Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
08/2012
08/15/2012CN102634769A Equipment for continuously preparing two-dimensional nano thin film
08/15/2012CN102634712A Nb-W alloy and preparation method thereof
08/15/2012CN102212800B Multi-stock-column type industrial furnace for chemical vapour infiltration densification
08/15/2012CN102154625B Preparation method for anti-carbon deposition layer on the surface of steel material part of engine
08/15/2012CN101952480B Bodies coated with a hard material and method for the production thereof
08/15/2012CN101410554B Composite material component with silicon-containing ceramic matrix, protected against corrosion
08/14/2012US8241754 Barrier laminate and device sealed with it, and method of sealing device
08/14/2012US8241704 Chemical vapor deposition of high conductivity, adherent thin films of ruthenium
08/14/2012US8241699 Deposition apparatus and method for manufacturing film by using deposition apparatus
08/14/2012US8241457 Plasma processing system, plasma measurement system, plasma measurement method, and plasma control system
08/14/2012US8240271 Substrate processing apparatus
08/14/2012CA2637118C Method of preparing organometallic compounds
08/14/2012CA2415028C Composite with a low emissivity in the medium and far infrared, and with a low reflectivity in the visible and near infrared
08/09/2012WO2012105834A1 Apparatus and method for atomic layer deposition
08/09/2012WO2012105832A1 Apparatus for atomic layer deposition
08/09/2012WO2012105831A1 Apparatus for atomic layer deposition
08/09/2012WO2012105313A1 Vapor phase growing apparatus
08/09/2012WO2012104928A1 Rotating and holding device and transport device for semiconductor substrate
08/09/2012WO2012104535A2 Structure for forming solar cells
08/09/2012WO2012104106A1 Method for producing a three-dimensional structure and three-dimensional structure
08/09/2012WO2012075992A3 Process and apparatus for applying layers to a component
08/09/2012WO2011146445A3 Carbon nanotube augmented electrodes with silicon
08/09/2012US20120202352 Method of and apparatus for manufacturing semiconductor device
08/09/2012US20120202069 Method of producing silicon carbide-coated carbon material
08/09/2012US20120202054 BODIES COATED BY SiC AND METHOD FOR CREATING SiC-COATED BODIES
08/09/2012US20120202028 Ceramic member and manufacturing thereof
08/09/2012US20120201976 Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon
08/09/2012US20120201974 Method for the high-temperature-resistant bonding of oxygen-permeable oxide ceramics based on substituted alkaline-earth cobaltates by means of doping-supported diffusive reactive sintering
08/09/2012US20120201968 Storage container, method for molding resin, and method for forming plating film
08/09/2012US20120201959 In-Situ Hydroxylation System
08/09/2012US20120201958 Multidentate Ketoimine Ligands For Metal Complexes
08/09/2012US20120201957 Method for the microdeformation of the front face of a thin part by modifying the rear face or the periphery of the part
08/09/2012US20120201955 Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
08/09/2012US20120201953 Conductive substrate, manufacturing method of conductive substrate, and laser light irradiation device
08/09/2012US20120201615 Cubic Aluminum Titanium Nitride Coating and Method of Making Same
08/09/2012US20120200913 Reflective optical element and method of producing it
08/09/2012US20120199996 Complex pierced micromechanical part
08/09/2012US20120199919 Semiconductor device and method of manufacturing the same
08/09/2012US20120199887 Methods of controlling tungsten film properties
08/09/2012US20120199793 Methods for producing coated phosphors and host material particles using atomic layer deposition methods
08/09/2012US20120199553 Carbon film
08/09/2012US20120199288 Method and system for introduction of an active material to a chemical process
08/09/2012US20120199072 Method and apparatus for manufacturing silicon thin film layer and manufacturing apparatus of solar cell
08/09/2012US20120199071 Plasma immersion chamber
08/09/2012US20120199069 Cvd apparatus
08/09/2012US20120199068 Manufacturing apparatus for depositing a material and an electrode for use therein
08/09/2012US20120199067 Film-forming apparatus
08/09/2012US20120199065 Multi-Module System for Processing Thin Film Photovoltaic Devices
08/09/2012US20120199063 Method of processing substrate holder material as well as substrate holder processed by such method
08/08/2012EP2485282A1 Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device
08/08/2012EP2485248A1 Catalytic cvd device, film forming method and solar cell manufacturing method
08/08/2012EP2485246A2 Method for manufacturing and reoxidising a TiN/Ta2O5/TiN capacitor
08/08/2012EP2485245A2 Method for manufacturing a TiN/Ta2O5/TiN capacitor
08/08/2012EP2484818A1 Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device
08/08/2012EP2484817A1 Method for preserving a gallium nitride substrate, preserved gallium nitride substrate, semiconductor device, and manufacturing method therefor
08/08/2012EP2484804A1 Catalytic cvd device, method for formation of film, process for production of solar cell, and substrate holder
08/08/2012EP2484803A1 Method of deposition of Al2O3/SiO2 stacks, from aluminium and silicon precursors
08/08/2012EP2484802A1 Method of deposition of Al2O3/SiO2 stacks from DMAI and silicon precursors
08/08/2012EP2484801A1 Method of deposition of Al2O3/SiO2 stacks, from TMA or TEA and silicon precursors
08/08/2012EP2484185A2 Unitized confinement ring arrangements and methods thereof
08/08/2012EP2483441A1 Vapor deposition reactor for forming thin film on curved surface
08/08/2012EP2483440A1 Non-orthogonal coater geometry for improved coatings on a substrate
08/08/2012EP2350341B1 Device for the synthesis of nanoparticles by fluidized-bed chemical vapour deposition
08/08/2012EP2297768B1 Arrangement for coating tape-shaped film substrates
08/08/2012EP2280091B1 METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER
08/08/2012EP1724039B1 Coated cutting tool
08/08/2012EP1653484B1 Method of producing a superconducting wire
08/08/2012EP1501963B1 Cvi furnace with gas preheater
08/08/2012CN202373620U Protection device of quartz tube locking sleeve
08/08/2012CN202373592U Multilayer film structure for improving conversion efficiency of crystalline silicon solar cell
08/08/2012CN202369642U Graphite bearing plate for silicon wafer coating equipment
08/08/2012CN202369641U Multilayer product support frame for vapor deposition
08/08/2012CN202369640U Flow-diverting dustproof air-controlling disk for vapor deposition
08/08/2012CN202369639U Water bath heating device for gas storage tank for chemical vapor deposition
08/08/2012CN202369638U Hollow graphite die
08/08/2012CN202369637U Novel plasma enhanced chemical vapor deposition (PECVD) cooling bench
08/08/2012CN202369636U Vacuum buffering system of plasma enhanced chemical vapor deposition (PECVD) coating device
08/08/2012CN102630344A Semiconductor device and production method thereof
08/08/2012CN102630188A Method and device for chemical vapor deposition of polymer film onto a substrate
08/08/2012CN102629555A Gate insulation layer and preparation method thereof, TFT and preparation method thereof, array substrate and display device
08/08/2012CN102628165A Method for monitoring abnormity of film deposition process and system thereof
08/08/2012CN102628164A Method for controlling low electrical property and appearance defect of solar battery module
08/08/2012CN102627413A Composite fiber preparation method of microwave-assisted diamond-like carbon film covered glass fiber
08/08/2012CN102627004A Multilayer phase-change film for ultrahigh density probe storage and preparation method thereof
08/08/2012CN102626796A Surface-coated cutting tool having hard-coating layer with excellent chipping resistance and fracturing resistance
08/08/2012CN102626795A Surface covering cutting tool of rigid covering layer
08/08/2012CN102021533B Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products
08/08/2012CN101809188B Process for forming thin film encapsulation layers
08/08/2012CN101688307B Device for coating substrates disposed on a susceptor
08/08/2012CN101578386B Method and apparatus for converting precursor layers into photovoltaic absorbers
08/08/2012CN101497999B Antimony precursors for GST films in ALD/CVD processes
08/08/2012CN101460660B Method of forming a layer of material using an atomic layer deposition process
08/07/2012US8237092 Apparatus and method for heating substrate and coating and developing system
08/07/2012US8236708 Reduced pattern loading using bis(diethylamino)silane (C8H22N2Si) as silicon precursor
08/07/2012US8236389 Method for making carbon nanotube films
08/07/2012US8236383 Abrasion resistant plastic glazing with in-mold coating
08/07/2012US8236381 Metal piperidinate and metal pyridinate precursors for thin film deposition
08/07/2012US8236380 Gas supply system, substrate processing apparatus and gas supply method
08/07/2012US8236379 Articles with super-hydrophobic and-or super-hydrophilic surfaces and method of formation
08/07/2012US8236267 High-pressure vessel for growing group III nitride crystals and method of growing group III nitride crystals using high-pressure vessel and group III nitride crystal