-roughening treatment of copper and mixed-metal circuitry |
| 04/13/2005 | EP1523037A2 Metal/ceramic bonding substrate and method for producing same |
| 04/13/2005 | EP1522605A1 Medical devices, particularly stents, and methods for their manufacture |
| 04/13/2005 | EP1522106A2 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
| 04/13/2005 | EP1522090A2 Thermal processing system and configurable vertical chamber |
| 04/13/2005 | CN1606137A Nano etching method based on nano material disposition |
| 04/13/2005 | CN1606136A Method of making inclined-planes used in semiconductor preparing process |
| 04/13/2005 | CN1605655A Stripping liquid for aluminum silicon infiltration layer on the surface of high-temperature alloy and its application method |
| 04/13/2005 | CN1196813C Electrode with high-adhesiveness surface catalytic layer |
| 04/13/2005 | CN1196809C Etching device, etching method and circuit board made using said method |
| 04/12/2005 | US6878207 Gas gate for isolating regions of differing gaseous pressure |
| 04/12/2005 | US6877518 Chemical solution treatment apparatus for semiconductor substrate |
| 04/07/2005 | WO2005031803A2 Thermal processing system with cross flow injection system with rotatable injectors |
| 04/07/2005 | WO2005030310A1 Surface modified reinforcing member for medical device and method for making same |
| 04/07/2005 | US20050074512 System for creating a turbulent flow of fluid between a mold and a substrate |
| 04/07/2005 | US20050072757 Method of creating a turbulent flow of fluid between a mold and a substrate |
| 04/07/2005 | US20050072755 Single phase fluid imprint lithography method |
| 04/07/2005 | US20050072753 Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface |
| 04/07/2005 | DE10342441A1 Process for chemically processing holes used in the production of cylinder liners of cast engine blocks comprises impinging the wall of a hole in the region of an annular chamber with a working medium leaving an opening between seals |
| 04/06/2005 | EP1521294A2 Method for surface treatment |
| 04/06/2005 | EP1520728A2 Method of manufacturing a support for a lithographic printing plate |
| 04/06/2005 | EP1520281A2 Low-force electrochemical mechanical processing method and apparatus |
| 04/06/2005 | EP1474811A4 Etching solution for forming an embedded resistor |
| 04/06/2005 | CN1604286A Method for treating surface |
| 04/06/2005 | CN1604285A Method for surface treatment |
| 04/06/2005 | CN1195895C Micro etching agent of copper and copper alloy |
| 04/06/2005 | CN1195879C Method of recovering metal from metal-containing sludge |
| 04/05/2005 | US6875997 Test patterns and methods of controlling CMP process using the same |
| 04/05/2005 | US6875365 Method for producing liquid discharge head |
| 04/05/2005 | US6875292 Oxidation, corrosion resistant protective coatings; surface treatment; controlling temperature |
| 03/31/2005 | WO2005027729A2 Silicon blades for surgical and non-surgical use |
| 03/31/2005 | US20050070110 Etching solution, etching method and method for manufacturing semiconductor device |
| 03/31/2005 | US20050067379 Imprint lithography template having opaque alignment marks |
| 03/31/2005 | US20050067378 Method for micro-roughening treatment of copper and mixed-metal circuitry |
| 03/31/2005 | US20050067371 Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium |
| 03/31/2005 | US20050067103 Interferometer endpoint monitoring device |
| 03/31/2005 | US20050067102 Method and apparatus for detecting a plasma |
| 03/31/2005 | US20050067100 Apparatus and method for removing coating film |
| 03/31/2005 | US20050067098 Method and system for introduction of an active material to a chemical process |
| 03/31/2005 | CA2538164A1 Silicon blades for surgical and non-surgical use |
| 03/30/2005 | CN1601708A Etching device for high precision silicon senser chip |
| 03/30/2005 | CN1600901A Method for etching polysilicon based on inductively coupled plasma and for preparing superfine lines |
| 03/29/2005 | US6872645 Methods of positioning and/or orienting nanostructures |
| 03/29/2005 | US6872320 Maintaining surface to be etched below freezing temperature of phase-change masking material; ejecting in liquid form droplets of phase change masking material in a predetermined pattern; etching surface to remove material; removing mask |
| 03/24/2005 | WO2005026410A2 Petroleum-free, ammonia-free cleaner for firearms and ordnance |
| 03/24/2005 | WO2004097895A3 A method of adding mass to mems structures |
| 03/24/2005 | US20050061773 Capillary imprinting technique |
| 03/24/2005 | US20050061771 Surface modified reinforcing member for medical device and method for making same |
| 03/24/2005 | US20050061768 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum and methods of forming trench isolation within a semiconductor substrate |
| 03/24/2005 | US20050061767 Wafer-based ion traps |
| 03/24/2005 | US20050061439 Method of processing substrate and chemical used in the same |
| 03/24/2005 | US20050061438 Integrated tool with interchangeable wet processing components for processing microfeature workpieces |
| 03/24/2005 | US20050061202 Surface treatment agent for copper and copper alloy |
| 03/24/2005 | DE10338422A1 Selektiver Plasmaätzprozess zur Aluminiumoxid-Strukturierung Selective plasma etching of alumina-structuring |
| 03/23/2005 | EP1516356A2 Acid etching mixture having reduced water content |
| 03/23/2005 | CN1599039A Method of processing substrate and chemical used in the same |
| 03/23/2005 | CN1599026A Apparatus for processing substrate and method of doing the same |
| 03/23/2005 | CN1598694A Method of forming nano pattern and manufacturing cnt-bio-nano chip |
| 03/23/2005 | CN1598073A Stainless steel plate, method of manufacturing the same, and rubber-coated stainless steel plate gasket |
| 03/23/2005 | CN1598061A Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates |
| 03/23/2005 | CN1598060A Process for compensation of potassium hydroxide solution corrosion (100) silicon earth (110) crystal direction convex angle |
| 03/22/2005 | US6869499 Substrate processing method and substrate processing apparatus |