Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
08/2012
08/22/2012CN202390535U Continuous vacuum plating facility with heating device
08/22/2012CN202390534U Graphite boat conveying device
08/22/2012CN202390533U Ammonia control valve box cabinet
08/22/2012CN202390532U Mesh belt automatic adjusting mechanism of continuous film plating machines
08/22/2012CN202390530U Universal drive shaft of continuous coating machine
08/22/2012CN102648513A Method for forming metal oxide film, method for forming manganese oxide film, and computer-readable storage medium
08/22/2012CN102648301A Method for forming a decorative coating on a gemstone, a decorative coating on a gemstone, and uses of the same
08/22/2012CN102647847A Plasma processing device
08/22/2012CN102646617A Substrate processing apparatus and method, and semiconductor device manufacturing method
08/22/2012CN102644064A Evaporator based on heat conduction oil evaporation mechanism
08/22/2012CN102644063A Equipment for realizing atomic layer deposition process
08/22/2012CN102644062A On-line atomic layer deposition device and deposition method
08/22/2012CN102644061A Reaction chamber cleaning method having nitrogen trifluoride and based on fluoride
08/22/2012CN102644059A Continuous deposition device
08/22/2012CN102642022A Superhard abrasive particle coated with active metal and silicon and method for producing superhard abrasive particle
08/22/2012CN102212877B MOCVD (Metal-organic Chemical Vapor Deposition) system with multiple extensional reaction cavities and operation method thereof
08/22/2012CN102127807B Method for preparing ternary-component AlxGaI-xN nanocone
08/22/2012CN102127750B Method for preparing graphene material based on chemical deposition
08/22/2012CN102076571B Polyester container and process for producing the same
08/22/2012CN102061456B Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device
08/22/2012CN102061454B Method for preparing coating on cutter
08/22/2012CN102051615B Preparation method of anti-creeping and anti-corrosive titanium or titanium alloy material
08/22/2012CN102036433B Infrared electric heating film heating tube with double-film layer structure as well as preparation method and application thereof
08/22/2012CN101994100B Installation method of chemical vapor deposition equipment and chemical vapor deposition equipment
08/22/2012CN101956177B Rotary bin for vacuum continuous coating production line
08/22/2012CN101930891B Reaction chamber and lining device
08/22/2012CN101903561B Liquid material vaporization apparatus
08/22/2012CN101893879B Method and system for carrier plate transmission control of plasma chemical vapor deposition equipment
08/22/2012CN101764044B Method for pretreating technical cavity of plasma device
08/22/2012CN101705477B System and method for detecting and repairing crystallization rate of film product on line
08/22/2012CN101406967B Coated cutting tool insert for milling
08/22/2012CN101256937B Method and apparatus for controlling gas flow to a processing chamber
08/21/2012US8247080 Coating structure and method
08/21/2012US8247064 Coatings
08/21/2012US8247039 Method and device for local functionalization of polymer materials
08/21/2012US8247031 Method for growing thin film
08/21/2012US8247030 Void-free copper filling of recessed features using a smooth non-agglomerated copper seed layer
08/21/2012US8247029 Method for forming micropattern
08/21/2012US8246924 Combustion process for the manufacture of calcium phosphate and calcium phosphate composite particles
08/21/2012US8246798 Substrate processing apparatus and apparatus and method of manufacturing magnetic device
08/21/2012US8246749 Substrate processing apparatus and semiconductor device producing method
08/21/2012US8246748 Method and apparatus for coating surfaces
08/21/2012US8246747 Apparatus for manufacturing semiconductor
08/16/2012WO2012109523A2 Deposition of thin films on energy sensitive surfaces
08/16/2012WO2012107138A1 METHOD OF DEPOSITION OF Al2O3/SiO2 STACKS, FROM ALUMINIUM AND SILICON PRECURSORS
08/16/2012WO2012106791A1 Engine component
08/16/2012WO2012084655A3 Microwave plasma reactors and substrates for synthetic diamond manufacture
08/16/2012WO2012078464A3 Article and method of making and using the same
08/16/2012WO2012069451A3 Thermal gradient chemical vapour deposition apparatus and method
08/16/2012US20120208371 Method and apparatus for multizone plasma generation
08/16/2012US20120207948 Atomic layer deposition using radicals of gas mixture
08/16/2012US20120207946 Method of forming a protective film for a magnetic recording medium, a protective film formed by the method and a magnetic recording medium having the protective film
08/16/2012US20120207928 Methods of making and deposition methods using hafnium- or zirconium-containing compounds
08/16/2012US20120207927 Hafnium- and zirconium-containing precursors and methods of using the same
08/16/2012US20120207926 Combined Injection Module For Sequentially Injecting Source Precursor And Reactant Precursor
08/16/2012US20120207916 Apparatus and method for cooling or heating work piece in a vacuum chamber
08/16/2012US20120206679 Liquid crystal display and method for manufacturing the same related application data
08/16/2012US20120205623 NON-POLAR (Al,B,In,Ga)N QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES
08/16/2012US20120205347 Scanned laser light source
08/16/2012US20120205279 Apparatus for manufacturing gas barrier plastic container, method for manufacturing the container, and the container
08/16/2012US20120204796 CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones
08/16/2012US20120204795 Methods to improve the in-film defectivity of pecvd amorphous carbon films
08/16/2012US20120204794 Mask Holding Device Capable of Changing Magnetic Means and Deposition Equipment Using the Same
08/16/2012DE10308381B4 Verfahren zur Abscheidung von Silizium A process for the deposition of silicon
08/15/2012EP2487277A1 Plasma cvd device
08/15/2012EP2487276A1 Methods and systems for forming thin films
08/15/2012EP2486174A1 Multi-rotation epitaxial growth apparatus and reactors incorporating same
08/15/2012EP2486167A1 Cvd apparatus
08/15/2012EP2486166A1 Manufacturing apparatus for depositing a material and an electrode for use therein
08/15/2012EP2486165A1 Cvd apparatus with electrode
08/15/2012EP2486164A1 Cutting tool for processing metal materials
08/15/2012EP1608007B1 Method for forming insulating film in semiconductor device
08/15/2012CN202380089U PECVD (Plasma Enhanced Chemical Vapor Deposition) furnace temperature control system
08/15/2012CN202380088U Supporting and positioning device for heating plate
08/15/2012CN202380087U Thermal insulation system for heating cavity
08/15/2012CN202380086U Transmission heating system
08/15/2012CN202380085U Gas purge system in LPCVD (low-pressure chemical vapor deposition) process chambers
08/15/2012CN202380084U Gas system
08/15/2012CN202380083U Vacuum chemical vapor deposition charging box
08/15/2012CN202380082U Anti-pollution system in LPCVD (Low Pressure Chemical Vapor Deposition) process
08/15/2012CN202380081U Uniform vapor flow intake device for vapor deposition
08/15/2012CN202380080U Device for spraying and pyrolyzing selenium source on surface of small-area substrate
08/15/2012CN202380079U Vapor conveying device and evaporator of vapor conveying device
08/15/2012CN202380078U Cooling cavity transmitting system in low pressure chemical vapor deposition (LPCVD) process
08/15/2012CN202380077U Heating and heat-preserving system for technological cavity
08/15/2012CN202380076U Door valve device for vapor deposition reaction chamber
08/15/2012CN202380075U Low-pressure chemical vapor deposition (LPCVD) device
08/15/2012CN102639761A Multi-rotation epitaxial growth apparatus and reactors incorporating same
08/15/2012CN102639749A Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system
08/15/2012CN102639748A 清洁气体 Clean gas
08/15/2012CN102639747A Sliding element, in particular a piston ring, having a coating
08/15/2012CN102639548A Process for preparing ruthenium(0)-olefin complexes
08/15/2012CN102639267A Surface coating cutting tool
08/15/2012CN102634776A Chemical vapor deposition device for continuously preparing two-dimensional nanofilm
08/15/2012CN102634775A Plasma enhanced chemical vapor deposition method
08/15/2012CN102634774A Method for preparing amorphous silicon germanium thin-film batteries with box type PECVD (plasma enhanced chemical vapor deposition) equipment
08/15/2012CN102634773A Film-forming apparatus
08/15/2012CN102634772A Process tail gas treatment system
08/15/2012CN102634771A Cvd coating scheme including alumina and/or titanium-containing materials and method of making the same
08/15/2012CN102634770A Hot filament rack for large-area deposited diamond film and manufacturing method of hot filament rack