| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/06/2012 | US20120304692 Coated metallic products and methods for making the same |
| 12/06/2012 | DE112010005101T5 Epitaxial-wafer und halbleiterelement Epitaxial wafer and semiconductor element |
| 12/06/2012 | DE112010003694T5 Verfahren und Vorrichtung zur Herstellung eines Epitaxialwafers Method and apparatus for manufacturing an epitaxial wafer |
| 12/06/2012 | DE102012208979A1 Gleitvorrichtung und Gleitsystem, das diese nutzt Sliding and sliding system that uses this |
| 12/06/2012 | DE102011103737A1 Verfahren zum Beschichten von inneren Oberflächen langgestreckter Gegenstände A method of coating internal surfaces of elongate articles |
| 12/06/2012 | DE102009049839B4 Gasverdampfer für Beschichtungsanlagen sowie Verfahren zu dessen Betreiben Gas evaporator for coating systems and a method for its operation |
| 12/06/2012 | DE102004030344B4 Vorrichtung zum Beschichten optischer Gläser mittels plasmaunterstützter chemischer Dampfabscheidung (CVD) An apparatus for coating optical glasses by means of plasma enhanced chemical vapor deposition (CVD) |
| 12/06/2012 | CA2837584A1 Metal catalyst composition |
| 12/05/2012 | EP2530705A2 Vacuum deposition apparatus |
| 12/05/2012 | EP2530184A2 Polysilicon deposition |
| 12/05/2012 | EP2529040A1 Cleaning method for coating systems |
| 12/05/2012 | CN202576562U Plasma enhanced chemical vapor deposition (PECVD) boat pushing automatic control system with multi-redundancy safety protection function |
| 12/05/2012 | CN202576561U Special-gas pipeline |
| 12/05/2012 | CN202576560U Evaporator based on heat transfer oil evaporation mechanism |
| 12/05/2012 | CN202576559U Selenization and vulcanization reaction device for copper indium gallium selenide solar cell substrate |
| 12/05/2012 | CN202576558U Selenylation and vulcanization reaction device of solar battery substrate |
| 12/05/2012 | CN202576556U Loading clamp |
| 12/05/2012 | CN202576555U Multifunctional substrate rack for coating |
| 12/05/2012 | CN202576544U Device for continuous preparation of two-dimensional nano film |
| 12/05/2012 | CN102812539A Deposition Method |
| 12/05/2012 | CN102812155A Metal Containing Composites |
| 12/05/2012 | CN102812154A Cleaning Method For Coating Systems |
| 12/05/2012 | CN102810607A Method for producing a group iii nitride semiconductor light-emitting device |
| 12/05/2012 | CN102810465A Method for growing SiO2 passivation layer on SiC material |
| 12/05/2012 | CN102810359A Method for manufacturing coaxial silicon carbide/silicon dioxide nanocable with chemical vapor deposition method |
| 12/05/2012 | CN102808167A Crucible device, control method of the crucible device, film thickness measuring device and thin film deposition apparatus |
| 12/05/2012 | CN102808166A Raw gas generating device |
| 12/05/2012 | CN102808165A Dust adsorber |
| 12/05/2012 | CN102808164A Cavity device and substrate process unit with same |
| 12/05/2012 | CN102808163A Sliding device and sliding system using the same |
| 12/05/2012 | CN102337513B Preparation method for transparent graphene conductive film |
| 12/05/2012 | CN102234792B Suspended spraying type metal organic chemical vapor deposition (MOCVD) reactor |
| 12/05/2012 | CN102031503B Deposition method of silicon thin film |
| 12/05/2012 | CN102021531B Device and method for generating silicon nitride film |
| 12/05/2012 | CN102011102B Normal-temperature deposition equipment for high-interfacial strength diamond film materials and method thereof |
| 12/05/2012 | CN101997057B Method and equipment for manufacturing solar cell |
| 12/05/2012 | CN101845619B Method for preparing ZnO nano needle arrays |
| 12/05/2012 | CN101680085B New cobalt precursors for semiconductor applications |
| 12/05/2012 | CN101490306B Apparatus and method for controlling plasma potential |
| 12/05/2012 | CN101419915B Methods to obtain low k dielectric barrier with superior etch resistivity |
| 12/05/2012 | CN101397655B Chemical vapor deposition equipment for material preparation |
| 12/04/2012 | USRE43837 Substrate supporting apparatus |
| 12/04/2012 | US8324814 Device and method for producing and/or confining a plasma |
| 12/04/2012 | US8323754 Stabilization of high-k dielectric materials |
| 12/04/2012 | US8323738 Coated cutting tool and method for producing the same |
| 12/04/2012 | US8323737 Sequential chemical vapor deposition |
| 12/04/2012 | US8323736 Methods of forming metal-containing structures, and methods of forming germanium-containing structures |
| 12/04/2012 | US8323734 Method for the application of a filter on a web |
| 12/04/2012 | US8323723 Controlled vapor deposition of biocompatible coatings for medical devices |
| 12/04/2012 | US8323451 System and method for self-aligned dual patterning |
| 12/04/2012 | US8323414 Particle removal apparatus and method and plasma processing apparatus |
| 12/04/2012 | US8323413 Susceptor and semiconductor manufacturing apparatus including the same |
| 12/04/2012 | US8323412 Substrate support, substrate processing device and method of placing a substrate |
| 12/04/2012 | US8323411 Semiconductor workpiece apparatus |
| 12/04/2012 | US8323409 Systems and methods for forming components with thermal barrier coatings |
| 12/04/2012 | US8323408 Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation |
| 12/04/2012 | US8323407 Gallium trichloride injection scheme |
| 12/04/2012 | US8322299 Cluster processing apparatus for metallization processing in semiconductor manufacturing |
| 11/29/2012 | WO2012162519A1 Apparatus and method for combinatorial gas distribution through a multi-zoned showerhead |
| 11/29/2012 | WO2012161265A1 Method and apparatus for producing semiconductor thin film crystal |
| 11/29/2012 | WO2012161164A1 Plasma processing device |
| 11/29/2012 | WO2012160804A1 Light emission analyzing device |
| 11/29/2012 | WO2012160321A1 Methods and apparatuses for measuring the thickness distribution of a deposited layer of coating material |
| 11/29/2012 | WO2012160145A1 Method for depositing layers on a glass substrate by means of low-pressure pecvd |
| 11/29/2012 | WO2012160040A1 Process for depositing metal on one or more substrates, coated substrate, and use thereof |
| 11/29/2012 | WO2012159780A1 Machine element |
| 11/29/2012 | WO2012134070A3 Gas-injection apparatus, atomic layer deposition apparatus, and atomic layer deposition method using the apparatus |
| 11/29/2012 | US20120302811 Catalysts Having Catalytic Material Applied Directly to Thermally-Grown Alumina and Catalytic Methods Using Same; Improved Methods of Oxidative Dehydrogenation |
| 11/29/2012 | US20120301743 Method of bonding a metal to a substrate |
| 11/29/2012 | US20120301734 Method of bonding a metal to a substrate |
| 11/29/2012 | US20120301723 Tantalum carbide-coated carbon material and manufacturing method for same |
| 11/29/2012 | US20120301706 METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON POROUS LOW K SUBSTRATES |
| 11/29/2012 | US20120301663 Carbon nanotube composite and method for making the same |
| 11/29/2012 | US20120301633 Method of producing gas barrier laminate |
| 11/29/2012 | US20120301632 Method for forming thin film using radicals generated by plasma |
| 11/29/2012 | US20120301616 Apparatus and method for combinatorial gas distribution through a multi-zoned showerhead |
| 11/29/2012 | US20120301615 Thin film-manufacturing apparatus,thin film-manufacturing method,and substrate-conveying roller |
| 11/29/2012 | US20120301614 Organic Layer Deposition Apparatus, Frame Sheet Assembly for the Organic Layer Deposition Apparatus, and Method of Manufacturing Organic Light Emitting Display Device Using the Frame Sheet Assembly |
| 11/29/2012 | US20120298970 Patterning Slit Sheet Assembly, Organic Layer Deposition Apparatus, Method of Manufacturing Organic Light-Emitting Display Apparatus, and the Organic Light-Emitting Display Apparatus |
| 11/29/2012 | US20120298625 Nanoporous membrane and manufacturing method thereof |
| 11/29/2012 | US20120298303 Plasma treatment apparatus |
| 11/29/2012 | US20120298041 Deflecting Device for Electron Beams, Magnetic Deflecting Unit for Such a Deflecting Device, and Device for Vapor Coating a Planar Substrate Using Such a Deflecting Device |
| 11/29/2012 | US20120298040 Vapor Delivery Device, Methods of Manufacture And Methods of Use Thereof |
| 11/29/2012 | US20120298039 Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures |
| 11/29/2012 | DE19959845B4 Plasmagenerator Plasma generator |
| 11/29/2012 | DE102011104132B3 Plasma assisted atomic layer deposition useful for forming thin layer on substrate, in reaction zone, comprises carrying out coating cycles, rinsing reaction area and converting adsorbed fraction of layer-forming process gas into thin layer |
| 11/29/2012 | DE102011076584A1 Cutting tool, useful for machining workpieces, comprises a base body that comprises cutting edges in a region of its free end, where the cutting edges extend radially outward starting from the center of the base body |
| 11/29/2012 | DE102011076410A1 Maschinenelement Machine element |
| 11/29/2012 | DE102011050684A1 Vorrichtung und Verfahren zur Herstellung von hoch porösen, kristallinen Oberflächenbeschichtungen Device and method for the production of highly porous, crystalline surface coatings |
| 11/29/2012 | DE102008028537B4 Verfahren zum Abscheiden einer Kratzschutzbeschichtung auf einem Kunststoffsubstrat A method for depositing a scratch-resistant coating on a plastic substrate |
| 11/28/2012 | EP2528082A2 Plasma treatment apparatus with an atmospheric pressure glow discharge electrode configuration |
| 11/28/2012 | EP2527500A1 Method for manufacturing epitaxial crystal substrate |
| 11/28/2012 | EP2527490A1 Vapor delivery device and method |
| 11/28/2012 | EP2527489A1 Vapor delivery device and method |
| 11/28/2012 | EP2527309A2 Improved quality multi-spectral zinc sulfide |
| 11/28/2012 | EP2526220A1 Cvd single crystal diamond material |
| 11/28/2012 | EP2526218A1 Plasma- or ion-based system for producing coatings on fluoropolymers, said coatings having good adhesion |
| 11/28/2012 | CN202558936U Apparatus for large-scale continuous preparation of two-dimensional nanometer film |
| 11/28/2012 | CN202558935U Chemical vapor deposition device capable of continuously preparing two-dimension nanometer thin films |
| 11/28/2012 | CN202558934U High-uniformity silane spray device for OTB coating equipment |