| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
|---|
| 09/07/2012 | WO2012092061A3 Graphene formation on dielectrics and electronic devices formed therefrom |
| 09/07/2012 | WO2012089196A9 Method for the plasma treatment of workpieces and workpiece comprising a gas barrier layer |
| 09/06/2012 | US20120225566 Substrate processing apparatus and a method of manufacturing a semiconductor device |
| 09/06/2012 | US20120225564 Vapor deposition device, vapor deposition method, and semiconductor element manufacturing method |
| 09/06/2012 | US20120225390 Substrate treatment method, substrate treatment apparatus, and non-transitory computer storage medium |
| 09/06/2012 | US20120225389 Substrate treatment method |
| 09/06/2012 | US20120225319 Coated insulating films for electric machines and manufacturing process therefor |
| 09/06/2012 | US20120225296 Uniform multilayer graphene by chemical vapor deposition |
| 09/06/2012 | US20120225286 Device housing and method for making same |
| 09/06/2012 | US20120225285 Coated Substrates and Methods of Making Same |
| 09/06/2012 | US20120225219 Apparatus And Process For Atomic Layer Deposition |
| 09/06/2012 | US20120225218 Apparatus and method for dielectric deposition |
| 09/06/2012 | US20120225207 Apparatus and Process for Atomic Layer Deposition |
| 09/06/2012 | US20120225206 Apparatus and Process for Atomic Layer Deposition |
| 09/06/2012 | US20120225205 Evaporation method, evaporation device and method of fabricating light emitting device |
| 09/06/2012 | US20120225204 Apparatus and Process for Atomic Layer Deposition |
| 09/06/2012 | US20120225203 Apparatus and Process for Atomic Layer Deposition |
| 09/06/2012 | US20120225195 Atomic Layer Deposition Carousel With Continuous Rotation And Methods Of Use |
| 09/06/2012 | US20120225194 Apparatus And Process For Atomic Layer Deposition |
| 09/06/2012 | US20120225193 Apparatus And Process For Atomic Layer Deposition |
| 09/06/2012 | US20120225192 Apparatus And Process For Atomic Layer Deposition |
| 09/06/2012 | US20120225191 Apparatus and Process for Atomic Layer Deposition |
| 09/06/2012 | US20120225190 Method for coating measurement |
| 09/06/2012 | US20120223011 Superhydrophobic/amphiphilic(oleophilic) surface with nano structure and the fabrication method thereof |
| 09/06/2012 | US20120222815 Hybrid ceramic showerhead |
| 09/06/2012 | US20120222813 Vacuum chambers with shared pump |
| 09/06/2012 | US20120222620 Atomic Layer Deposition Carousel with Continuous Rotation and Methods of Use |
| 09/06/2012 | US20120222619 Carbon electrode and apparatus for manufacturing polycrystalline silicon rod |
| 09/06/2012 | US20120222618 Dual plasma source, lamp heated plasma chamber |
| 09/06/2012 | US20120222617 Plasma system and method of producing a functional coating |
| 09/06/2012 | US20120222616 Shower head assembly and thin film deposition apparatus comprising same |
| 09/06/2012 | US20120222615 Film deposition apparatus |
| 09/06/2012 | US20120222614 Self-closing embedded slit valve |
| 09/06/2012 | DE112009004581T5 Schichtherstellungsverfahren und Schichtherstellungsvorrichtung Layer manufacturing process and layer manufacturing apparatus |
| 09/06/2012 | DE102012002394A1 Beschichtete Substrate und Verfahren zu deren Herstellung Coated substrates and processes for their preparation |
| 09/06/2012 | DE10018143C5 DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems DLC layer system and method and apparatus for producing such a layer system |
| 09/05/2012 | EP2495755A1 Metal organic chemical vapor deposition device and temperature control method therefor |
| 09/05/2012 | EP2495749A1 Surface wave plasma generating antenna and surface wave plasma processing apparatus |
| 09/05/2012 | EP2495738A1 Process for producing multilayer film |
| 09/05/2012 | EP2495350A2 Microwave plasma processing device with a plasma processing gas supply member |
| 09/05/2012 | EP2495349A1 Method for depositing a coating on a substrate by chemical vapour deposition |
| 09/05/2012 | EP2495348A1 A method and apparatus for masking a portion of a component |
| 09/05/2012 | EP2495057A1 Surface coated cutting tool with excellent chip resistance |
| 09/05/2012 | EP2494092A1 Fluid distribution manifold including compliant plates |
| 09/05/2012 | EP2494091A1 Fluid distribution manifold including plate comprising a mirror - finished surface |
| 09/05/2012 | EP2494090A1 Fluid conveyance system including flexible retaining mechanism |
| 09/05/2012 | EP2494089A1 Fluid distribution manifold including bonded plates |
| 09/05/2012 | EP2494088A1 Method for removing deposits |
| 09/05/2012 | EP2494087A1 Chemical vapor deposition coating, article, and method |
| 09/05/2012 | CN202423358U Carbon plate delivery assembling and disassembling platform of loading and unloading system of plate type PECVD (Plasma Enhanced Chemical Vapor Deposition) device |
| 09/05/2012 | CN202415688U Reactant gas transmission system |
| 09/05/2012 | CN202415687U Chemical vapor deposition furnace capable of implementing upper and lower gas inlet switching |
| 09/05/2012 | CN202415686U Spray header with novel structure used in CVD (chemical vapor deposition) process |
| 09/05/2012 | CN202415685U Transmission control system for process cavity |
| 09/05/2012 | CN202415684U Carbon plate lifter of an automatic feeding and discharging system for plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
| 09/05/2012 | CN202415683U Wafer discharging mechanism for automatic silicon wafer loading and unloading system |
| 09/05/2012 | CN202411572U Small-modulus diamond worm rod rolling wheel |
| 09/05/2012 | CN1777692B Control or modeling of chemical infiltration in a vapor phase for the densification of porous substrates by carbon |
| 09/05/2012 | CN102656665A Vapor deposition device, vapor deposition method, and semiconductor element manufacturing method |
| 09/05/2012 | CN102656664A Method for cleaning film forming apparatus, film forming method, and film forming apparatus |
| 09/05/2012 | CN102656297A SiC epitaxial wafer and method for manufacturing same |
| 09/05/2012 | CN102656294A CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones |
| 09/05/2012 | CN102656293A Non-orthogonal coater geometry for improved coatings on a substrate |
| 09/05/2012 | CN102656292A Method for forming a decorative coating, a decorative coating, and uses of the same |
| 09/05/2012 | CN102655085A Method of forming titanium nitride film, apparatus for forming titanium nitride film, and program |
| 09/05/2012 | CN102653884A A method of processing substrate holder material |
| 09/05/2012 | CN102653859A Lifting and delivering device for automatic wafer loading and unloading of graphite boat |
| 09/05/2012 | CN102653856A Method for improving first wall fuel recycling of full-superconducting tokomak by using lithium metal coating layer |
| 09/05/2012 | CN102653146A Coated substrates and methods of making same |
| 09/05/2012 | CN102226273B Elastic tensioning device for growth of diamond film electrode |
| 09/05/2012 | CN102176471B Textured structural ZnO:B (BZO)/ZnO:Ga/H (HGZO) composite thin film and application |
| 09/05/2012 | CN102067347B Method for fabricating InGaN-based multi-quantum well layers |
| 09/05/2012 | CN102031504B Film-forming apparatus, matching unit, and impedance control method |
| 09/05/2012 | CN102017084B Heating device, film forming apparatus, film forming method, and device |
| 09/05/2012 | CN102016101B Water-reactive Al composite material, water-reactive Al film, process for production of the Al film, and constituent member for film depostion chamber |
| 09/05/2012 | CN102002683B Method for preparing hydrogen-containing diamond film |
| 09/05/2012 | CN101971288B Plasma system |
| 09/05/2012 | CN101967626B Method for preparing high-hardness diamond film on surface of medical CoCrMo alloy |
| 09/05/2012 | CN101871096B Methods and apparatuses for transferring articles through a load lock chamber under vacuum |
| 09/05/2012 | CN101855947B Plasma treatment device |
| 09/05/2012 | CN101748393B Heating control method of production line equipment and device |
| 09/05/2012 | CN101580224B Patterning preparation method for nano array |
| 09/05/2012 | CN101553595B Method and apparatus for sputtering onto large flat panels |
| 09/05/2012 | CN101497993B Film formation method and apparatus for forming silicon-containing insulating film |
| 09/05/2012 | CN101469412B Thin film deposition device and method thereof |
| 09/05/2012 | CN101445918B Apparatus for depositting atomic layer |
| 09/05/2012 | CN101440478B Preparation of a metal-containing film via ALD or CVD processes |
| 09/05/2012 | CN101384749B Film precursor evaporation system and method of using |
| 09/05/2012 | CN101360846B Electrode and vacuum processing apparatus |
| 09/05/2012 | CN101321890B Silicon gas injector and method of making same |
| 09/05/2012 | CN101306294B Method for supplying high purity fluid |
| 09/05/2012 | CN101282836B Wide range pressure control using turbo pump |
| 09/05/2012 | CN101218375B Multilayer structure and method for cleaning same |
| 09/05/2012 | CN101159228B Processing gas supplying mechanism, supplying method and gas processing unit |
| 09/05/2012 | CN101145506B Load lock chamber for large area substrate processing system |
| 09/05/2012 | CN101128619B Method for preparing nanoparticles of a metal or a metal alloy, dispersed on a substrate, by chemical vapour deposition |
| 09/04/2012 | US8257841 Bodies coated with a hard material and method for the production thereof |
| 09/04/2012 | US8257799 Method for forming thin film using radicals generated by plasma |
| 09/04/2012 | US8257790 Ti-containing film formation method and storage medium |
| 09/04/2012 | US8257789 Film formation method in vertical batch CVD apparatus |