| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/11/2012 | CN102575342A Flexible substrate position control device |
| 07/11/2012 | CN102575341A Thin film, method for forming same, and semiconductor light-emitting element comprising the thin film |
| 07/11/2012 | CN102575340A Method for manufacturing optical component, and optical component |
| 07/11/2012 | CN102574884A High molecular weight alkyl-allyl cobalttricarbonyl complexes and use thereof for preparing dielectric thin films |
| 07/11/2012 | CN102574362A Metal-clad polymer article |
| 07/11/2012 | CN102574156A Coating method and coating apparatus |
| 07/11/2012 | CN102569531A Passivating method for polycrystalline silicon chips |
| 07/11/2012 | CN102569524A Method for manufacturing solar cell and apparatus for manufacturing solar cell |
| 07/11/2012 | CN102569512A Integrated deposition of thin film layers in cadmium telluride based photovoltaic module manufacture |
| 07/11/2012 | CN102569509A Carbon plate conveying assembly and disassembly platform of feeding and discharging systems of plate-type plasma enhanced chemical vapor deposition (PECVD) device |
| 07/11/2012 | CN102569481A Nano silicon window layer with gradient band gap characteristic and preparation method thereof |
| 07/11/2012 | CN102569165A Bottom up fill in high aspect ratio trenches |
| 07/11/2012 | CN102569030A Thin film forming method and thin film forming apparatus |
| 07/11/2012 | CN102560633A Method for depositing group III/V compounds |
| 07/11/2012 | CN102560443A Processing chamber transmission and control system |
| 07/11/2012 | CN102560442A Method and device for generating offset |
| 07/11/2012 | CN102560441A Heating control method, heating control device, heating control system, heating cavity and plasma device |
| 07/11/2012 | CN102560440A Method for microcrystalline silicon film formation |
| 07/11/2012 | CN102560439A Method and device for carrying out surface treatment on plasma |
| 07/11/2012 | CN102560438A Method for improving performance of plasma enhance chemical vapor deposition equipment |
| 07/11/2012 | CN102560437A Device and method for fast preparing large-area vertically aligned graphene |
| 07/11/2012 | CN102560436A Vapor deposition equipment |
| 07/11/2012 | CN102560435A Heating control method, device, system and PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
| 07/11/2012 | CN102560434A Chamber component and metal organic compound chemical vapor deposition equipment with same |
| 07/11/2012 | CN102560433A Rotating substrate support and methods of use |
| 07/11/2012 | CN102560432A Substrate loading device and substrate processing device applying same |
| 07/11/2012 | CN102560431A Metal organic chemical vapor deposition device and chamber assembly thereof |
| 07/11/2012 | CN102560430A Raw material supplying device and film forming apparatus |
| 07/11/2012 | CN102560429A Metal organic vapor phase deposition device |
| 07/11/2012 | CN102560428A Chemical vapor deposition machine station |
| 07/11/2012 | CN102560427A Cooling baffle device in vacuum coating equipment |
| 07/11/2012 | CN102560426A Automatic circulation plasma vapor phase deposition system |
| 07/11/2012 | CN102560425A Chemical vapor deposition furnace |
| 07/11/2012 | CN102560424A Vacuum multi-cavity atomic layer deposition equipment |
| 07/11/2012 | CN102560423A Carbon plate lifting table of automatic loading and unloading system of plate plasma enhanced chemical vapor deposition (PECVD) device |
| 07/11/2012 | CN102560422A Multi-chip long-distance plasma enhanced atomic layer deposit chamber |
| 07/11/2012 | CN102560421A Method and system for thin film deposition |
| 07/11/2012 | CN102560420A Flexible battery piece sucking device |
| 07/11/2012 | CN102560419A Method for preparing alumina ultrathin film |
| 07/11/2012 | CN102560418A Chemical vapor deposition device |
| 07/11/2012 | CN102560417A Method and apparatus for forming silicon nitride film |
| 07/11/2012 | CN102560416A Method for growing carbon-containing thin film on wafer |
| 07/11/2012 | CN102560415A Three-dimensional graphene/metal line or metal wire composite structure and preparation method thereof |
| 07/11/2012 | CN102560414A Method for preparing graphene on 3C-SiC substrate |
| 07/11/2012 | CN102560413A Diamond-like carbon and production method thereof |
| 07/11/2012 | CN102560412A Manufacturing method for pure tungsten or molybdenum thin-wall device |
| 07/11/2012 | CN102560411A Preparation method of anti-ablative coating on surface of titanium alloy |
| 07/11/2012 | CN102560410A Nucleation of ultrathin, continuous, conformal metal films using atomic layer deposition and application as fuel cell catalysts |
| 07/11/2012 | CN102560409A Mask |
| 07/11/2012 | CN102560408A Continuous vacuum coating device |
| 07/11/2012 | CN102560405A Method for guaranteeing film deposition quality and daily monitoring method of film deposition equipment |
| 07/11/2012 | CN102560402A Method for coating reflection cup of car lamp |
| 07/11/2012 | CN102560376A Temporally variable deposition rate of cdte in apparatus and process for continuous deposition |
| 07/11/2012 | CN102560336A Mask frame assembly for thin film deposition and the manufacturing method thereof |
| 07/11/2012 | CN102558221A Metal-enolate precursors for depositing metal-containing films |
| 07/11/2012 | CN102555518A Marking method for wafer |
| 07/11/2012 | CN102554318A Diamond-coated cutting tool |
| 07/11/2012 | CN102191481B Medical magnesium alloy with surface carrying Hf-Si-N gradient coating and preparation method thereof |
| 07/11/2012 | CN102042921B Standard sample prepared for quantitative analysis of SiGe film and preparation method |
| 07/11/2012 | CN102016102B Water-reactive Al composite material, water-reactive Al film, method for production of the Al film, and structural member for film-forming chamber |
| 07/11/2012 | CN101856895B Diamond film coating steel matrix composite material and preparation method thereof |
| 07/11/2012 | CN101830703B Carbon fiber reinforced boron carbide composite material and preparation method thereof |
| 07/11/2012 | CN101791883B Surface erosion-resistant composite coating of carbon/carbon composite, preparation method and application thereof |
| 07/11/2012 | CN101748384B Gas distribution sprinkling module |
| 07/10/2012 | US8219140 Battery-operated wireless-communication apparatus and method |
| 07/10/2012 | US8217313 Heating apparatus and heating method |
| 07/10/2012 | US8216663 Surface-modified member, surface-treating process and apparatus therefor |
| 07/10/2012 | US8216654 Components for a film-forming device and method for cleaning the same |
| 07/10/2012 | US8216648 Film formation method and apparatus |
| 07/10/2012 | US8216643 Methods for preparation of high-purity polysilicon rods using a metallic core means |
| 07/10/2012 | US8216642 Method of manufacturing film |
| 07/10/2012 | US8216641 Method of fabricating carbon fiber reinforced composite material parts |
| 07/10/2012 | US8216640 Method of making showerhead for semiconductor processing apparatus |
| 07/10/2012 | US8216639 Methods for elimination or reduction of oxide and/or soot deposition in carbon containing layers |
| 07/10/2012 | US8216486 Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body |
| 07/10/2012 | US8216433 Plasma generator and method of generating plasma using the same |
| 07/10/2012 | US8216422 Substrate support bushing |
| 07/10/2012 | US8216421 Plasma stabilization method and plasma apparatus |
| 07/10/2012 | US8216420 Plasma processing apparatus |
| 07/10/2012 | US8216419 Drilled CVD shower head |
| 07/10/2012 | US8216418 Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings |
| 07/10/2012 | US8216380 Gap maintenance for opening to process chamber |
| 07/10/2012 | US8216378 Reaction tube and heat processing apparatus for a semiconductor process |
| 07/10/2012 | US8216377 Method and system for binding halide-based contaminants |
| 07/10/2012 | US8216376 Method and apparatus for variable conductance |
| 07/10/2012 | US8216375 Slab cross flow CVD reactor |
| 07/10/2012 | US8216374 Gas coupler for substrate processing chamber |
| 07/10/2012 | US8215264 Atomic layer deposition apparatus |
| 07/05/2012 | WO2012092064A1 Wafer processing with carrier extension |
| 07/05/2012 | WO2012092061A2 Graphene formation on dielectrics and electronic devices formed therefrom |
| 07/05/2012 | WO2012091269A1 Method for manufacturing x-ray/γ-ray focusing optical system using atomic layer deposition |
| 07/05/2012 | WO2012091214A1 Cooler unit coated with anodizing and instant cooling apparatus of drinking water using thereof |
| 07/05/2012 | WO2012091097A1 Gas-barrier plastic molded product and manufacturing process therefor |
| 07/05/2012 | WO2012091095A1 Method for producing gas barrier plastic molded body |
| 07/05/2012 | WO2012090738A1 Method for manufacturing semiconductor device, substrate treatment method, and substrate treatment device |
| 07/05/2012 | WO2012090715A1 Plasma treatment device |
| 07/05/2012 | WO2012090484A1 Cvd device and cvd method |
| 07/05/2012 | WO2012090421A1 Plasma cvd device |
| 07/05/2012 | WO2012090420A1 Carbon film production method and plasma cvd method |
| 07/05/2012 | WO2012089196A1 Method for the plasma treatment of workpieces and workpiece comprising a gas barrier layer |