Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
07/2012
07/19/2012WO2012071302A3 Interchangeable pumping rings to control path of process gas flow
07/19/2012WO2012051182A3 Fabrication of single-crystalline graphene arrays
07/19/2012US20120184111 Selective plasma nitriding method and plasma nitriding apparatus
07/19/2012US20120184110 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
07/19/2012US20120184054 Manufacturing apparatus and method for semiconductor device
07/19/2012US20120183887 Oriented amorphous carbon film and process for forming the same
07/19/2012US20120183689 Ni film forming method
07/19/2012US20120183683 Glass substrate-holding tool and method for producing an euv mask blank by employing the same
07/19/2012US20120183676 Vapor deposition method and vapor deposition apparatus
07/19/2012US20120180954 Semiconductor processing system and methods using capacitively coupled plasma
07/19/2012US20120180953 Plasma processing apparatus and wave retardation plate used therein
07/19/2012US20120180727 Film forming apparatus
07/19/2012US20120180726 Susceptor and chemical vapor deposition apparatus comprising the same
07/19/2012US20120180725 Cvd apparatus
07/19/2012US20120180724 Liquid vaporization system
07/19/2012US20120180720 Cvd apparatus
07/19/2012US20120180719 Film forming apparatus
07/19/2012US20120180561 Method and apparatus for determining a curing level of printing inks and print process control strip
07/19/2012DE102010063887B4 Verfahren zum Herstellen eines pyrolysetauglichen Bauteils eines Gargeräts sowie pyrolysetaugliches Bauteil für ein Gargerät A method of manufacturing a component of a cooking appliance and pyrolysetauglichen pyrolysetaugliches component for a cooking appliance
07/19/2012DE102004017241A9 Verbundmaterial und Verfahren zu seiner Herstellung Composite material and process for its preparation
07/18/2012EP2477214A1 Electronic part positioning jig
07/18/2012EP2476778A1 Susceptor.
07/18/2012EP2476777A1 Dry cleaning method of substrate processing apparatus
07/18/2012EP2476776A1 Method for adjusting the coolant consumption within actively cooled components and component
07/18/2012EP2476775A1 Protective film and method for producing same
07/18/2012EP2476148A1 Protective substrate for a device that collects or emits radiation
07/18/2012EP2476147A1 Layered element for encapsulating a sensitive element
07/18/2012EP2475804A1 Cvd reactor
07/18/2012EP2475803A1 Improved polyurethane foaming processes and foam properties using halogenated olefin blowing agent
07/18/2012EP2475802A1 Metal containing composites
07/18/2012EP2475799A2 An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings
07/18/2012EP2475798A1 Apparatus and methods to form a patterned coating on an oled substrate
07/18/2012EP2475467A1 Coating method and coating apparatus
07/18/2012CN202337820U 热丝cvd钨丝固定拉直张紧机构 Cvd tungsten hot-wire tensioning mechanism fixed to straighten
07/18/2012CN202337819U Cvd炉内气体扩散装置 Cvd furnace gas diffusion devices
07/18/2012CN202337818U 聚对二甲苯卧式沉积系统新腔室滚筒复合结构 Parylene horizontal cylinder chamber deposition system new composite structure
07/18/2012CN102598226A Jig for semiconductor production and method for producing same
07/18/2012CN102598218A Plasma cvd device and method of manufacturing silicon thin film
07/18/2012CN102598158A Process for producing multilayer film
07/18/2012CN102597345A CNT-tailored composite sea-based structures
07/18/2012CN102597340A Method for producing laminate
07/18/2012CN102597316A Process and apparatus for controlling coating deposition
07/18/2012CN102597315A Loaded film cassette for gaseous vapor deposition
07/18/2012CN102597314A Apparatus and method for unloading a film cassette for gaseous vapor deposition
07/18/2012CN102597313A Fluid conveyance system including flexible retaining mechanism
07/18/2012CN102597312A Gas delivery for beam processing systems
07/18/2012CN102597311A Gas supply system
07/18/2012CN102597310A Evaporator
07/18/2012CN102597309A Method for removing deposits
07/18/2012CN102597308A Cvd film forming device
07/18/2012CN102597307A CVD method and CVD reactor
07/18/2012CN102597306A Cleaning of a process chamber
07/18/2012CN102597305A Stable surface wave plasma source
07/18/2012CN102597304A Cnt-tailored composite space-based structures
07/18/2012CN102597298A An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings
07/18/2012CN102596456A Surface coated cutting tool with excellent chip resistance
07/18/2012CN102593377A Alignment master glass for tensioning vapor deposition mask, method for manufacturing the same, and method for tensioning vapor deposition mask using the same
07/18/2012CN102593293A Template, method for manufacturing the template and method for manufacturing vertical type nitride-based semiconductor light emitting device using the template
07/18/2012CN102593260A Method for forming silicon nitride film by using excitation of plasma
07/18/2012CN102592994A Selective etching and formation of xenon difluoride
07/18/2012CN102592992A Preparation method for highly-doped phosphorosilicate glass film
07/18/2012CN102592973A Transfer method of large area graphene
07/18/2012CN102586869A Three-dimensional grapheme tube and preparation method thereof
07/18/2012CN102586777A Preparation method for CBN (Cubic Boron Nitride) coated cutter based on micrometer/nanometer diamond transition layer
07/18/2012CN102586762A Method for preparing diamond film through multiple-doped hot filament chemical vapor deposition
07/18/2012CN102586761A Vortex chamber lids for atomic layer deposition
07/18/2012CN102586760A Vortex chamber lids for atomic layer deposition
07/18/2012CN102586759A Gas delivery system and semiconductor processing equipment applying same
07/18/2012CN102586758A Method for pre-depositing high-density plasma machine platform
07/18/2012CN102586757A Thermal chemical vapor deposition of silicon nitride
07/18/2012CN102586756A Microporous diamond coating preparation device for drawing dies and coating preparation method
07/18/2012CN102586755A Apparatus for chemical vapor deposition
07/18/2012CN102586754A Method for preparing pyrolytic boron nitride crucible easy to demould
07/18/2012CN102586753A Method for cleaning metal organic chemical vapor deposition (MOCVD) device
07/18/2012CN102586739A Gas-distributing system for vacuum coating
07/18/2012CN102586726A Mask frame assembly for thin film deposition
07/18/2012CN102586723A Method and device for automatically controlling vacuum pressure of ion chemical heat treatment furnace
07/18/2012CN102584021A Entrance and exit roll seal configuration for a vapor deposition system
07/18/2012CN102583331A Preparation method for large-area graphene based on Ni film auxiliary annealing and Cl2 reaction
07/18/2012CN102581324A Surface-coated cutting tool with knife broken resistance and excellent performance of hard-coated layer
07/18/2012CN102581323A Surface-coated cutting tool with hard-coated layer possessing knife broken resistance and abrasion resistance
07/18/2012CN102581322A Surface-coated cutting tool with hard-coated layer possessing knife broken resistance and abrasion resistance
07/18/2012CN102581274A Method for coating micro/nano-metal powder by chemical vapor deposition
07/18/2012CN102181940B Preparation method of multicrystalline silicon texture
07/18/2012CN102162098B Preparation method of silicon film/titanium dioxide nanotube array composite structure
07/18/2012CN101971292B Cathode electrode for plasma cvd and plasma cvd apparatus
07/18/2012CN101952971B Method for manufacturing a solar cell with a surface-passivating dielectric double layer, and corresponding solar cell
07/18/2012CN101939466B Plasma CVD apparatus, plasma CVD method
07/18/2012CN101912763B Method of treating a gas stream
07/18/2012CN101882571B III nitride semiconductor crystal, III nitride semiconductor device, and light emitting device
07/18/2012CN101845620B Multi-cavity chemical vapor deposition p-i-n coating device by pulse heating
07/18/2012CN101802977B System for processing subject to be processed and method for controlling the system
07/18/2012CN101784695B Method for preparation of a nanocomposite material by vapour phase chemical deposition
07/18/2012CN101755325B Film forming apparatus, film forming method, storage medium and gas supplying apparatus
07/18/2012CN101736314B Formation method of silicon oxide film and metal-insulator-metal capacitor
07/18/2012CN101715466B Transparent barrier film and method for producing the same
07/18/2012CN101671190B Method for regulating microstructure of carbon-based composite material through rapid directional infiltration
07/18/2012CN101671189B Method for using domestic carbon fiber to prepare high-performance carbon-based composite material through rapid directional infiltration
07/18/2012CN101501244B Gas feeder and substrate treatment device
07/18/2012CN101476112B Telluride precursor in ALD or CVD process for producing germanium-antimony-tellurium films