| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/20/2012 | WO2012112334A3 Method of operating filament assisted chemical vapor deposition system |
| 12/20/2012 | US20120323008 Group 11 mono-metallic precursor compounds and use thereof in metal deposition |
| 12/20/2012 | US20120322258 MODULATED DEPOSITION PROCESS FOR STRESS CONTROL IN THICK TiN FILMS |
| 12/20/2012 | US20120322175 Methods and Systems For Controlling SiIicon Rod Temperature |
| 12/20/2012 | US20120322168 Chemical vapor deposition apparatus |
| 12/20/2012 | US20120322015 Apparatus and method for treating substrate |
| 12/20/2012 | US20120321910 Methods and apparatus for atomic layer deposition on large area substrates |
| 12/20/2012 | US20120321818 Method and device for forming piezoelectric/pryoelectric film |
| 12/20/2012 | US20120321817 Bis-ketoiminate copper precursors for deposition of copper-containing films |
| 12/20/2012 | US20120321791 Film forming method and film forming apparatus |
| 12/20/2012 | US20120321790 Rotation system for thin film formation |
| 12/20/2012 | US20120321789 Organic thin film deposition system and method for depositing organic film |
| 12/20/2012 | US20120321788 Rotation system for thin film formation |
| 12/20/2012 | US20120321787 Rotation system for thin film formation and method thereof |
| 12/20/2012 | US20120321786 System for multi-region processing |
| 12/20/2012 | US20120321785 Methods of Making Spatially Aligned Nanotubes and Nanotube Arrays |
| 12/20/2012 | US20120321779 Chemical vapor infiltration apparatus and process |
| 12/20/2012 | US20120319252 Method for manufacturing semiconductor device, substrate processing apparatus, and semiconductor device |
| 12/20/2012 | US20120319000 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
| 12/20/2012 | US20120318457 Materials and coatings for a showerhead in a processing system |
| 12/20/2012 | US20120318456 Method of controlling the switched mode ion energy distribution system |
| 12/20/2012 | US20120318228 Germanium containing coating for inner surfaces of cylinder liners |
| 12/20/2012 | DE102011104730A1 Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht Method for plasma treatment of workpieces and workpiece having a gas barrier layer |
| 12/20/2012 | DE102011077833A1 Verfahren zur Bearbeitung von Substraten und Vorrichtung dazu Method for processing substrates and apparatus therefor |
| 12/20/2012 | CA2839406A1 Chemical vapor infiltration apparatus and process |
| 12/19/2012 | EP2535440A1 Chemical vapor deposition apparatus |
| 12/19/2012 | EP2535439A1 Flexible substrate position control device |
| 12/19/2012 | EP2535343A2 Organoaminosilane precursors and methods for making and using same |
| 12/19/2012 | EP2534278A1 Method and apparatus for depositing atomic layers on a substrate |
| 12/19/2012 | EP2534094A2 Induction for thermochemical processes, and associated systems and methods |
| 12/19/2012 | EP2533975A2 Architectural construct having for example a plurality of architectural crystals |
| 12/19/2012 | EP2533923A1 Process for coating cobalt nonoparticles with copper and copper oxide |
| 12/19/2012 | CN202610326U On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell |
| 12/19/2012 | CN202610325U Gas spraying device with temperature control device and vacuum treatment device |
| 12/19/2012 | CN202610324U Gas showerhead |
| 12/19/2012 | CN202610323U Gas spray module |
| 12/19/2012 | CN202610322U Gas sprinkler head |
| 12/19/2012 | CN202610321U Exit system of vertical spraying metalorganic chemical vapor deposition (MOCVD) reactor |
| 12/19/2012 | CN202610320U Height fine-adjustment device for high-temperature CVD (chemical vapor deposition) growth chamber |
| 12/19/2012 | CN202610319U Equipment for implementing atomic layer deposition process |
| 12/19/2012 | CN202610318U Extensible reaction cavity |
| 12/19/2012 | CN202610317U Online atomic layer depositing device |
| 12/19/2012 | CN202610316U Plasma enhanced chemical vapor deposition (PECVD) material-loading area anti-boat-collision protective device |
| 12/19/2012 | CN102834546A A method and apparatus for depositing a microcrystalline material in photovoltaic applications |
| 12/19/2012 | CN102834545A Method and device for layer deposition |
| 12/19/2012 | CN102832300A Method of manufacturing semiconductor light emitting device |
| 12/19/2012 | CN102828244A Layer-number-controllable graphite film based on nickel-copper composite substrate and preparation method of film |
| 12/19/2012 | CN102828172A Method for preparing SiO2 thin film by using plasma enhanced chemical vapor deposition (PECVD) method |
| 12/19/2012 | CN102828171A Rotation system for thin film formation |
| 12/19/2012 | CN102828170A Rotation system for thin film formation and method thereof |
| 12/19/2012 | CN102828169A Tray of slide glass, tray apparatus and growth equipment of crystal film |
| 12/19/2012 | CN102828168A System and method for forming semiconductor material |
| 12/19/2012 | CN102828167A Exhaust method, exhaust apparatus and substrate treatment equipment |
| 12/19/2012 | CN102828166A Chemical vapor deposition servicing equipment |
| 12/19/2012 | CN102828165A Leak check method of cavity of high-density plasma chemical vapor deposition device |
| 12/19/2012 | CN102828164A Improvement on water-barrier performance |
| 12/19/2012 | CN102828163A Film forming method and film forming apparatus |
| 12/19/2012 | CN102828162A Method for preparing FeSe superconductive film |
| 12/19/2012 | CN102828161A Graphene production method and continuous production device of graphene |
| 12/19/2012 | CN102827198A Organoaminosilane precursors and methods for making and using same |
| 12/19/2012 | CN102021527B Strip film plating machine |
| 12/19/2012 | CN101844873B On-line film coating method of conductive glass and on-line film coating device |
| 12/19/2012 | CN101665928B Damping device and thin film deposition system |
| 12/19/2012 | CN101535525B Method and device for preventing forming of polymer in exhaust pipe of cvd reaction chamber |
| 12/19/2012 | CN101500989B Metal(IV) tetra-amidinate compounds and their use in vapor deposition |
| 12/19/2012 | CN101452827B Treatment apparatus, treatment method, and storage medium |
| 12/19/2012 | CN101048853B Precursor for film formation and method for forming ruthenium-containing film |
| 12/18/2012 | US8334017 Apparatus and methods for forming energy storage and photovoltaic devices in a linear system |
| 12/18/2012 | US8334016 Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide |
| 12/18/2012 | US8334015 Vapor based combinatorial processing |
| 12/18/2012 | US8334011 Method for regenerating oxide coatings on gas turbine components by addition of oxygen into SEGR system |
| 12/18/2012 | US8333841 Roll-to-roll vacuum deposition apparatus |
| 12/18/2012 | US8333840 Metal organic chemical vapor deposition apparatus and method |
| 12/18/2012 | US8333839 Vapor deposition reactor |
| 12/18/2012 | US8333166 Plasma treatment systems and methods for uniformly distributing radiofrequency power between multiple electrodes |
| 12/18/2012 | CA2677414C N-type conductive aluminum nitride semiconductor crystal and manufacturing method thereof |
| 12/18/2012 | CA2513935C Method of depositing dlc on substrate |
| 12/13/2012 | WO2012170368A1 A chemical bath deposition apparatus for fabrication of semiconductor films through roll-to-roll processes |
| 12/13/2012 | WO2012170166A2 Method and system for inline chemical vapor deposition |
| 12/13/2012 | WO2012170145A1 Process for fabricating oled lighting panels |
| 12/13/2012 | WO2012169747A2 Plasma-generating source comprising a belt-type magnet, and thin-film deposition system using same |
| 12/13/2012 | WO2012169602A1 Substrate having transparent conductive film attached thereto |
| 12/13/2012 | WO2012169552A1 Method for producing substrate having transparent conductive film attached thereto, and injector and device used therein |
| 12/13/2012 | WO2012169540A1 Method for affixing water-and-oil-repellent layer to amorphous carbon film layer, and layered product formed by said method |
| 12/13/2012 | WO2012169500A1 Method for producing fiber composite resin layer-containing multilayered sheet, and optical device |
| 12/13/2012 | WO2012169332A1 Shower plate manufacturing method, shower plate, and vapor-phase growth apparatus utilizing same |
| 12/13/2012 | WO2012168924A1 Supply apparatus and method of solid material gas |
| 12/13/2012 | WO2012168248A1 Plasma pre-treatment |
| 12/13/2012 | WO2012167703A1 Method for preparing graphene by high temperature atom dialysis based on chemical vapor deposition |
| 12/13/2012 | WO2012167701A1 Chemical vapor deposition method for producing monolayer and multilayer graphene |
| 12/13/2012 | US20120316633 Durable Stent Drug Eluting Coating |
| 12/13/2012 | US20120315767 Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus |
| 12/13/2012 | US20120315745 Crystalline silicon film forming method and plasma cvd apparatus |
| 12/13/2012 | US20120315724 Method and apparatus for deposition of selenium thin-film and plasma head thereof |
| 12/13/2012 | US20120315501 Coated article and method for making same |
| 12/13/2012 | US20120315468 Coated article and method for making same |
| 12/13/2012 | US20120315467 Receptor-catalyst growth process for carbon nanotubes |
| 12/13/2012 | US20120315453 Coating layer structure of basic material of mold |
| 12/13/2012 | US20120315405 Hot wire chemical vapor depostion (hwcvd) with carbide filaments |
| 12/13/2012 | US20120315404 Apparatus for thermal and plasma enhanced vapor deposition and method of operating |