Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
10/2012
10/11/2012US20120258294 Multilayer component for the encapsulation of a sensitive element
10/11/2012US20120258266 Coatings For Engine And Powertrain Components To Prevent Buildup Of Deposits
10/11/2012US20120258260 Method and device for polarizing a dbd electrode
10/11/2012US20120258259 Apparatus and method for uv treatment, chemical treatment, and deposition
10/11/2012US20120258258 Method of reusing a consumable part for use in a plasma processing apparatus
10/11/2012US20120258257 Nanolayer deposition process
10/11/2012US20120258243 Method and apparatus for producing a fresnel zone plate
10/11/2012US20120258242 In-line film-forming apparatus, method of manufacturing magnetic recording medium, and gate valve
10/11/2012US20120258239 Evaporation system with measurement unit
10/11/2012US20120257274 Film mirror, production process of same and reflection device for solar power generation comprising same
10/11/2012US20120255932 Nanofabrication device and method for manufacture of a nanofabrication device
10/11/2012US20120255898 Semipermeable polymers and method for producing same
10/11/2012US20120255494 Low temperature cnt growth using gas-preheat method
10/11/2012US20120255493 Gas evaporator for coating plants
10/11/2012US20120255492 Large Area Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Apparatus
10/11/2012US20120255486 Cleaning apparatus and method, and film growth reaction apparatus and method
10/11/2012CA2832084A1 Method for depositing one or more polycrystalline silicon layers on substrate
10/10/2012EP2509139A1 Method for manufacturing negative electrode active material for use in non-aqueous electrolyte secondary battery, negative electrode material for use in non-aqueous electrolyte secondary battery and non-aqueous electrolyte secondary battery
10/10/2012EP2509119A1 Light emitting element and method for manufacturing same
10/10/2012EP2508654A1 Vapor deposition system
10/10/2012EP2507405A1 Method for forming a decorative coating on a gemstone, a decorative coating on a gemstone, and uses of the same
10/10/2012EP2507404A2 Method and apparatus for depositing nanostructured thin layers with controlled morphology and nanostructure
10/10/2012EP2507056A1 Conformable barrier sheet, methods, and device
10/10/2012EP2506921A2 Cubic silicon carbide implantable neural prosthetic
10/10/2012CN202482433U Micro-pore diamond coating device for wire-drawing dies
10/10/2012CN202482432U Telescopic cell piece suction device
10/10/2012CN202482424U Hanging frame device for vacuum coating of corrosion resistant plate
10/10/2012CN102725439A Inline coating installation
10/10/2012CN102725438A Deposition device
10/10/2012CN102725437A Method and device for separating argon from a gaseous mixture
10/10/2012CN102725239A Method for producing an optical component
10/10/2012CN102725127A Method for surface treating a substrate and device for carrying out the method
10/10/2012CN102724803A Inductively coupled plasma processing apparatus
10/10/2012CN102720851A Gate valve
10/10/2012CN102719887A Method for growing high-quality gallium nitride epitaxial film on basis of gallium nitride substrate
10/10/2012CN102719810A Thin film deposition system
10/10/2012CN102719809A Thin film deposition system
10/10/2012CN102719808A Pallet and substrate processing equipment with pallet
10/10/2012CN102719807A An electrostatic-adsorbing support plate, an apparatus and a technology for producing film
10/10/2012CN102719806A Deposition device
10/10/2012CN102719805A Automatic furnace door mechanism for PECVD device
10/10/2012CN102719804A Growing device of gas inner circulation type hot wire chemical vapor deposition (CVD) diamond films
10/10/2012CN102719803A Method for preparing and transferring graphene transparent film
10/10/2012CN102719802A Device for increasing metal adhesivity of diamond through wrapping silicon on diamond and application method thereof
10/10/2012CN102719801A Method for preparing nickel foil
10/10/2012CN102717067A Method for preparing nickel-coated powder
10/10/2012CN102717066A Method for preparing iron-coated powder
10/10/2012CN102330068B Pyrolysis boron nitride plate preparing method and vapor phase deposition furnace used in same
10/10/2012CN102212794B Copper plating substrate-based method for preparing large-area graphene film
10/10/2012CN102169925B Method for manufacturing buffer layer of amorphous silicon thin-film solar cell
10/10/2012CN102047385B Thin film formation device and semiconductor film manufacturing method
10/10/2012CN102016099B Method for production of water-reactive Al film, and structural member for film-forming chamber
10/10/2012CN101999172B Apparatus for manufacturing thin film solar cell
10/10/2012CN101999159B Thin film solar cell manufacturing equipment
10/10/2012CN101935827B Device and method for precipitating film layer of thin-film solar cell
10/10/2012CN101928930B Vacuum coating machine
10/10/2012CN101903980B Stage structure and heat treatment apparatus
10/10/2012CN101871098B Growing method of high-crystal quality high-resistance GaN epitaxial layer
10/10/2012CN101555590B Environmental-protecting chemical gas-phase permeating technical method with stable running and device thereof
10/10/2012CN101102970B Glass ceramic article having a diffusion barrier and method for producing a glass ceramic article having a diffusion barrier
10/09/2012US8283607 Apparatus including heating source reflective filter for pyrometry
10/09/2012US8283041 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s)
10/09/2012US8282997 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
10/09/2012US8282993 Ultrathin magnesium nanoblades
10/09/2012US8282992 Methods for atomic layer deposition of hafnium-containing high-K dielectric materials
10/09/2012US8282988 Methods of making crystalline tantalum pentoxide
10/09/2012US8282983 Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source
10/09/2012US8282794 Filtered cathodic arc deposition method and apparatus
10/09/2012US8282769 Shower head and plasma processing apparatus having same
10/09/2012US8282767 Plasma processing apparatus
10/09/2012US8282737 Substrate processing apparatus and method for manufacturing a semiconductor device
10/09/2012US8282736 Lower liner with integrated flow equalizer and improved conductance
10/09/2012US8282735 Atomic layer deposition apparatus
10/09/2012US8282734 Methods to improve the in-film defectivity of PECVD amorphous carbon films
10/09/2012US8281741 Plasma deposition apparatus and deposition method utilizing same
10/09/2012US8281740 Substrate processing apparatus, and magnetic recording medium manufacturing method
10/09/2012US8281739 RF shutter
10/09/2012US8281734 Web sealing device
10/04/2012WO2012134084A2 Plasma enhanced chemical vapor deposition apparatus and method for controlling the same
10/04/2012WO2012134083A2 Plasma enhanced chemical vapor deposition apparatus and method for controlling the same
10/04/2012WO2012134082A2 Plasma enhanced chemical vapor deposition apparatus and method for controlling the same
10/04/2012WO2012134070A2 Gas-injection apparatus, atomic layer deposition apparatus, and atomic layer deposition method using the apparatus
10/04/2012WO2012133541A1 Rolled film formation apparatus
10/04/2012WO2012133461A1 Member coated with hard film, process for producing same, and bit-exchangeable rotary tool equipped therewith
10/04/2012WO2012133441A1 Substrate processing device, method for manufacturing semiconductor device, and substrate processing method
10/04/2012WO2012132977A1 Vapor phase growth device
10/04/2012WO2012132878A1 Vaporizer, gas supply device and film formation apparatus
10/04/2012WO2012132669A1 Precursor for formation of europium-containing thin film, and method for forming europium-containing thin film
10/04/2012WO2012132609A1 Substrate processing apparatus and recovery device
10/04/2012WO2012132588A1 Plasma cvd apparatus, plasma cvd method, reactive sputtering apparatus, and reactive sputtering method
10/04/2012WO2012132585A1 Gas barrier film, production device therefor, and production program therefor
10/04/2012WO2012132575A1 Shower plate, vapor-phase growth apparatus, and vapor-phase growth method
10/04/2012WO2012132538A1 Heat treating apparatus
10/04/2012WO2012132253A1 Substrate processing apparatus
10/04/2012WO2012132229A1 MANUFACTURING METHOD FOR TRENCH-TYPE SiC SEMICONDUCTOR DEVICE
10/04/2012WO2012132078A1 Induction heating device
10/04/2012WO2012132077A1 Induction heating device
10/04/2012WO2012132032A1 Surface-coated cutting tool and method for manufacturing same
10/04/2012WO2012130089A1 Method for cleaning gas conveying device, and method and reaction device for film growth
10/04/2012WO2012079066A3 Method for producing graphene oxide with tunable gap
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