| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 10/26/2012 | WO2012142992A1 Hot-wire method for depositing semiconductor material on a substrate and device for performing the method |
| 10/26/2012 | WO2012118606A3 Thin heated substrate support |
| 10/25/2012 | US20120270413 Silicon Nitride Film, A Semiconductor Device, A Display Device and a Method for Manufacturing a Silicon Nitride Film |
| 10/25/2012 | US20120270407 Susceptor for supporting a semiconductor wafer and method for depositing a layer on a front side of a semiconductor wafer |
| 10/25/2012 | US20120270384 Apparatus for deposition of materials on a substrate |
| 10/25/2012 | US20120270054 Roll-to-roll doping method of graphene film, and doped graphene film |
| 10/25/2012 | US20120270053 SITU GROWN SiC COATINGS ON CARBON MATERIALS |
| 10/25/2012 | US20120270037 Surface-coated cutting tool and manufacturing method thereof |
| 10/25/2012 | US20120270023 Composite material |
| 10/25/2012 | US20120270013 ZnO-BASED TRANSPARENT CONDUCTIVE THIN FILM FOR PHOTOVOLTAIC CELL AND MANUFACTURING METHOD THEREOF |
| 10/25/2012 | US20120269989 Low temperature silicon oxide conversion |
| 10/25/2012 | US20120269988 Method of manufacture of multilayer film |
| 10/25/2012 | US20120269987 Processes and Systems for Engineering a Barrier Surface for Copper Deposition |
| 10/25/2012 | US20120269985 Atmospheric film-coating method |
| 10/25/2012 | US20120269970 Cleaning method and film depositing method |
| 10/25/2012 | US20120269969 Film deposition method and apparatus |
| 10/25/2012 | US20120269968 Atomic Layer Deposition Apparatus and Process |
| 10/25/2012 | US20120269967 Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use |
| 10/25/2012 | US20120269962 Process for passivating dielectric films |
| 10/25/2012 | US20120269960 Method of manufacturing conductive laminated film |
| 10/25/2012 | US20120268845 Write pole and shield with different taper angles |
| 10/25/2012 | US20120267784 Semiconductor Device and Bonding Wire |
| 10/25/2012 | US20120267346 Support assembly |
| 10/25/2012 | US20120267341 Film deposition apparatus and film deposition method |
| 10/25/2012 | US20120267051 Inductively coupled plasma processing apparatus |
| 10/25/2012 | US20120267049 Grounding assembly for vacuum processing apparatus |
| 10/25/2012 | US20120266967 Evaporator |
| 10/25/2012 | US20120266821 Reaction system for growing a thin film |
| 10/25/2012 | US20120266820 Reactor for polycrystalline silicon and polycrystalline silicon production method |
| 10/25/2012 | US20120266819 Semiconductor substrate processing system |
| 10/25/2012 | US20120266818 Atmospheric film-coating device and film-manufacturing apparatus |
| 10/25/2012 | US20120266817 Substrate processing apparatus capable of cleaning inside thereof and cleaning control apparatus for controlling cleaning process of substrate processing apparatus |
| 10/25/2012 | US20120266816 Polycrystal silicon manufacturing apparatus |
| 10/25/2012 | DE202012103945U1 Dichtung für Substratbehandlungskammer Seal for substrate processing chamber |
| 10/25/2012 | DE112009004681T5 Verfahren zur Bildung eines Metalloxidfilmes, Metalloxidfilm und Anlage zur Erzeugung des Metalloxidfilmes A method for forming a metal oxide film, metal oxide and plant for the production of metal oxide film |
| 10/25/2012 | DE102011018324A1 Heißdrahtverfahren zur Abscheidung von Halbleiter-Material auf einem Substrat und Vorrichtung zur Durchführung des Verfahrens Hot-wire method for deposition of semiconductor material on a substrate and apparatus for carrying out the method |
| 10/25/2012 | DE102004017236B4 Verbundmaterial mit verbesserter chemischer Beständigkeit und Verfahren zu dessen Herstellung A composite material having improved chemical resistance, and process for its preparation |
| 10/24/2012 | EP2514857A1 SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SAME |
| 10/24/2012 | EP2514852A1 Conveyance device for film substrate |
| 10/24/2012 | EP2514720A1 Preparation method of high density zinc oxide nanometer granules |
| 10/24/2012 | EP2513354A1 Chemical vapor deposition for an interior of a hollow article with high aspect ratio |
| 10/24/2012 | EP2512710A1 Method of surfacing metallic nanoparticles with carbon |
| 10/24/2012 | CN202499905U Chemical vapor deposition equipment |
| 10/24/2012 | CN202499904U Plasma-assisted selenizing device for preparing copper-indium-gallium-selenium (CIGS) thin films |
| 10/24/2012 | CN202499902U Substrate holder capable of achieving automatically overturning |
| 10/24/2012 | CN102754191A Heating apparatus and annealing apparatus |
| 10/24/2012 | CN102753727A Plasma processing device and plasma processing method |
| 10/24/2012 | CN102753726A Oxygen radical generation for radical-enhanced thin film deposition |
| 10/24/2012 | CN102753725A Covered member and process for production thereof |
| 10/24/2012 | CN102753724A Material for forming ruthenium film and method for forming ruthenium film |
| 10/24/2012 | CN102753723A Small plasma chamber systems and methods |
| 10/24/2012 | CN102751399A Facility for manufacturing vertical GaN-based LED chips by metal substrates |
| 10/24/2012 | CN102751216A Heat treatment apparatus |
| 10/24/2012 | CN102751181A Method and apparatus for depositing a material layer originating from process gas on a substrate wafer |
| 10/24/2012 | CN102747342A Structure for adjusting air-duct flow |
| 10/24/2012 | CN102747341A Special tool for installing wafer bracket and method for installing special tool |
| 10/24/2012 | CN102747340A Plasma enhanced chemical vapor deposition device |
| 10/24/2012 | CN102747339A Plasma enhanced chemical vapor deposition device |
| 10/24/2012 | CN102747338A Gas transmission pipeline and silica deposition device |
| 10/24/2012 | CN102747337A Method for preparing amorphous carbon film with large area and high quality |
| 10/24/2012 | CN102747336A Cleaning method and apparatus of semiconductor processing systems |
| 10/24/2012 | CN102051603B Plasm-aided selenium sulfuration treatment device and process |
| 10/24/2012 | CN102031501B Method for selectively depositing thin film on substrate by utilizing atomic layer deposition |
| 10/24/2012 | CN101831626B Chemical vapor diamond deposition device |
| 10/24/2012 | CN101788516B Method for manufacturing alternating current electrophoresis directionally assembled carbon nanotube array sensing device |
| 10/24/2012 | CN101671187B Method for regulating performance of high-performance carbon-based composite material |
| 10/24/2012 | CN101176190B Ozone post-deposition treatment to remove carbon in a flowable oxide film |
| 10/24/2012 | CN101160192B Saw band and method for the production of a saw band |
| 10/23/2012 | US8295966 Methods and apparatus to predict etch rate uniformity for qualification of a plasma chamber |
| 10/23/2012 | US8293335 Yttria-coated ceramic components of semiconductor material processing apparatuses and methods of manufacturing the components |
| 10/23/2012 | US8293329 Organic vapor jet printing system |
| 10/23/2012 | US8293328 Enhanced copper growth with ultrathin barrier layer for high performance interconnects |
| 10/23/2012 | US8293327 Process for forming the strontium-containing thin film |
| 10/23/2012 | US8293193 Microfluidic component with a channel filled with nanotubes and method for its production |
| 10/23/2012 | US8293081 Physical vapor deposition device |
| 10/23/2012 | US8293070 Oxygen ion implantation equipment |
| 10/23/2012 | US8293069 Inductively coupled plasma apparatus |
| 10/23/2012 | US8293068 Plasma processing apparatus |
| 10/23/2012 | US8293067 Microwave plasma processing device and gate valve for microwave plasma processing device |
| 10/23/2012 | US8293066 Apparatus and methods for transporting and processing substrates |
| 10/23/2012 | US8293017 Method and apparatus for coating surfaces |
| 10/23/2012 | US8293016 Apparatus for efficient removal of halogen residues from etched substrates |
| 10/23/2012 | US8293015 Apparatuses and methods for atomic layer deposition |
| 10/23/2012 | US8293014 Substrate processing apparatus and reaction tube for processing substrate |
| 10/23/2012 | US8293013 Dual path gas distribution device |
| 10/23/2012 | US8291858 Movable jig for silicon-based thin film solar cell |
| 10/23/2012 | US8291857 Apparatuses and methods for atomic layer deposition |
| 10/23/2012 | US8291856 Gas heating device for a vapor deposition system |
| 10/23/2012 | US8291853 Apparatus for forming a flexible nanostructured material for photovoltaic panels |
| 10/23/2012 | CA2474839C Coating line and process for forming a multilayer composite coating on a substrate |
| 10/18/2012 | WO2012142439A1 Method and apparatus for ion-assisted atomic layer deposition |
| 10/18/2012 | WO2012142408A2 Substrate holders and methods of substrate mounting |
| 10/18/2012 | WO2012142385A1 In-situ cleaning assembly |
| 10/18/2012 | WO2012141708A1 Organic resin laminate |
| 10/18/2012 | WO2012141484A2 Bowl-shaped structure, method for manufacturing same, and bowl array |
| 10/18/2012 | WO2012141031A1 Semiconductor light emitting element and method for manufacturing same |
| 10/18/2012 | WO2012140837A1 Plasma processing device and plasma processing method |
| 10/18/2012 | WO2012140792A1 Film-forming apparatus and film-forming method |
| 10/18/2012 | WO2012140406A1 Vacuum pumping system |
| 10/18/2012 | WO2012096466A3 Thin film deposition apparatus and substrate treatment system including same |