Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
10/2012
10/04/2012US20120252229 System and Process For Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy
10/04/2012US20120252227 Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device
10/04/2012US20120252195 Ion implantation system and method
10/04/2012US20120252149 Method of manufacturing organic electroluminescence display device
10/04/2012US20120251818 Paper or paperboard substrate, a process for production of the substrate and a package formed of the substrate
10/04/2012US20120251797 Chemical vapor deposition coating, article, and method
10/04/2012US20120251738 Magnetic field assisted deposition
10/04/2012US20120251737 Plasma-nitriding method
10/04/2012US20120251724 Beta-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same
10/04/2012US20120251723 Method of cleaning film forming apparatus, film forming method, and film forming apparatus
10/04/2012US20120251721 Device and method for forming film
10/04/2012US20120251720 Vapor collection
10/04/2012US20120251710 METHOD OF PRODUCING HIGH PURITY SiOx NANOPARTICLES WITH EXCELLENT VOLATILITY AND APPARATUS FOR PRODUCING THE SAME
10/04/2012US20120251705 Temperature controlling method and plasma processing system
10/04/2012US20120251704 Conditioning method, computer readable storage medium and substrate processing apparatus
10/04/2012US20120251427 Reactor and method for production of silicon
10/04/2012US20120251310 Method for producing an abradable coating on a turbomachine
10/04/2012US20120248975 Moisture-proof film, method for manufacturing the same, and organic electronic device including the same
10/04/2012US20120248336 Apparatus and Method for Batch Non-Contact Material Characterization
10/04/2012US20120248034 Methods of making and using liquid filter media
10/04/2012US20120247953 Film-coating system
10/04/2012US20120247680 Plasma stabilization method and plasma apparatus
10/04/2012US20120247676 Plasma processing apparatus and microwave introduction device
10/04/2012US20120247673 Electrode having gas discharge function and plasma processing apparatus
10/04/2012US20120247669 Measuring apparatus and plasma processing apparatus
10/04/2012US20120247668 Gas supply system, substrate processing apparatus and gas supply method
10/04/2012US20120247511 Method for cleaning thin film forming apparatus, thin film forming method, and thin film forming apparatus
10/04/2012US20120247392 Multichamber thin-film deposition apparatus and gas-exhausting module
10/04/2012US20120247391 Vertical batch-type film forming apparatus
10/04/2012US20120247390 Film formation apparatus
10/04/2012US20120247389 Apparatus for manufacturing thin film stacked member
10/04/2012US20120247388 Roll-to-roll evaporation system and method to manufacture group ibiiiavia photovoltaics
10/04/2012DE102011015875A1 Device for transporting strip-shaped substrate in vacuum treatment plant for manufacturing thin film solar module, has support structure to contact substrate front surface and support roller to contact substrate rear surface
10/04/2012DE102011006676A1 Method for reducing gas load of substrate carriers with vacuum processes, comprises repeatedly equipping substrate carrier with a substrate, transferring and treating substrate in vacuum treatment plant, removing and recycling substrate
10/04/2012DE102011006462A1 Channeling vacuum process systems, comprises feeding air in a lock chamber of the vacuum process system until pressure is equally large within and outside of the lock chamber, and opening the lock chamber to atmosphere
10/04/2012DE102011001642A1 Preparing a polymer layer on a substrate, comprises providing the substrate, initiating the polymerization of a monomer with a free radical initiator and feeding a gaseous radical initiator to the substrate
10/04/2012DE102005002674B4 Vorrichtung zur plasmachemischen Gasphasenabscheidung auf Substrate im Vakuum An apparatus for plasma chemical vapor deposition onto substrates in vacuum
10/03/2012EP2505687A1 Cleaning gas
10/03/2012EP2504474A2 Cnt-tailored composite sea-based structures
10/03/2012EP2504464A1 Cnt-tailored composite space-based structures
10/03/2012EP2504226A2 Cnt-tailored composite air-based structures
10/03/2012EP2504149A1 Method for surface treating a substrate and device for carrying out the method
10/03/2012CN202473623U High density NH3+SiH4 arc discharge plasma generating device
10/03/2012CN202465874U Production device of silicon base thin film
10/03/2012CN202465873U Cooling plate for DC arc discharge high-density plasma generating device
10/03/2012CN202465872U Cathode electrode for high-density arc discharge plasma generating device
10/03/2012CN202465871U Automatic input electrode bonding mechanism for vacuum coating
10/03/2012CN202465870U Quick-preparing large-range vertical aligning graphene device
10/03/2012CN202465869U Thin-film deposition device with heating medium
10/03/2012CN202465868U Graphite disk and reaction chamber with same
10/03/2012CN202465867U Graphite boat clamping point device
10/03/2012CN202465866U Bearing device for double-side chemical vapor deposition of solar cell
10/03/2012CN202465865U Nozzle and furnace tube with same
10/03/2012CN202465864U Pressure stabilizing and air charging device for inlet/outlet chamber of coating film production line
10/03/2012CN202465863U Device for spraying electrode and synchronously depositing thin film in manufacturing of flexible thin film photovoltaic cell
10/03/2012CN202465862U Transmission rolling shaft of vacuum coater
10/03/2012CN202465859U Linear winding vacuum coating device
10/03/2012CN202465852U Synchronous masking mechanism
10/03/2012CN1937175B Method for depositing material atomic layer for semiconductor device by using atmosphere
10/03/2012CN102714280A Layered element for encapsulating a sensitive element
10/03/2012CN102714279A Protective substrate for a device that collects or emits radiation
10/03/2012CN102714147A Vapor deposition apparatus
10/03/2012CN102714143A 外延片以及半导体元件 Epitaxial wafers and semiconductor element
10/03/2012CN102713001A Fluid bed reactor
10/03/2012CN102713000A Method of plasma etching and plasma chamber cleaning using F2 and COF2
10/03/2012CN102712999A Method of coating a substrate
10/03/2012CN102712998A Chemical vapor deposition for an interior of a hollow article with high aspect ratio
10/03/2012CN102712662A Hafnium- and zirconium-containing precursors and methods of using the same
10/03/2012CN102712477A Method for forming carbon nanotubes, and carbon nanotube film-forming apparatus
10/03/2012CN102709404A Method for preparing polycrystalline silicon film by carrying out induced crystallization on amorphous silicon film by using metallic copper under low temperature
10/03/2012CN102703900A Method for depositing film, panel and display
10/03/2012CN102703883A Plate-type PECVD (Plasma Enhanced Chemical Vapor Deposition) film-coating carrier plate
10/03/2012CN102703882A Method for reducing ALD (atom layer deposition) process pipeline particles
10/03/2012CN102703881A Guide rail for PECVD (plasma enhanced chemical vapor deposition) support plate
10/03/2012CN102703880A Method for preparing high-accuracy optical broadband anti-reflection multilayer film by utilizing atomic layer deposition
10/03/2012CN102703879A Deposition method of salicide bolck film
10/03/2012CN102703878A Side wall film deposition method
10/03/2012CN102703877A Film forming method, film forming apparatus
10/03/2012CN102703876A Anti-drop coating-under-slice stop piece
10/03/2012CN102703859A Preparation method for gradient transitional layer between amorphous carbon-based film and metallic matrix
10/03/2012CN102703857A Shade strip
10/03/2012CN102703856A Auxiliary device for preparing thin film electrode
10/03/2012CN102702237A Organic silver complexes, their preparation methods and their methods for forming thin layers
10/03/2012CN102191483B Transient enhanced atomic layer deposition
10/03/2012CN102130212B Manufacturing method of solar cell
10/03/2012CN102031494B Vacuum plating roller transmission device
10/03/2012CN101896637B Showerhead electrode assemblies and plasma processing chambers incorporating the same
10/03/2012CN101775354B Microbe inoculator with boron nitride film coating and preparation method thereof
10/03/2012CN101663734B Apparatus and method for atomic layer deposition
10/03/2012CN101572993B Method for forming conducting wire on insulated heat-conducting metal substrate in a vacuum sputtering way
10/03/2012CN101548030B Self assembled monolayer for improving adhesion between copper and barrier layer
10/03/2012CN101495670B Plasma confinement ring assemblies having reduced polymer deposition characteristics
10/03/2012CN101466866B Thin film production apparatus and inner block for thin film production apparatus
10/03/2012CN101457352B Source object quantity measuring method in chemical vapor coating process
10/03/2012CN101445919B Semiconductor manufacturing apparatus and manufacturing method of semiconductor device
10/03/2012CN101328580B Method for depositing thin film using high density plasma chemical vapor deposition
10/02/2012US8278195 Plasma CVD apparatus
10/02/2012US8277943 Thin films with high near-infrared reflectivity deposited on building materials
10/02/2012US8277893 Chemical vapor deposition apparatus
10/02/2012US8277892 Process for creating an oxygen scavenging particle
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