Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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07/19/2012 | WO2012071302A3 Interchangeable pumping rings to control path of process gas flow |
07/19/2012 | WO2012051182A3 Fabrication of single-crystalline graphene arrays |
07/19/2012 | US20120184111 Selective plasma nitriding method and plasma nitriding apparatus |
07/19/2012 | US20120184110 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus |
07/19/2012 | US20120184054 Manufacturing apparatus and method for semiconductor device |
07/19/2012 | US20120183887 Oriented amorphous carbon film and process for forming the same |
07/19/2012 | US20120183689 Ni film forming method |
07/19/2012 | US20120183683 Glass substrate-holding tool and method for producing an euv mask blank by employing the same |
07/19/2012 | US20120183676 Vapor deposition method and vapor deposition apparatus |
07/19/2012 | US20120180954 Semiconductor processing system and methods using capacitively coupled plasma |
07/19/2012 | US20120180953 Plasma processing apparatus and wave retardation plate used therein |
07/19/2012 | US20120180727 Film forming apparatus |
07/19/2012 | US20120180726 Susceptor and chemical vapor deposition apparatus comprising the same |
07/19/2012 | US20120180725 Cvd apparatus |
07/19/2012 | US20120180724 Liquid vaporization system |
07/19/2012 | US20120180720 Cvd apparatus |
07/19/2012 | US20120180719 Film forming apparatus |
07/19/2012 | US20120180561 Method and apparatus for determining a curing level of printing inks and print process control strip |
07/19/2012 | DE102010063887B4 Verfahren zum Herstellen eines pyrolysetauglichen Bauteils eines Gargeräts sowie pyrolysetaugliches Bauteil für ein Gargerät A method of manufacturing a component of a cooking appliance and pyrolysetauglichen pyrolysetaugliches component for a cooking appliance |
07/19/2012 | DE102004017241A9 Verbundmaterial und Verfahren zu seiner Herstellung Composite material and process for its preparation |
07/18/2012 | EP2477214A1 Electronic part positioning jig |
07/18/2012 | EP2476778A1 Susceptor. |
07/18/2012 | EP2476777A1 Dry cleaning method of substrate processing apparatus |
07/18/2012 | EP2476776A1 Method for adjusting the coolant consumption within actively cooled components and component |
07/18/2012 | EP2476775A1 Protective film and method for producing same |
07/18/2012 | EP2476148A1 Protective substrate for a device that collects or emits radiation |
07/18/2012 | EP2476147A1 Layered element for encapsulating a sensitive element |
07/18/2012 | EP2475804A1 Cvd reactor |
07/18/2012 | EP2475803A1 Improved polyurethane foaming processes and foam properties using halogenated olefin blowing agent |
07/18/2012 | EP2475802A1 Metal containing composites |
07/18/2012 | EP2475799A2 An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings |
07/18/2012 | EP2475798A1 Apparatus and methods to form a patterned coating on an oled substrate |
07/18/2012 | EP2475467A1 Coating method and coating apparatus |
07/18/2012 | CN202337820U 热丝cvd钨丝固定拉直张紧机构 Cvd tungsten hot-wire tensioning mechanism fixed to straighten |
07/18/2012 | CN202337819U Cvd炉内气体扩散装置 Cvd furnace gas diffusion devices |
07/18/2012 | CN202337818U 聚对二甲苯卧式沉积系统新腔室滚筒复合结构 Parylene horizontal cylinder chamber deposition system new composite structure |
07/18/2012 | CN102598226A Jig for semiconductor production and method for producing same |
07/18/2012 | CN102598218A Plasma cvd device and method of manufacturing silicon thin film |
07/18/2012 | CN102598158A Process for producing multilayer film |
07/18/2012 | CN102597345A CNT-tailored composite sea-based structures |
07/18/2012 | CN102597340A Method for producing laminate |
07/18/2012 | CN102597316A Process and apparatus for controlling coating deposition |
07/18/2012 | CN102597315A Loaded film cassette for gaseous vapor deposition |
07/18/2012 | CN102597314A Apparatus and method for unloading a film cassette for gaseous vapor deposition |
07/18/2012 | CN102597313A Fluid conveyance system including flexible retaining mechanism |
07/18/2012 | CN102597312A Gas delivery for beam processing systems |
07/18/2012 | CN102597311A Gas supply system |
07/18/2012 | CN102597310A Evaporator |
07/18/2012 | CN102597309A Method for removing deposits |
07/18/2012 | CN102597308A Cvd film forming device |
07/18/2012 | CN102597307A CVD method and CVD reactor |
07/18/2012 | CN102597306A Cleaning of a process chamber |
07/18/2012 | CN102597305A Stable surface wave plasma source |
07/18/2012 | CN102597304A Cnt-tailored composite space-based structures |
07/18/2012 | CN102597298A An insulated conductive element having a substantially continuous barrier layer formed through multiple coatings |
07/18/2012 | CN102596456A Surface coated cutting tool with excellent chip resistance |
07/18/2012 | CN102593377A Alignment master glass for tensioning vapor deposition mask, method for manufacturing the same, and method for tensioning vapor deposition mask using the same |
07/18/2012 | CN102593293A Template, method for manufacturing the template and method for manufacturing vertical type nitride-based semiconductor light emitting device using the template |
07/18/2012 | CN102593260A Method for forming silicon nitride film by using excitation of plasma |
07/18/2012 | CN102592994A Selective etching and formation of xenon difluoride |
07/18/2012 | CN102592992A Preparation method for highly-doped phosphorosilicate glass film |
07/18/2012 | CN102592973A Transfer method of large area graphene |
07/18/2012 | CN102586869A Three-dimensional grapheme tube and preparation method thereof |
07/18/2012 | CN102586777A Preparation method for CBN (Cubic Boron Nitride) coated cutter based on micrometer/nanometer diamond transition layer |
07/18/2012 | CN102586762A Method for preparing diamond film through multiple-doped hot filament chemical vapor deposition |
07/18/2012 | CN102586761A Vortex chamber lids for atomic layer deposition |
07/18/2012 | CN102586760A Vortex chamber lids for atomic layer deposition |
07/18/2012 | CN102586759A Gas delivery system and semiconductor processing equipment applying same |
07/18/2012 | CN102586758A Method for pre-depositing high-density plasma machine platform |
07/18/2012 | CN102586757A Thermal chemical vapor deposition of silicon nitride |
07/18/2012 | CN102586756A Microporous diamond coating preparation device for drawing dies and coating preparation method |
07/18/2012 | CN102586755A Apparatus for chemical vapor deposition |
07/18/2012 | CN102586754A Method for preparing pyrolytic boron nitride crucible easy to demould |
07/18/2012 | CN102586753A Method for cleaning metal organic chemical vapor deposition (MOCVD) device |
07/18/2012 | CN102586739A Gas-distributing system for vacuum coating |
07/18/2012 | CN102586726A Mask frame assembly for thin film deposition |
07/18/2012 | CN102586723A Method and device for automatically controlling vacuum pressure of ion chemical heat treatment furnace |
07/18/2012 | CN102584021A Entrance and exit roll seal configuration for a vapor deposition system |
07/18/2012 | CN102583331A Preparation method for large-area graphene based on Ni film auxiliary annealing and Cl2 reaction |
07/18/2012 | CN102581324A Surface-coated cutting tool with knife broken resistance and excellent performance of hard-coated layer |
07/18/2012 | CN102581323A Surface-coated cutting tool with hard-coated layer possessing knife broken resistance and abrasion resistance |
07/18/2012 | CN102581322A Surface-coated cutting tool with hard-coated layer possessing knife broken resistance and abrasion resistance |
07/18/2012 | CN102581274A Method for coating micro/nano-metal powder by chemical vapor deposition |
07/18/2012 | CN102181940B Preparation method of multicrystalline silicon texture |
07/18/2012 | CN102162098B Preparation method of silicon film/titanium dioxide nanotube array composite structure |
07/18/2012 | CN101971292B Cathode electrode for plasma cvd and plasma cvd apparatus |
07/18/2012 | CN101952971B Method for manufacturing a solar cell with a surface-passivating dielectric double layer, and corresponding solar cell |
07/18/2012 | CN101939466B Plasma CVD apparatus, plasma CVD method |
07/18/2012 | CN101912763B Method of treating a gas stream |
07/18/2012 | CN101882571B III nitride semiconductor crystal, III nitride semiconductor device, and light emitting device |
07/18/2012 | CN101845620B Multi-cavity chemical vapor deposition p-i-n coating device by pulse heating |
07/18/2012 | CN101802977B System for processing subject to be processed and method for controlling the system |
07/18/2012 | CN101784695B Method for preparation of a nanocomposite material by vapour phase chemical deposition |
07/18/2012 | CN101755325B Film forming apparatus, film forming method, storage medium and gas supplying apparatus |
07/18/2012 | CN101736314B Formation method of silicon oxide film and metal-insulator-metal capacitor |
07/18/2012 | CN101715466B Transparent barrier film and method for producing the same |
07/18/2012 | CN101671190B Method for regulating microstructure of carbon-based composite material through rapid directional infiltration |
07/18/2012 | CN101671189B Method for using domestic carbon fiber to prepare high-performance carbon-based composite material through rapid directional infiltration |
07/18/2012 | CN101501244B Gas feeder and substrate treatment device |
07/18/2012 | CN101476112B Telluride precursor in ALD or CVD process for producing germanium-antimony-tellurium films |