| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 03/07/2006 | US7008553 Method for removing aluminide coating from metal substrate and turbine engine part so treated |
| 03/07/2006 | US7008551 Low loss optical waveguide device |
| 03/07/2006 | US7008548 Etchant for etching metal wiring layers and method for forming thin film transistor by using the same |
| 03/07/2006 | US7008484 Method and apparatus for deposition of low dielectric constant materials |
| 03/02/2006 | WO2006023637A2 In situ surface contaminant removal for ion implanting |
| 03/02/2006 | WO2005095108A3 Method for the production of surface and depth variable embossing tools |
| 03/02/2006 | US20060045987 Localized plasma processing |
| 03/02/2006 | US20060043073 Substrate treating method and apparatus |
| 03/02/2006 | US20060043068 Microlens forming method |
| 03/02/2006 | US20060043064 Plasma processing system and method |
| 03/02/2006 | US20060043063 Electrically floating diagnostic plasma probe with ion property sensors |
| 03/02/2006 | US20060043061 Method for manufacturing bipolar plate and direct methanol fuel cell |
| 03/02/2006 | US20060043060 Removal of amine components on the sidewalls of a via or contact hole or trench opening by treatment with Cl2 and/or CxCly plasma before the aperture is filled with a photoresist to prevent reaction of amines with the photoresist which forms residues |
| 03/02/2006 | US20060042757 Wafer processing apparatus capable of controlling wafer temperature |
| 03/02/2006 | US20060042756 Semiconductor manufacturing apparatus and chemical exchanging method |
| 03/02/2006 | US20060042755 Large surface area dry etcher |
| 03/01/2006 | EP1629527A2 Adjustable gas distribution system |
| 03/01/2006 | EP1629522A2 Gas distribution system |
| 03/01/2006 | EP1252028A4 Temporary bridge for micro machined structures |
| 03/01/2006 | CN1740396A Etchant solutions and methods of forming semiconductor devices formed by processes including the same |
| 03/01/2006 | CN1243849C A method for wet etching |
| 02/28/2006 | US7005193 attachment of the appendage by way of a stem prevents stresses arising from CTE differentials in the appendage from being transmitted to the base, where they could contribute to temperature errors |
| 02/28/2006 | US7005080 For improved metal finishing; surface treatment |
| 02/28/2006 | US7004107 Method and apparatus for monitoring and adjusting chamber impedance |
| 02/23/2006 | US20060040499 In situ surface contaminant removal for ion implanting |
| 02/23/2006 | US20060040415 Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring |
| 02/23/2006 | US20060037943 Integrated circuits ; using chelate compounds as etchants; overcoating dielectric with patterned mask |
| 02/23/2006 | US20060037940 Apparatus and method for shielding a wafer from charged particles during plasma etching |
| 02/23/2006 | US20060037933 Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature |
| 02/23/2006 | US20060037932 Method and micromechanical component |
| 02/23/2006 | US20060037705 Temperature control assembly for use in etching processes and an associated retrofit method |
| 02/23/2006 | US20060037704 Plasma Processing apparatus and method |
| 02/23/2006 | US20060037703 Plasma processing apparatus and method |
| 02/23/2006 | US20060037702 Plasma processing apparatus |
| 02/23/2006 | US20060037701 Plasma processing apparatus and method |
| 02/23/2006 | US20060037700 Method and apparatus for removing material from a substrate surface |
| 02/23/2006 | US20060037699 Polishing pad and method for manufacturing semiconductor device |
| 02/23/2006 | US20060037698 Systems and methods for processing microfeature workpieces |
| 02/23/2006 | US20060037627 Process for treating solid surface and substrate surface |
| 02/22/2006 | CN1739066A Electron beam processing technology for mask repair |
| 02/22/2006 | CN1738928A Compositions for copper, tantalum and tantalum nitride chemical mechanical method complanation |
| 02/22/2006 | CN1738927A Metal photo-etching product and production method therefor |
| 02/22/2006 | CN1738926A Film-forming apparatus component and method for cleaning same |
| 02/22/2006 | CN1737199A Cleaning and servicing technology for turbine blade basal body surface by strong current pulsed ionizing beam |
| 02/22/2006 | CN1737186A Plasma arc processing apparatus |
| 02/21/2006 | US7001843 Methods of forming metal lines in semiconductor devices |
| 02/21/2006 | US7001838 Method of wet etching an inorganic antireflection layer |
| 02/21/2006 | US7001533 Chromate-free method for surface etching of aluminum and aluminum alloys |
| 02/21/2006 | US7001482 Method and apparatus for improved focus ring |
| 02/21/2006 | US7001481 Method and system providing high flux of point of use activated reactive species for semiconductor processing |
| 02/21/2006 | US7001468 Pressure energized pressure vessel opening and closing device and method of providing therefor |
| 02/21/2006 | US7000298 Method a quartz sensor |
| 02/16/2006 | WO2006017217A2 Integrated lc-esi on a chip |
| 02/16/2006 | US20060036312 Flexible stent and method of manufacture |
| 02/16/2006 | US20060033201 Systems and methods for wafer bonding by localized induction heating |
| 02/16/2006 | US20060032834 Method of manufacturing semiconductor wafer and method of manufacturing semiconductor device |
| 02/16/2006 | US20060032832 Shadow mask and method of fabricating vertically tapered structure using the shadow mask |
| 02/16/2006 | US20060032811 Transition radiation apparatus and method therefor |
| 02/16/2006 | US20060032585 Plasma processing method and apparatus |
| 02/16/2006 | US20060032584 Plasma processing apparatus capable of suppressing variation of processing characteristics |
| 02/16/2006 | US20060032445 Substrate processing apparatus and method, and gas nozzle for improving purge efficiency |
| 02/15/2006 | EP1626098A2 Process of dissolving zinc in alkaline brines |
| 02/15/2006 | CN1734711A Vacuum processing device |
| 02/15/2006 | CN1733976A Sheet metal having decorative pattern and method for manufacturing the same |
| 02/15/2006 | CN1733974A Chemical process of nickel-titanium alloy material |
| 02/14/2006 | US6998204 patterning the non-transparent film using the etch stop layer to expose areas of the transparent substrate, forming a mask on the non-transparent film to protect selected areas of the transparent substrate and forming a phase shift oxide |
| 02/14/2006 | US6998063 Method of forming microporous membranes |
| 02/14/2006 | US6998060 Flexible stent and method of manufacture |
| 02/14/2006 | US6998059 Method for manufacturing a silicon sensor and a silicon sensor |
| 02/14/2006 | US6998014 Apparatus and method for plasma assisted deposition |
| 02/09/2006 | WO2006013812A1 Process for producing aluminum electrode foil for capacitor and aluminum foil for etching |
| 02/09/2006 | WO2005080633A3 Method for zinc coating aluminum |
| 02/09/2006 | US20060027533 System for dynamic slurry delivery in a CMP process |
| 02/09/2006 | US20060027531 Base material cutting method, base material cutting apparatus, ingot cutting method, ingot cutting apparatus and wafer producing method |
| 02/09/2006 | US20060027528 Ion bombardment of electrical lapping guides to decrease noise during lapping process |
| 02/09/2006 | US20060027527 Method of producing perpendicular magnetic recording disk |
| 02/09/2006 | US20060027525 Cantilever-type near-field probe for optical data storage and method of manufacturing the same |
| 02/09/2006 | US20060027524 Microfabricated two-pin liquid sample dispensing system |
| 02/09/2006 | US20060027523 Micromachined fluidic device and method for making same |
| 02/09/2006 | US20060027522 Method of producing a MEMS device |
| 02/09/2006 | US20060027329 Multi-frequency plasma enhanced process chamber having a torroidal plasma source |
| 02/09/2006 | US20060027328 Hollow anode plasma reactor and method |
| 02/09/2006 | US20060027327 Apparatus and methods for a low inductance plasma chamber |
| 02/09/2006 | US20060027326 Semiconductor substrate processing chamber and substrate transfer chamber interfacial structure |
| 02/09/2006 | US20060027325 Method and apparatus for photomask fabrication |
| 02/09/2006 | US20060027020 Tungsten coated silicon fingers |
| 02/08/2006 | EP1624520A1 Thin film solid oxide fuel cell (SOFC) and its method of production |
| 02/08/2006 | EP1623608A2 Method for coating blanks for the production of printed circuit boards (pcb) |
| 02/08/2006 | EP1622699A1 Method and reactor arrangement for reducing the emission of nitrogen oxides |
| 02/08/2006 | CN1730728A Copper or copper alloy surface tiny-etching treatment fluid for smoothing |
| 02/08/2006 | CN1730164A Outdoor metal surface double coating antiseptic chromatic spray painting method |
| 02/08/2006 | CN1240879C Method and system for recovering and removing copper from fluid |
| 02/08/2006 | CN1240874C Method for producing conductor pattern on dielectric substrate |
| 02/07/2006 | US6995089 Method to remove copper without pattern density effect |
| 02/07/2006 | US6994769 In-situ cleaning of a polymer coated plasma processing chamber |
| 02/02/2006 | WO2006012297A1 Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes |
| 02/02/2006 | WO2006012021A2 Methods and apparatus for optimal temperature control in a plasma processing system |
| 02/02/2006 | WO2006011954A2 Diagnostic plasma measurement device having patterned sensors and features |
| 02/02/2006 | WO2005048301A3 Methods and apparatus for optimizing a substrate in a plasma processing system |
| 02/02/2006 | US20060024969 Method for purifying silicon carbide coated structures |