| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/18/2012 | CN101469411B Chemical vapor deposition apparatus |
| 07/18/2012 | CN101443476B High crystalline quality synthetic diamond |
| 07/18/2012 | CN101365823B Film forming apparatus and film forming method |
| 07/18/2012 | CN101298668B Plasma generating device |
| 07/18/2012 | CN101297061B Surface-coated member, method for manufacture thereof, and cutting tool |
| 07/18/2012 | CN101295639B Method of manufacturing a semiconductor film and method of manufacturing a photovoltaic element |
| 07/18/2012 | CN101268209B Duplex surface treatment of metal objects |
| 07/18/2012 | CN101257079B Semiconductor layer |
| 07/18/2012 | CN101177782B System and method for shielding during PECVD deposition processes |
| 07/18/2012 | CN101133186B Self-cooling gas delivery apparatus under high vacuum for high density plasma applications |
| 07/17/2012 | USRE43508 Plasma confinement by use of preferred RF return path |
| 07/17/2012 | US8222574 Temperature measurement and control of wafer support in thermal processing chamber |
| 07/17/2012 | US8222570 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 07/17/2012 | US8222138 Method and structure of a thick metal layer using multiple deposition chambers |
| 07/17/2012 | US8222125 Plasma deposition of amorphous semiconductors at microwave frequencies |
| 07/17/2012 | US8221852 Methods of atomic layer deposition using titanium-based precursors |
| 07/17/2012 | US8221838 Method of making a CVD coating scheme including alumina and/or titanium-containing materials |
| 07/17/2012 | US8221837 Organometallic compounds and processes for preparation thereof |
| 07/17/2012 | US8221836 Method of fabricating a thermostructural composite material part, and a part obtained thereby |
| 07/17/2012 | US8221835 Method of manufacturing semiconductor device and apparatus for processing substrate |
| 07/17/2012 | US8221832 Method of making heat treated coated article having carbon layer and utilizing removable zinc oxide inclusive protective film |
| 07/17/2012 | US8221830 Method of manufacturing cellulose electrode for fuel cells, cellulose electrode manufactured thereby, and use of cellulose fibers as fuel cell electrodes |
| 07/17/2012 | US8221828 Surface coating process |
| 07/17/2012 | US8221825 Comprehensive method for local application and local repair of thermal barrier coatings |
| 07/17/2012 | US8221823 Method for fabricating material |
| 07/17/2012 | US8221581 Gas supply mechanism and substrate processing apparatus |
| 07/17/2012 | US8221580 Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops |
| 07/17/2012 | US8221557 Systems and methods for exposing semiconductor workpieces to vapors for through-hole cleaning and/or other processes |
| 07/17/2012 | US8221551 Apparatus for producing a reflector |
| 07/17/2012 | US8221535 Tin-doped indium oxide fine particle dispersion, method for manufacturing the same, interlayer film for laminated glass with heat ray blocking properties formed by using said dispersion, and laminated glass therewith |
| 07/12/2012 | WO2012094182A2 Chuck for chemical vapor deposition systems and related methods therefor |
| 07/12/2012 | WO2012093847A2 Polycrystalline cuprous oxide nanowire array production method using low-temperature electrochemical growth |
| 07/12/2012 | WO2012093467A1 Organic el display device and method for manufacturing same |
| 07/12/2012 | WO2012093182A1 Barrier coat and production method thereof |
| 07/12/2012 | WO2012093142A1 Filament for hot wire chemical vapour deposition |
| 07/12/2012 | WO2012067439A3 Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same |
| 07/12/2012 | US20120178972 Process and apparatus for depositing nanostructured material onto a substrate material |
| 07/12/2012 | US20120178953 Solution based precursors |
| 07/12/2012 | US20120178321 Method for producing a metallised fabric, and resulting fabric |
| 07/12/2012 | US20120178267 Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride |
| 07/12/2012 | US20120178264 Method and apparatus for forming silicon nitride film |
| 07/12/2012 | US20120178256 Formation of a tantalum-nitride layer |
| 07/12/2012 | US20120178200 Integrated in-line processing system for selective emitter solar cells |
| 07/12/2012 | US20120178015 Method of processing a ceramic electrolyte, and related articles |
| 07/12/2012 | US20120177846 Radical steam cvd |
| 07/12/2012 | US20120177845 High molecular weight alkyl-allyl cobalttricarbonyl complexes and use thereof for preparing dielectric thin films |
| 07/12/2012 | US20120177844 Method and device for chemical vapor deposition of polymer film onto a substrate |
| 07/12/2012 | US20120177841 Low Temperature Silicon Carbide Deposition Process |
| 07/12/2012 | US20120177824 Method and device for coating substrates from the vapor phase |
| 07/12/2012 | US20120177823 Method for forming a protective coating containing aluminum on the surface of a metal part |
| 07/12/2012 | US20120177813 Chemical annealing method for fabrication of organic thin films for optoelectronic devices |
| 07/12/2012 | US20120177810 In-situ identification and control of microstructures produced by phase transformation of a material |
| 07/12/2012 | US20120177808 System and method for low-power nanotube growth using direct resistive heating |
| 07/12/2012 | US20120176681 Nanostructured anti-reflective coatings for substrates |
| 07/12/2012 | US20120175270 Electrode for Electrolytic Processes with Controlled Crystalline Structure |
| 07/12/2012 | US20120175062 Cam-locked showerhead electrode and assembly |
| 07/12/2012 | US20120175060 Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations |
| 07/12/2012 | US20120174866 Apparatus for chemical vapor deposition |
| 07/12/2012 | US20120174865 Deposition source and organic layer deposition apparatus including the same |
| 07/12/2012 | US20120174864 Plasma cvd apparatus |
| 07/12/2012 | US20120174823 Composition for coating film to prevent conspicuous fingerprints, coating film to prevent conspicuous fingerprints using the composition, and article having the coating film |
| 07/12/2012 | DE112010003214T5 Epitaxiesubstrat für ein halbleiterelement, verfahrenzur herstellung eines epitaxiesubstrats für einhalbleiterelement, und halbleiterelement Epitaxial substrate for semiconductor element, verfahrenzur making an epitaxial substrate for a half head of element and semiconductor element |
| 07/12/2012 | DE102008028542B4 Verfahren und Vorrichtung zum Abscheiden einer Schicht auf einem Substrat mittels einer plasmagestützten chemischen Reaktion Method and apparatus for depositing a layer on a substrate by a plasma enhanced chemical reaction |
| 07/11/2012 | EP2474644A1 Gas supply system |
| 07/11/2012 | EP2474643A1 Method for direct deposition of a germanium layer |
| 07/11/2012 | EP2474370A1 Method and device for producing process gases for vapour deposition |
| 07/11/2012 | EP2473651A1 Process and apparatus for controlling coating deposition |
| 07/11/2012 | EP2473650A2 Plasma enhanced chemical vapor deposition apparatus |
| 07/11/2012 | EP2473649A1 Method for applying layers |
| 07/11/2012 | EP2473648A2 Methods and systems for making battery electrodes and devices arising therefrom |
| 07/11/2012 | EP2249379B1 Batch-type atomic layer vapour-deposition device |
| 07/11/2012 | EP2233491B1 Metal compound, chemical vapor deposition material containing the same, and method for producing metal-containing thin film |
| 07/11/2012 | EP1893785B1 Method for feeding powdered or granular material |
| 07/11/2012 | CN202332927U 分体式pecvd及扩散设备架 Split pecvd and diffusion equipment rack |
| 07/11/2012 | CN202329179U 一种炉门脱落的防砸装置 One kind of door off the anti-smashing device |
| 07/11/2012 | CN202323024U 一种化学气相沉积炉用沉积室 A chemical vapor deposition furnace deposition chamber |
| 07/11/2012 | CN202323023U 具有新结构石墨舟的pecvd设备 With the new structure of the graphite boat pecvd equipment |
| 07/11/2012 | CN202323022U Gas distribution system for base plate type coating equipment |
| 07/11/2012 | CN202323021U 一种双腔室或多腔室薄膜沉积设备的混气进气结构 One kind of dual chamber or chambers of thin film deposition equipment mixed gas intake structure |
| 07/11/2012 | CN202323020U 一种实现mocvd喷淋均匀性的装置 A mocvd device to achieve uniformity of the spray |
| 07/11/2012 | CN202323019U Multi-point gas inlet multi-area adjustable device for PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| 07/11/2012 | CN202323018U Maze air inlet device for vacuum chamber of large-sized plate type PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
| 07/11/2012 | CN202323017U Novel liquid gasifier |
| 07/11/2012 | CN202323016U 一种大型环形气相沉积炉 A large, ring-shaped vapor deposition furnace |
| 07/11/2012 | CN202323015U 一种三料柱气相沉积炉 A three-column feed vapor deposition furnace |
| 07/11/2012 | CN202323014U 一种气相沉积炉 A gas phase deposition furnace |
| 07/11/2012 | CN202323013U Bidirectional magnetic field enhancement device |
| 07/11/2012 | CN202323012U 一种加热盘与真空机械手定位装置 A heating plate and vacuum manipulator positioning device |
| 07/11/2012 | CN202323008U 卷绕真空镀膜机用的卷辊架移动定位装置 Roll holder mobile positioning device with vacuum coating machine winding |
| 07/11/2012 | CN102577629A Plasma generation device |
| 07/11/2012 | CN102576787A Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device |
| 07/11/2012 | CN102576668A Catalytic CVD device, film forming method and solar cell manufacturing method |
| 07/11/2012 | CN102576666A Silicon carbide epitaxial wafer and manufacturing method therefor |
| 07/11/2012 | CN102575349A Plasma CVD device |
| 07/11/2012 | CN102575348A Thin film deposition apparatus and method for the same |
| 07/11/2012 | CN102575347A Film-forming device, film-forming head, and film-forming method |
| 07/11/2012 | CN102575346A Method of applying atomic layer deposition coatings onto porous non-ceramic substrates |
| 07/11/2012 | CN102575345A Multilayer coating, method for fabricating a multilayer coating, and uses for the same |
| 07/11/2012 | CN102575344A Pulsed chemical vapor deposition of metal-silicon-containing films |
| 07/11/2012 | CN102575343A Catalytic CVD device, method for formation of film, process for production of solar cell, and substrate holder |