Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
07/2012
07/26/2012WO2012097987A1 Apparatus for plasma treatment of hollow bodies
07/26/2012WO2012097972A1 Plasma treatment device for producing coatings
07/26/2012WO2012082902A4 Pressure based liquid feed system for suspension plasma spray coatings
07/26/2012US20120190950 Electrode compositions for use with analyte sensors
07/26/2012US20120190215 Film deposition method and film deposition apparatus
07/26/2012US20120190176 Catalytic cvd equipment, method for formation of film, and process for production of solar cell
07/26/2012US20120190149 Catalytic cvd equipment, method for formation of film, process for production of solar cell, and substrate holder
07/26/2012US20120189841 Layer system for the formation of a surface layer on a surface of a substrate and coating method for the manufacture of a layer system
07/26/2012US20120189810 Secondary Containment Panels and Process for Making and Installing Same
07/26/2012US20120189783 Plasma reaction method and plasma reaction device
07/26/2012US20120189782 ELECTRONIC DEVICE MANUFACTURE USING LOW-k DIELECTRIC MATERIALS
07/26/2012US20120189781 Method of forming conductive layer and semiconductor device
07/26/2012US20120189775 Method for producing indexable inserts
07/26/2012US20120189774 Enhanced deposition of noble metals
07/26/2012US20120189766 Process and apparatus for controlling coating deposition
07/26/2012US20120189765 Paint curing measurement system and method
07/26/2012US20120188536 Imprint apparatus, detection method, article manufacturing method, and foreign particle detection apparatus
07/26/2012US20120187601 Injection molding method
07/26/2012US20120187399 Substrate for flexible device, thin film transistor substrate for flexible device, flexible device, substrate for thin film element, thin film element, thin film transistor, method for manufacturing substrate for thin film element, method for manufacturing thin film element, and method for manufacturing thin film transistor
07/26/2012US20120187291 Method of Depositing Protective Structures
07/26/2012US20120187278 Microchannel plate and its manufacturing method
07/26/2012US20120186522 Vapor deposition apparatus for optical lens
07/26/2012US20120186521 Plasma processing apparatus and gas supply device for plasma processing apparatus
07/26/2012US20120186519 Plasma doping method and apparatus
07/26/2012DE102011009057A1 Plasma-Behandlungsvorrichtung zur Herstellung von Beschichtungen The plasma treatment apparatus for the production of coatings
07/26/2012DE102011009056A1 Vorrichtung zur Plasmabehandlung von Hohlkörpern Apparatus for plasma treatment of hollow bodies
07/26/2012CA2824074A1 Plasma treatment apparatus for producing coatings
07/25/2012EP2479780A1 Film formation apparatus
07/25/2012EP2479313A1 Amorphous Ge/Te deposition process
07/25/2012EP2478128A1 Thin film deposition apparatus and method for the same
07/25/2012EP2478127A1 Multilayer coating, method for fabricating a multilayer coating, and uses for the same
07/25/2012EP2477754A1 Method and device for chemical vapor deposition of polymer film onto a substrate
07/25/2012EP2257853B1 Method for processing an object with miniaturized structures
07/25/2012EP1682445B1 Method for patterning structures on a substrate
07/25/2012EP1657245B1 Organoiridium compound, process for producing the same, and process for producing film
07/25/2012EP1346607B1 Resistive heaters and uses thereof
07/25/2012CN202352712U Film-coating and point sticking structure of crystalline silicon batteries
07/25/2012CN202347096U Vapor deposition equipment
07/25/2012CN202347095U Novel tooling structure for horizontal depositing system of poly-p-xylylene
07/25/2012CN202347094U Device for preparing micro/nanostructures of coatings
07/25/2012CN202347092U Loading clamp for vacuum coating machine
07/25/2012CN102612571A Cvd reactor
07/25/2012CN102612570A Coated cutting insert and method for making the same
07/25/2012CN102612417A Coated tool
07/25/2012CN102610713A Method for growing nitride light emitting diode by adopting metal-organic chemical vapor deposition (MOCVD) technology
07/25/2012CN102605351A Method for resetting after LPCVD (low pressure chemical vapor deposition) maintenance
07/25/2012CN102605350A Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container
07/25/2012CN102605349A Substrate heating device
07/25/2012CN102605348A Transmission heating system and method
07/25/2012CN102605347A Susceptor and chemical vapor deposition apparatus comprising the same
07/25/2012CN102605346A Preparation method of insulator silicon dioxide film in MIM (metal-insulator-metal) type capacitor
07/25/2012CN102605345A Preparation method for silica nanometer diamond film
07/25/2012CN102605344A Dry cleaning method of substrate processing apparatus
07/25/2012CN102605343A Cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process
07/25/2012CN102605342A Process cavity heating heat insulation system
07/25/2012CN102605341A Vapor deposition apparatus and susceptor
07/25/2012CN102605340A P-type doped ZnxCd1-xS nanomaterial and preparation method thereof
07/25/2012CN102605339A Regular nitrogen doped graphene and preparation method thereof
07/25/2012CN102605338A Plasma processing equipment having deviation rectifying function and used for processing rolled material
07/25/2012CN102602920A Preparation method of iron-coated graphene nanocomposite material
07/25/2012CN102601906A Flow casting die, method of manufacturing die head and method of manufacturing film
07/25/2012CN102094183B Cold-wall batch reactor
07/25/2012CN102051601B Thin film deposition method
07/25/2012CN102051592B Method for preparing graphene film with single atomic layer
07/25/2012CN102011103B Chemisorption method for preparing carbon nitride film
07/25/2012CN102011099B Deposition doped polysilicon machine board
07/25/2012CN102007588B Method for reducing temperature of substrate placing table and substrate processing system
07/25/2012CN102005212B 真空处理设备以及衬底转移方法 The vacuum processing apparatus and a substrate transfer method
07/25/2012CN101979707B Carbon chemical adsorption method for preparing graphene film by using atomic layer deposition
07/25/2012CN101962759B PECVD system with internal heater
07/25/2012CN101908575B Method for manufacturing solar battery
07/25/2012CN101830733B Method for preparing ultra nanometer diamond coating of ceramic valve core
07/25/2012CN101824647B Automatic process control method of PECVD film deposition
07/25/2012CN101812676B Processing chamber used for semiconductor solar film plating
07/25/2012CN101748379B Automatic horizontal silicon substrate film producing device
07/25/2012CN101688300B Method in depositing metal oxide materials
07/25/2012CN101550545B Device for inserting and placing shank for precision cutter diamond coating, and processing equipment
07/25/2012CN101463473B Shower plate electrode for plasma cvd reactor
07/25/2012CN101143873B Metal alkoxides compound, material for forming film and film manufacturing method
07/24/2012US8227805 Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film
07/24/2012US8227729 Rapid conductive cooling using a secondary process plane
07/24/2012US8227322 Methods of growing nitride-based film using varying pulses
07/24/2012US8227052 Method and device for plasma-assisted chemical vapour deposition on the inner wall of a hollow body
07/24/2012US8227049 Method for forming patterns by vacuum coating
07/24/2012US8227040 Method of curing metal alkoxide-containing films
07/24/2012US8227032 Method of forming silicon oxide containing films
07/24/2012US8227031 Method of producing a layered composite including cubic boron nitride
07/24/2012US8227030 Method of manufacturing semiconductor device and apparatus for processing substrate
07/24/2012US8227029 Method for depositing a vapour deposition material
07/24/2012US8227025 Conductive polymer coatings and methods of forming the same
07/24/2012US8226770 Susceptor with backside area of constant emissivity
07/24/2012US8226769 Substrate support with electrostatic chuck having dual temperature zones
07/24/2012US8226768 Apparatus for evaporation, a crucible for evaporation and a method of growing a film on a substrate
07/24/2012US8226400 Die for molding honeycomb structure and manufacturing method thereof
07/24/2012US8225745 Chemical vaporizer for material deposition systems and associated methods
07/24/2012CA2570977C Common rack for electroplating and pvd coating operations
07/24/2012CA2549981C Article having patterned decorative coating
07/19/2012WO2012096899A1 Self-assembled functional layers in multilayer structures
07/19/2012WO2012096466A2 Thin film deposition apparatus and substrate treatment system including same
07/19/2012WO2012096293A1 METHOD FOR FORMING TiSiN FILM AND STORAGE MEDIUM