| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/13/2012 | WO2012121677A1 Method for depositing gradient films on a substrate surface by atomic layer deposition |
| 09/13/2012 | WO2012121289A1 Surface wave plasma processing device, microwave plasma source, and microwave introduction mechanism used in same |
| 09/13/2012 | WO2012121154A1 Base, substrate with gallium nitride crystal layer, and process for producing same |
| 09/13/2012 | WO2012121132A1 Plasma generating apparatus, plasma processing apparatus, and plasma processing method |
| 09/13/2012 | WO2012121040A1 Method for manufacturing functional film |
| 09/13/2012 | WO2012120991A1 Substrate processing apparatus and method for manufacturing substrate |
| 09/13/2012 | WO2012120970A1 Gas phase growth device with raising and lowering mechanism |
| 09/13/2012 | WO2012120941A1 Vapor deposition apparatus |
| 09/13/2012 | WO2012120850A1 Plasma source and film deposition apparatus provided with plasma source |
| 09/13/2012 | WO2012120787A1 Susceptor and method for producing epitaxial wafer using same |
| 09/13/2012 | WO2012120472A1 Supply apparatus and method of solid material gas |
| 09/13/2012 | WO2012120194A1 Coating process, apparatus and use |
| 09/13/2012 | WO2012119785A1 Method and device for producing a functional material web |
| 09/13/2012 | WO2012055906A3 Alumina layer with multitexture components |
| 09/13/2012 | US20120232371 Implantable Device Using Ultra-Nanocrystalline Diamond |
| 09/13/2012 | US20120231628 Reduction of a process volume of a processing chamber using a nested dynamic inert volume |
| 09/13/2012 | US20120231615 Semiconductor thin-film manufacturing method, semiconductor thin-film manufacturing apparatus, susceptor, and susceptor holder |
| 09/13/2012 | US20120231610 Vapor-phase growing apparatus and vapor-phase growing method |
| 09/13/2012 | US20120231609 Vapor-phase growing apparatus and vapor-phase growing method |
| 09/13/2012 | US20120231374 Bipolar plate for fuel cell and method for producing the same |
| 09/13/2012 | US20120231270 Materials and methods for thermal and electrical conductivity |
| 09/13/2012 | US20120231246 Process for removal of backside coating from substrate |
| 09/13/2012 | US20120231237 Method for improving the durability of an ink printed on a substrate and substrate formed from such a method |
| 09/13/2012 | US20120231212 Method for producing a structured coating on a substrate, coated substrate, and semi-finished product having a coated substrate |
| 09/13/2012 | US20120231182 Method and Apparatus for Treating Containers |
| 09/13/2012 | US20120231181 Insulation coverage of cvd electrode |
| 09/13/2012 | US20120231180 Process of purifying ruthenium precursors |
| 09/13/2012 | US20120231177 Depositing Coatings In Long Hollow Substrates Using A Heated Center Electrode |
| 09/13/2012 | US20120231173 Ceramic Coating Deposition |
| 09/13/2012 | US20120231166 Organic thin film deposition device, organic el element manufacturing device, and organic thin film deposition method |
| 09/13/2012 | US20120231165 Application of Supercritical Fluid Technology for Manufacturing Soft Tissue Repair Medical Articles |
| 09/13/2012 | US20120231164 Precursors and Methods for the Atomic Layer Deposition of Manganese |
| 09/13/2012 | US20120231163 Apparatus and method for producing carbon |
| 09/13/2012 | US20120230808 Substrate transport apparatus, substrate transport method, and recording medium |
| 09/13/2012 | US20120229906 Anti-Reflection Optical Element and Method for Manufacturing Anti-Reflection Optical Element |
| 09/13/2012 | US20120228771 Semiconductor interconnect structure with multi-layered seed layer providing enhanced reliability and minimizing electromigration |
| 09/13/2012 | US20120228758 Electron beam induced deposition of interface to carbon nanotube |
| 09/13/2012 | US20120228129 Apparatus for forming deposited film |
| 09/13/2012 | US20120227936 Heat-dissipating unit having a hydrophilic compound film and method for depositing a hydrophilic compound film |
| 09/13/2012 | US20120227904 Cylinder cabinet and semiconductor manufacturing system |
| 09/13/2012 | US20120227666 Processing chamber and method for centering a substrate therein |
| 09/13/2012 | DE102011013467A1 Vorrichtung und Verfahren zum plasmaunterstützten Behandeln zumindest zweier Substrate Apparatus and method for plasma-assisted treatment of at least two substrates |
| 09/13/2012 | DE102011013279A1 Keramische Transportrolle zur Vakuumbeschichtung Ceramic transport roller for vacuum coating |
| 09/12/2012 | EP2498293A1 Epitaxial substrate for semiconductor element, semiconductor element, and method for producing epitaxial substrate for semiconductor element |
| 09/12/2012 | EP2498278A1 Plasma cvd device and method of manufacturing silicon thin film |
| 09/12/2012 | EP2498277A1 Chemical vapor deposition device and temperature control method of chemical vapor deposition device |
| 09/12/2012 | EP2497590A1 Coated tool |
| 09/12/2012 | EP2496734A1 Sliding element, in particular piston ring, and combination of a sliding element with a mating running element |
| 09/12/2012 | EP2496733A1 Evaporator |
| 09/12/2012 | EP2496732A2 Materials and methods for thermal and electrical conductivity |
| 09/12/2012 | EP2496731A1 Method for forming a decorative coating, a decorative coating, and uses of the same |
| 09/12/2012 | EP2496730A1 A method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same |
| 09/12/2012 | EP2496540A1 Stabilization of bicycloheptadiene |
| 09/12/2012 | CN202430285U Radio-frequency power transmission arm structure |
| 09/12/2012 | CN202430284U Heater for coating device |
| 09/12/2012 | CN202430283U Gas dispersion device used in growth process of wafer polycrystalline silicon film |
| 09/12/2012 | CN102668034A Heating control system, deposition device provided therewith, and temperature control method |
| 09/12/2012 | CN102668033A Semiconductor thin-film manufacturing method, seminconductor thin-film manufacturing apparatus, susceptor, and susceptor holding tool |
| 09/12/2012 | CN102668032A Deposited film forming device |
| 09/12/2012 | CN102666944A Synthetic cvd diamond |
| 09/12/2012 | CN102666925A Sliding element, in particular piston ring, and combination of a sliding element with a mating running element |
| 09/12/2012 | CN102666917A An electrostatic chuck with an angled sidewall |
| 09/12/2012 | CN102666916A Manufacturing apparatus for depositing a material and an electrode for use therein |
| 09/12/2012 | CN102666915A CVD apparatus with electrode |
| 09/12/2012 | CN102666914A A method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same |
| 09/12/2012 | CN102666913A Strip passing apparatus, apparatus for treating surface of strip with the same, and method for treating surface of strip |
| 09/12/2012 | CN102659451A CVD (Chemical Vapor Deposition) SiC/SiO2 gradient antioxidant composite coating and preparation method thereof |
| 09/12/2012 | CN102027152B Water-reactive Al composite material, water-reactive Al film, process for production of the Al film, and constituent member for film deposition chamber |
| 09/12/2012 | CN101821426B RF return plates for backing plate support |
| 09/12/2012 | CN101267940B Clay thin-film board, clay thin-film board equipped with electrode and display device using them |
| 09/11/2012 | US8264081 Multilayered barrier metal thin-films |
| 09/11/2012 | US8263795 Copper precursors for thin film deposition |
| 09/11/2012 | US8263193 Vacuum treatment method |
| 09/11/2012 | US8263181 Ti-based film forming method and storage medium |
| 09/11/2012 | US8263180 One-dimensional metal nanostructures |
| 09/11/2012 | US8263178 in-flight surface treatment of powders using a Dielectric Barrier Discharge Torch operating at atmospheric pressures or soft vacuum conditions |
| 09/11/2012 | US8263174 Light emitting device and method for manufacturing light emitting device |
| 09/11/2012 | US8263172 Method for producing optical element having multi-layered film |
| 09/11/2012 | US8262891 Leveler compounds |
| 09/11/2012 | US8262848 Plasma processing apparatus and method |
| 09/11/2012 | US8262847 Plasma-enhanced substrate processing method and apparatus |
| 09/11/2012 | US8262846 Plasma processing apparatus and method thereof |
| 09/11/2012 | US8262798 Shower head, device and method for manufacturing thin films |
| 09/11/2012 | US8261692 Substrate processing apparatus and reaction container |
| 09/11/2012 | US8261691 Plasma processing apparatus |
| 09/11/2012 | US8261690 In-situ flux measurement devices, methods, and systems |
| 09/11/2012 | US8261688 Torch for thermal spraying of surface coatings, and coatings obtained thereby |
| 09/07/2012 | WO2012118953A2 Atomic layer deposition carousel with continuous rotation and methods of use |
| 09/07/2012 | WO2012118947A2 Apparatus and process for atomic layer deposition |
| 09/07/2012 | WO2012118887A2 Apparatus and process for atomic layer deposition |
| 09/07/2012 | WO2012118606A2 Thin heated substrate support |
| 09/07/2012 | WO2012118200A1 Method for forming metal thin film, metal thin film, and device for forming metal thin film |
| 09/07/2012 | WO2012118037A1 Method and apparatus for manufacturing functional film |
| 09/07/2012 | WO2012118019A1 Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gas |
| 09/07/2012 | WO2012117888A1 Catalytic chemical vapor deposition device, and deposition method and catalyst body surface treatment method using same |
| 09/07/2012 | WO2012117878A1 Method for producing functional film |
| 09/07/2012 | WO2012117854A1 Slide member |
| 09/07/2012 | WO2012117758A1 Dry cleaning method |
| 09/07/2012 | WO2012117590A1 Gas phase growth device and gas phase growth method |
| 09/07/2012 | WO2012116477A1 Preparation method of high density zinc oxide nanometer granules |