| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 05/04/2006 | US20060090848 Laser processing apparatus and laser processing method |
| 05/04/2006 | US20060090700 Gas-introducing system and plasma CVD apparatus |
| 05/04/2006 | DE102004053135A1 Process for removing a coating containing a chromium and/or chromium oxide compound from a component comprises placing the component in a bath containing an alkanol-amine compound as inhibitor and removing after a treatment time |
| 05/04/2006 | DE10006990B4 Anlage zur Rückgewinnung von Säuren aus metallhaltigen Lösungen dieser Säuren Plant for recovery of acids from metal-containing solutions of these acids |
| 05/03/2006 | EP1651794A1 Method of manufacturing vacuum plasma treated workpieces and system for vacuum plasma treating workpieces |
| 05/03/2006 | CN1768005A Potassium hydrogen peroxymonosulfate solutions |
| 05/03/2006 | CN1767145A Vacuum treatment device |
| 05/03/2006 | CN1254860C Manufacturing method of circuit device |
| 05/03/2006 | CN1254561C Aqueous solution composition with metal surface treatment |
| 05/02/2006 | US7037849 Process for patterning high-k dielectric material |
| 04/27/2006 | WO2006044724A1 Method and system for wafer temperature control |
| 04/27/2006 | WO2006044722A2 Apparatus and methods for improving the stability of rf power delivery to a plasma load |
| 04/27/2006 | WO2006044198A2 Heat transfer system for improved semiconductor processing uniformity |
| 04/27/2006 | WO2006043696A1 Filter for purifying hydrogen and method for manufacture thereof |
| 04/27/2006 | US20060088774 Photomask blank, photomask and fabrication method thereof |
| 04/27/2006 | US20060086692 Plasma etching method |
| 04/27/2006 | US20060086691 Porous material and production process thereof |
| 04/27/2006 | US20060086690 Dielectric etching method to prevent photoresist damage and bird's beak |
| 04/27/2006 | US20060086689 Method of fabricating microneedles |
| 04/27/2006 | US20060086463 Substrate processing apparatus and substrate processing method |
| 04/27/2006 | US20060086460 Developing treatment apparatus |
| 04/27/2006 | US20060086459 Laser processing apparatus and laser processing method |
| 04/27/2006 | US20060086319 Processing gas supply mechanism, film forming apparatus and method, and computer storage medium storing program for controlling same |
| 04/27/2006 | DE10248481B4 Verfahren und Vorrichtung zur nasschemischen Behandlung von Silicium Method and apparatus for wet-chemical treatment of silicon |
| 04/26/2006 | EP1649503A2 Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing |
| 04/26/2006 | CN1764739A Solution for etching copper surfaces and method of depositing metal on copper surfaces |
| 04/26/2006 | CN1253527C Etching liquid composition |
| 04/25/2006 | US7034688 Selective metal removal process for metallized retro-reflective and holographic films and radio frequency devices made therewith |
| 04/25/2006 | US7034319 Electron beam irradiation apparatus, electron beam irradiation method, original disk, stamper, and recording medium |
| 04/25/2006 | US7033943 Etching solution, etching method and method for manufacturing semiconductor device |
| 04/25/2006 | US7033942 Chemical mechanical polishing composition and process |
| 04/25/2006 | US7033516 Inexpensive fabrication of large-area pixel arrays for displays and sensors |
| 04/25/2006 | US7033444 Plasma processing apparatus, and electrode structure and table structure of processing apparatus |
| 04/25/2006 | US7033442 System and method for ventilation in the fabrication of integrated circuits |
| 04/25/2006 | CA2264908C Method for anisotropic etching of structures in conducting materials |
| 04/20/2006 | WO2006041656A2 Methods and apparatus for monitoring a process in a plasma processing system by measuring a plasma frequency |
| 04/20/2006 | WO2006041153A1 Method for manufacturing electroconductive pattern and electronic device, and electronic device |
| 04/20/2006 | US20060084275 Etch stop structure and method of manufacture, and semiconductor device and method of manufacture |
| 04/20/2006 | US20060084271 Systems, methods and slurries for chemical mechanical polishing |
| 04/20/2006 | US20060081559 Plasma processing apparatus and plasma processing method |
| 04/20/2006 | US20060081558 Plasma immersion ion implantation process |
| 04/20/2006 | US20060081338 Spinning apparatus |
| 04/20/2006 | US20060081337 Capacitive coupling plasma processing apparatus |
| 04/20/2006 | US20060081336 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads |
| 04/20/2006 | US20060081335 Semiconductor substrate processing apparatus and semiconductor device fabrication method |
| 04/20/2006 | US20060081327 Belt and method of marking |
| 04/20/2006 | DE102004049825A1 To remove the protective coating from the surface of an aircraft engine gas turbine vane, for surface repair, the coating is broken down by a chemical for removal by blasting while untreated surfaces are shrouded against chemical attack |
| 04/19/2006 | CN1253059C Chemical-corrosive process for substrate |
| 04/19/2006 | CN1252802C Method for etching bismuth-containing oxide films |
| 04/19/2006 | CN1252320C Composition for removing aluminium surface stain |
| 04/18/2006 | US7030035 Prevention of electrostatic wafer sticking in plasma deposition/etch tools |
| 04/18/2006 | US7030034 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum |
| 04/18/2006 | US7029597 Anodized aluminum etching process and related apparatus |
| 04/18/2006 | US7029596 Computer integrated manufacturing control system for oxide chemical mechanical polishing |
| 04/18/2006 | US7029591 Planarization with reduced dishing |
| 04/13/2006 | WO2006039193A2 Rf ground switch for plasma processing system |
| 04/13/2006 | WO2006038990A2 Method for treating a substrate |
| 04/13/2006 | WO2006038975A2 Method and system for improving coupling between a surface wave plasma source and a plasma space |
| 04/13/2006 | US20060076315 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 04/13/2006 | US20060076313 Etching process and patterning process |
| 04/13/2006 | US20060076312 Method of modifying an etched trench |
| 04/13/2006 | US20060076109 Method and apparatus for controlling temperature of a substrate |
| 04/13/2006 | US20060076108 Method and apparatus for controlling temperature of a substrate |
| 04/13/2006 | US20060075971 Heated substrate support and method of fabricating same |
| 04/13/2006 | US20060075969 Heat transfer system for improved semiconductor processing uniformity |
| 04/13/2006 | US20060075968 Leak detector and process gas monitor |
| 04/13/2006 | US20060075626 Electroplating a small quantity of noble metal on the apex of a single crystal metal wire that has been etched to form a tip in low concentration noble metal electrolyte in a base aqueous liquid; annealing in vacuum or in inert gas ambient to diffuse the additional electroplated noble metal atoms |
| 04/12/2006 | EP1646091A2 Etching liquid composition |
| 04/12/2006 | CN1759205A Method for manufacturing utensil for drinking water system made from lead-containing copper alloy, cast and lead-removed utensil for drinking water system, and utensil for drinking water system |
| 04/12/2006 | CN1758420A Preparation method of deep groove and its etching mixing liquid |
| 04/12/2006 | CN1757795A Special hot state silicon washing film forming agent for high parameter boiler |
| 04/12/2006 | CN1757794A Chemical etching preparation technology of titanium alloy and etching agent used in said technology |
| 04/12/2006 | CN1251331C 半导体器件 Semiconductor devices |
| 04/12/2006 | CN1250772C Electroplating pretreatment solution and electroplating pretreatment method |
| 04/11/2006 | US7027703 Method for forming and apparatus comprising optical waveguides leading to a free space coupler region |
| 04/11/2006 | US7026253 Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask |
| 04/11/2006 | US7026173 Method and apparatus for detecting end point |
| 04/11/2006 | US7025896 Process for treating solid surface and substrate surface |
| 04/11/2006 | US7025895 Plasma processing apparatus and method |
| 04/11/2006 | US7025892 Method for creating gated filament structures for field emission displays |
| 04/11/2006 | US7025857 Plasma treatment apparatus, matching box, impedance matching device, and coupler |
| 04/11/2006 | US7025856 Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge |
| 04/11/2006 | US7025854 Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system |
| 04/11/2006 | US7025831 Apparatus for surface conditioning |
| 04/06/2006 | WO2006036820A2 Methods and apparatus for monitoring a process in a plasma processing system by measuring impedance |
| 04/06/2006 | WO2006036753A2 Methods and apparatus for tuning a set of plasma processing steps |
| 04/06/2006 | US20060073627 Probe for a scanning probe microscope and method for fabricating same |
| 04/06/2006 | US20060073619 Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process |
| 04/06/2006 | US20060070703 Method & apparatus to improve plasma etch uniformity |
| 04/06/2006 | US20060070702 Substrate processing system for performing exposure process in gas atmosphere |
| 04/06/2006 | US20060070522 Desublimator for aluminum chloride |
| 04/06/2006 | DE10308134B4 Verfahren zur Verringerung der Bleiauslaugung in Trinkwasserversorgungssystemen A method of reducing lead release in water supply systems |
| 04/06/2006 | DE102005005229A1 Electronic component e.g. CMOS-transistor, producing process, involves isolating dielectric layer from another layer on basis of oxide-containing material and etching former layer with etching solution from aqueous sulfuric acid |
| 04/06/2006 | DE102004045956A1 Etching holder for use in etching system, has fixing unit that is adjustable, so that substrate is inserted into holder to form etching medium free area, and integrated radiation guidance beginning/ending at upper surface that limits area |
| 04/05/2006 | EP1643817A1 Etching solution, method of etching and printed wiring board |
| 04/05/2006 | CN1249521C Mask and method for mfg. same, and method for manufacturing electric light emitting apparatus |
| 04/04/2006 | US7022612 Method of removing etch residues |
| 04/04/2006 | US7022254 Chromate-free method for surface etching of titanium |
| 04/04/2006 | US7022251 Methods for forming a conductor on a dielectric |
| 03/30/2006 | WO2005065433A3 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates |