Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
07/2012
07/04/2012CN102534555A Wafer discharge mechanism for automatic silicon wafercharge and discharge system
07/04/2012CN102534554A Graphite boat cooling and chip unloading trolley
07/04/2012CN102534553A Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD)
07/04/2012CN102534552A Chemical vapor deposition device
07/04/2012CN102534551A Semiconductor equipment
07/04/2012CN102534550A Deposition method for silicon dioxide thin film of grid sidewall
07/04/2012CN102534549A Method and apparatus for forming oxide film on carbon film
07/04/2012CN102534548A Aminovinylsilane for CVD and ALD SIO2 films
07/04/2012CN102534547A Preparation process for gradient antireflection silicon nitride thin film of crystalline silicon solar cell
07/04/2012CN102534546A Preparation method of perovskite type nanocrystalline thin film on glass substrate
07/04/2012CN102534545A Method for growing patterned graphene film on surface of hydroxyapatite
07/04/2012CN102534544A Nanometer carbon pipe composite material and manufacturing method thereof
07/04/2012CN102534543A Method for preparing tungsten by chemical vapor deposition and device thereof
07/04/2012CN102534542A Preparation method for surface protective coating of aluminum alloy
07/04/2012CN102534541A Ceramic coated orthopaedic implants and method of making such implants
07/04/2012CN102534538A Atmosphere isolation device between vacuum chambers
07/04/2012CN102534511A Film vapor deposition device and application method thereof
07/04/2012CN102534509A Vapor deposition apparatus and process for continuous deposition of a doped thin film layer on a substrate
07/04/2012CN102534475A Coating process for ultra-thin optical filter and coating fixture
07/04/2012CN102529209A Enhanced protection type toughened low-radiation coated glass and manufacturing process thereof
07/04/2012CN102528142A Carbon film coated end mill and manufacturing method thereof
07/04/2012CN102220569B Vertical air flow type MOCVD (Metal Organic Chemical Vapor Deposition) gas transport spray-nozzle device
07/04/2012CN102206856B Method for growing zinc oxide material by modulating temperature periodically
07/04/2012CN102097548B Method for preparing self-supported GaN-based light emitting diode
07/04/2012CN102097297B Method for depositing high k gate dielectrics on atomic layer on graphene surface by adopting electric field induction
07/04/2012CN102051594B Method for preparing Al-doped ZnO transparent conductive film by atomic layer deposition
07/04/2012CN102024659B Cleaning method of PVD (Physical Vapor Deposition) equipment
07/04/2012CN101985744B Method for preparing monocrystalline cubic carbon nitride thin film
07/04/2012CN101974739B Plasma-enhanced chemical vapor deposition device
07/04/2012CN101939464B Lock device for adding and removing containers to and from a vacuum treatment chamber
07/04/2012CN101911275B Vacuum processing device, and vacuum processing method
07/04/2012CN101880866B Method for preparing diamond-silicon carbide-cobalt disilicide composite interlayer of diamond coating on hard alloy
07/04/2012CN101818332B Super-hard self-lubricating diamond/diamond-like composite laminated coating material and preparation method thereof
07/04/2012CN101736325B Microwave plasma preparation method of superhard titanium aluminum nitride thin film
07/04/2012CN101673655B Microwave plasma resonant cavity used for depositing diamond film
07/04/2012CN101652834B Trap apparatus, exhaust system, and treating system using the same
07/04/2012CN101605930B N-type conductive aluminum nitride semiconductor crystal and method for producing the same
07/04/2012CN101595768B Induction coil, plasma generating apparatus and plasma generating method
07/04/2012CN101523573B Plasma filming apparatus, and plasma filming method
07/04/2012CN101517759B Method for manufacturing group iii nitride compound semiconductor light-emitting device, group iii nitride compound semiconductor light-emitting device, and lamp
07/04/2012CN101514444B Preparation method for double-walled carbon nano tube electromagnetic shielding film
07/04/2012CN101465276B Air-intake device and semiconductor processing equipment applying the same
07/04/2012CN101459215B Method for manufacturing gallium nitride single crystalline substrate using self-split
07/04/2012CN101440482B Film formation apparatus and method for using same
07/04/2012CN101438387B Batch processing platform for ALD and CVD
07/04/2012CN101305451B Shower plate and plasma treatment apparatus using shower plate
07/04/2012CN101297063B Method of treating gas
07/04/2012CN101256940B Gas supply system and integrated unit for semiconductor manufacturing device
07/04/2012CN101245445B Solid source container with inlet plenum
07/04/2012CN101205604B Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
07/04/2012CN101155634B Method of treating a gas stream
07/03/2012US8214032 Implantable device using ultra-nanocrystalline diamond
07/03/2012US8212299 Semiconductor device having a thin film capacitor of a MIM (metal-insulator-metal) structure
07/03/2012US8211802 Substrate processing apparatus
07/03/2012US8211798 Substrate treating apparatus and method for manufacturing semiconductor device
07/03/2012US8211501 Fluorination pre-treatment of heat spreader attachment indium thermal interface material
07/03/2012US8211500 Copper film deposition method
07/03/2012US8211499 Preparation of membranes using solvent-less vapor deposition followed by in-situ polymerization
07/03/2012US8211235 Apparatuses and methods for deposition of material on surfaces
07/03/2012US8211234 Coater platter homing tool
07/03/2012US8211233 Evaporating method for forming thin film
07/03/2012US8211232 Substrate processing apparatus
07/03/2012US8211231 Delivery device for deposition
07/03/2012US8211230 Reaction system for growing a thin film
07/03/2012US8211229 Apparatus including column having hollow part filled with filler and solid film-formation material
07/03/2012US8210120 Systems and methods for building tamper resistant coatings
07/03/2012CA2541479C Vapour deposition method
06/2012
06/28/2012WO2012086800A1 Substrate treatment device and method for producing semiconductor device
06/28/2012WO2012086728A1 Vaporizer
06/28/2012WO2012086119A1 Take-up-type continuous film-forming apparatus
06/28/2012WO2012084733A1 Method for producing a pyrolysis compatible component for a cooking appliance and pyrolysis compatible component for a cooking appliance
06/28/2012WO2012084660A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084659A2 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084658A1 Microwave power delivery system for plasma reactors
06/28/2012WO2012084657A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084655A2 Microwave plasma reactors and substrates for synthetic diamond manufacture
06/28/2012WO2012084187A1 Retaining device for substrates and method for coating a substrate
06/28/2012WO2012083846A1 Metal organic chemical vapor deposition apparatus and chamber assembly therefor
06/28/2012WO2012027857A3 Method for manufacturing a tandem solar cell with microcrystalline absorber layer
06/28/2012US20120166023 Door opening/closing apparatus and coating film forming method
06/28/2012US20120165238 Droplet-Based Surface Modification and Washing
06/28/2012US20120164847 Thin film forming method, thin film forming apparatus, and program
06/28/2012US20120164844 Method and apparatus for forming oxide film on carbon film
06/28/2012US20120164842 Trench embedding method and film-forming apparatus
06/28/2012US20120164841 Combinatorial non-contact wet processing
06/28/2012US20120164834 Variable-Density Plasma Processing of Semiconductor Substrates
06/28/2012US20120164776 Non-Wear Shutter Apparatus for a Vapor Deposition Apparatus
06/28/2012US20120164772 Method of fabricating organic light emitting diode display device
06/28/2012US20120164478 Process for coating parts made of aluminium alloy and parts of obtained therefrom
06/28/2012US20120164443 Material and glazing comprising said material
06/28/2012US20120164438 Process for surface treating aluminum or aluminum alloy and article made with same
06/28/2012US20120164430 Composite material part having a ceramic matrix, and method for manufacturing same
06/28/2012US20120164375 Composite carbon nanotube structure and method for fabricating the same
06/28/2012US20120164353 Plasma enhanced chemical vapor deposition apparatus
06/28/2012US20120164352 Method for producing composite and the composite
06/28/2012US20120164350 Treatment of parts with metallized finish areas with a differentiated appearance
06/28/2012US20120164347 Susceptor for cvd apparatus, cvd apparatus and substrate heating method using the same
06/28/2012US20120164344 Activation of Electrode Surfaces by Means of Vacuum Deposition Techniques in a Continuous Process
06/28/2012US20120164329 Combination CVD/ALD method and source
06/28/2012US20120164328 Film formation method and storage medium
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