Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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06/21/2005 | US6908479 Expandable stents and method for making same |
06/16/2005 | WO2005054543A1 Cleaning method |
06/16/2005 | WO2005034596A3 Improved method for micro-roughening treatment of copper and mixed-metal circuitry |
06/16/2005 | WO2004087281A3 Implementation of microfluidic components, including molecular fractionation devices, in a microfluidic system |
06/16/2005 | US20050130046 Subjecting the chrome-containing layer of a photomask to a wet etch process using deionized water and ozone; length of exposure is directly proportional to the degree of adjustment desired |
06/16/2005 | US20050127447 Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate |
06/16/2005 | US20050127036 Method of cleaning a reaction chamber |
06/16/2005 | US20050127032 Master for concavo-convex pattern transfer and method for manufacturing stamp for manufacturing information recording medium |
06/16/2005 | US20050127030 Applying liquid solution containing carbon nanotubes having functional groups and an additive for bonding to a surface of a base body; crosslinking; anhydriding, carbonylation, sulfonation, etherification, amidation, amination, carbamylation, sulfiding, sulfonation, esterification, alkylation |
06/16/2005 | US20050126711 Plasma processing apparatus |
06/16/2005 | US20050126707 Manufacture having double sided features in a metal-containing web and manufacture and method for forming same in a liquid-based etch process |
06/15/2005 | EP1541714A1 Method for repairing components using environmental bond coatings and resultant repaired components |
06/15/2005 | EP1541221A1 Thin film supporting substrate used in filter for hydrogen production and method for manufacturing filter for hydrogen production |
06/15/2005 | CN1626699A Removing liquid for tungsten metal and method for removing tungsten metal using such liquid |
06/15/2005 | CN1626567A Polishing compound for chemimachanical polishing and method for polishing substrate |
06/15/2005 | CN1206707C Chip protector |
06/15/2005 | CN1206388C Nickel ion separated from ferric chloride solution by using iron substitution method |
06/14/2005 | US6905975 Methods of forming patterned compositions |
06/14/2005 | US6905628 Preapplying passivation layer before etching; electrochemical wet etching |
06/14/2005 | US6905624 Interferometric endpoint detection in a substrate etching process |
06/14/2005 | US6905617 Etching method for making fluid bearings |
06/14/2005 | US6905616 Method of releasing devices from a substrate |
06/09/2005 | WO2005017937A3 Sensor array for measuring plasma characteristics in plasma processing enviroments |
06/09/2005 | WO2004103040A3 Method for coating blanks for the production of printed circuit boards (pcb) |
06/09/2005 | US20050121145 Thermal processing system with cross flow injection system with rotatable injectors |
06/09/2005 | DE102004053336A1 Ätzmittel und Ergänzungsmittel dafür sowie ein Ätzmittelverfahren und ein Verfahren zur Herstellung einer Schaltplatte unter dessen Verwendung And etchant supplements therefor, and a Ätzmittelverfahren and a method of manufacturing a circuit board in its use |
06/08/2005 | CN1625590A An etchant for a wiring, a method for manufacturing the wiring using the etchant, a thin film transistor array panel including the wiring, and a method for manufacturing the same |
06/08/2005 | CN1624198A Acidless metal etching method and its etching machine |
06/08/2005 | CN1205325C Stabilized alkaline compositions for cleaning microelectronic substrates |
06/08/2005 | CN1204940C Method for making surface component of head of golf club |
06/07/2005 | US6902824 Copper foil and metal foil with carrier foil for printed wiring board, and semi-additive process for producing printed wiring board using the same |
06/07/2005 | US6902646 Sensor array for measuring plasma characteristics in plasma processing environments |
06/07/2005 | US6902628 Immersing ceramics or metals having coatings in acidic, then in basic solutions to remove deposits and optionally blasting for smoothness |
06/07/2005 | US6902627 Cleaning chamber surfaces to recover metal-containing compounds |
06/07/2005 | US6902626 A liquid etchant used for etching of a copper foil or a copper plate |
06/02/2005 | WO2005026410A3 Petroleum-free, ammonia-free cleaner for firearms and ordnance |
06/02/2005 | US20050118334 Multistage process for multilayer forming of alloy diffusion coating on article with vapor or vacuum deposition on surface for protection of surface using nickel, aluminum |
06/02/2005 | US20050115926 contacting the coating with an aqueous composition which comprises a fluorine-containing acid such as hexafluorosilicic acid. and a second acid, such as phosphoric acid or nitric acid |
06/02/2005 | US20050115925 Method for selective removal of high-k material |
06/02/2005 | US20050115679 Surface treatment apparatus |
06/02/2005 | US20050115677 Plasma etching apparatus |
06/02/2005 | US20050115676 Plasma processing method, plasma processing apparatus and computer storage medium |
06/01/2005 | EP1535317A1 High temperature anisotropic etching of multi-layer structures |
06/01/2005 | CN1621555A Mask and container and manufacturing apparatus |
05/31/2005 | US6899787 Plasma processing apparatus and plasma processing system with reduced feeding loss, and method for stabilizing the apparatus and system |
05/31/2005 | US6899785 Method of stabilizing oxide etch and chamber performance using seasoning |
05/26/2005 | WO2005048663A2 Improved methods of cleaning copper surfaces in the manufacture of printed circuit boards |
05/26/2005 | WO2005048301A2 Methods and apparatus for optimizing a substrate in a plasma processing system |
05/26/2005 | WO2005035090A3 An etching method in fabrications of microstructures |
05/26/2005 | WO2005031803A9 Thermal processing system with cross flow injection system with rotatable injectors |
05/26/2005 | US20050109734 Etchant and replenishment solution therefor, and etching method and method for producing wiring board using the |
05/26/2005 | US20050109733 Cleaning and etching methods and their apparatuses |
05/26/2005 | US20050109636 Generation. conditioning , reuse of metal containing electrolytes; surface treatment; ion exchanging |
05/26/2005 | US20050109462 Apparatus for generating inductively-coupled plasma and antenna coil structure thereof for generating inductive electric fields |
05/26/2005 | US20050109460 Adjustable gas distribution system |
05/26/2005 | US20050109088 Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces |
05/25/2005 | EP1533398A1 Process for producing an electrolyte ready for use out of waste products containing metal ions |
05/25/2005 | CN1620231A Process for manufacturing a wiring substrate |
05/25/2005 | CN1619013A Detin liquid and its preparation technology and use |
05/25/2005 | CN1203529C Polishing compound for chemimachanical polishing and method for polishing substrate |
05/24/2005 | US6896737 Gas delivery device for improved deposition of dielectric material |
05/19/2005 | WO2005045524A2 A method of forming a patterned layer on a substrate |
05/19/2005 | WO2005045099A1 Process of maintaining hybrid etch |
05/19/2005 | WO2005045098A1 Process for etching metal and alloy surfaces |
05/19/2005 | US20050107012 Method and apparatus for polishing a substrate while washing a polishing pad of the apparatus with at least one free-flowing vertical stream of liquid |
05/19/2005 | US20050106881 Wafer reuse techniques |
05/19/2005 | US20050106867 Method and device for treating objects by means of a liquid |
05/19/2005 | US20050106472 patterning the non-transparent film using the etch stop layer to expose areas of the transparent substrate, forming a mask on the non-transparent film to protect selected areas of the transparent substrate and forming a phase shift oxide |
05/19/2005 | US20050106315 Method for repairing components using environmental bond coatings and resultant repaired components |
05/19/2005 | US20050103750 Chemical vapor deposition of a Ti/TiN barrier film onto the inner walls of a plug hole with exposed cobalt silicide; examining the film and if particles are detected, then an acid wet etching rework procedure is performed to remove the barrier layer and to reform a new Ti/TiN barrier layer |
05/19/2005 | US20050103268 Method and apparatus for an improved baffle plate in a plasma processing system |
05/19/2005 | US20050102830 Electrolessly plating a thin copper film onto a dielectric, forming plated resists, electrolytically plating copper, removing the plated resists and thin copper film layers, etching the wiring pattern layers, and forming another dielectric layer; high performance; miniaturization |
05/19/2005 | DE10344351A1 Verfahren zum anisotropen Ätzen von Silizium A method for anisotropic etching of silicon |
05/18/2005 | CN1616714A Polycrystal silicon etching process with reduced micro channel effect |
05/17/2005 | US6893969 Use of ammonia for etching organic low-k dielectrics |
05/12/2005 | WO2005043701A1 Method for manufacturing gratings in semiconductor materials |
05/12/2005 | WO2005042658A1 Abrasive-free che.mical mechanical polishing composition and polishing process containing same |
05/12/2005 | US20050101150 Methods of enhancing selectivity of etching silicon dioxide relative to one or more organic substances; and plasma reaction chambers |
05/12/2005 | US20050101149 Dry etching method and apparatus for use in the LCD device |
05/12/2005 | US20050101136 Etching method and method of manufacturing circuit device using the same |
05/12/2005 | US20050101134 Method for etching a thin metal layer |
05/12/2005 | US20050098899 Structure and method of forming an enlarged head on a plug to eliminate the enclosure requirement |
05/12/2005 | US20050098538 Methods of cleaning copper surfaces in the manufacture of printed circuit boards |
05/12/2005 | US20050098537 Method for large-area patterning dissolved polymers by making use of an active stamp |
05/12/2005 | US20050098264 Molecular airborne contaminants (MACs) film removal and wafer surface sustaining system and method |
05/12/2005 | US20050098108 Gas delivery device for improved deposition of dielectric material |
05/11/2005 | CN1614789A Method for preparing polycrystalline silicon suede |
05/11/2005 | CN1614093A Etchant and replenishment solution therefor, and etching method and method for producing wiring board using them |
05/11/2005 | CN1201033C Treatment method of copper containing waste liquid from alkali etching of printed circuit board |
05/10/2005 | US6890447 Method of forming noble metal thin film pattern |
05/05/2005 | US20050095871 Process of maintaining hybrid etch |
05/05/2005 | US20050095811 Method for surface treatment |
05/05/2005 | US20050092436 System and method for ventilation in the fabrication of integrated circuits |
05/05/2005 | US20050092435 Processing device, electrode, electrode plate, and processing method |
05/05/2005 | US20050092433 Etching apparatus of glass substrate |
05/05/2005 | US20050092432 Ion beam processing system and ion beam processing method |
05/05/2005 | US20050092431 Chemical processing method, and method of manufacturing semiconductor device |
05/04/2005 | CN1613036A Method and device for treating objects by means of a liquid |
05/04/2005 | CN1611639A Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium |
05/04/2005 | CN1200141C Acid detinning and deleading agent |