| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/25/2012 | US8273210 Plasma processing apparatus and method for adjusting plasma density distribution |
| 09/25/2012 | US8273180 Device for film coating |
| 09/25/2012 | US8273179 Deposition mask for display device and method for fabricating the same |
| 09/25/2012 | US8273178 Thin film deposition apparatus and method of maintaining the same |
| 09/25/2012 | US8273136 Electrochemical element, and method and apparatus for manufacturing electrode thereof |
| 09/25/2012 | US8272626 Bubbler for the transportation of substances by a carrier gas |
| 09/25/2012 | US8272348 Method for plasma deposition and plasma CVD system |
| 09/25/2012 | US8272347 High temperature gas heating device for a vapor deposition system |
| 09/25/2012 | US8272346 Gasket with positioning feature for clamped monolithic showerhead electrode |
| 09/25/2012 | US8272343 Fingerprint goggles |
| 09/25/2012 | CA2765510A1 Cvd coated polycrystalline c-bn cutting tools |
| 09/25/2012 | CA2712248C Cmas-resistant thermal barrier coatings |
| 09/25/2012 | CA2448697C Method of making a passivated surface |
| 09/20/2012 | WO2012126006A1 Systems and methods for charging solar cell layers |
| 09/20/2012 | WO2012125771A2 Substrate support assembly for thin film deposition systems |
| 09/20/2012 | WO2012125439A2 Precursors and methods for the atomic layer deposition of manganese |
| 09/20/2012 | WO2012124913A2 Noble group iv-b organometallic compound, and method for preparing same |
| 09/20/2012 | WO2012124047A1 Film formation device |
| 09/20/2012 | WO2012044729A3 Microelectronic structures including cuprous oxide semiconductors and having improved p-n heterojunctions |
| 09/20/2012 | WO2012036537A3 Apparatus and method for manufacturing graphene using a flash lamp or laser beam, and graphene manufactured by same |
| 09/20/2012 | US20120237794 Aluminum oxynitride coated article and method of making the same |
| 09/20/2012 | US20120237792 Coating for improved wear resistance |
| 09/20/2012 | US20120237789 High yield strength lightweight polymer-metal hybrid articles |
| 09/20/2012 | US20120237782 Carbon coated aluminum foil as cathode of solid aluminum electrolytic capacitor and manufacturing method thereof |
| 09/20/2012 | US20120237777 Process for forming an anti-fouling coating system |
| 09/20/2012 | US20120237696 Fluid distribution members and/or assemblies |
| 09/20/2012 | US20120237695 Method and apparatus for depositing a thin film |
| 09/20/2012 | US20120237680 Method for elaborating carbon nanotubes on a substrate |
| 09/20/2012 | US20120237679 Apparatus and methods for depositing one or more organic materials on a substrate |
| 09/20/2012 | US20120237678 Tool For Harvesting Polycrystalline Silicon-coated Rods From A Chemical Vapor Deposition Reactor |
| 09/20/2012 | US20120236528 Multilayer emi shielding thin film with high rf permeability |
| 09/20/2012 | US20120236385 Display substrate, display apparatus having the same and method of manufacturing the same |
| 09/20/2012 | US20120235115 Growth of iii-v led stacks using nano masks |
| 09/20/2012 | US20120234792 Lithography method using tilted evaporation |
| 09/20/2012 | US20120234491 Plasma processing method and plasma processing apparatus |
| 09/20/2012 | US20120234243 Method and apparatus utilizing a single lift mechanism for processing and transfer of substrates |
| 09/20/2012 | US20120234242 Thermal reactors with improved gas flow characteristics |
| 09/20/2012 | US20120234241 Microwave plasma deposition device |
| 09/20/2012 | US20120234240 Graphene synthesis chamber and method of synthesizing graphene by using the same |
| 09/20/2012 | US20120234238 Integrated metrology for wafer screening |
| 09/20/2012 | DE102012004367A1 Mit Aluminiumoxynitrid beschichteter Gegenstand und Verfahren zu dessen Herstellung With aluminum oxynitride coated article and method of producing the |
| 09/20/2012 | DE102011015097A1 Cooling unit e.g. vapor-chamber-cooler or a flat heat pipe, comprises a hydrophilic layer, and a metal body comprising an inner space, where the inner space comprises a vaporization zone, a condensation zone and a connection zone |
| 09/20/2012 | DE102011014186A1 Cutter body, useful for cutting plastic-, wood-, paper and carbon fiber materials, comprises a substrate body, and a thin coating lamella applied on a free surface side of the substrate body |
| 09/20/2012 | DE102011005557A1 Operating a vacuum coating system for producing thin film solar cells, comprises purifying a coating chamber using a cleaning gas, and depositing a diffusion barrier layer comprising amorphous silicon carbide on coating chamber walls |
| 09/20/2012 | DE102010060762A9 Plasmabearbeitungsvorrichtung The plasma processing apparatus |
| 09/19/2012 | EP2500451A1 Method for producing laminate |
| 09/19/2012 | EP2500446A1 Component manipulator for dynamic positioning of a substrate, coating method and use of a component manipulator |
| 09/19/2012 | EP2499276A2 Multilayer growth by gas phase deposition |
| 09/19/2012 | EP2499275A1 Coated bodies made of metal, hard metal, cermet or ceramic material and method for coating such bodies |
| 09/19/2012 | EP2499274A2 Methods of making and deposition methods using hafnium- or zirconium-containing compounds |
| 09/19/2012 | EP2499273A2 Coated cutting insert and method for making the same |
| 09/19/2012 | EP2499149A2 Process for preparing ruthenium(0)-olefin complexes |
| 09/19/2012 | CN202440548U Reaction chamber spraying system |
| 09/19/2012 | CN102686775A Fluid distribution manifold including compliant plates |
| 09/19/2012 | CN102686774A Cvd apparatus |
| 09/19/2012 | CN102686773A Film forming method and film forming apparatus |
| 09/19/2012 | CN102686772A Coated bodies made of metal, hard metal, cermet, or ceramic, and method(s) for coating of such bodies |
| 09/19/2012 | CN102686771A Ruthenium complex mixture, method of producing the same, composition for film formation, ruthenium-containing film, and method of producing the same |
| 09/19/2012 | CN102686770A Phase change memory device suitable for high temperature operation |
| 09/19/2012 | CN102686769A Method for depositing multi-layered layers and/or gradient layers |
| 09/19/2012 | CN102686768A Substrate support |
| 09/19/2012 | CN102686342A Method of surfacing metallic nanoparticles with carbon |
| 09/19/2012 | CN102683481A Method for operating a vacuum coating device |
| 09/19/2012 | CN102683476A Oxygenic n-type beta-ferrosilicon (FeSi2) and manufacturing method thereof |
| 09/19/2012 | CN102683252A Substrate conveying method and substrate conveyor |
| 09/19/2012 | CN102681058A Preparing method of porous-alumina-based phase transmission grating |
| 09/19/2012 | CN102677053A Preparation method of anti-corrosion composite coating on surface of magnesium alloy |
| 09/19/2012 | CN102677024A Cavity pressure adjustment method and cavity pressure adjustment device |
| 09/19/2012 | CN102677023A Roll-to-roll type glow discharge generation device and process for modifying surface of flexible material |
| 09/19/2012 | CN102677022A Atomic layer deposition device |
| 09/19/2012 | CN102677021A Film formation method and film formation apparatus |
| 09/19/2012 | CN102677020A Bilayer coating device of crystalline silicon solar cell |
| 09/19/2012 | CN102677019A Motion magnetic field auxiliary-reinforced chemical vapor deposition method and device |
| 09/19/2012 | CN102677018A Thermal treatment apparatus |
| 09/19/2012 | CN102677017A Loading and unloading mechanism, chemical vapor deposition (CVD) equipment and control method of CVD equipment |
| 09/19/2012 | CN102677016A Aluminum oxynitride coated article and method of making the same |
| 09/19/2012 | CN102677015A Structure, device and method for stacking glass substrates for coating film manufacture |
| 09/19/2012 | CN102676998A Manufacture device and lighting device |
| 09/19/2012 | CN101933122B Load-lock apparatus and substrate cooling method |
| 09/19/2012 | CN101901743B Cleaning process and apparatus for silicate materials |
| 09/19/2012 | CN101870191B Novel material intaglio roller |
| 09/19/2012 | CN101783280B Cleaning method of semiconductor board |
| 09/19/2012 | CN101556948B Semiconductor device, method for manufacturing semiconductor device and gas for plasma cvd |
| 09/18/2012 | US8268409 Plasma-enhanced deposition of metal carbide films |
| 09/18/2012 | US8268398 Method for making carbon nanotube composite structure |
| 09/18/2012 | US8268397 Organometallic precursor, thin film having the same, metal wiring including the thin film, method of forming a thin film and method of manufacturing a metal wiring using the same |
| 09/18/2012 | US8268396 Film forming method and apparatus, and storage medium |
| 09/18/2012 | US8268386 Method for manufacturing high-temperature superconducting conductors |
| 09/18/2012 | US8268116 Methods of and apparatus for protecting a region of process exclusion adjacent to a region of process performance in a process chamber |
| 09/18/2012 | US8268080 Apparatus and method for preparing composite particulates using vapor deposition |
| 09/18/2012 | US8268079 Vacuum film deposition apparatus |
| 09/18/2012 | US8268078 Method and apparatus for reducing particle contamination in a deposition system |
| 09/18/2012 | US8267042 Plasma processing apparatus and plasma processing method |
| 09/18/2012 | US8267041 Plasma treating apparatus |
| 09/18/2012 | US8267040 Plasma processing apparatus and plasma processing method |
| 09/18/2012 | US8267039 Coating apparatus and method of applying coating liquid |
| 09/18/2012 | US8267038 Method for discharging droplets and droplet discharge apparatus |
| 09/18/2012 | CA2523927C Controlling or modeling a chemical vapor infiltration process for densifying porous substrates with carbon |
| 09/13/2012 | WO2012122304A2 Systems and methods for activation and deactivation of appliances |
| 09/13/2012 | WO2012122253A2 Substrate carrier with multiple emissivity coefficients for thin film processing |